Wafer conveyor arm for semiconductor manufacturing equipment

- Tokyo Electron Limited
Skip to: Description  ·  Claims  ·  References Cited  · Patent History  ·  Patent History
Description

FIG. 1 is a front/top/left-side perspective view of a wafer conveyor arm for semiconductor manufacturing equipment showing my new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a top plan view thereof;

FIG. 5 is a bottom plan view thereof;

FIG. 6 is a left-side elevational view thereof; and,

FIG. 7 is a right-side elevational view thereof.

Claims

I claim the ornamental design for wafer conveyor arm for semiconductor manufacturing equipment, as shown and described.

Referenced Cited
U.S. Patent Documents
D32840 June 1900 Sanders
D214383 June 1969 Johnson
D240015 May 1976 Buckley
4138011 February 6, 1979 Lapeyre
D276586 December 4, 1984 Hanna
D286932 November 25, 1986 Bode et al.
5131937 July 21, 1992 Kuster et al.
D407174 March 23, 1999 Baker
6607065 August 19, 2003 Peppel
D479637 September 9, 2003 Flippo
Patent History
Patent number: D525408
Type: Grant
Filed: Jun 14, 2004
Date of Patent: Jul 18, 2006
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Hiromi Nitadori (Tokyo)
Primary Examiner: Cynthia E. Ramirez
Attorney: Ladas and Parry LLP
Application Number: 29/207,457
Classifications
Current U.S. Class: Element Or Attachment (D34/35); D8/371; D8/499