Substrate conveyance arm
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The broken lines in the drawings depict unclaimed environmental subject matter.
Claims
The ornamental design for the substrate conveyance arm, as shown and described.
| 6189943 | February 20, 2001 | Manpuku |
| 6578891 | June 17, 2003 | Suzuki |
| D552138 | October 2, 2007 | Kondo |
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| 20120189419 | July 26, 2012 | Yazawa |
| 20120301832 | November 29, 2012 | Tsuruda |
| 20160148812 | May 26, 2016 | Kang |
| 20170052460 | February 23, 2017 | Yoneda |
Type: Grant
Filed: Nov 2, 2015
Date of Patent: Feb 27, 2018
Assignee: HIRATA CORPORATION (Shinagawa-ku)
Inventors: Tetsuya Sakai (Tokyo), Hideki Sakaue (Tokyo)
Primary Examiner: Patricia A Palasik
Application Number: 29/544,295