Substrate conveyance arm
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The broken lines in the drawings depict unclaimed environmental subject matter.
Claims
The ornamental design for the substrate conveyance arm, as shown and described.
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D665759 | August 21, 2012 | Sato |
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20120301832 | November 29, 2012 | Tsuruda |
20160148812 | May 26, 2016 | Kang |
20170052460 | February 23, 2017 | Yoneda |
Type: Grant
Filed: Nov 2, 2015
Date of Patent: Feb 27, 2018
Assignee: HIRATA CORPORATION (Shinagawa-ku)
Inventors: Tetsuya Sakai (Tokyo), Hideki Sakaue (Tokyo)
Primary Examiner: Patricia A Palasik
Application Number: 29/544,295