Process chamber lid
Latest Applied Materials, Inc. Patents:
Description
FIG. 1 is a top perspective view of a process chamber lid showing our new design;
FIG. 2 is a top plan view thereof;
FIG. 3 is a side elevational view thereof;
FIG. 4 is an opposite side elevational view thereof;
FIG. 5 is an enlarged end elevational view thereof;
FIG. 6 is an enlarged opposite end elevational view thereof; and,
FIG. 7 is a bottom plan view thereof.
Claims
The ornamental design for a process chamber lid, as shown and described.
Referenced Cited
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Patent History
Patent number: D441348
Type: Grant
Filed: Nov 30, 1999
Date of Patent: May 1, 2001
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Craig B. Todd (San Jose, CA), James E. Yu (Santa Clara, CA)
Primary Examiner: Brian N. Vinson
Attorney, Agent or Law Firm: Thomason, Moser & Patterson
Application Number: 29/114,741
Type: Grant
Filed: Nov 30, 1999
Date of Patent: May 1, 2001
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Craig B. Todd (San Jose, CA), James E. Yu (Santa Clara, CA)
Primary Examiner: Brian N. Vinson
Attorney, Agent or Law Firm: Thomason, Moser & Patterson
Application Number: 29/114,741
Classifications
Current U.S. Class:
Casing Or Enclosure Not Elsewhere Specified (D13/184);
Miscellaneous (D13/199)
International Classification: 1399;
International Classification: 1399;