Heating tube for semiconductor-making furnace

- Tokyo Electron Limited
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Description

FIG. 1 is a front elevational view of a first embodiment of a heating tube for semiconductor-making furnace showing my new design;

FIG. 2 is a rear elevational view thereof;

FIG. 3 is a left-side elevational view thereof;

FIG. 4 is a right-side elevational view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a sectional view on line 7—7 in FIG. 3;

FIG. 8 is a front elevational view of a second embodiment of the heating tube for semiconductor-making furance;

FIG. 9 is a rear elevational view thereof;

FIG. 10 is a left-side elevational view thereof;

FIG. 11 is a right-side elevational view thereof;

FIG. 12 is a top plan view thereof;

FIG. 13 is a bottom plan view thereof; and,

FIG. 14 is a sectional view on line 14—14 in FIG. 10.

The broken lines are for illustrative purposes only and form no part of the claimed design.

Claims

I claim the ornamental design for heating tube for semiconductor-making furnace, as shown and described.

Referenced Cited
U.S. Patent Documents
1468536 September 1923 Lawter et al.
D234940 April 1975 Mezquita
6073622 June 13, 2000 Steimer
6568277 May 27, 2003 Emin
Patent History
Patent number: D518884
Type: Grant
Filed: May 22, 2003
Date of Patent: Apr 11, 2006
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Tomoki Haneishi (Esashi)
Primary Examiner: Robert M. Spear
Assistant Examiner: Susan Bennett Hattan
Attorney: Ladas and Parry LLP
Application Number: 29/182,226
Classifications