Electrostatic chuck

- NGK Spark Plug Co., Ltd.
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Description

FIG. 1 is a perspective view of the top, front and right side of an electrostatic chuck showing my new design;

FIG. 2 is a front elevational view thereof, the rear elevational view being a mirror image thereof;

FIG. 3 is a right side elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof; and,

FIG. 7 is a sectional view taken along the line 7—7 in FIG. 5.

Claims

The ornamental design for an electrostatic chuck, as shown and described.

Referenced Cited
U.S. Patent Documents
4518889 May 21, 1985 'T Hoen
4692836 September 8, 1987 Suzuki
5474614 December 12, 1995 Robbins
5535090 July 9, 1996 Sherman
5572398 November 5, 1996 Federlin et al.
5671116 September 23, 1997 Husain
5838528 November 17, 1998 Os et al.
D420022 February 1, 2000 Burkhart et al.
D425919 May 30, 2000 Burkhart et al.
6268994 July 31, 2001 Logan et al.
6639783 October 28, 2003 Shamouilian et al.
Patent History
Patent number: D497171
Type: Grant
Filed: Jun 20, 2003
Date of Patent: Oct 12, 2004
Assignee: NGK Spark Plug Co., Ltd. (Aichi)
Inventor: Keisuke Okugawa (Aichi)
Primary Examiner: Lucy Lieberman
Attorney, Agent or Law Firm: Sughrue Mion, PLLC
Application Number: 29/183,947
Classifications
Current U.S. Class: Tool Or Work Holder (D15/140)
International Classification: 1509;