Holding pad for substrate transfer
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The dashed lines in the drawings depict portions of the holding pad for substrate transfer that form no part of the claimed design.
The long dash-short dash-short dash lines in the drawings depict the boundaries of the claim and form no part thereof.
Claims
The ornamental design for a holding pad for substrate transfer, as shown and described.
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Type: Grant
Filed: Oct 8, 2018
Date of Patent: Feb 2, 2021
Assignee: TOKYO ELECTRON LIMITED (Tokyo)
Inventors: Toru Tokimatu (Koshi), Akihiro Teramoto (Koshi)
Primary Examiner: Susan Bennett Hattan
Assistant Examiner: Omeed Agilee
Application Number: 29/665,837