Container for transporting substrates

- Ebara Corporation
Skip to: Description  ·  Claims  ·  References Cited  · Patent History  ·  Patent History
Description

FIG. 1 is a front elevation view of the container for transporting substrates;

FIG. 2 is a rear view of the container for transporting substrates;

FIG. 3 is a plan view of the container for transporting substrates;

FIG. 4 is a bottom plan view of the container for transporting substrates;

FIG. 5 is a right side view of the container for transporting substrates;

FIG. 6 is a left side view of the container for transporting substrates; and,

FIG. 7 is a perspective view of the container for transporting substrates as seen from the front, top and left.

The broken lines are for illustrative purposes only and form no part of the claimed design.

Claims

The ornamental design for a container for transporting substrates, as shown and described.

Referenced Cited
U.S. Patent Documents
D376688 December 24, 1996 Gallagher et al.
D378873 April 22, 1997 Gregerson et al.
D387903 December 23, 1997 Jacoby et al.
5711427 January 27, 1998 Nyseth
5755332 May 26, 1998 Holliday et al.
5944194 August 31, 1999 Gregerson et al.
6006919 December 28, 1999 Betsuyaku
6206196 March 27, 2001 Krampotich et al.
6382419 May 7, 2002 Fujimori et al.
Foreign Patent Documents
1047112 October 2000 EP
1049137 November 2000 EP
Other references
  • “Shin-Etsu 300mm FOUP (Front Opening Unified Pod)”, whole pages, Shin-Etsu Polymer Co., Ltd.
  • “F300 AutoPod™ Wafer Carrier 300mm”, whole pages, Fluoroware, Inc.
  • ASYST SMIF-POD 300, whole pages, Asyst Technologies Inc.
  • U.S. Provisional application Ser. No. 60/340,503, filed Dec. 19, 2001 (Akira Tanaka et al.).
Patent History
Patent number: D479399
Type: Grant
Filed: Dec 19, 2001
Date of Patent: Sep 9, 2003
Assignee: Ebara Corporation (Tokyo)
Inventors: Akira Tanaka (Tokyo), Yoko Suzuki (Tokyo), Takashi Kishi (Tokyo)
Primary Examiner: Philip S. Hyder
Attorney, Agent or Law Firm: Wenderoth, Lind & Ponack, L.L.P.
Application Number: 29/152,233
Classifications
Current U.S. Class: D3/273
International Classification: 0301;