Plasma reactor showerhead face plate having concentric ridge pattern
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Description
Claims
We claim the ornamental design for a plasma reactor showerhead face plate having concentric ridge pattern, as shown and described.
Referenced Cited
U.S. Patent Documents
D459434 | June 25, 2002 | Fauquet |
D459435 | June 25, 2002 | Fauquet |
D466183 | November 26, 2002 | Tse |
D495776 | September 7, 2004 | Blomstrom |
6983898 | January 10, 2006 | Clark |
D593640 | June 2, 2009 | Schoenherr et al. |
D599881 | September 8, 2009 | Wang et al. |
D619202 | July 6, 2010 | Zhang |
D623721 | September 14, 2010 | Reynoso |
D624155 | September 21, 2010 | Yokoyama et al. |
Patent History
Patent number: D641829
Type: Grant
Filed: Oct 29, 2010
Date of Patent: Jul 19, 2011
Assignee: Novellus Systems, Inc. (San Jose, CA)
Inventors: Ivelin A. Angelov (Sunnyvale, CA), James E. Caron (Tracy, CA), Ilia Kalinovshi (Berkeley, CA)
Primary Examiner: Robin Webster
Attorney: Weaver Austin Villeneuve & Sampson LLP
Application Number: 29/378,161
Type: Grant
Filed: Oct 29, 2010
Date of Patent: Jul 19, 2011
Assignee: Novellus Systems, Inc. (San Jose, CA)
Inventors: Ivelin A. Angelov (Sunnyvale, CA), James E. Caron (Tracy, CA), Ilia Kalinovshi (Berkeley, CA)
Primary Examiner: Robin Webster
Attorney: Weaver Austin Villeneuve & Sampson LLP
Application Number: 29/378,161
Classifications
Current U.S. Class:
Dispersal (i.e., Sprayer, Fogger, Nozzle, Aerator, Etc.) (4) (D23/213)