Holding pad for substrate transfer

- TOKYO ELECTRON LIMITED
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Description

FIG. 1 is an isometric view of a holding pad for substrate transfer showing our new design item.

FIG. 2 is a top plan view thereof.

FIG. 3 is a bottom plan view thereof.

FIG. 4 is a first side elevational view thereof.

FIG. 5 is a second side elevational view thereof.

FIG. 6 is a third side elevational view thereof.

FIG. 7 is a fourth side elevational view thereof.

FIG. 8 is a cross sectional view thereof taken along cut lines 8-8 of FIG. 2; and,

FIG. 9 is a bottom isometric view thereof.

The dashed lines in the drawings depict portions of the holding pad for substrate transfer that form no part of the claimed design.

The long dash-short dash-short dash lines in the drawings depict the boundaries of the claim and form no part thereof.

Claims

The ornamental design for a holding pad for substrate transfer, as shown and described.

Referenced Cited
U.S. Patent Documents
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D679375 April 2, 2013 Kenyon
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Patent History
Patent number: D909603
Type: Grant
Filed: Oct 8, 2018
Date of Patent: Feb 2, 2021
Assignee: TOKYO ELECTRON LIMITED (Tokyo)
Inventors: Toru Tokimatu (Koshi), Akihiro Teramoto (Koshi)
Primary Examiner: Susan Bennett Hattan
Assistant Examiner: Omeed Agilee
Application Number: 29/665,837
Classifications