Compound charged particle beam device
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Description
The portion shown in broken lines are for illustrative purposes only and form no part of the claimed invention.
Claims
The ornamental design for a compound charged particle beam device, as shown and described.
Patent History
Patent number: D679026
Type: Grant
Filed: May 14, 2012
Date of Patent: Mar 26, 2013
Assignee: SII Nano Technology Inc. (Chiba)
Inventors: Kenichi Akamatsu (Chiba), Hiroto Muto (Chiba)
Primary Examiner: Ian Simmons
Assistant Examiner: Charles Hanson
Application Number: 29/420,852
Type: Grant
Filed: May 14, 2012
Date of Patent: Mar 26, 2013
Assignee: SII Nano Technology Inc. (Chiba)
Inventors: Kenichi Akamatsu (Chiba), Hiroto Muto (Chiba)
Primary Examiner: Ian Simmons
Assistant Examiner: Charles Hanson
Application Number: 29/420,852
Classifications