Instrument for holding boats for thermal treatment of semiconductor wafers

Description

FIG. 1 is a front elevational view of an instrument for holding boats for thermal treatment of semiconductor wafers showing our new design;

FIG. 2 is a left side elevational view;

FIG. 3 is a right elevational view;

FIG. 4 is a top plan view;

FIG. 5 is a bottom plan view; and

FIG. 6 is a rear elevational view thereof.