Display screen with graphical user interface for supporting service maintenance and tracking activities in semiconductor tool
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The broken lines in the drawings illustrate the display screen and portions of the graphical user interface and form no part of the claimed design. The broken lines seen in
Claims
We claim the ornamental design for a display screen with graphical user interface for supporting service maintenance and tracking activities in semiconductor tool, as shown and described.
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Type: Grant
Filed: Oct 10, 2014
Date of Patent: Apr 3, 2018
Assignee: LAM RESEARCH CORPORATION (Fremont, CA)
Inventors: Vincent Wong (Pleasanton, CA), Ronald Ramnarine (Fremont, CA), Robert Housley (Los Gatos, CA), Sandy Shih-Hsun Chao (Fremont, CA), Mukesh Shah (Fremont, CA), Robert Ahrens (San Jose, CA)
Primary Examiner: Melanie H Tung
Assistant Examiner: Bao-Yen Nguyen
Application Number: 29/504,989