Patents by Inventor Hiroto Muto

Hiroto Muto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged-particle beam apparatus
    Patent number: 7804066
    Abstract: Provided is a charged-particle beam apparatus capable of preventing a small amount of dust from being attached to an electrostatic lens serving as an objective lens to apply a high voltage to the electrostatic lens. The charged-particle beam apparatus 1 includes a chamber 2 which has an interior 2a evacuated by an intra-chamber evacuating means 4, and a lens-barrel 3 which emits a charged-particle beam B1 onto a sample S put in the interior 2a of the chamber 2.
    Type: Grant
    Filed: July 22, 2008
    Date of Patent: September 28, 2010
    Assignee: SII NanoTechnology Inc.
    Inventors: Takashi Ogawa, Hiroto Muto
  • CHARGED-PARTICLE BEAM APPARATUS
    Publication number: 20090008572
    Abstract: Provided is a charged-particle beam apparatus capable of preventing a small amount of dust from being attached to an electrostatic lens serving as an objective lens to apply a high voltage to the electrostatic lens. The charged-particle beam apparatus 1 includes a chamber 2 which has an interior 2a evacuated by an intra-chamber evacuating means 4, and a lens-barrel 3 which emits a charged-particle beam B1 onto a sample S put in the interior 2a of the chamber 2.
    Type: Application
    Filed: July 22, 2008
    Publication date: January 8, 2009
    Applicant: SII NANO TECHNOLOGY INC.
    Inventors: Takashi Ogawa, Hiroto Muto
  • Compound charged particle beam device
    Patent number: D671654
    Type: Grant
    Filed: August 19, 2009
    Date of Patent: November 27, 2012
    Assignee: Sii Nano Technology Inc.
    Inventors: Kenichi Akamatsu, Hiroto Muto
  • Compound charged particle beam device
    Patent number: D679026
    Type: Grant
    Filed: May 14, 2012
    Date of Patent: March 26, 2013
    Assignee: SII Nano Technology Inc.
    Inventors: Kenichi Akamatsu, Hiroto Muto