Patents Issued in August 16, 2001
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Publication number: 20010013888Abstract: An object is to provide an LED printer head in structure capable of reducing influence of a sub emission band by use of a rode lens array and thus prevent light of the sub emission band from reaching a development level, thereby achieving high quality to the contrary. The LED printer head consists of an LED array of LEDs to emit light according to an image signal, which are arrayed at the resolution pitch P of not less than 600 dpi, and a multi-lens array for forming an emission image of the LED array on a photosensitive body. Each of the LEDs of the LED array has a main emission band of an emission spectrum and another sub emission band having a peak level of not less than 0.01 as a photosensitive intensity ratio R to the main emission spectrum, and a difference D between best TCs at peak wavelengths of the main and sub emission bands by the multi-lens array is at least 0.15.Type: ApplicationFiled: November 30, 2000Publication date: August 16, 2001Inventor: Motomu Fukasawa
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Publication number: 20010013889Abstract: A photosensitive body has a photosensitive layer. An optical scanning device has a deflector deflecting a light flux emitted from a light source, and scans the surface of the photosensitive body by the thus-deflected light flux. A dot is formed at a center between adjacent light fluxes as a result of the adjacent light fluxes being overlapped with one another in a sub-scan direction. A ratio of a static beam-spot diameter Ws in the sub-scan direction on the surface of the photosensitive body defined by 1/e2 of the maximum value in the exposure distribution of the beam spot to an interval L between adjacent scan lines satisfies the following formula: 1.2<Ws/L<4.5.Type: ApplicationFiled: January 22, 2001Publication date: August 16, 2001Applicant: RICOH COMPANY, LTD.Inventors: Yoshinori Hayashi, Taira Kouchiwa, Yutaka Ebi
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Publication number: 20010013890Abstract: An attachment apparatus for a handheld computer having a display in accordance with the present invention includes an attachment portion for receiving and securing the handheld computer. A camera assembly mounts to the attachment portion for providing images to the handheld computer, and an interface electrically connects the handheld computing device to the camera assembly for transferring the image data to be displayed on the display of the handheld computer.Type: ApplicationFiled: April 29, 1998Publication date: August 16, 2001Inventor: CHANDRASEKHAR NARAYANASWAMI
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Publication number: 20010013891Abstract: An integrated video conference terminal is disclosed which comprises a monitor for displaying video images from other conferees, lights and a video camera for transmitting the conferees image to a server, speakers for emitting audio, and an optional coin/credit card input for allowing for public operation similar to a pay phone.Type: ApplicationFiled: June 17, 1999Publication date: August 16, 2001Inventor: CHRIS HAMILTON
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Publication number: 20010013892Abstract: A high temperature camera apparatus having an elongated steel camera housing tube and an elongated camera support member, supporting a video camera at the furnace interior end of the camera housing tube. A ceramic heat shield tube telescopically surrounds at least a portion of the camera, and preferably the portion of the camera housing tube which contains the camera. The exterior surface of the camera housing tube is plated and polished to provide a highly reflective surface, and the ceramic heat shield tube is telescopically surrounded by an outer steel tube. The ceramic heat shield is spaced in position around the camera housing tube by a plurality of spacers projecting outwardly from the outer surface of the camera housing tube. A steel end plate is fixed at the furnace interior end of the camera housing tube, and is provided with an image hole aligned with the image axis of the camera, and a plurality of spaced ventilation holes surrounding the image hole.Type: ApplicationFiled: January 10, 2001Publication date: August 16, 2001Applicant: Ultrak, Inc.Inventors: Donald L. Eversole, Howard R. Smith, Mile A. Garrabrant
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Publication number: 20010013893Abstract: Camera systems as known in the art have to determine before operation the type of base station and the type of camera.Type: ApplicationFiled: December 21, 2000Publication date: August 16, 2001Inventor: Rudolf Pieter Koppe
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Publication number: 20010013894Abstract: A system wherein already-existing computing and memory resources in an electronic camera are used to process an image for printing. Rather than duplicating, in printers, computing and memory resources that are already in digital cameras, significant computing and memory resources need exist only in the camera. A digital camera can support many different printers, each with its own set of parameters such as for example print size, pixel size, colorimetry, sensitometry, and artifacts compensation. Printer parameters are uploaded from the printer to the camera to provide a basis for image processing specific to the associated printer; whereby compensation may be done for variations in the printer characteristics which may occur as a result of printer manufacturing variations, and further so that compensation may be done for different media types which may be installed in the printer.Type: ApplicationFiled: March 6, 2001Publication date: August 16, 2001Applicant: Eastman Kodak CompanyInventors: Kenneth A. Parulski, Jeffrey A. Small, Douglas W. Couwenhoven, Jason C. VanBlargan, Raymond E. Wess
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Publication number: 20010013895Abstract: The object of this invention is to provide an apparatus for reconstructing, from a plurality of images that are focused differently, an arbitrarily focused image that is an image wherein the degree of blur at any depth is suppressed or intensified. A first filter for converting a first image that is in focus in a first portion based on a first blur parameter input from the outside, a second filter for converting a second image that is in focus in a second portion based on a second blur parameter input from the outside, a synthesizer for synthesizing the output of the first filter and the output of the second filter and generating an arbitrarily focused image, and a brightness compensator for performing brightness correction in image block units so that the brightness of the first image and of the second image become about the same, and supplying the images after brightness correction to the first filter and the second filter, are provided.Type: ApplicationFiled: February 1, 2001Publication date: August 16, 2001Applicant: KIYOHARU AIZAWAInventors: Kiyoharu Aizawa, Akira Kubota, Yasunori Tsubaki, Conny Gunadi
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Publication number: 20010013896Abstract: Method and system aspects for digital image stamping are disclosed. A method aspect, and system for providing same, stamps digital images captured with a digital image capture unit. Included are the establishing of parameters for at least one stamp type and the capturing of raw image data. Further included are the processing of the raw image data into at least one image, and the applying of the at least one stamp type to the at least one image.Type: ApplicationFiled: September 17, 1997Publication date: August 16, 2001Inventor: ERIC C. ANDERSON
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Publication number: 20010013897Abstract: An information processing device includes a shooting lens assembly, a photoelectric conversion element, a memory, a display screen, a zoom designation device and an image size changing device (e.g., a controller). The photoelectric conversion element receives light from an object that is collected by the shooting lens assembly and converts the collected light into electrical signals representative of the object. The memory stores image data that is representative of objects. The display screen displays images of the object corresponding to the electrical signal converted by the photoelectric conversion element or images corresponding to the image data stored in the memory. The image size changing device magnifies or reduces an image size of the image displayed on the display screen regardless of whether the image is being supplied from the photoelectric conversion element or the memory.Type: ApplicationFiled: December 8, 2000Publication date: August 16, 2001Applicant: Nikon CorporationInventors: Yousuke Kowno, Akira Ohmura
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Publication number: 20010013898Abstract: A pixel structure of an image sensor, the pixel structure for providing sensor signals in response to incident light is provided. The pixel structure includes light selective elements, the light selective elements having predetermined thicknesses to absorb only light having wavelengths corresponding to the visible region of the light spectrum.Type: ApplicationFiled: June 24, 1998Publication date: August 16, 2001Inventors: EDWARD J. BAWOLEK, KEVIN M. CONNOLLY
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Publication number: 20010013899Abstract: A solid imaging device includes at least one pixel, the pixel including a photoelectric conversion section and a charge detection node which are coupled to or decoupled from each other via a transfer gate transistor, the charge detection node being coupled to or decoupled from a drain of a reset gate transistor via the reset gate transistor. After the reset gate resets a potential of the charge detection node, the transfer gate transistor is turned ON so as to allow a signal charge to be transferred from the photoelectric conversion section to the charge detection node, and thereafter a potential of the drain is changed from a HIGH state to a LOW state to a HIGH state while both of the transfer gate transistor and the reset gate transistor are maintained in an ON state.Type: ApplicationFiled: January 19, 2001Publication date: August 16, 2001Inventor: Takashi Watanabe
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Publication number: 20010013900Abstract: A number of photoelectric conversion elements are disposed in a plurality of rows and columns in a pixel shift layout, and an analog/digital conversion unit is provided per two photoelectric conversion element columns to form a MOS type solid-state image pickup device. It is possible to suppress an increase in the manufacture cost of MOS type solid state image pickup devices with built-in A/D conversion units and improve the integration degree of photoelectric conversion elements.Type: ApplicationFiled: February 9, 2001Publication date: August 16, 2001Applicant: Fuji Photo Film Co., Ltd.Inventors: Nobuo Suzuki, Kazuyuki Masukane
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Publication number: 20010013901Abstract: An MOS-type solid-state imaging apparatus includes an imaging region formed by two-dimensionally arranging unit cells serving as photoelectric conversion portions on a semiconductor substrate, a plurality of vertical address lines arranged in a row direction of the imaging region to select a row of unit cells to be addressed, a plurality of vertical signal lines arranged in a column direction of the imaging region to read out signals from the unit cells in each column, a plurality of load transistors each connected to one end of each of the vertical signal lines, and a plurality of horizontal selection transistors each connected to the other end of each of the vertical signal lines.Type: ApplicationFiled: March 19, 2001Publication date: August 16, 2001Inventors: Yoshiyuki Matsunaga, Shinji Ohsawa, Nobuo Nakamura, Hirofumi Yamashita, Hiroki Miura
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Publication number: 20010013902Abstract: The zoom speed of a zoom function is detected by a zoom lever detection circuit. A sensed image is displayed on a monitor, and a desired partial region in that sensed image is designated using a region designation lever. A compression circuit compresses the designated region and a non-designated region using different characteristics. A region detector controls the designated region on the basis of the detected zoom speed.Type: ApplicationFiled: February 13, 2001Publication date: August 16, 2001Inventor: Takeshi Kawabe
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Publication number: 20010013903Abstract: In an electronic camera, an exposure amount S ({fraction (1/2000)} sec.), an exposure amount M ({fraction (1/250)} sec.) and an exposure amount L ({fraction (1/30)} sec.) are set in vertically synchronous signal timing directly before the fourth frame, the fifth frame, and the sixth frame. In the frame directly following that setting, exposure is performed corresponding to that exposure amount. The signal levels obtained from the three exposure amounts are compared in the eighth frame, and an added value &agr; is added to the shutter time in which the signal level obtained is closest to the optimum signal level. This time is set in vertically synchronous signal timing directly before the ninth frame. In the ninth frame, exposure is performed corresponding to this setting. In the tenth frame, the signal is readout according to this exposure. In the eleventh frame, the signal calculation is performed. The processing is repeated in the same way thereafter and the optimum exposure amount is determined.Type: ApplicationFiled: April 25, 2001Publication date: August 16, 2001Applicant: Nikon CorporationInventors: Masahiro Suzuki, Akihiko Hamamura
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Publication number: 20010013904Abstract: A multi-display device displays a single image constituted by a plurality of projection images projected by a plurality of image projection units on a screen in which the device has a shifting unit for shifting a picture signal which is supplied to the image projecting unit toward a time-base direction in accordance with a width of an overlapped portion of images mutually adjacent in a vertical scanning direction.Type: ApplicationFiled: February 8, 2001Publication date: August 16, 2001Applicant: Olympus Optical Co., Ltd.Inventors: Akihiro Kubota, Yukihiro Sugimoto
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Publication number: 20010013905Abstract: A control device (32; 35) for controlling at least a first receiving device (1) so as to achieve that television channel information (FKI) stored in correlation with program position information (PPI) is stored in a second receiving device (2; 33), includes an encoding stage (29; 38) for encoding program position information (PPI) applied to the encoding stage (29; 38) and for supplying a corresponding control signal (SS1, SS2), and a transmitting stage (30) for transmitting the control signal (SS1, SS2) to the first receiving device (1) so as to achieve that a television signal (FS1) is supplied from the first receiving device (1) to the second receiving device (2; 33), the television signal (FS1) being identified by television channel information (FKI) stored in the first receiving device (1) in correlation with this program position information (PPI), expiry control means (31; 41) being provided, which are adapted to supply further program position information (PPI) in an ascending or descending order afteType: ApplicationFiled: December 20, 2000Publication date: August 16, 2001Inventor: Berndt Burghard
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Publication number: 20010013906Abstract: The invention relates to a method of operating an appliance. The method according to the invention comprises the display of a state diagram on a display screen. The state diagram comprises state symbols representing operative states of the appliance. A state cursor is provided, which indicates a position relative to the state diagram, which state cursor can be relocated in response to user supplied cursor control commands. The appliance can be operated by navigating the state cursor to a state symbol representing a desired state of the appliance, which causes the appliance to adopt the desired state in response to said navigation.Type: ApplicationFiled: December 21, 2000Publication date: August 16, 2001Inventor: Gudmund Orn Thorgeirsson
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Publication number: 20010013907Abstract: An anti-microbial touch panel includes a substrate; an active portion on one surface of the substrate; and a homeotropic organosilane layer deposited on the active portion for reducing survivability of microorganisms contacting the touch panel.Type: ApplicationFiled: January 19, 1999Publication date: August 16, 2001Inventors: CHIA-YEN LI, FRANK J. BOTTARI, BERNARD O. GEAGHAN
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Publication number: 20010013908Abstract: This invention is related to an active matrix liquid crystal display (AMLCD) or an X-ray imaging device having a high aperture ratio, and method of making same. The imager or display has an increased aperture ratio because electrodes are formed over dual insulating layers so as to overlap portions of the array address lines and/or TFTs. Both the manufacturability and capacitive crosstalk of the device are improved due to the use of a photo-imageable organic insulating layer between the pixel electrodes and the address lines. An intermediate inorganic insulating layer is provided between the photo-imageable organic insulating layer and the overlapped TFTs in order to prevent the organic insulating layer from directly contacting semiconductor material in the TFTs thereby reducing potential voltage swings.Type: ApplicationFiled: October 20, 1997Publication date: August 16, 2001Inventors: TIEER GU, WILLEM DEN BOER
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Publication number: 20010013909Abstract: A structure is provided which avoids overlap of a pixel electrode and an intersecting portion of a gate line and a data line. For example, the pixel electrode is patterned such that its corner portion is intentionally cut out to avoid the intersecting portion. With this structure, the capacitance of a storage capacitor that is formed by an overlapping portion of the pixel electrode and a black matrix can be increased while short-circuiting in a third interlayer insulating film that is interposed between the pixel electrode and the black matrix is prevented.Type: ApplicationFiled: April 23, 2001Publication date: August 16, 2001Applicant: Semiconductor Energy Laboratory Co., Ltd., Japanese corporationInventors: Hongyong Zhang, Takeshi Fukunaga
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Publication number: 20010013910Abstract: A TFT array substrate for use in LCD device includes at least one repair line to repair the line defects. The repair line(s) is formed when forming the pixel electrode so that additional process steps are not required. Accordingly, the productivity can increase. Moreover, either the short-circuit or the open-circuit can be repaired due to the the repair line(s).Type: ApplicationFiled: December 15, 2000Publication date: August 16, 2001Inventors: Byung-Chul Ahn, Jae-Gu Lee, Yu-Ho Jung
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Publication number: 20010013911Abstract: The present invention discloses a back light device for used in a liquid crstal display device, including: at least one lamp; a light guide plate for guiding light emitting from the lamp; a diffusing sheet for diffusing light emitting from the light guide plate; at least one prism sheet located on the diffusing sheet, concentrating light; a protecting sheet located on the prism sheet; a reflector located under the light guide plate, reflecting light directing downward the light guide plate. At least one of an edge portion of the diffusing sheet adjacent to the lamp, an edge portion of the protecting sheet adjacent to the lamp, and the reflector includes a printing portion made of colorless ink containing a light scattering agent.Type: ApplicationFiled: December 21, 2000Publication date: August 16, 2001Inventor: Sung-Kon Kim
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Publication number: 20010013912Abstract: A novel liquid crystal display device and a manufacturing process thereof are provided, the display device being provided with a light reflection film by which incident light is reflected more efficiently than in a conventional case. By providing a texture body formed of a material having a low refractive index on reflection electrodes and by forming thereon a light reflection film formed of a material having a high refractive index, a high degree of scattering and a high refractivity can be materialized.Type: ApplicationFiled: June 10, 1999Publication date: August 16, 2001Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.Inventors: SHUNPEI YAMAZAKI, YOSHIHARU HIRAKATA
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Publication number: 20010013913Abstract: In a reflective liquid crystal display device comprising on a substrate (12) an array of reflective pixel electrodes (45) which are each connected to the output of a respective switching device (18), e.g. a TFT, carried on the substrate and which are provided on an insulating layer (40) that extends over the switching device, each pixel electrode (45) is connected to the output (31) of its associated switching device through a plurality of tapered contact openings (47) in the insulating layer (40) which form depressions (50) in the pixel electrode surface for enhancing the pixel's light reflection characteristics. The number, shape, size and relative disposition of such openings can be varied to tailor these characteristics.Type: ApplicationFiled: September 27, 1999Publication date: August 16, 2001Applicant: U.S. PHILIPS CORPORATIONInventor: NIGEL D. YOUNG
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Publication number: 20010013914Abstract: In a method of manufacturing a color filter for an in-plane switching mode liquid crystal display a black matrix for light-shielding and color filter layers of red, green and blue are formed on a glass substrate and an overcoat layer is coated thereon for minimizing a stepped difference of an overlapped part between the black matrix and the color filter layers, the overcoat layer being formed of a non-exposing type material.Type: ApplicationFiled: December 14, 2000Publication date: August 16, 2001Inventor: Jin Seok Lee
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Publication number: 20010013915Abstract: An IPS-LCD panel includes first and second substrates, and a liquid crystal interposed therebetween. The first substrate includes common and pixel electrodes that are formed of a transparent conductive material. Because the common and pixel electrodes are transparent, aperture ratios of the inventive IPS-LCD panel are increased.Type: ApplicationFiled: December 18, 2000Publication date: August 16, 2001Inventor: In-Duk Song
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Publication number: 20010013916Abstract: An array substrate of a liquid crystal display panel includes a substrate; a thin film transistor on the substrate; a pixel electrode having a plurality of first tips, the first tips being formed at at least one edge of the pixel electrode; and a common electrode having a plurality of second tips, the second tips being formed at at least one edge of the pixel electrode and the common electrode being parallel with the pixel electrodes.Type: ApplicationFiled: December 11, 2000Publication date: August 16, 2001Inventors: Won-Gyun Youn, In-Jae Chung
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Publication number: 20010013917Abstract: A display device includes a liquid crystal capable of displaying a central region, a first peripheral region at the periphery of the central region, and a second peripheral region at the periphery of the central region and differing from the first peripheral region. A first electrode is connected to a region including the central region and first peripheral region of the liquid crystal. A second electrode is connected to a region including the central region and second peripheral region of the liquid crystal. The display regions of the liquid crystal are controlled by supplying driving signals to the first electrode and second electrode.Type: ApplicationFiled: March 16, 1999Publication date: August 16, 2001Applicant: OLYMPUS OPTICAL CO., LTD.Inventor: TOSHIAKI ISHIMARU
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Publication number: 20010013918Abstract: A liquid crystal display device, and a fabricating method thereof, with improved bonding of an upper plate to a lower plate. The lower plate includes an organic protective film over an inorganic gate insulating layer that is on a substrate. Channels through the organic protective film expose either metal patterns or the gate insulating layer. A seal coated with a sealant is then placed over the organic protective film and channels. The sealant passes through the channels to the metal patterns or to the gate insulating layer. Bonding of the seal to the lower plate is improved by the sealant that contacts the metal patterns and/or the gate insulating layer. During LCD fabrication, the metal patterns act as etch stops when etching the channels. Alternatively, an etch stop semiconductor layer is placed on the gate insulating film. The etch stops prevent the etching process from exposing the lower substrate.Type: ApplicationFiled: December 15, 2000Publication date: August 16, 2001Inventors: Dong Yeung Kwak, Kwang Seop Park
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Publication number: 20010013919Abstract: In a liquid crystal display panel, a gap between an array substrate 2a and an opposing substrate 3 is made constant by using spacers 23 mixed in a seal agent 22 provided around a display area A. A bottom-up pattern 17 formed in the same layer as that of a light shield 16 is formed in a seal area B and aleveling layer 19 on the seal area B is made thinner in order to minimize an amount of sink of the spacers 23 into the leveling layer 19 thereby make the gap between the substrates uniform.Type: ApplicationFiled: February 12, 2001Publication date: August 16, 2001Inventors: Yuko Sato, Mitsuhiro Sugimoto
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Publication number: 20010013920Abstract: A liquid crystal display device which has a liquid crystal composition between a first substrate and a flexible second substrate. The liquid crystal composition is filled between the substrates by being dispensed on the first substrate and spread uniformly while the second substrate is being pressed against the first substrate by a roller, and the liquid crystal composition is sealed by sealing resin provided on the sides of the substrates. The gap between the substrates is maintained by spherical spacers and/or a resin structure.Type: ApplicationFiled: April 11, 2001Publication date: August 16, 2001Applicant: MINOLTA CO., LTD.Inventors: Kiyofumi Hashimoto, Masakazu Okada, Kenji Nishiguchi, Tatsuo Taniguchi
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Publication number: 20010013921Abstract: This invention provides a contact lens comprising a front surface, a back surface, and an identifying mark, wherein said identifying mark comprises one or more holes depressed into at least one of said surfaces of said lens.Type: ApplicationFiled: March 20, 2001Publication date: August 16, 2001Inventors: Jongliang Wu, Carl G. Crowe, Khaled A. Chehab, Timothy R. Poling, Jon Scott Walker, Victor Lust, Richard J. Nason
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Publication number: 20010013922Abstract: An ophthalmic apparatus used in refractive surgery for changing a radius of curvature of a cornea, the apparatus comprising a first input device for inputting data about a pre-operative corneal shape of a patient's eye, a second input device for inputting data about an intended post-operative corneal shape of the eye, a third input device for inputting data about a pre-operative MTF of an ocular imaging system of the eye, and an arithmetic device for obtaining an intended post-operative MTF of the ocular imaging system of the eye based on each inputted data.Type: ApplicationFiled: February 9, 2001Publication date: August 16, 2001Inventor: Toshifumi Sumiya
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Publication number: 20010013923Abstract: This specification discloses an illuminating apparatus having a condensing optical system for converting light from a light source into convergent light, a first convex lens array for receiving the convergent light, a collimating optical system for making a plurality of light beams from the first convex lens array parallel to one another, and a polarization converting element array for individually converting the plurality of light beams from the collimating optical system into polarized lights.Type: ApplicationFiled: July 14, 1999Publication date: August 16, 2001Inventor: ATSUSHI OKUYAMA
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Publication number: 20010013924Abstract: A projection display apparatus employing organic EL elements is presented that is light in weight, is small in size, and can be practically implemented. In particular, the apparatus suppresses light-emission performance degradation caused by generated heat, thereby extending useful life, stabilizing brightness, and securing continual maximum brightness. The apparatus comprises; liquid crystal panels 12R, 12G, and 12B; light emitting units 13R, 13G, and 13B, positioned at the back of the liquid crystal panels and provided with organic EL elements as light emitting layers; and cooling bodies 14R, 14G, and 14B, positioned at the back of the light emitting units, for dispersing the heat generated by the light emitting layers. The cooling bodies 14R, 14G, and 14B may, for example, be electronic cooling elements that employ the Peltier effect to absorb and radiate the generated heat. Alternatively, the cooling bodies may be configured as heat-dispersing fins that guide and disperse generated heat.Type: ApplicationFiled: July 20, 1998Publication date: August 16, 2001Inventors: OSAMU YOKOYAMA, SATORU MIYASHITA, HIROSHI KAMAKURA, TATSUYA SHIMODA
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Publication number: 20010013925Abstract: In a lithographic projection apparatus a first part is shielded from a second part by a heat shield. The first part is required to have a temperature of a predetermined value and the second part has a characteristic that may influence the temperature of the first part. The characteristic may be a temperature deviating from the predetermined value, or a supply of radiation that may deviate the temperature of the first part from the predetermined value when incident on the first part. Heat shield temperature controlling means are provided to control a temperature of the heat shield to the predetermined value.Type: ApplicationFiled: February 7, 2001Publication date: August 16, 2001Inventors: Erik R. Loopstra, Yim Bun P. Kwan, Marcel J.E.H. Muitjens, Sonja T. De Vrieze - Voom
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Publication number: 20010013926Abstract: An image forming apparatus is provided to smoothly form images corresponding to received image data even if the memory becomes full when collated printing is executed. If the memory never becomes full during collated printing, images for all of the pages are expanded to intermediate data, stored in a page memory, and complete collated printing is enabled. In the meantime, if the memory becomes full while the print data of part of a page is expanded to intermediate data and stored, the controller, controls so that the page memory can be written after collated printing is executed up to a page immediately before the partial page and the residual pages are printed in the form of collated printing. Therefore, even if the memory becomes full, printing can be executed in a form as close to collated printing as possible.Type: ApplicationFiled: November 30, 1998Publication date: August 16, 2001Inventor: HIROYUKI FUNAHASHI
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Publication number: 20010013927Abstract: A stage apparatus includes a base having a reference plane, a stage mounted on the base, a plurality of static-pressure bearings forming a gap between the reference plane and the stage, a plurality of preloading mechanisms producing a preload between the stage and the reference plane, a guideless motor for driving the stage and a controller for controlling driving of the stage in (i) at least one of a direction at perpendicular to the reference plane and in a tilting direction by controlling at least one of the static-pressure bearings and the preloading mechanism, and (ii) in a direction within the reference plane by the guideless motor. Positioning of the stage in a Z-direction and in tilting directions can be carried out by electromagnets and air pads. Positioning in directions (X, Y, &thgr;) within a plane parallel to the reference plane of the base can be accomplished by guideless motors.Type: ApplicationFiled: December 15, 1998Publication date: August 16, 2001Inventors: HIROSHI ITOH, NOBUSHIGE KORENAGA
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Publication number: 20010013928Abstract: In an automatic exposure apparatus for printing plates, a photopolymer plate is taken out of an accommodating cassette in which stacked photopolymer plates are accommodated, and an image is recorded onto the photopolymer plate. A shutter which opens and closes an opening of the accommodating cassette is configured as a thin plate, and thus, the accommodating cassette is thin and light.Type: ApplicationFiled: February 13, 2001Publication date: August 16, 2001Inventors: Takashi Koizumi, Yoshinori Kawamura, Yoshihiro Koyanagi, Kazuhisa Okamoto
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Publication number: 20010013929Abstract: The invention is directed to a method for optoelectronic distance measurement and a measurement device based on this method, in which two light emitters, particularly laser emitters and two photodiode receivers are used for calibration. Part of the modulated output of the main emitter reaches the measurement object and then arrives at the main photoreceiver in the form of scattered light and another part of the output of the main emitter travels directly to a reference photoreceiver, while a part of the modulated output of the reference light emitter is guided directly to the main photoreceiver and another part is guided directly to the reference photoreceiver.Type: ApplicationFiled: January 23, 2001Publication date: August 16, 2001Inventor: Gogolla Torsten
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Publication number: 20010013930Abstract: A method and apparatus for detection of a particular material, such as photo-resist material, on a sample surface. A narrow beam of light is projected onto the sample surface and the fluoresced and/or reflected light intensity at a particular wavelength band is measured by a light detector. The light intensity is converted to a numerical value and transmitted electronically to a logic circuit which determines the proper disposition of the sample. The logic circuit controls a sample-handling robotic device which sequentially transfers samples to and from a stage for testing and subsequent disposition. The method is particularly useful for detecting photo-resist material on the surface of a semiconductor wafer.Type: ApplicationFiled: April 25, 2001Publication date: August 16, 2001Inventors: Mark Eyolfson, Elton J. Hochhalter, Joe Lee Phillips, David R. Johnson, Peter S. Frank
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Publication number: 20010013931Abstract: In a double beam spectrophotometer, a sample beam is irradiated to a large-sized sample in a substantially vertical direction, and the beam upwardly transmitted through the large-sized sample is reflected by a reflecting mirror and sent to an integrating sphere including a detector. A reference beam irradiated parallel to the sample beam is deflected by reflecting mirrors such that the reference beam goes around the large-sized sample, and guided to the integrating sphere. Thus, a holder is not required to correspond to a size or shape of the sample, and measurement position can be freely changed by moving the sample. Also, in case of utilizing a conventional standard sample chamber, movable reflecting mirrors are inserted in the optical paths to transfer the beams to the standard sample chamber.Type: ApplicationFiled: January 3, 2001Publication date: August 16, 2001Applicant: SHIMADZU CORPORATIONInventor: Tatsumi Sato
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Publication number: 20010013932Abstract: A wavelength-variable light source apparatus having a wavelength measurement function for measuring the wavelength characteristic of an object to be measured. In the apparatus, a CPU outputs control signals for controlling components of a light power meter section via a bus for controlling a light detection operation. When the CPU obtains light detection level data detected by the light power meter section from light passing through an object to be measured, the CPU stores the light detection level data for each wavelength in the object to be measured in an RAM and causes a display control section to display the light detection level on a display section.Type: ApplicationFiled: January 29, 1999Publication date: August 16, 2001Applicant: ANDO ELECTRIC CO., LTD.Inventor: SEIJI FUNAKAWA
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Publication number: 20010013933Abstract: A first double pass etalon based spectrometer. In a preferred embodiment a second etalon matched to the first double pass etalon is used to produce extremely precise fringe data. Spectral components of a diffused beam are angularly separated as they are transmitted through an etalon. A retroreflector reflects the transmitted components back through the etalon. Twice transmitted spectral components are directed through a second etalon and focused onto a light detector which in a preferred embodiment is a photo diode array. The spectrometer is very compact producing the extremely precise fringe data permitting bandwidth measurements with precision needed for microlithography for both &Dgr;&lgr;FWHM and &Dgr;&lgr;95%.Type: ApplicationFiled: December 14, 2000Publication date: August 16, 2001Inventors: Scott T. Smith, Alexander I. Ershov, Jesse D. Buck
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Publication number: 20010013934Abstract: An apparatus for interferometric sensing comprises a first broadband switched optical source, a first matched interferometer, a plurality of first sensing interferometers, and a detector. The first matched interferometer contains a first phase modulator. The optical path length difference in each of the first sensing interferometers is approximately equal to the optical path length difference in the first matched interferometer Each of the first sensing interferometers returns an optical interference signal to the detector at a substantially different wavelength The first broadband switched optical source is switched so as to emit optical radiation at wavelengths corresponding to each of the first sensing interferometers at different times.Type: ApplicationFiled: November 17, 1998Publication date: August 16, 2001Inventors: MALCOLM PAUL VARNHAM, ERHARD LOTHAR EDGAR KLUTH
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Publication number: 20010013935Abstract: A surface inspection device irradiates a laser beam onto the surface of a sample, scans the surface two-dimensionally, and detects the intensities of the s-polarized light component and p-polarized light component of the reflected laser beam. RR (reflectance ratio), which is the ratio of the reflective intensities of the s- and p-polarized light components, is calculated for each position of the surface of the sample, and the two-dimensional distribution of RR on the surface of the sample is detected. The distribution width of this measured RR is compared with the natural width for a clean sample, and the surface of the sample is determined to be contaminated when, as the result of comparison, the RR distribution width diverges from the natural width. The absence or presence of contamination on the microscopically rough surface of a sample can therefore be quickly and easily determined based on the RR of the reflective intensities of the s- and p-polarized light components.Type: ApplicationFiled: March 28, 2001Publication date: August 16, 2001Inventors: Masao Watanabe, Akiko Okubo
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Publication number: 20010013936Abstract: A linear position array detector system is provided which imparts light energy to a surface of a specimen, such as a semiconductor wafer, receives light energy from the specimen surface and monitors deviation of the retro or reflected beam from that expected to map the contours on the specimen surface. The retro beam will, with ideal optical alignment, return along the same path as the incident beam if and only if the surface is normal to the beam. The system has a measurement device or sensor within the path of the retro or reflected beam to measure deviation of the retro beam from expected. The sensor is preferably a multiple element array of detector-diodes aligned in a linear fashion. A unique weighting and summing scheme is provided which increases the mechanical dynamic range while preserving sensitivity.Type: ApplicationFiled: November 18, 1998Publication date: August 16, 2001Applicant: KLA TENCOR CORPORATIONInventors: HENRIK K. NIELSEN, LIONEL KUHLMANN, MARK NOKES
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Publication number: 20010013937Abstract: An apparatus (1) into which a first stack (2) of record carriers to be printed and a second stack (5) of record carriers to be scanned can be inserted and which has holder means (25) for holding the first stack, which has load-exerting means (50) for urging the first stack (2) towards the withdrawal means (50), actuating means (63) for moving the load-exerting means (56) and guide means for guiding a record carrier (11) to be scanned, the actuating means (63) for moving the load-exerting means (56) are, in addition, configured as guide means for guiding a record carrier (11) to be scanned.Type: ApplicationFiled: January 16, 2001Publication date: August 16, 2001Inventor: Christoph Potakowskyj