Patents Assigned to Tokyo Electron Limited
  • Patent number: 11031213
    Abstract: A device includes a microwave generation unit that averages the first measured values and the second measured values at a predetermined movement average time and a predetermined sampling interval, and controls the microwave such that a value obtained by subtracting the averaged second measured value from the averaged first measured value comes close to the setting power, and in which the predetermined movement average time is 60 ?s or less, and a relationship of y?78.178x0.1775 is satisfied when the predetermined sampling interval is indicated by x, and the predetermined movement average time is indicated by y.
    Type: Grant
    Filed: May 2, 2018
    Date of Patent: June 8, 2021
    Assignee: Tokyo Electron Limited
    Inventors: Kazushi Kaneko, Yuji Onuma
  • Patent number: 11032899
    Abstract: A plasma processing apparatus includes a cooling plate having a fixing surface to which an upper electrode is fixed, the cooling plate having, on the fixing surface, an electrostatic chuck configured to attract the upper electrode by an attraction force generated by an applied voltage; a power supply configured to apply the voltage to the electrostatic chuck; and a power supply controller configured to control the power supply such that an absolute value of the voltage applied to the electrostatic chuck is increased based on a degree of consumption of the upper electrode.
    Type: Grant
    Filed: September 10, 2019
    Date of Patent: June 8, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Yohei Uchida, Tetsuji Sato, Shojiro Yahata, Taira Takase
  • Patent number: 11028483
    Abstract: A substrate W having a non-plateable material portion 31 and a plateable material portion 32 formed on a surface thereof is prepared, and then, a catalyst is selectively imparted to the plateable material portion 32 by performing a catalyst imparting processing on the substrate W. Thereafter, a plating layer 35 is selectively formed on the plateable material portion 32 by performing a plating processing on the substrate W. Before the imparting of the catalyst, an organic film 36 is formed on the substrate W by supplying an organic liquid L1 onto the substrate W.
    Type: Grant
    Filed: August 29, 2017
    Date of Patent: June 8, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Yuichiro Inatomi, Takashi Tanaka, Kazutoshi Iwai
  • Patent number: 11031287
    Abstract: In a method for processing a substrate, a conductive cap layer is selectively formed over a plurality of conductive structures that are positioned in a first dielectric layer. A second dielectric layer is selectively formed over the first dielectric layer. A third dielectric layer is selectively formed over the second dielectric layer. A fourth dielectric layer is then formed over the plurality of conductive structures and the third dielectric layer, and an interconnect structure is subsequently formed within the fourth dielectric layer. The interconnect structure includes a via structure that has a first portion positioned over the conductive cap layer so that sidewalls of the first portion are surrounded by the third dielectric layer, and a second portion disposed over the first portion and the third dielectric layer.
    Type: Grant
    Filed: June 26, 2019
    Date of Patent: June 8, 2021
    Assignee: Tokyo Electron Limited
    Inventors: Kandabara Tapily, Jeffrey Smith
  • Patent number: 11028479
    Abstract: A method of forming a tungsten film on a surface of a target substrate having a base film is performed by repeating a cycle plural times. The cycle includes alternately supplying a tungsten chloride gas and a reducing gas for reducing the tungsten chloride gas, with a purge interposed therebetween, into a process container in which the target substrate is accommodated and that is maintained under a depressurized atmosphere. The method includes setting a supply flow rate of the tungsten chloride gas and a time of the cycle such that a ratio of a thickness of the base film etched by repeating the cycle the plural times to a thickness of the base film before repeating the cycle the plural times becomes smaller than a predetermined ratio in a state where an integrated flow rate of the tungsten chloride gas per one cycle is kept substantially constant.
    Type: Grant
    Filed: November 26, 2018
    Date of Patent: June 8, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Katsumasa Yamaguchi, Takashi Sameshima
  • Patent number: 11031261
    Abstract: A liquid processing apparatus for performing liquid processing with respect to a substrate using processing fluid, includes: a plurality of substrate holding units arranged side by side in a left-right direction; a nozzle configured to supply the processing fluid to the substrate held in each of the substrate holding units; and a nozzle moving mechanism configured to move the nozzle forward and backward in a front-rear direction intersecting an arrangement direction of the substrate holding units between a supplying position in which the processing fluid is supplied to a region including a central portion of the substrate and a waiting position which is defined at a rear side of a row of the substrate holding units opposite to a front side of the row of the substrate holding units at which the substrate is loaded and unloaded.
    Type: Grant
    Filed: June 21, 2018
    Date of Patent: June 8, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Yasushi Takiguchi, Koki Yoshimura, Taro Yamamoto, Hideharu Kyouda, Koshi Muta
  • Publication number: 20210166920
    Abstract: A disclosed plasma processing apparatus includes a chamber, a substrate support, an electric path, and a measuring device. The substrate support is accommodated in the chamber. The electric path is coupled to or capacitively coupled to an edge ring on the substrate support. The measuring device measures an electrical characteristic value of the edge ring with a voltage applied to the edge ring on the substrate support through the electric path. The electrical characteristic value measured by the measuring device is variable in accordance with a thickness of the edge ring.
    Type: Application
    Filed: November 20, 2020
    Publication date: June 3, 2021
    Applicant: Tokyo Electron Limited
    Inventors: Chishio KOSHIMIZU, Manabu IWATA
  • Publication number: 20210166120
    Abstract: An abnormality detection device trains a model using multiple network sections each configured to process acquired time series data sets and a concatenation section configured to combine output data output from each of the multiple network sections and to output, as a combined result, a result of combining the output data output from each of the multiple network sections. The trained model is then applied to adapt a unit of process performed during manufacture of a processed object.
    Type: Application
    Filed: November 27, 2020
    Publication date: June 3, 2021
    Applicant: Tokyo Electron Limited
    Inventor: Takuro TSUTSUI
  • Publication number: 20210166121
    Abstract: A predicting device trains a trained model using multiple network sections configured to process the acquired time series data sets and the device state information, and a concatenation section configured to output, as a combined result, a result of combining output data output from each of the multiple network sections. The trained model is then applied to adapt a unit of process performed during manufacture of a processed object.
    Type: Application
    Filed: November 27, 2020
    Publication date: June 3, 2021
    Applicant: Tokyo Electron Limited
    Inventor: Takuro TSUTSUI
  • Publication number: 20210166918
    Abstract: A plasma processing apparatus includes a chamber having a sidewall and a plasma processing space surrounded by the sidewall, and a first side gas inlet line and a second side gas inlet line configured to introduce at least one gas from the sidewall into the plasma processing space. The first side gas inlet line includes a plurality of first side gas injectors symmetrically arranged along a circumferential direction on the sidewall and configured to introduce the gas in a first direction into the plasma processing space. Further, the second side gas inlet line includes a plurality of second side gas injectors symmetrically arranged along the circumferential direction on the sidewall and configured to introduce the gas in a second direction different from the first direction into the plasma processing space.
    Type: Application
    Filed: November 27, 2020
    Publication date: June 3, 2021
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Mayo UDA, Manabu TSURUTA, Keigo TOYODA
  • Publication number: 20210166975
    Abstract: Techniques herein include methods for fabricating three-dimensional (3D) logic or memory stack integrated with 3D metal routing. The methods can include stacking metal layers within existing 3D silicon stacks. A first portion can be masked while a second, uncovered portion is etched. Predetermined layers in a bottom portion (disposed closer to the substrate) of the multilayer stack can be replaced with a conductor. The second portion can be masked while the first portion is uncovered and processed. This can enable higher density 3D circuits by having multiple metal lines contained within a multilayer 3D nano-sheet. Advantageously, this facilitates easier connections for 3D logic and memory. Moreover, better speed performance can be achieved by having reduced distance for signals to travel to transistor connections.
    Type: Application
    Filed: April 14, 2020
    Publication date: June 3, 2021
    Applicant: Tokyo Electron Limited
    Inventors: Mark I. GARDNER, H. Jim FULFORD, Anton DEVILLIERS
  • Patent number: 11022644
    Abstract: There is provided an inspection apparatus provided with a plurality of inspection chambers for inspecting an electrical characteristic of a semiconductor device formed on a substrate, the inspection apparatus includes: a substrate chuck part configured to attractively hold the substrate during an inspection; a measurement part configured to measure an attractive force of the substrate chuck part in a state in which the substrate is placed on the substrate chuck part; and a controller configured to perform a first determination based on a first condition and a measurement result of the measurement part and a second determination based on a second condition different from the first condition and the measurement result of the measurement part, and configured to select one of a plurality of preset operations based on a result of the first determination and a result of the second determination and execute a process corresponding to the selected operation.
    Type: Grant
    Filed: December 9, 2019
    Date of Patent: June 1, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventor: Junya Ozawa
  • Patent number: 11024519
    Abstract: A substrate processing apparatus includes a rotation holding device that holds and rotates a substrate, a liquid supply device including one or more rinse liquid nozzles that are positioned on back surface side of the substrate and supply rinse liquid to peripheral edge portion of back surface of the substrate, a cup that receives the liquid supplied to the substrate, and a control device including circuitry that controls the holding and supply devices. The nozzle is attached to the cup to receive the liquid, and the circuitry controls the holding and supply devices and executes first process in which the holding device varies rotation speed between first and second speeds, and the nozzle supplies the liquid to the peripheral edge portion of the back surface of the substrate such that the liquid cleans peripheral region of the nozzle in the cup and region on outer side of the peripheral region.
    Type: Grant
    Filed: January 17, 2018
    Date of Patent: June 1, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventor: Akira Fujita
  • Patent number: 11024514
    Abstract: There is provided an etching method including: loading a substrate having a recess and an etching target portion existing on an inner surface of the recess into a processing container, the etching target portion being made of SiN or Si; preferentially modifying a surface of the etching target portion at a top portion of the recess by performing an oxygen-containing plasma process on the substrate inside the processing container; and subsequently, dry-etching the etching target portion in an isotropic manner.
    Type: Grant
    Filed: July 26, 2019
    Date of Patent: June 1, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Takuya Abe, Hidenori Miyoshi, Akitaka Shimizu, Koichi Nagakura
  • Patent number: 11024535
    Abstract: A method for filling recessed features with a low-resistivity metal. The method includes providing a patterned substrate containing a recessed feature formed in a first layer and a second layer that is exposed in the recessed feature, and pre-treating the substrate with a surface modifier that increases metal deposition selectivity on the second layer relative to on the first layer, depositing a metal layer on the substrate by vapor phase deposition, where the metal layer is preferentially deposited on the second layer in the recessed feature, and removing metal nuclei deposited on the first layer, including on a field area and on sidewalls of the first layer in the recessed feature, to selectively form the metal layer on the second layer in the recessed feature. The steps of pre-treating, depositing and removing may be repeated at least once to increase a thickness of the metal layer in the recessed feature.
    Type: Grant
    Filed: October 10, 2019
    Date of Patent: June 1, 2021
    Assignee: Tokyo Electron Limited
    Inventors: Kai-Hung Yu, David O'Meara, Nicholas Joy, Gyanaranjan Pattanaik, Robert Clark, Kandabara Tapily, Takahiro Hakamata, Cory Wajda, Gerrit Leusink
  • Patent number: 11024518
    Abstract: A substrate processing apparatus includes a stationary cup body 51 provided to surround a substrate holding unit 31 and configured to receive a processing liquid or mist of the processing liquid discharged onto a substrate, the stationary cup body not being moved relatively with respect to a processing vessel; a mist guard 80; and a guard elevating mechanism 84 configured to elevate the mist guard. Here, the mist guard is provided at an outside of the stationary cup body to surround the stationary cup body and configured to block a liquid scattered outwards beyond a space above the stationary cup body. Further, the mist guard includes a cylindrical portion 81 of a cylindrical shape and a protruding portion 82 protruded from an upper portion of the cylindrical portion toward an inside of the cylindrical portion.
    Type: Grant
    Filed: July 28, 2016
    Date of Patent: June 1, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Norihiro Ito, Jiro Higashijima, Nobuhiro Ogata, Takahisa Otsuka, Yuichi Douki, Yusuke Hashimoto, Kazuhiro Aiura, Daisuke Goto
  • Patent number: 11024508
    Abstract: A method for selective plasma etching of silicon oxide relative to silicon nitride is described. The method includes providing a substrate containing a silicon oxide film and a silicon nitride film, and selectively etching the silicon oxide film relative to the silicon nitride film by: a1) exposing the substrate to a plasma-excited passivation gas containing carbon, sulfur, or both carbon and sulfur, where the plasma-excited passivation gas does not contain fluorine or hydrogen, and b1) exposing the substrate to a plasma-excited etching gas containing a fluorine-containing gas. The method can further include, between a1) and b1), an additional step of a2) exposing the substrate to a plasma-excited additional passivation gas containing a fluorocarbon gas, hydrofluorocarbon gas, a hydrochlorocarbon gas, a hydrochlorofluorocarbon gas, or a hydrocarbon gas, or a combination thereof.
    Type: Grant
    Filed: March 24, 2020
    Date of Patent: June 1, 2021
    Assignee: Tokyo Electron Limited
    Inventors: Du Zhang, Yu-Hao Tsai, Mingmei Wang
  • Publication number: 20210159085
    Abstract: A technique improves selectivity in etching of a silicon-containing film over etching of a mask in plasma etching. A substrate processing method includes placing a substrate in a chamber in a plasma processing apparatus. The substrate includes a silicon-containing film and a mask on the silicon-containing film. The substrate processing method further includes generating plasma from a first process gas containing a hydrogen fluoride gas in the chamber. The generating plasma includes etching the silicon-containing film with a chemical species contained in the plasma. A flow rate of the hydrogen fluoride gas is at least 25 vol % of a total flow rate of the non-inert components of the first process gas.
    Type: Application
    Filed: November 9, 2020
    Publication date: May 27, 2021
    Applicant: Tokyo Electron Limited
    Inventors: Ryutaro SUDA, Maju TOMURA
  • Publication number: 20210159049
    Abstract: A disclosed plasma processing method includes generating plasma in a chamber of a plasma processing apparatus by supplying radio frequency power from a radio frequency power source in a first period. The plasma processing method further includes stopping supply of the radio frequency power from the radio frequency power source in a second period following the first period. The plasma processing method further includes applying a negative direct-current voltage from a bias power source to a substrate support in a third period following the second period. In the third period, the radio frequency power is not supplied. In the third period, the negative direct-current voltage is set to generate ions in a chamber by secondary electrons that are emitted by causing ions in the chamber to collide with a substrate.
    Type: Application
    Filed: November 24, 2020
    Publication date: May 27, 2021
    Applicant: Tokyo Electron Limited
    Inventors: Shinji KUBOTA, Kazuya NAGASEKI, Shinji HIMORI, Koichi NAGAMI
  • Publication number: 20210159057
    Abstract: Provided is a technique for stably applying a voltage to an edge ring. Provided is a substrate support including: a substrate mounting surface on which a substrate is mounted; an edge ring mounting surface on which an edge ring is mounted around the substrate mounting surface; and a conductive electrode formed on the edge ring mounting surface and configured to apply a voltage to the edge ring.
    Type: Application
    Filed: November 25, 2020
    Publication date: May 27, 2021
    Applicant: Tokyo Electron Limited
    Inventor: Chishio KOSHIMIZU