Abstract: A filter unit for a motor vehicle which combines an intake air filter for an internal combustion engine and an interior ventilation air filter for a passenger compartment in a single unit. Filter housings for the respective filters may be joined to each other by a releasable connection, such as a combination of attachment hooks and screw fasteners, or they may be formed integrally with each other in one piece.

Abstract: A filter platform is provided for allowing attachment of an air filter unit thereto. The filter platform includes: a substantially hollow outer housing, the housing forming a chamber within the platform, the housing having a first opening at one end for engaging the platform with a respirator so as to allow air to flow between the chamber and the respirator, and a second opening for engaging the platform with the air filter unit so as to allow filtered air to flow into the chamber. A respirator connection member is located in association with the first opening, the respirator connection member being structured to sealingly engage the first opening to an input of the respirator, and a filter connection member is located in association with the second opening, the filter connection member being structured to sealingly engage the second opening with the filter unit.

Abstract: A mower includes a traction frame that supports at least one cutting unit and a grass catcher associated with each cutting unit. The cutting unit and grass catcher are both operatively coupled to the traction frame such that they both jointly are able to steer or yaw together during turns of the traction frame. This permits the gap between the cutting unit and a grass basket which is part of the grass catcher to remain constant whether the traction frame is travelling straight or is turning. This ensures that the grass clippings will be properly retained in the grass basket without dribbling out of the grass basket. In addition, a system is provided for keeping the grass catcher level as it is lifted up out of engagement with the ground into a raised, transport position, also to better retain the grass clippings within the grass basket.

Abstract: Broadly, one aspect of the present invention is an articulated combine having increased on-board grain storage capacity (e.g., 1,200 bushels) and which is composed of a forward unit having an operator's cab, an engine, a grain harvesting assembly, a grain transfer assembly, and being devoid of an on-board grain bin; and a rearward unit jointedly attached to the forward section and having, steerable and powered wheels, an on-board grain bin for receiving grain from the forward section grain transfer assembly, and a grain off-loading assembly. The grain transfer assembly, joint, and grain off-loading assembly and controls, form other aspects of the present invention.

Abstract: Broadly, one aspect of the present invention is an articulated combine having increased on-board grain storage capacity (e.g., 1,200 bushels) and which is composed of a forward unit having an operator's cab, an engine, a grain harvesting assembly, a grain transfer assembly, and being devoid of an on-board grain bin; and a rearward unit jointedly attached to the forward section and having, steerable and powered wheels, an on-board grain bin for receiving grain from the forward section grain transfer assembly, and a grain off-loading assembly. The grain transfer assembly, joint, and grain off-loading assembly and controls, form other aspects of the present invention.

Abstract: An implement draft tongue is moved through a range of working positions to a transport position extending transverse to the working direction of the implement by an extensible and retractable hydraulic actuator. A control for the hydraulic cylinder includes an interrupter valve that is actuated, in response to a preselected extension of the hydraulic cylinder so as to prevent the cylinder from extending beyond a position for moving the draft tongue to one extreme of its operating range, when an actuating device for the interrupt valve is enabled. When the actuating device for the interrupt valve is disabled, the hydraulic actuator may be extended fully to place the draft tongue in its transport position.

Abstract: An agricultural harvesting apparatus comprising a base frame, a pivotally mounted wing frame and a pivotally mounted outer wing frame. The outer wing frame is folded and unfolded into its operating and transport positions by an outer wing pivot drive. An outer wing pivot sensing hydraulic cylinder drives inner and outer pushing rods pivoting hydraulic cylinders and a pivot locking hydraulic cylinder so that the associated elements are placed in their respective transport or operating positions. After the outer wing frame is folded together with the associated elements into their transport positions a wing pivot hydraulic cylinder folds the wing frame.

Abstract: A cutter head assembly comprising a first longitudinal member; a second hollow longitudinal member provided with at least one aperture, being coaxial with the first longitudinal member and radially spaced apart therefrom; cup-shaped elements fixedly mounted to a corresponding aperture and to the first longitudinal member; blade holders to removably secure a rotatable blade to the cutter head. These blade holders are designed so as to improve mulching action and resistance to impacts of the cutter head, for use in land clearing and in any operation involving mechanical vegetation cutting.

Abstract: A baler pick-up includes a pair of support wheels, each of which is connected to the pick-up by a mounting arrangement permitting the wheel to be selectively moved from a working position outboard of the pick-up to an inboard, elevated transport or non-working position. Each mounting arrangement comprises a holder fixed to the pick-up and including a transverse pipe and a projection formed from a plate and spaced outwardly from and end of the pipe. The arrangement further comprises a wheel mounting bracket including a cylindrical tube pivotally and slidably received in the pipe and in a hole provided in the projection, the tube carrying a ring captured between the end of the pipe and the projection and containing a throughbore aligned with one of a pair of crossbores provided in the tube and receiving a linchpin bolt for retaining the wheel mounting bracket so as to dispose the wheel in a selected one of its positions.

Abstract: Drying of wet ground surfaces provided with stalks includes removing droplets from stalks with comb-shaped projections, and guiding the removed droplets along the projections toward lower edges of the projections and from there onto the ground surface.

Abstract: A spinning rotor for open-end spinning machines and a method for balancing the spinning rotor in the course of a single clamping process by removing material from a cylindrical-shaped section of the collar (20) of the rotor cup (19) to form an identification mark (21) thereon sufficiently to offset an imbalance and equalize the mass of the rotor. The mark (21), which preferably consists of a combination of a graphic symbol (22) and lettering (23), is used for identification and information.

Abstract: In a gas turbine power plant system having an air chiller for lowering the temperature of inlet air, a compressor for compressing the inlet air, a combustor for combusting the compressed air and fuel and a power turbine for providing useful power, a method and apparatus for chilling water delivered to the air chiller is provided, having a thermal water storage tank for storing chilling water, the tank having a bottom portion and a top portion, and a bottom inlet and a bottom outlet and a top inlet and a top outlet. A charge cycle is provided wherein the tank is filled with chilled water, and a discharge cycle is provided wherein the chilled water is fed to the air chiller, thereby chilling the inlet air to the power turbine.

Abstract: This Jet engine comprises of a complete low bypass turbofan unit 1 including secondary fan unit 2 and engine core, some five to eight feet ahead of which sits a larger diameter main fan unit 3 driven from the secondary fan via drive shaft 4. Between the main and secondary fans sits a reversed variable area nozzle 5 connected to the forward end of the secondary fan by a short inlet tube 6 (fitted with intercooler 12). At the back of the core sits another variable area nozzle 7 facing rearwards. This arrangement (front nozzle, inlet tube, secondary fan, core, rear nozzle) is enclosed by a variable diameter cylinder 8, providing a variable area bypass duct 9 between cylinder and engine outer casing 10 that extends backwards from the outer diameter of the main fan. A third variable area nozzle 11 is positioned aft of the outer casing facing rearwards.

Abstract: An exhaust gas system includes a collector for joining exhaust gas flows from two or more cylinders of a combustion engine. The collector has an outlet cross-section behind which a tubular jacket is disposed. A honeycomb body is disposed in the tubular jacket. A space through which a flow is to take place is defined between the outlet cross-section and the honeycomb body. At least one guide surface is disposed in the space for diverting at least a part of the exhaust gas flows. A method is provided for applying exhaust gas flows to a honeycomb body. The flows arrive at the honeycomb body at least partly from different directions. The exhaust gas flows are diverted by at least a first guide surface, before they impinge upon the honeycomb body, in such a way that they flow in a direction at least partly opposite to that of the exhaust gas flows, and their incidence upon the honeycomb body is thus delayed.

Abstract: An exhaust gas alternator system for a diesel powered motor vehicle including a Stirling engine operating through a heat input of waste heat from a diesel engine exhaust to drive an electrical alternator. The cooler of the Stirling engine receives liquid engine coolant. An auxiliary diesel fuel burner may be operated to provide heat input for said Stirling engine when the diesel engine is not operated. The system may be used in an exhaust circuit having a catalytic converter.

Abstract: A thermal engine including a positive displacement compressor (A) having at least one rotatable vane partly defining at least one of the variable chambers within the compressor (A) having at least one rotatable vane partly defining at least one of the variable volume chambers within the compressor, a thermal chamber (D) in fluid communication with the outlet of the compressor (A), the thermal chamber (D) having heat transfer means for transferring heat from a heat source to the working fluid; and a positive displacement motor (B) having at least one rotatable vane partly defining at least one of the variable volume chambers within the motor and drive means for driving the compressor and an external load wherein, in use the flow of working fluid through the thermal chamber is substantially continuous.

Abstract: Steam generator unit having a fluidized-bed combustion system, which has a fluidized-bed combustion chamber, at least one second gas pass, and at least one separator positioned between the fluidized-bed combustion chamber and second gas pass. The steam generator unit also having at least one superheater and two reheaters connected in series on the steam side. The first reheater is constructed with a regulated bypass mechanism on the steam side, so that a partial flow of the steam fed to the second reheater can be directed past the first reheater, such that the first reheater is positioned in the second gas pass and the second reheater is positioned in the fluidized-bed combustion chamber.

Abstract: This invention relates to a gas-turbine combustion chamber with at least one pilot burner (2) and at least one main burner (3) which are axially and radially offset relative to each other, said combustion chamber (1) comprising an outer flame-tube wall (4) and an inner flame-tube wall (5) each provided with ports for the introduction of air, and said main burner (3) being located at the outer flame-tube wall (4) and said pilot burner (2) being located at the inner flame-tube wall (5), characterized in that the outer flame-tube wall (4) is provided with a first arrangement (6) of ports and in that the inner flame-tube wall (5) is provided with a second arrangement (7) of ports.

Abstract: Disclosed is a system for thermally conditioning and pumping a fluid having use as a ventilation system for vehicle seats and other applications. The system includes a thermoelectric heat exchanger having a thermoelectric element configured to pump heat from one body to another body. A pair of heat exchanger elements comprising rotor units are coupled to the thermoelectric element for both transferring heat to and from the thermoelectric element and generating a fluid flow across the thermoelectric element. The conditioned fluid may be placed in thermal communication with a variety of objects, one of which is a vehicle seat to provide localized heating and cooling of a person sitting on the seat.

Abstract: A temperature controller is in a position at a height of 130 cm or more from a base surface settling, of which the refrigerator is settled, on a door of the refrigerator, which position is on an upper side of a handle for opening and closing the door. Further, a minute control depending on a preserving condition of foods, the seasons, a quantity of the foods, and so on is made possible.

Abstract: A selectively controllable valve is arranged in a refrigeration circuit which interconnects the evaporator and the condenser and is controlled so that a pressure differential is built up across the valve. The valve is selectively opened to allow “batches” of working fluid to pass therethrough. In some embodiments, the working fluid which is allowed to pass through the valve, is heated in a chamber to increase the amount of pressure on the downstream side of the valve. This produces expanded pressurized working fluid which increases the pressure in the condenser and forces previously condensed and liquefied working fluid through a flow restricting transfer device into an evaporator. Condensation of the just heated gas in the condenser subsequently reduces the pressure on the downstream side of the valve and establishes conditions suitable for the passage of a further amount of gaseous working fluid while itself becoming liquid to be forced through the flow restricting transfer device.

Abstract: The present invention is generally directed to a method for modifying a vending machine to provide a vending machine for storing product at a temperature no greater than −40 degrees Celsius. The method of the invention includes the steps of replacing an existing refrigeration compressor with a different compressor having a higher compression and replacing an existing refrigerant with a more efficient refrigerant. Then, the length of an existing capillary tube was increased (preferably to approximately 21 inches). Finally, a new thermostat capable of achieving a −40 Celsius set point. In addition, in the preferred embodiment, the pre-existing thermostat was rewired into a safety switch, which is operable to disable the vending machine from dispensing product if the temperature exceeds the set point. A novel business method is also provided; namely a method of manufacturing and distributing ice cream.

Abstract: Heating/defrost constructions of a very loW temperature refrigeration system having a defrost supply circuit and a defrost return bypass circuit optimizing the heating/defrost cycle, preventing overload (excessive pressure) of its refrigeration process and protecting components from damaging temperatures. The defrost cycle operates continuously, when required, and provides a shorter recovery period between heating/defrost and cooling operating modes. The rate of the temperature change during cool down or warm up is controlled in an open loop fashion by controlled refrigerant flow in bypass circuits.

Abstract: An integrated compression based heating/cooling, humidification and mid or high efficiency heat recovery ventilation system is provided. The integrated system is a centralized apparatus that offers a very efficient method for heating/cooling with more winter and summer humidity control plus offering heat recovery ventilation in a structure having a regulated indoor temperature and specific ventilation/energy recovery rate. The heating and cooling section of the apparatus would most commonly be configured as a forced air geothermal or air-to-air heat pump. The heat recovery ventilation section of the apparatus will incorporate a heat recovery chamber complete with a primary passive cross flow heat recovery core. Plus, a secondary refrigeration based high efficiency reversible energy recovery evaporator/condenser coil. The integrated system will also incorporate a humidification system designed to operate during the winter heating season.

Abstract: An air cooling and humidifying device using water from a body of water includes an air to water heat exchanger for transferring heat from air surrounding the exchanger to water contained in the exchanger. A water transmitting hose is communicably connected to the exchanger. The hose includes an intake portion submersible in the body of water for transmitting water from a location beneath the surface of the body of water wherein the water temperature is below the ambient air temperature and introducing the water through the exchanger. The hose also includes an exhaust portion for discharging water from the exchanger into the body of water. The pump is operably connected to the intake portion for moving water through the intake portion, the exchanger and the exhaust portion. An air circulating device directs ambient air through the exchanger such that the ambient air is cooled by water in the exchanger.

Abstract: The present invention relates to a refrigeration circulation apparatus of a playing machine, including a refrigerator and a baffle. The baffle is mounted in the frame of a playing machine. The refrigerator includes an evaporator mounted on one end of the baffle, and extended to the upper side and the lower side of the baffle. The evaporator of the refrigerator is mounted in a first passage. A plurality of fans are mounted under the first passage. When the refrigeration circulation starts operation, the fans located under the first passage start to draw the air under the baffle. The heat is absorbed by the evaporator of the refrigerator, and the air is then blown out through the first passage to be returned to a position under the baffle through a second passage. Thus, the air circulates continuously between the upper side and the lower side of the baffle through the evaporator of the refrigerator, so that the cold air can be used for refrigerating food placed on the upper surface of the baffle.

Abstract: A separated type air conditioner with evaporative condensing apparatus comprises an outdoor unit and at least one indoor unit which the outdoor unit includes an evaporative condensing apparatus, a water chiller type evaporating apparatus and a comparative low pressure compressor for circulating a cooling medium system between the condensing apparatus and the evaporating apparatus within the outdoor unit to avoid long distance medium transmitting for improving the energy saving and environment protecting, and characteristically that the evaporative condensing apparatus comprises an evaporative water intermittent supply system to supply water onto a layer of absorptive material covered on the condensing coils intermittently through an electromagnetic valve automatically controlled by a PC board to assume that the amount of water once supplied to the absorptive material will be approximately fully evaporated within a controlled intermittence to provide a highest effect for absorbing evaporative latent heat form

Abstract: A distillation apparatus comprises a reboiler/condenser (30), cleanable in operation, being duplicated by another reboiler/condenser (40).

Abstract: A film-type vaporizer (2) in a vaporization enclosure (1), for example the upper column of a double air-distillation column, is associated with a measurement and analysis box (3) where a polished surface (4) and a spillway (6) reconstruct the flow of liquid in the vaporizer in order to check for the absence of the deposition of impurities in the liquid that is to be evaporated or, if such a deposition occurs, to quantify and analyse the impurities involved and take appropriate action on the settings of the machine.

Abstract: A method for automatically setting a target production level for at least one air separation unit in a network of air separation units. Each air separation unit has a plurality of field elements and at least one regulatory controller associated with one of the field elements, and has an energy usage level corresponding to a level of production. The method includes receiving a production level requirement for the network of air separation units and generating a production target level for at least one of the air separation units which minimizes and/or optimizes the sum of the ASU energy usage levels. The ASUs then can automatically ramp the plant production to the appropriate production target levels via the use of advanced process control (multivariable process controllers and/or advanced feedforward controllers), advanced regulatory control, and regulatory control means.

Abstract: The amount of residual carbon and hydroxyl groups in a synthetic quartz powder made by a wet process is reduced by baking the synthetic quartz powder in a low pressure atmosphere. Quartz glass crucibles made using the synthetic quartz powder have low bubble contents, and are particularly suited for growing single crystals.

Abstract: A method that provides a new way to embed rare earth fluorides into silicate (or germania-doped silica) glasses by means of solution chemistry. Embedding rare earth fluorides into a silicate (or germania-doped silica) glass comprises the following steps. First, form a porous silicate core preform. Second, submerge the preform into an aqueous solution of rare earth ions. Third, remove the preform from the solution and wash the outside surfaces of the preform. Fourth, submerge the preform into an aqueous solution of a fluorinating agent to precipitate rare earth trifluorides from the solution and deposit in the pores or on the wall of the preform. This is followed by drying.

Abstract: A laser processing method for removing glass by melting, evaporation or ablation from sheet-like glass substrate for forming microscopic concavities and convexities. Diffraction grating and planar microlens array obtained thereby.

Abstract: An integrated laundry center has an integrated cabinet assembly defining a plurality of discrete spaces. Each space can provide a separate module for performing a particular fabric care function. A washing machine is at least partly housed within a portion of the cabinet assembly defining a washer module. A clothes dryer is at least partly housed within a portion of the cabinet assembly defining a dryer module. A plurality of exterior decorative fascia panels are carried by the cabinet assembly and can be selected to coordinate with a decor of an individual's home. The integrated laundry center can also include any number of additional and optional modules providing virtually any desired fabric care function and equipment. The integrated laundry center can also incorporate an optional control system for controlling virtually any function of each of the integrated laundry center modules such as the washing machine functions and the clothes dryer functions.

Abstract: A drum-type fabric dyeing machine has its drum subdivided into sections by radial partitions. The partitions are connected to the drum wall by narrow perforated strips through which the dyeing liquor is discharged. The drum wall and the partition are unperforated. The partitions are connected to a perforated pipe at the center of the drum through which the dying liquor is introduced.

Abstract: An apparatus which inhibits the theft of equipment such as personal computers is disclosed. The equipment must have an external wall provided with a specially designed, approximately rectangular slot having preselected dimensions. An attachment mechanism includes a housing for a spindle having a first portion rotatable within the housing, a shaft extending outwardly from the housing, and a crossmember at the end of the shaft having peripheral dimensions closely conforming to the internal dimensions of the slot. An abutment mechanism also emanates from the housing, and is located on opposite sides of the shaft intermediate the housing and the crossmember. The peripheral cross-sectional dimensions of the abutment mechanism and the shaft in combination closely conform to the dimensions of the slot. The length of the shaft from the housing to the crossmember is approximately equal to the thickness of the external wall of equipment.

Abstract: A manual lock for a moveable wing comprising a hollow frame supporting an in-fill portion and defined by an interior and an opposed exterior side, the manual lock including an engageable means, a casing,

Abstract: An interconnected lock assembly which can remotely engage a mechanism to couple operation of an inside handle to operation of an outside handle to enable the door to be unlocked from the outside of the door without requiring a key. The interconnected lock assembly is mounted in a door and comprises a first lock assembly including an inside handle and an outside handle, and a second lock assembly interconnected to the first lock assembly. The second lock assembly comprises a deadbolt assembly operably connected to a deadbolt latch having a deadbolt movable between an extended position and a retracted position. Rotation of the inside handle operates to move the deadbolt into a retracted position. The interconnected lock assembly further comprises a remote unlocking mechanism selectively engageable to automatically couple the outside handle to the inside handle such that rotation of the outside handle moves the deadbolt into a retracted position thus unlocking the door.

Abstract: A wire drawing machine is provided with a pressure roller in the form of a roller sized to extend substantially across the width of the capstan and engage multiple turns of wire thereon in a lower quadrant on the exit side of the capstan. The pressure roller is mounted for pivoting about a horizontal axis parallel to the axis of the capstan, and for automatic angular positioning and alignment as contact is made with the wraps of wire on the capstan.

Abstract: During the forging of a metallic workpiece (W) with at least four forging tools (1, 2) which are mutually opposite in pairs and are mutually angularly offset about the forging axis (S), the workpiece (W) is deformed under prevention of any lateral flow during each forging stroke by the deforming forging tools (1, 2) which enclose the workpiece cross section and is subjected to a hydrostatic pressure all over. In order to achieve in addition to the favorable dense forging due to the hydrostatic pressure Iall over a kneading effect for the desired improvement of the structure, the workpiece (W), prior to the final enclosure of the workpiece cross section and the consequent deformation obstructing the lateral flows is deformed during each forging stroke by an uneven deformation effect of the mutually angularly offset pairs of forging tools (1, 2) in addition with an at least reduced obstruction to lateral flow.

Abstract: The present invention relates to a method of determining the relative proportions of gases in a mixture, such that the relative proportions of N gases are determined using N−1 sensors, not all of which are specific to a particular gas. In the preferred embodiment, oxygen and carbon dioxide are measured in the presence of nitrogen by measuring magnetic susceptibility and speed of sound. The described method of gas analysis leads to very fast response times and exceptional stability, making the technology suitable for breath-by-breath analysis of respired air. Notably, the method does not require high-temperature components, electrochemical cells, or consumable components.

Abstract: The present invention provides a device for detecting the presence of an analyte, including: a sample chamber having a fluid inlet port for the influx of the analyte; a fluid concentrator in flow communication with the sample chamber wherein the fluid concentrator has an absorbent material capable of absorbing the analyte and capable of desorbing a concentrated analyte; and an array of sensors in fluid communication with the concentrated analyte.

Abstract: The present invention provides a hydrogen sensor including a thin film sensor element formed by metal organic chemical vapor deposition (MOCVD) or physical vapor deposition (PVD), on a micro-hotplate structure. The thin film sensor element includes a film of a hydrogen-interactive metal film that reversibly interacts with hydrogen to provide a correspondingly altered response characteristic, such as optical transmissivity, electrical conductance, electrical resistance, electrical capacitance, magneto resistance, photoconductivity, etc., relative to the response characteristic of the film in the absence of hydrogen. The hydrogen-interactive metal film may be overcoated with a thin film hydrogen-permeable barrier layer to protect the hydrogen-interactive film from deleterious interaction with non-hydrogen species. The hydrogen permeable barrier may comprise species to scavenge oxygen and other like species.

Abstract: An improved structure of an electric connector of a gas sensor is provided which is designed to establish a firm electric connection between each electrode terminal formed on a sensing element and one of leads extending outside of the gas sensor for connection with an external device. The connector has a stopper which is placed in contact with an end wall of an insulating member to keep the connector on the insulating member without dropping into a hole through which a lead extends from the sensing element when the lead is coupled to the connector. This allows the connector to be pressed and welded to secure the lead in a constant position.

Abstract: An air side cover is attached to a proximal end of a housing so as to confine an aerial atmosphere therein. A measured gas side cover is attached to a distal end of the housing so as to confine a measured gas atmosphere therein. A glass sealing material airtightly seals a clearance between an inner surface of an insulator and an outer surface of a sensing element. A contact interface of the glass sealing material protrudes toward a proximal end of the gas sensor compared with at least an adjacent portion of the remainder of the glass sealing material. By melting and hardening a glass pellet, the sensing element is airtightly fixed in the insulator.

Abstract: A vehicle brake leakage detector installs between a vehicle brake pedal and a reference point such as a steering wheel, for testing vehicle hydraulic brake systems, and, specifically, for detecting brake fluid leaks. A brake contact at one end of the detector contacts the vehicle brake pedal and a reference end at the opposite end of the detector contacts any tangible reference location, such as a steering wheel. Force means are associated with the detector for applying force for pressurizing the vehicle brake fluid when the detector is installed. A sensor detects relative movement between the brake contact and reference end to determine whether any brake fluid leaks are present. An output source indicates whether any brake fluid leaks are detected.

Abstract: A smoke and clean air generating machine for detecting the presence and location of leaks in a fluid system (e.g. the evaporative or brake system of a motor vehicle). A source of gas (e.g. air or nitrogen) under pressure is delivered to a smoke generating apparatus or to a flow meter by way of a multi-position selector valve. With the selector valve in a first position, gas is delivered to the system under test via the flowmeter to detect the presence of a leak in need of repair depending upon the reading of the flow meter. With the selector valve in a second position, gas is delivered to the smoke generating apparatus so that smoke can be supplied to the system under test to locate the leak. With the selector valve in a third position between the first and second positions, pressure is bled from the machine to disable the smoke generating apparatus and thereby terminate the production of smoke.

Abstract: The invention relates to a device for measuring the filling level of a filling material (12) in a container (11), having a sensor (2) and a control/evaluation unit (4).

Abstract: A method of fabricating a micro-mechanical sensor (101) comprising the steps for forming an insulating layer (6) onto the surface of a first wafer (4) bonding a second wafer (2) to the insulating layer (6), patterning and subsequently etching either the first (4) or second wafer (6) such that channels (18,20) are created in either the first (2) or second (4) wafer terminating adjacent the insulating layer (6) and etching the insulating layer (6) to remove portions of the insulating layer (6) below the etched wafer such that those portions of the etched wafer below a predetermined cross section, suspended portions (22), become substantially freely suspended above the un-etched wafer. This method uses Silicon on Insulator technology. Also disclosed is a micro-mechanical gyroscope structure (101) allowing an anisotropic silicon to be used to fabricate a sensor functioning as if fabricated from isotropic silicon.

Abstract: A micromachined single-crystalline silicon micro-gyroscope comprising oxide/polysilicon/metal triple layer for electrical isolation is disclosed. The isolation method includes forming the triple layer composed of an insulation layer formed over an exposed surface of the silicon microstructure, a conductive layer formed over the entire insulation layer, and a metal layer formed over a top portion of the microstructure; and partially etching the conductive layer to form electrical isolation between parts of the microstructure. The method does not require a separate photolithography process for isolation, and can be effectively applied to microstructures having high aspect ratios and narrow trenches. Also disclosed are micro-gyroscope comprising a new type of spring which has a node with a hole in the middle of spring to reduce the release etch time for spring.