Substrate cleaning tool

- Tokyo Electron Limited
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Description

FIG. 1 is a front, left and top perspective view of the substrate cleaning tool showing the new design;

FIG. 2 is a front elevation view thereof;

FIG. 3 is a rear elevation view thereof;

FIG. 4 is a left side elevation view thereof;

FIG. 5 is a top plan view thereof; and,

FIG. 6 is a cross-sectional view taken along line 6-6 in FIG. 2.

The right side elevation view is a mirror image of the left side, and the bottom view is a mirror image of the top plan view.

The broken lines illustrate portions of the substrate cleaning tool that form no part of the claimed design.

Claims

The ornamental design for a substrate cleaning tool, as shown and described.

Referenced Cited
U.S. Patent Documents
5647083 July 15, 1997 Sugimoto et al.
6412134 July 2, 2002 Oikawa
6554010 April 29, 2003 Hirose et al.
D563186 March 4, 2008 Ahn
D619152 July 6, 2010 Evatt et al.
D623034 September 7, 2010 Evatt et al.
D630656 January 11, 2011 Lambert et al.
D633769 March 8, 2011 Evatt et al.
D646542 October 11, 2011 Wackwitz
D648762 November 15, 2011 Mack
8522799 September 3, 2013 Freer et al.
20020035763 March 28, 2002 Hirose et al.
Patent History
Patent number: D719591
Type: Grant
Filed: Sep 9, 2013
Date of Patent: Dec 16, 2014
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Kento Kurusu (Kumamoto)
Primary Examiner: Patricia Palasik
Application Number: 29/466,456
Classifications
Current U.S. Class: Element Or Attachment (D15/138)