Coating machine
Latest Beneq Oy Patents:
- Loading device, arrangement and method for loading a reaction chamber
- Vacuum chamber and arrangement for atomic layer deposition
- Atomic layer deposition reactor arrangement and a method for operating an atomic layer deposition reactor arrangement
- Gas feeding cup and a gas manifold assembly
- Precursor source arrangement and atomic layer deposition apparatus
The broken lines shown in
Claims
The ornamental design for a coating machine as shown and described.
Type: Grant
Filed: Jan 17, 2020
Date of Patent: Sep 12, 2023
Assignee: Beneq Oy (Espoo)
Inventors: Heikki Naulapää (Helsinki), Hulda Aminoff (Espoo)
Primary Examiner: Michael C Stout
Assistant Examiner: Fritzgerald L Butac
Application Number: 29/721,033