Lift pin
Latest Applied Materials, Inc. Patents:
- AUTOMATED DIAL-IN OF ELECTROPLATING PROCESS PARAMETERS BASED ON WAFER RESULTS FROM EX-SITU METROLOGY
- HIGH TEMPERATURE BIASABLE HEATER WITH ADVANCED FAR EDGE ELECTRODE, ELECTROSTATIC CHUCK, AND EMBEDDED GROUND ELECTRODE
- HIGH-PRECISION IN-SITU VERIFICATION AND CORRECTION OF WAFER POSITION AND ORIENTATION FOR ION IMPLANT
- SELECTIVE WAVEGUIDE ION IMPLANTATION TO ADJUST LOCAL REFRACTIVE INDEX FOR PHOTONICS
- SHOWERHEAD HEATED BY CIRCULAR ARRAY
Description
Claims
The ornamental design for a lift pin, as shown and described.
Referenced Cited
U.S. Patent Documents
3015709 | January 1962 | Bodenschatz |
3074186 | January 1963 | Gudermuth |
3832764 | September 1974 | Fletcher et al. |
5594985 | January 21, 1997 | Varley |
5796066 | August 18, 1998 | Guyot |
5848670 | December 15, 1998 | Salzman |
5879128 | March 9, 1999 | Tietz et al. |
6120609 | September 19, 2000 | Selyutin et al. |
6202368 | March 20, 2001 | Wallace, III |
6364955 | April 2, 2002 | Schertler |
6481723 | November 19, 2002 | Hao et al. |
6719516 | April 13, 2004 | Kroeker |
6767176 | July 27, 2004 | Yudovsky et al. |
6884319 | April 26, 2005 | Kim |
6896282 | May 24, 2005 | McKinley |
6958098 | October 25, 2005 | Gujer et al. |
6962084 | November 8, 2005 | Gall |
7204888 | April 17, 2007 | Tran et al. |
D568914 | May 13, 2008 | Or et al. |
D612772 | March 30, 2010 | Goodman et al. |
20020011204 | January 31, 2002 | Gujer et al. |
20020121312 | September 5, 2002 | Lubomirsky et al. |
20020174950 | November 28, 2002 | Park |
20030075387 | April 24, 2003 | Wang et al. |
20030136341 | July 24, 2003 | Na |
20050180737 | August 18, 2005 | Kurita et al. |
20060156987 | July 20, 2006 | Lai et al. |
20070007782 | January 11, 2007 | Kalous |
20080110397 | May 15, 2008 | Son |
20080149032 | June 26, 2008 | Jung |
20080196665 | August 21, 2008 | Chandran |
20090095621 | April 16, 2009 | Kao et al. |
20090127808 | May 21, 2009 | Otterson |
20090155025 | June 18, 2009 | Lerner et al. |
20090190908 | July 30, 2009 | Shibagaki |
20090314211 | December 24, 2009 | Du Bois et al. |
20100013626 | January 21, 2010 | Park et al. |
Patent History
Patent number: D635597
Type: Grant
Filed: Nov 17, 2008
Date of Patent: Apr 5, 2011
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventor: Robin L. Tiner (Santa Cruz, CA)
Primary Examiner: Patricia Palasik
Attorney: Patterson & Sheridan, LLP
Application Number: 29/328,009
Type: Grant
Filed: Nov 17, 2008
Date of Patent: Apr 5, 2011
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventor: Robin L. Tiner (Santa Cruz, CA)
Primary Examiner: Patricia Palasik
Attorney: Patterson & Sheridan, LLP
Application Number: 29/328,009
Classifications
Current U.S. Class:
Element Or Attachment (D15/138)