Insulation unit cover of semiconductor manufacturing apparatus
Latest HITACHI KOKUSAI ELECTRIC INC. Patents:
Description
The dot-dash broken lines
Claims
I claim the ornamental design for an insulation unit cover of semiconductor manufacturing apparatus, as shown and described.
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Patent History
Patent number: D818961
Type: Grant
Filed: Jul 28, 2016
Date of Patent: May 29, 2018
Assignee: HITACHI KOKUSAI ELECTRIC INC. (Tokyo)
Inventor: Takatomo Yamaguchi (Toyama)
Primary Examiner: Thomas Johannes
Assistant Examiner: Lauren McVey
Application Number: 29/572,569
Type: Grant
Filed: Jul 28, 2016
Date of Patent: May 29, 2018
Assignee: HITACHI KOKUSAI ELECTRIC INC. (Tokyo)
Inventor: Takatomo Yamaguchi (Toyama)
Primary Examiner: Thomas Johannes
Assistant Examiner: Lauren McVey
Application Number: 29/572,569
Classifications
Current U.S. Class:
Insulator (7) (D13/129)