Quartz cover

- Tokyo Electron Limited
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Description

FIG. 1 perspective view of a quartz cover.

FIG. 2 a top plan view thereof.

FIG. 3 a bottom plan view thereof.

FIG. 4 a front elevational view thereof; and,

FIG. 5 a cross-sectional view taken along line V--V in FIG. 2.

Referenced Cited
U.S. Patent Documents
5718574 February 17, 1998 Shimazu
5820367 October 13, 1998 Osawa
Patent History
Patent number: D423026
Type: Grant
Filed: Feb 12, 1998
Date of Patent: Apr 18, 2000
Assignee: Tokyo Electron Limited (Tokyo-To)
Inventor: Tomohisa Shimazu (Shiroyama-Machi)
Primary Examiner: Antoine Duval Davis
Law Firm: Ladas & Parry
Application Number: 0/83,714
Classifications
Current U.S. Class: D15/1441
International Classification: 1509;