Brush for cleaning semiconductor polishing disk
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Description
The broken line showing is included for the purpose of illustrating environment and forms no part of the claimed design.
Claims
The ornamental design for a brush for cleaning semiconductor polishing disk, as shown and described.
Referenced Cited
U.S. Patent Documents
Foreign Patent Documents
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Patent History
Patent number: D760455
Type: Grant
Filed: Feb 7, 2013
Date of Patent: Jun 28, 2016
Assignee: EBARA CORPORATION (Tokyo)
Inventor: Hiroyuki Shinozaki (Tokyo)
Primary Examiner: John Windmuller
Assistant Examiner: Luqman McNeil
Application Number: 29/445,123
Type: Grant
Filed: Feb 7, 2013
Date of Patent: Jun 28, 2016
Assignee: EBARA CORPORATION (Tokyo)
Inventor: Hiroyuki Shinozaki (Tokyo)
Primary Examiner: John Windmuller
Assistant Examiner: Luqman McNeil
Application Number: 29/445,123
Classifications
Current U.S. Class:
Element Or Attachment (D32/25)