Abstract: Excellent optical performance is obtained without substantially any impact of birefringence even when a crystal material with intrinsic birefringence such as fluorite is used.

Abstract: A coordinate measuring stage (1) with interferometric position determination, and a coordinate measuring instrument having said coordinate measuring stage (1), are described. The coordinate measuring stage (1) comprises the following elements arranged one above another: a stationary base part (2) having a linear X guidance element (3); a center part (4), movable slidingly along a linear X guidance element (3); and above that, an X-Y-positionable stage body (5), for reception of a substrate, which is movable slidingly along a Y guidance element (6). The center part (4) is arranged in freely suspended fashion over the base part (2), being supported with its one end on the Y guidance element (6) and with its other end on an additionally arranged support element (13). The base part (2), the center part (4), and the stage body (5) each comprise an internally located opening (18) for a transmitted-light region.

Abstract: An exposing device including an optical fiber array with a plurality of optical fibers disposed at a predetermined interval, a first lens, and a second lens. The optical fiber array is mounted on a base seat supported on a rail movably along an optical axis direction. The first lens is mounted in a casing. The casing is mounted on a base seat supported on a rail movably along the optical axis direction. The second lens is mounted in a casing, and the casing is supported by a supporting member mounted on a base seat. In the case of changing imaging magnification, a moving amount of the optical fiber array and a moving amount of the first lens corresponding to the imaging magnification provided for the changing operation are each set so as to be moved.

Abstract: A device for exposing a peripheral area of a wafer, in which the area which is located within the wafer (and which need not be exposed) is prevented from being exposed regardless of the orientation the wafer which bears a notch in its periphery. The device includes an exposure light irradiation part, a wafer edge determination part, and a notch determination part are arranged integrally with each other. The wafer edge determination part moves such that it follows the edge of the wafer. The peripheral area of the edge of the wafer is exposed by exposure light emitted by the exposure light irradiation part. When the exposure sequence begins irradiation with exposure light is not immediately done, even if the means for wafer edge determination has determined the wafer edge. Instead, the wafer is rotated by a given amount and then exposure is begun. When the area irradiated with exposure light reaches the notch starting position, wafer edge determination is stopped until the end position of the notch is reached.

Abstract: Disclosed is a focal point position detecting method and a focal point position detecting system, in which an object having a mark is moved in an optical axis direction of a projection optical system, and, with respect to different movement positions of the object, the mark of the object is illuminated through the projection optical system. An image of the mark is picked up to produce imagewise information The imagewise information is corrected in accordance with an intensity of light illuminating the mark. The focal point position of the projection optical system is then detected on the basis of the imagewise information corrected with respect to each of the different movement positions of the object. With this arrangement, even if the intensity of illumination light changes, the influence upon the detection of focal point position is reduced, and the detection can be simple without complicatedness.

Abstract: The scanner scans a first laser beam to have a first optical path. A concave mirror collects a second laser beam reflected by a reflective object. A photosensitive element receives the laser beam from the concave (parabolic) mirror to output a photosensitive signal. The photosensitive element is arranged outside a second optical path from the reflective object in the first optical path to the concave mirror. A segment concave mirror of which maximum size is such that a general concave mirror with a full circle aperture is divided on a plane including an optical axis of the concave mirror may be used. The photosensitive element is arranged near the optical axis to place the photosensitive element outside the second optical path to increase a light receiving efficiency. The distance measuring apparatus includes the optical radar scanner.

Abstract: A method for detecting during a planarization process the removal of a first layer of material overlying a workpiece is provided. Relative motion is effected between the first layer and a working surface to remove the first layer. A light having a spectrum of wavelengths is transmitted to the workpiece. The intensity for each of a plurality of reflected wavelengths of a reflected light reflected from the workpiece is measured to obtain a spectrum. The spectrum is a function of the plurality of reflective wavelengths. A spectrum reference value is calculated and a plurality of spectrum difference values are calculated by subtracting the spectrum reference value from the spectrum. An absolute value for each of the plurality of spectrum difference values that is a function of one of the plurality of reflected wavelengths that falls within a selected range of wavelengths is summed together to obtain a delta value. An endpoint parameter is calculated from the delta value.

Abstract: A method and apparatus is provided for mounting any one of a plurality of types of connectors upon the end portion of a fiber optic cable. The automated fiber optic connectorization apparatus includes a memory device for storing data relating to a plurality of types of connectors. The automated fiber optic connectorization apparatus also includes a controller for receiving input from a system operator or other source that specifies the type of connector to be mounted upon the specified fiber optic cable, the polishing geometry, and the optical performance specifications. Based upon this input, the controller determines the components required to mount the specified type of connector upon the end portion of the fiber optic cable based upon the data stored by the memory device. The automated fiber optic connectorization apparatus also includes means for obtaining the necessary components and means for assembling these components upon the end portion of the fiber optic cable.

Abstract: A system and method are provided for measuring the average light levels from a flat panel display for use in a brightness compensating system. One or more photodiodes are disposed outside of the display area of a flat panel display so as to measure the average light levels directly or via total internal reflection through the transparent substrate of the display. The measured light levels are then used to provide a baseline for calibrating the color balance and brightness of the display using the brightness compensating system.

Abstract: An inspection system for automatically scanning, documenting and verifying the perimeters and hole dimensions of flat sheet metal workpieces.

Abstract: A defect inspecting device for a wafer is built in a positioning device for positioning a wafer 1, as a substrate to be processed, in a semiconductor manufacturing process. Light is irradiated on the wafer held on a vacuum holding base 2 while rotating the wafer at least one rotation from a position where the wafer is positioned and the scattered light is received. An operation unit 14 and a control unit 15 judge that if the intensity of the scattered light exceeds a predetermined threshold, a defect is detected on the wafer 1.

Abstract: An information measuring apparatus having a fine channel device comprises at least one detector for measuring information supplied from a plurality of measuring portions formed in the fine channel device, a position-holding/determining means for holding and positioning the fine channel device, a rotating means for rotating the fine channel device at a predetermined angle, a position-determining means for positioning the measuring portion and the detector, wherein information supplied from the measuring portions in the fine channel device is measured successively by rotating the fine channel device at the predetermined angle, whereby information from the measuring portions is stably and efficiently measured.

Abstract: An electron microscope 10 is adapted to enable spectroscopic analysis of a sample 16. A parabolic mirror 18 has a central aperture 20 through which the electron beam can pass. The mirror 18 focuses laser illumination from a transverse optical path 24 onto the sample, and collects Raman and/or other scattered light, passing it back to an optical system 30. The mirror 18 is retractable (within the vacuum of the electron microscope) by a sliding arm assembly 22.

Abstract: The methods and apparatus described may be used for the discrimination of two closely spaced spectral lines. In certain embodiments the methods and apparatus may be used for the detection of isotopes and isotopic ratios by Raman spectroscopy. In certain embodiments the conversion of a labeled substrate to a labeled product may be detected. In particular embodiments the conversion of a 13C labeled substrate to a 13C labeled product may be detected. In other embodiment the conversion of 13C urea to 13CO2 is detected. Embodiments described include the diagnostic determination of 13CO2/12CO2 ratio in a test sample.

Abstract: The present invention relates to methods and devices for in-situ measurement of reaction components of interest during manufacturing of polycarbonate by melt polymerization. The present invention describes irradiating a molten polymer sample with UV/visible light, and generating an absorbance profile correlated to Fries products as well as uncapped phenolic groups in the sample. The methods and apparatus of the invention are suitable for monitoring of Fries products in reactions ranging in size from small scale combinatorial formats to production scale reactors. Also included in methods of the invention are univariate and multivariate analysis for prediction of linear Fries, branched Fries and uncapped phenolic end-groups in unknowns.

Abstract: There is disclosed a method and apparatus for spectroscopically sensing a magnetic field emanating from an object that includes receiving a radiance emission from an object and dispersing the radiance emission into parts of the electromagnetic spectrum. The method also includes detecting a part of the electromagnetic spectrum identified with a selected gas and measuring the magnetic field from a part of the electromagnetic spectrum based on spectral spreading of a spectral line.

Abstract: An optical filter for generating a filter output signal from a filter input signal, the filter output signal consisting of light from the filter input signal in a predetermined bandwidth. The filter includes a grating, a first optical assembly and an optical signal path. A portion of the input signal traverses the optical signal path such that it is diffracted from the grating to form a first intermediate beam that is input to the first optical assembly, which generates a second intermediate beam therefrom. The second intermediate beam is directed back to the grating and is diffracted by the grating, a portion of the diffracted second intermediate beam forming a portion of the filter output signal. The second intermediate beam is the inverted image of the first intermediate beam, and hence, the second reflection from the grating compensates for the time dispersion introduced by the first reflection from the grating.

Abstract: A system is disclosed for evaluating nitrogen levels in thin gate dielectric layers formed on semiconductor samples. In one embodiment, a tool is disclosed which includes both a narrow band ellipsometer and a broadband spectrometer for measuring the sample. The narrowband ellipsometer provides very accurate information about the thickness of the thin film layer while the broadband spectrometer contains information about the nitrogen levels. In another aspect of the subject invention, a thermal and/or plasma wave detection system is used to provide information about the nitrogen levels and nitration processes.

Abstract: Methods and apparatus are provided for manufacturing optical signal controllers such as optical switches. The methods and apparatus can be used for aligning optical elements such as output ferrules for the optical signal controller. The methods and apparatus may allow substantially automated alignment of optical components in the optical signal controller.

Abstract: Methods and apparatus are provided for manufacturing optical signal controllers such as optical switches. The methods and apparatus can be used for aligning optical elements such as output lens for the optical signal controller. The methods and apparatus may allow substantially automated alignment of optical components in the optical signal controller.

Abstract: In the neighborhood of each connecting region 11, 12, 13, 14 of a panel substrate, a TAB substrates 2, 3, and a flexible substrate 4, marks 15a-15d, 20a-20d, 30a-30d, 40a-40d for a visual inspection are provided at a preset distance apart from the connecting region. According to the present marks, inferior products can be eliminated with a high accuracy in a step of the visual inspection after completing a connection of display panel. Thus, workload in a step of microscope inspection after the step of the visual inspection can be reduced.

Abstract: The position of each of four marks is calculated by receiving signals by a photoelectric conversion element (S102). At this time, signal reception is performed a plurality of number of times. After mark spacings are calculated from the mark positions (S103), a wafer stage is finely driven (S104). Then, it is judged whether a predetermined number of times of driving measurement operations are complete or not (S105). If they are not complete, the process returns to S102 to perform calculation of mark spacings again.

Abstract: An alignment mark includes the first mark usable for global alignment measurement in the direction of a scribe line, and the second mark usable for pre-alignment measurement in the direction perpendicular to the direction of the scribe line. The first mark is formed by arranging a plurality of strip-shaped X measurement marks whose longitudinal direction is perpendicular to the direction of the scribe line. In the second mark, the strip-shaped second measurement marks are arranged at the two ends of the first mark such that the longitudinal direction of the second measurement mark is perpendicular to that of the first measurement mark. The alignment mark can be shared by global alignment and pre-alignment, and applied to a narrow scribe line.

Abstract: In a position detection apparatus which detects the position of an alignment mark, the alignment mark is sensed by a low-magnification image sensing system to acquire a rough position, and a stage is aligned based on the acquired rough position. The alignment mark is sensed by a high-magnification image sensing system to acquire an accurate position. The photoelectric conversion elements of the high- and low-magnification image sensing optical systems are elements whose storage times can be set. A controller determines the signal intensity levels of the photoelectric conversion elements on the basis of electrical signals from the photoelectric conversion elements of the high- and low-magnification image sensing optical systems, and sets storage times appropriate for the photoelectric conversion elements. The position of the alignment mark is detected using signals from the photoelectric conversion elements whose storage times are properly set.

Abstract: A semiconductor wafer has an alignment mark for use in aligning the wafer with exposure equipment during the manufacturing of a semiconductor device. The wafer is made by forming a chemical mechanical polishing target layer over an alignment mark layer, chemically-mechanically polishing the target layer to planarize the same, and prior to forming the chemical mechanical polishing target layer over the alignment mark layer, forming a dense pattern of lands or trenches in the alignment layer of dimensions and an inter-spacing preselected to inhibit a dishing phenomenon from occurring in the target layer as the result of its being chemically-mechanically polished. The lands or trenches may be disposed in at least a 2×2 array of rows and columns.

Abstract: An instrument and related process for measuring color, shade, gloss, shape and/or translucence of a tooth. First, the instrument uses searchlight illumination to illuminate a tooth with constant irradiance. Second, the instrument uses colorimetric imaging to collect time-separated frames of different wavelengths of light reflected from a tooth and to combine those frames into a color image. Third, the instrument includes a sanitary shield to establish a reference color and a predetermined distance to a target tooth. Fourth, the instrument provides line-of-sight viewing so an operator may simultaneously view a display of the image on the instrument and the object being measured. Fifth, the instrument is impervious to pollutants because it incorporates a sealed measurement window. Sixth, optical measurements of a tooth taken by a dentist are compared to optical measurements of a prosthetic restoration for that tooth to confirm satisfactory matching of optical characteristics of the tooth and restoration.

Abstract: The invention relates to a grating optical sensor comprised of a lens (1) that reproduces an object space, of a diffractive hexagonal 3D grating optical modulator (4) in the image plane (5) of the lens (1), of a photoelectric receiver device (8), which is arranged in the near field behind the modulator (4) in accordance with the centrosymmetrically trichromatic diffraction orders (R, G, B), and of an evaluation device for the electrical signals generated by the individual receivers (8). The invention is characterized in that at least one light diffusion glass (9) is arranged in the pupillary plane of the lens (1) or in a pupillary plane conjugate thereto. The inventive sensor is used for conducting chromatometries with a color constancy performance via a thermal radiation source (17), which modifies the grating constants of the 3D grating (4) for a new white standard value.

Abstract: A method of obtaining a range of colors includes the following steps:

Abstract: There are disclosed a wavelength detector capable of accurately detecting the wavelength of an entered light beam by a simple configuration without needing any highly accurate fine-adjustments, and an optical transmitter equipped with the wavelength detector.

Abstract: A device for irradiation of small particles, such as grains from cereals and like crops, for analysis of the quality of the particles, comprises a sample-feeding carrier (30), which has sample holders and is adapted to take up particle samples (2), which each comprise at least one particle, in the sample holders and transport the particle samples (2) to a place for irradiation (34). The device further comprises a radiating device (36) emitting electromagnetic radiation for irradiation of the particle samples (2), and radiation guides (22). The radiation guides (22) are attached on the sample-feeding carrier (30) for guiding the radiation emitted by the radiating device (36) to a particle sample (2) in a sample holder, when the particle sample (2) has been fed to the place for irradiation (34).

Abstract: A method and apparatus for inspecting the optical quality of a reflective surface providing for the reflecting of a beam of light off the reflective surface, measuring an intensity of the reflected light at a first distance from said reflective surface, measuring an intensity of the reflected light at a second distance from said reflective surface, and comparing the intensity of the light measured at the two distances to determine the distortion of the reflective surface.

Abstract: An optical gyroscope (100) has a detection light guide body (100S) and a light measuring board (140). The detection light guide body (100S) is formed by stacking light guide layers (110, 120) and protective layers (130) alternately. An eddy-shaped light guide path section is provided in each of the light guide layers (110, 120), and the light guide path sections are optically connected to each other through said protective layers (130) to form an integral light guide path (100L) One end (100La) of the light guide path (100L) is directly connected to the light measuring board (140), and another end (100Lb) of the same is connected to the light measuring board (140) through an optical fiber (143).

Abstract: A system and method for measuring optical characteristics of an optical device under test (DUT) is provided. The system includes a light source for generating an optical signal applied to the optical DUT. A reference interferometer and a test interferometer are optically coupled to the light source. A computing unit is coupled to the interferometers, and utilizes amplitude and phase computing components, such as orthogonal filters, in determining optical characteristics of the optical DUT.

Abstract: A method and system for measuring optical characteristics of a sub-component within a composite optical system is disclosed. In one embodiment, the present invention generates an optical response from a composite optical system. The present embodiment then separates an optical response of a sub-component from the optical response of the composite optical system. The present embodiment then determines the optical characteristics of the sub-component by utilizing at least one portion of the optical response of the sub-component.

Abstract: A method for screening the quality of an optical component including the step of simulating the performance of the optical component. The step of simulating includes the step of measuring the optical phase &phgr; of the optical component, wherein the step of measuring comprises indirectly measuring the optical phase &phgr; of the optical component using a scanning laser having a scanning step size &Dgr;&ohgr; and a modulation frequency &ohgr;m such that &Dgr;&ohgr;/&ohgr;m≦2. The light throughput R of the optical component is then measured. A transfer function H as a function of optical frequency &ohgr; is constructed where H(&ohgr;)=R(&ohgr;)exp[j&phgr;(&ohgr;)], and the performance is simulated using the measured value of the optical phase and the light throughput into the transfer function.

Abstract: Apparatus for splitting, imaging, and measuring wavefronts with a reference wavefront and an object wavefront. A wavefront-combining element receives and combines into a combined wavefront an object wavefront from an object and a reference wavefront. A wavefront-splitting element splits the combined wavefront into a plurality of sub-wavefronts in such a way that each of the sub-wavefronts is substantially contiguous with at least one other sub-wavefront. The wavefront-splitting element may shift the relative phase between the reference wavefront and the object wavefront of the sub-wavefronts to yield a respective plurality of phase-shifted sub-wavefronts. The wavefront-splitting element may then interfering the reference and object wavefronts of the phase-shifted sub-wavefronts to yield a respective plurality of phase-shifted interferograms. An imaging element receives and images the phase-shifted interferograms.

Abstract: Topographic measurement of eye structures based on short coherence interferometry is the subject of the invention. The problem occurring in this connection is that longitudinal and transverse eye movements during signal registration lead to errors in the measured structure. The influences of longitudinal eye movements are compensated in that the reference beam, independent from the measurement beam, is directed to the corneal vertex and is reflected at the latter. The influences of longitudinal eye movements are minimized in that the transverse position of the eye is monitored by means of a direction-dependent registration of the light reflected at the corneal vertex by means of a diode array or a four-quadrant diode and transverse misalignment is detected and compensated.

Abstract: Beam shear can be reduced in an interferometric system by conditioning an input beam prior to directing the input beam to an interferometer. Accordingly, apparatus and methods for conditioning an interferometer input beam are disclosed.

Abstract: an apparatus including: a support structure; a stage configured to move relative to the support structure; a first reflection surface carried by one of the support structure and the stage; and a first interferometry system. The first interferometry system is configured to direct a first measurement beam to contact the first reflection surface and monitor changes in the position and orientation of the stage relative to the support structure along multiple degrees of freedom using the first measurement beam and no other measurement beam that contacts the first reflection surface. For example, the first measurement beam can define a first measurement axis and the multiple degrees of freedom can include at least two of: distance along the first measurement axis, pitch about the first measurement axis, and yaw about the first measurement axis.

Abstract: Apparatus for correcting positional deviations of at least one area of a subject along one or more subject position axes.

Abstract: A profile measurement apparatus of the present invention is characterized in that two flash light beams, having wavelengths slightly different from each other, are emitted to an object with a predetermined interval t1 therebetween, and when a camera picks up interference light formed by light beams reflected from the object and a light beam reflected from the reference mirror, while moving the object in a direction, in which the two flash light beams are directed, in units of intervals t2 at which each of the two flash light beams is cyclically emitted, a phase shift amount corresponding to a movement amount of the object at a time is set to a value falling within a range of 2n&pgr;±&pgr;/2±&pgr;/4.

Abstract: An aspheric microlens, particularly a conic constant of the microlens, may be evaluated and this evaluation may be used to determine an optimal process for creating the aspheric microlens. Such evaluation may include a curve fitting or a numerical expression of the wavefront.

Abstract: A microelectromechanical wavelength monitor includes a first wafer that includes a first movable layer. A first chevron is a thermal actuator that is connected to the first movable layer by a first tether. A second chevron is a thermal actuator that is connected to the first movable layer by a second tether. A second wafer is bonded to the first wafer and includes a trench defining a second stationary layer that is flat or curved. The first and second chevrons adjust a distance between the first movable layer and the second stationary layer to vary a resonated wavelength between the first and second stationary layers. The first movable layer includes an antireflective coating formed on an outer surface thereof. The first and second movable layers include a highly reflective coating formed on an inner surface thereof.

Abstract: An interferometry system includes an interferometer to split an input beam into a measurement beam and at least one other beam. The interferometer directs the measurement beam along a measurement path that includes at least two passes to a measurement object, and overlaps the measurement beam with the other beam after the measurement beam completes the at least two passes. The path of the measurement beam is sheared during the first and second passes when the measurement object moves along a direction orthogonal to a portion of the measurement path that contacts the measurement object. The interferometry system includes optics to redirect the measurement beam after the first pass and before the second pass so that shear imparted during the second pass cancels shear imparted during the first pass.

Abstract: A targeting device for determining the position of a target in space including at least four reflectors, each reflector having a concave conical surface, and an electromagnetic wave sensor associated with each of the reflectors. Axes longitudinally extending through the surfaces are substantially parallel, three of the surfaces are arranged substantially in a horizontal mean plane P such that respective axes of the three surfaces form in horizontal section a triangle and a fourth one of the surfaces is spaced from the three surfaces.

Abstract: The present invention provides a method for monitoring a modifying-process taking place in a thin-film sample and thereby characterizing the sample thus modified, wherein the modifying-process is performed for purpose of improving physical properties of the sample. The present invention further provides a monitoring tool for characterizing various thin-film processes. Advantages of the method of the present invention are manifest in its non-intrusive nature, fast (or real-time) response, robust sensitivity, and versatility in a variety of thin-film processes. Another inherent advantage of the present invention is that an assortment of the “n&k” parameters can be obtained by using only measurement tool, in contrast to two (or more) simultaneous measurement tools used in the prior art.

Abstract: In an arrangement of printing set-up of a virtual printer, which is associated with a plurality of member printer drivers, the optimum user interface control is executed according to the arrangement of a plurality of member printer drivers.

Abstract: When an original image is to be printed as a poster composed of an-array of 4×4 output images, an image is generated by enlarging the original image fourfold in the vertical and horizontal directions and dividing the enlarged image into 16 parts. These 16 partial images are output successively starting from the upper left or lower right of the 4×4 array, depending upon the designation. If there is a blank page, the blank page is output as is even if the printer possesses a blank-paper economizing function. Thus, when a poster printing function is used, the user designates the manner in which the enlarged image is divided up and the order in which the divided images are printed. Even if the printer is equipped with the blank-paper economizing function, normal printed results can be obtained merely by joining the output sheets together in the order that conforms to the manner in which the enlarged image was divided.

Abstract: Described is electronic ink maintained as a software object, thereby associating ink functionality with electronic ink data. The ink may be separated into words or characters, with one object per word or character. By the associated functionality, applications that deal with embedded objects in general can automatically benefit from electronic ink, including having the object's functionality render the ink data as part the application's document. Further, because the ink data is maintained as an object, the data is automatically persisted in association with the document into which it is embedded. Ink-aware applications may call on methods of the electronic ink object to adjust formatting, search recognized ink along with text, and perform other functions. Via the electronic ink object, electronic ink substantially approaches much of the behavior normally available with text data, without requiring applications to interpret the ink data.

Abstract: R, G, B signals outputted from a digital camera or a color scanner are converted into calorimetric signals by a colorimetric converter having a colorimetric conversion matrix and a calorimetric conversion table. Colorimetric signals are processed for setup by a calorimetric setup unit. Colorimetric signals processed for setup are converted by a cmyk converter into c, m, y, k signals that are half tone dot % signals for being supplied to an image output unit such as a film producing device, a color printer, or the like.