Electrostatic chuck
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Description
The broken line showing of the electrostatic chuck is included for the purpose of illustrating the bounds of the claimed design and forms no part of the claimed design.
Claims
The ornamental design for an electrostatic chuck, as shown and described.
Referenced Cited
U.S. Patent Documents
5213349 | May 25, 1993 | Elliott |
5530616 | June 25, 1996 | Kitabayashi et al. |
6028762 | February 22, 2000 | Kamitani |
D490827 | June 1, 2004 | Okugawa |
D497171 | October 12, 2004 | Okugawa |
20020027762 | March 7, 2002 | Yamaguchi |
20030198004 | October 23, 2003 | Hiramatsu et al. |
20040233609 | November 25, 2004 | Yoshida et al. |
20060221539 | October 5, 2006 | Morita et al. |
Patent History
Patent number: D561206
Type: Grant
Filed: Nov 25, 2005
Date of Patent: Feb 5, 2008
Assignee: Momentive Performance Materials Inc. (Wilton, CT)
Inventor: Tetsuo Kitabayashi (Ito-machi)
Primary Examiner: Antoine D. Davis
Assistant Examiner: Patricia Palasik
Attorney: Dominick G. Vicari
Application Number: 29/243,513
Type: Grant
Filed: Nov 25, 2005
Date of Patent: Feb 5, 2008
Assignee: Momentive Performance Materials Inc. (Wilton, CT)
Inventor: Tetsuo Kitabayashi (Ito-machi)
Primary Examiner: Antoine D. Davis
Assistant Examiner: Patricia Palasik
Attorney: Dominick G. Vicari
Application Number: 29/243,513
Classifications
Current U.S. Class:
Tool Or Work Holder (D15/140)