150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment

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Description

FIG. 1 is a front perspective view of a 150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment showing my new design;

FIG. 2 is a right side elevational view thereof;

FIG. 3 is a left side elevational view thereof;

FIG. 4 is a back elevational view thereof;

FIG. 5 is a top plan view thereof; and,

FIG. 6 is a bottom plan view thereof.

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Patent History
Patent number: D368802
Type: Grant
Filed: Oct 13, 1994
Date of Patent: Apr 16, 1996
Inventors: Gary M. Gallagher (Colorado Springs, CO), Brian S. Wiseman (Colorado Springs, CO), Boyd C. Wittman (Colorado Springs, CO)
Primary Examiner: Louis S. Zarfas
Assistant Examiner: Catherine R. Oliver
Law Firm: Haugen and Nikolai
Application Number: 0/29,711
Classifications
Current U.S. Class: D/3315