Infrared lamp heater transmission window for semiconductor manufacturing apparatus
Latest Hitachi High-Technologies Corporation Patents:
Description
Claims
The ornamental design for an infrared lamp heater transmission window for semiconductor manufacturing apparatus, as shown and described.
Referenced Cited
U.S. Patent Documents
| D598873 | August 25, 2009 | Tseng |
| 7806554 | October 5, 2010 | Chang |
| D630350 | January 4, 2011 | Lin |
| D636117 | April 12, 2011 | Kim |
| D636118 | April 12, 2011 | Kim |
| 8220971 | July 17, 2012 | Harbers |
| D694204 | November 26, 2013 | Meyer |
| D700737 | March 4, 2014 | Campagna |
| D701181 | March 18, 2014 | Meyer |
| D705182 | May 20, 2014 | Meyer |
| D705183 | May 20, 2014 | Meyer |
| D728129 | April 28, 2015 | Kreuzbichler |
| 9249955 | February 2, 2016 | Schroll |
| 9627599 | April 18, 2017 | Lee |
| 9985375 | May 29, 2018 | McGowan |
| D835304 | December 4, 2018 | Hirabayashi |
| D847414 | April 30, 2019 | Danesh |
| 20070285926 | December 13, 2007 | Maxik |
| 20110012161 | January 20, 2011 | Hung |
| 20120313522 | December 13, 2012 | Myojo |
| 20150131301 | May 14, 2015 | Ho |
Patent History
Patent number: D864885
Type: Grant
Filed: Feb 27, 2018
Date of Patent: Oct 29, 2019
Assignee: Hitachi High-Technologies Corporation (Tokyo)
Inventors: Michiaki Kobayashi (Tokyo), Kazuyuki Hirozane (Tokyo), Akio Harada (Tokyo), Nobuhide Nunomura (Tokyo), Yutaka Kouzuma (Tokyo)
Primary Examiner: Janice Hallmark
Assistant Examiner: Harold E Blackwell, II
Application Number: 29/638,440
Type: Grant
Filed: Feb 27, 2018
Date of Patent: Oct 29, 2019
Assignee: Hitachi High-Technologies Corporation (Tokyo)
Inventors: Michiaki Kobayashi (Tokyo), Kazuyuki Hirozane (Tokyo), Akio Harada (Tokyo), Nobuhide Nunomura (Tokyo), Yutaka Kouzuma (Tokyo)
Primary Examiner: Janice Hallmark
Assistant Examiner: Harold E Blackwell, II
Application Number: 29/638,440
Classifications
Current U.S. Class:
Casing Or Enclosure Not Elsewhere Specified (D13/184);
Support Or Trim (26) (D26/138)