Patents Assigned to Entegris, Inc.
  • Patent number: 10465286
    Abstract: Vaporizable material is supported within a vessel to promote contact of an introduced gas with the vaporizable material, and produce a product gas including vaporized material. A heating element supplies heat to a wall of the vessel to heat vaporizable material disposed therein. The vessel may include an ampoule having a removable top. Multiple containers defining multiple material support surfaces may be stacked disposed within a vessel in thermal communication with the vessel. A tube may be disposed within the vessel and coupled to a gas inlet. Filters, flow meters, and level sensors may be further provided. Product gas resulting from contact of introduced gas with vaporized material may be delivered to atomic layer deposition (ALD) or similar process equipment. At least a portion of source material including a solid may be dissolved in a solvent, followed by removal of solvent to yield source material (e.g., a metal complex) disposed within the vaporizer.
    Type: Grant
    Filed: October 17, 2016
    Date of Patent: November 5, 2019
    Assignee: ENTEGRIS, INC.
    Inventors: John N. Gregg, Scott L. Battle, Jeffrey I. Banton, Donn K. Naito, Ravi K. Laxman
  • Patent number: 10460954
    Abstract: A liquid removal composition and process for removing anti-reflective coating (ARC) material and/or post-etch residue from a substrate having same thereon. The composition achieves at least partial removal of ARC material and/or post-etch residue in the manufacture of integrated circuitry with minimal etching of metal species on the substrate, such as aluminum, copper and cobalt alloys, and without damage to low-k dielectric and nitride-containing materials employed in the semiconductor architecture.
    Type: Grant
    Filed: June 2, 2015
    Date of Patent: October 29, 2019
    Assignee: ENTEGRIS, INC.
    Inventors: Emanuel I. Cooper, Steven Lippy, Lingyan Song
  • Patent number: 10451540
    Abstract: A multipass cell assembly for monitoring of fluid is described, as well as fluid processing systems utilizing same, and associated methods of use of such multipass cell assembly for fluid monitoring. The multipass cell assembly is usefully employed in fluid processing operations such as monitoring of vapor deposition process reactants, e.g., reactants used for vapor deposition metallization of tungsten from a tungsten carbonyl precursor.
    Type: Grant
    Filed: January 16, 2016
    Date of Patent: October 22, 2019
    Assignee: ENTEGRIS, INC.
    Inventors: Thomas H. Baum, John P. Coates, Robert L. Wright, Jr.
  • Patent number: 10453744
    Abstract: The disclosure relates to a method of making molybdenum films utilizing boron and molybdenum nucleation layers. The resulting molybdenum films have low electrical resistivity, are substantially free of boron, and can be made at reduced temperatures compared to conventional chemical vapor deposition processes that do not use the boron or molybdenum nucleation layers. The molybdenum nucleation layer formed by this process can protect the substrate from the etching effect of MoCl5 or MoOCl4, facilitates nucleation of subsequent CVD Mo growth on top of the molybdenum nucleation layer, and enables Mo CVD deposition at lower temperatures. The nucleation layer can also be used to control the grain sizes of the subsequent CVD Mo growth, and therefore controls the electrical resistivity of the Mo film.
    Type: Grant
    Filed: April 20, 2018
    Date of Patent: October 22, 2019
    Assignee: ENTEGRIS, INC.
    Inventors: Shuang Meng, Richard Ulrich Assion, Thomas H. Baum, Bryan Clark Hendrix
  • Patent number: 10443999
    Abstract: A connection verification tool for verifying a secure connection between two fluid handling components of a fluid handling system. A connection verification tool can include a gauge portion sized sized to be placed over a first fluid handling component connected to a second fluid handling component to verify a secure connection between the two components. If the first fluid handling component is not securely connected to the second fluid handling component such that additional torque may be required to complete the connection between the two components, the gauge portion of the connection verification tool will not fit over the first component coupled to the second component.
    Type: Grant
    Filed: June 19, 2017
    Date of Patent: October 15, 2019
    Assignee: ENTEGRIS, INC.
    Inventors: John A. Leys, Michael Schleicher
  • Patent number: 10446389
    Abstract: Compositions and methods for removing lanthanoid-containing solids and/or species from the surface of a microelectronic device or microelectronic device fabrication hardware. Preferably, the lanthanoid-containing solids and/or species comprise cerium. The composition is preferably substantially devoid of fluoride ions.
    Type: Grant
    Filed: August 4, 2017
    Date of Patent: October 15, 2019
    Assignee: ENTEGRIS, INC.
    Inventors: Emanuel I. Cooper, Jeffery A. Barnes
  • Patent number: 10428271
    Abstract: Compositions useful for the selective removal of titanium nitride and/or photoresist etch residue materials relative to insulating materials from a microelectronic device having same thereon. The removal compositions contain at least one oxidant, one etchant, and one activator to enhance the etch rate of titanium nitride.
    Type: Grant
    Filed: August 28, 2014
    Date of Patent: October 1, 2019
    Assignee: Entegris, Inc.
    Inventors: Emanuel I. Cooper, Li-Min Chen, Steven Lippy, Chia-Jung Hsu, Sheng-hung Tu, Chieh Ju Wang
  • Publication number: 20190291027
    Abstract: Filters for semiconductor tool and clean room applications to control airborne molecular contamination. The filter cartridge system includes a filter cartridge having a non-woven fiber and at least one adsorbent. In some embodiments, the filter cartridge is constructed of substantially combustible materials to support its end of service destruction.
    Type: Application
    Filed: April 28, 2017
    Publication date: September 26, 2019
    Applicant: Entegris, Inc.
    Inventors: Tom LEBLANC, Joe WILDGOOSE, Marc VENET, Evan WARNIERS, John GAUDREAU
  • Publication number: 20190282964
    Abstract: Spacers for filtration membranes that are formed from perforated films. The spacer include unperforated regions, which can serve as integrated lamination strips, advantageously omitting the need for separate lamination steps required with woven and nonwoven spacer fabrics while also providing a spacer with a uniform thickness.
    Type: Application
    Filed: July 17, 2017
    Publication date: September 19, 2019
    Applicant: Entegris, Inc.
    Inventor: John Paul PUGLIA
  • Patent number: 10392560
    Abstract: Compositions useful for the selective removal of titanium nitride and/or photoresist etch residue materials relative to metal conducting, e.g., tungsten, and insulating materials from a microelectronic device having same thereon. The removal compositions contain at least one oxidant and one etchant, may contain various corrosion inhibitors to ensure selectivity.
    Type: Grant
    Filed: January 17, 2017
    Date of Patent: August 27, 2019
    Assignee: ENTEGRIS, INC.
    Inventors: Jeffrey A. Barnes, Emanuel I. Cooper, Li-Min Chen, Steven Lippy, Rekha Rajaram, Sheng-Hung Tu
  • Patent number: 10395963
    Abstract: In accordance with an embodiment of the invention, there is provided an electrostatic chuck comprising an electrode, and a surface layer activated by a voltage in the electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck. The surface layer includes a plurality of protrusions extending to a height above portions of the surface layer surrounding the protrusions to support the substrate upon the protrusions during electrostatic clamping of the substrate. The protrusions are substantially equally spaced across the surface layer as measured by a center to center distance between pairs of neighboring protrusions.
    Type: Grant
    Filed: October 17, 2016
    Date of Patent: August 27, 2019
    Assignee: ENTEGRIS, INC.
    Inventor: Richard A. Cooke
  • Patent number: 10392700
    Abstract: Vaporizers are described, suited for vaporizing a vaporizable solid source materials to form vapor for subsequent use, e.g., a deposition of metal from organometallic source material vapor on a substrate for manufacture of integrated circuitry, LEDs, photovoltaic panels, and the like. Methods are described of fabricating such vaporizers, including methods of reconfiguring up-flow vaporizers for down-flow operation to accommodate higher flow rate solid delivery of source material vapor in applications requiring same.
    Type: Grant
    Filed: March 28, 2015
    Date of Patent: August 27, 2019
    Assignee: ENTEGRIS, INC.
    Inventors: Thomas H. Baum, Robert L. Wright, Jr., Bryan C. Hendrix, Scott L. Battle, John M. Cleary
  • Patent number: 10385452
    Abstract: Systems, reagent support trays, particle suppression devices, and methods are disclosed. In one aspect, a system includes a vaporizer vessel having one or more interior walls enclosing an interior volume and a plurality of reagent support trays configured to be vertically stackable within the interior volume. Each of the plurality of reagent support trays is configured to be vertically stackable within the interior volume to form a stack of reagent support trays. One or more of the plurality of reagent support trays is configured to redirect a flow of a gas passing between adjacent reagent support trays in the stack of reagent support trays to cause the flow of gas to interact with the source reagent material in a particular reagent support tray before passing into a next of the plurality of reagent support trays in the stack of reagent support trays.
    Type: Grant
    Filed: May 31, 2013
    Date of Patent: August 20, 2019
    Assignee: ENTEGRIS, INC.
    Inventors: Bryan C. Hendrix, John N. Gregg, Scott L. Battle, Donn K. Naito, Kyle Bartosh, John M. Cleary, Sebum Cheon, Jordan Hodges
  • Patent number: 10388554
    Abstract: A purge configurable wafer shipper. The container includes an enclosure portion with an open side or bottom, a door to sealing close the open side or bottom. One of the door and the container portion includes an opening formed in the enclosure portion to provide a fluid passageway from an interior of the wafer shipper to an exterior region. The opening may include a module receiving structure that defines the fluid passageway. A sealing member is included for insertion into the module receiving structure. The sealing member has a body portion including a support flange positioned proximate a lower portion of the body portion, a circumferential groove in the exterior surface of the body portion, and an O-ring positioned at least partially within the circumferential groove.
    Type: Grant
    Filed: April 6, 2017
    Date of Patent: August 20, 2019
    Assignee: ENTEGRIS, INC.
    Inventor: Barry Gregerson
  • Patent number: 10371624
    Abstract: A sensor system (100) utilizes temperature control systems (262) and methods to achieve and maintain a sample in a sample chamber (110) at a sampling temperature. Such sensor systems and methods may employ a dual mode temperature controller including a spike mode (SMC) controller (274) and a proportional-integral-derivative (PID) mode controller (272). Based on a temperature of the sample, the temperature controller of the sensor system can initially enter the spike mode or the PID mode.
    Type: Grant
    Filed: October 24, 2016
    Date of Patent: August 6, 2019
    Assignee: Entegris, Inc.
    Inventor: John Anthony Balchunas
  • Patent number: 10358263
    Abstract: A supply vessel for dispensing of ultra-high purity chemical reagents, comprising a metal container defining an enclosable interior volume including interior surface structure, wherein the interior surface structure is coated with an ultra-high purity effective polyperfluoroalkoxyethylene coating. Such supply vessel may for example be utilized for storage and dispensing of ultra-high purity chemical reagent to a semiconductor manufacturing tool, or a tool for manufacturing of flat-panel displays, or solar panels.
    Type: Grant
    Filed: August 7, 2013
    Date of Patent: July 23, 2019
    Assignee: Entegris, Inc.
    Inventors: Donn K. Naito, Andy Krell, Mitchell W. McFeron, Steven Jackson, Joel Robison
  • Patent number: 10351809
    Abstract: A cleaning composition and process for cleaning post-chemical mechanical polishing (CMP) residue and contaminants from a microelectronic device having said residue and contaminants thereon. The cleaning compositions are substantially devoid of alkali hydroxides, alkaline earth metal hydroxides, and tetramethylammonium hydroxide. The composition achieves highly efficacious cleaning of the post-CMP residue and contaminant material from the surface of the microelectronic device without compromising the low-k dielectric material or the copper interconnect material.
    Type: Grant
    Filed: January 5, 2016
    Date of Patent: July 16, 2019
    Assignee: Entegris, Inc.
    Inventors: Elizabeth Thomas, Donald Frye, Jun Liu, Michael White, Danela White, Chao-Yu Wang
  • Patent number: 10352491
    Abstract: An anti-rotation device for preventing a hydraulic connector assembly from leaking. Various embodiments of the anti-rotation device provide a mechanism whereby threadably engaged connectors, such as compression fittings, are permitted to rotate only a fraction of a turn after loosening. For many applications, the limited degree of loosening is sufficient to prevent the onset of leaking. Structurally, the anti-rotation device can include a band that is secured to a female nut of a hydraulic connector. Protrusions extend laterally from the band and engage with a stop tab on the male body of the hydraulic connector assembly, thereby limiting rotation of the female nut that would otherwise cause leaks.
    Type: Grant
    Filed: October 22, 2014
    Date of Patent: July 16, 2019
    Assignee: Entegris, Inc.
    Inventors: John Leys, Michael Schleicher, Jeffrey J. McKenzie
  • Patent number: 10354877
    Abstract: Ion implantation processes and systems are described, in which carbon dopant source materials are utilized to effect carbon doping. Various gas mixtures are described, including a carbon dopant source material, as well as co-flow combinations of gases for such carbon doping. Provision of in situ cleaning agents in the carbon dopant source material is described, as well as specific combinations of carbon dopant source gases, hydride gases, fluoride gases, noble gases, oxide gases and other gases.
    Type: Grant
    Filed: March 22, 2018
    Date of Patent: July 16, 2019
    Assignee: Entegris, Inc.
    Inventors: Oleg Byl, Edward A. Sturm, Ying Tang, Sharad N. Yedave, Joseph D. Sweeney, Steven G. Sergi, Barry Lewis Chambers
  • Patent number: 10350529
    Abstract: Disclosed is a filtration article comprising a first layer comprising porous PTFE for fluid filtration (e.g., a PTFE membrane), and a second layer comprising strands of fluoropolymer fibers arranged to form a stable knit. The knit layer comprises interlocking regions that are each defined by corresponding sets of at least two interlocking loop portions of the fluoropolymer fiber strands. In filtration article embodiments, the fluoropolymer fiber strands may be twisted and/or have a rounded outer configuration. The knit layer provides improved dimensional stability as a support layer for the filtration layer and/or as a drainage layer.
    Type: Grant
    Filed: July 22, 2013
    Date of Patent: July 16, 2019
    Assignee: Entegris, Inc.
    Inventors: Eric Keith Propst, Steven H. Speck