Wafer support ring
Latest Entegris, Inc. Patents:
Claims
I claim the ornamental design for a wafer support ring, as shown and described.
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Type: Grant
Filed: Oct 13, 2016
Date of Patent: Apr 10, 2018
Assignee: Entegris, Inc. (Billerica, MA)
Inventor: Eric Kirkland (Colorado Springs, CO)
Primary Examiner: Cynthia Ramirez
Application Number: 29/580,872