Semiconductor manufacturing device

Skip to: Description  ·  References Cited  · Patent History  ·  Patent History
Description

FIG. 1 is a front view of a semiconductor manufacturing device showing my new design;

FIG. 2 is a rear view thereof;

FIG. 3 is a right side view thereof;

FIG. 4 is a left side view thereof;

FIG. 5 is a top view thereof; and,

FIG. 6 is a bottom view thereof.

Referenced Cited
U.S. Patent Documents
D352911 November 29, 1994 Yamamoto et al.
4915564 April 10, 1990 Eror et al.
5254170 October 19, 1993 Devilbiss et al.
5281320 January 25, 1994 Turner et al.
Patent History
Patent number: D365584
Type: Grant
Filed: Jun 6, 1994
Date of Patent: Dec 26, 1995
Assignees: Tokyo Electron Kabushiki Kaisha (Tokyo), Tokyo Electron Yamanashi Kabushiki Kaisha (Nirasaki)
Inventors: Tatsuya Nakagome (Nirasaki), Takashi Tozawa (Nirasaki)
Primary Examiner: Antoine Duval Davis
Law Firm: Ladas & Parry
Application Number: 0/24,005