Wafer support ring

- Entegris, Inc.
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Description

FIG. 1 is a top plan view of a wafer support ring according of to an embodiment of the invention.

FIG. 2 is a top perspective view of the wafer support ring depicted in FIG. 1.

FIG. 3 is a cross-sectional view of the wafer support ring taken at line 3-3 of FIG. 1.

FIG. 4 is a cross-sectional view of the wafer support ring taken at line 4-4 of FIG. 1.

FIG. 5 is a cross-sectional view of the wafer support ring taken at line 5-5 of FIG. 1

FIG. 6 is a left elevational view of the wafer support ring.

FIG. 7 is a front plan view of the wafer support ring.

FIG. 8 is a bottom perspective view of the wafer support ring; and,

FIG. 9 is a bottom plan view of the wafer support ring.

Claims

I claim the ornamental design for a wafer support ring, as shown and described.

Referenced Cited
U.S. Patent Documents
3893649 July 1975 Cornell
4867401 September 19, 1989 Graff
4899967 February 13, 1990 Johnson
D457283 May 14, 2002 Wayt
8016542 September 13, 2011 Cox
D646764 October 11, 2011 Rusconi
D655401 March 6, 2012 Muramatsu
D667601 September 18, 2012 Fitzpatrick
D723239 February 24, 2015 Raschke
D743513 November 17, 2015 Yamagishi
D754308 April 19, 2016 Nakagawa
Foreign Patent Documents
D1362609 June 2009 JP
D1362612 June 2009 JP
D1369017 September 2009 JP
D1397981 October 2010 JP
D1436283 March 2012 JP
D149672 October 2012 TW
D160525 May 2014 TW
Patent History
Patent number: D815385
Type: Grant
Filed: Oct 13, 2016
Date of Patent: Apr 10, 2018
Assignee: Entegris, Inc. (Billerica, MA)
Inventor: Eric Kirkland (Colorado Springs, CO)
Primary Examiner: Cynthia Ramirez
Application Number: 29/580,872
Classifications
Current U.S. Class: Belt Or Roller Conveyor (D34/29)