Seal member for semiconductor production apparatus
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Claims
The ornamental design for seal member for semiconductor production apparatus, as shown and described.
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Type: Grant
Filed: Jan 21, 2019
Date of Patent: Dec 22, 2020
Assignee: Valqua, Ltd. (Tokyo)
Inventors: Kazuaki Tsuji (Tokyo), Takafumi Sakurai (Santa Clara, CA)
Primary Examiner: Richard E Chilcot
Application Number: 35/507,137