Processing machine for electron beam lithography system
Latest Hitachi, Ltd. Patents:
- Update device, update method and program
- Silicon carbide semiconductor device, power conversion device, three-phase motor system, automobile, and railway vehicle
- Fault tree generation device and fault tree generation method
- Application screen display program installing method
- Storage system and data processing method
Description
FIG. 1 is a front, top and right side elevational perspective view of a processing machine showing our new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a right elevational view thereof;
FIG. 4 is a left elevational view thereof;
FIG. 5 is a top plan elevational view thereof;
FIG. 6 is a bottom plan elevational view thereof;
FIG. 7 is a rear elevational view thereof; and,
FIG. 8 is a front, top and right side elevational perspective view thereof in condition that a drawer on which a keyboard and a mouse pad is disposed .
Referenced Cited
Patent History
Patent number: D352911
Type: Grant
Filed: Feb 8, 1993
Date of Patent: Nov 29, 1994
Assignee: Hitachi, Ltd. (Tokyo)
Inventors: Takashi Yamamoto (Kodaira), Tomoyuki Miyata (Kokubunji), Kazunori Hasimoto (Tachikawa), Mitsuru Ohnuma (Tokyo), Toshihiko Wada (Musashimurayama), Seishiro Sato (Hitachi)
Primary Examiner: Alan P. Douglas
Assistant Examiner: Antoine D. Davis
Law Firm: Antonelli, Terry, Stout & Kraus
Application Number: 0/4,587
Type: Grant
Filed: Feb 8, 1993
Date of Patent: Nov 29, 1994
Assignee: Hitachi, Ltd. (Tokyo)
Inventors: Takashi Yamamoto (Kodaira), Tomoyuki Miyata (Kokubunji), Kazunori Hasimoto (Tachikawa), Mitsuru Ohnuma (Tokyo), Toshihiko Wada (Musashimurayama), Seishiro Sato (Hitachi)
Primary Examiner: Alan P. Douglas
Assistant Examiner: Antoine D. Davis
Law Firm: Antonelli, Terry, Stout & Kraus
Application Number: 0/4,587
Classifications