Electrostatic chuck

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Description

FIG. 1 is a top view of the top part of an electrostatic chuck.

FIG. 2 is a left side elevational view thereof.

FIG. 3 is a perspective view of the top part of the electrostatic chuck; and,

FIG. 4 is a front side elevational view thereof, wherein the shaded (grey) area showing the extension of the electrode.

The broken line showing of the electrostatic chuck is included for the purpose of illustrating the bounds of the claimed design and forms no part of the claimed design.

Claims

The ornamental design for an electrostatic chuck, as shown and described.

Referenced Cited
U.S. Patent Documents
5213349 May 25, 1993 Elliott
5530616 June 25, 1996 Kitabayashi et al.
6028762 February 22, 2000 Kamitani
D490827 June 1, 2004 Okugawa
D497171 October 12, 2004 Okugawa
20020027762 March 7, 2002 Yamaguchi
20030198004 October 23, 2003 Hiramatsu et al.
20040233609 November 25, 2004 Yoshida et al.
20060221539 October 5, 2006 Morita et al.
Patent History
Patent number: D561206
Type: Grant
Filed: Nov 25, 2005
Date of Patent: Feb 5, 2008
Assignee: Momentive Performance Materials Inc. (Wilton, CT)
Inventor: Tetsuo Kitabayashi (Ito-machi)
Primary Examiner: Antoine D. Davis
Assistant Examiner: Patricia Palasik
Attorney: Dominick G. Vicari
Application Number: 29/243,513
Classifications
Current U.S. Class: Tool Or Work Holder (D15/140)