Arm transferring substrate to be processed

- Tokyo Electron Limited
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Description

FIG. 1 is a front elevational view of an arm transferring substrate to be processed, showing our new design;

FIG. 2 bottom plan view thereof;

FIG. 3 is right side elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a rear elevational view thereof; and,

FIG. 7 is a bottom and right front perspective view thereof.

Claims

The ornamental design for an arm transferring substrate to be processed, as shown and described.

Referenced Cited
U.S. Patent Documents
6655901 December 2, 2003 Tsubota et al.
6737826 May 18, 2004 Gilchrist
7018162 March 28, 2006 Kondoh
20010033788 October 25, 2001 Pietrantonio
20020114690 August 22, 2002 Ishigame
20030190224 October 9, 2003 Saeki
20050217053 October 6, 2005 Kim et al.
20050220576 October 6, 2005 Kim et al.
20060210387 September 21, 2006 Saeki et al.
Patent History
Patent number: D552138
Type: Grant
Filed: Dec 29, 2005
Date of Patent: Oct 2, 2007
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Masaki Kondo (Nirasaki), Tomohiro Abe (Nirasaki)
Primary Examiner: Antoine D. Davis
Assistant Examiner: Patricia Palasik
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 29/245,738
Classifications
Current U.S. Class: Miscellaneous (D15/199)