Abstract: A method of manufacturing an active matrix substrate comprises forming a plurality of elements on an element formation substrate, forming wirings on a final substrate, transferring some elements selected from the elements, and selectively connecting some elements to the wirings on the final substrate. According to this method, it is possible to manufacture an active matrix substrate providing a high definition image on a large substrate or a non-glass substrate, at a low cost.

Abstract: A liquid crystal display apparatus includes semiconductor elements placed at intersection points between scanning wires and signal wires. Each semiconductor element includes: a semiconductor layer having a channel region and a pair of semiconductor regions which sandwich the channel region and which are each made of a high-resistance region and a low-resistance region; a first electrode formed on the intrinsic semiconductor region with an insulating film interposed therebetween; and second and third electrodes connected to the low-resistance regions. Each scanning wire constitutes the first electrode of the corresponding one of the semiconductor elements. The first electrode has a first wiring formed on the insulating film and second wiring formed in direct contact with a side surface of the first wiring, part of the second wiring being overlaid on part of a high-resistance region with the insulating film interposed therebetween.

Abstract: The chassis fixing apparatus for a liquid crystal display (LCD) monitor is disclosed. The chassis fixing apparatus according to the present invention includes a chassis for engaging the liquid crystal panel, and a hook integrally formed in an interior of the front casing and receiving the chassis therein for supporting the chassis. When engaging a rear casing to the front casing, the hook is pressed to the chassis for preventing the chassis from escaping from the hook.

Abstract: A liquid crystal display is described having a front frame, a rear frame and a light source, in which the rear frame and light source may be easily removed from the front frame. The arrangement also permits frame narrowing in the liquid crystal display. A diffusion plate is set between the front frame and the rear frame; lamps are set in the rear frame facing the diffusion plate. Side faces of the front frame and the rear frame are fastened together by removable fasteners.

Abstract: The present invention relates to a liquid crystal display element having improved utilization efficiency of light and a light source device constituting the liquid crystal display element, and said liquid crystal display element includes (I) a light source device comprising the following (i) to (iii): (i) a light guide body comprising a transparent medium, and having an end face through which the light emitted from a light source is introduced, a pair of opposing faces one of which works as a light emission face and a haze anisotropic layer, (ii) a light source placed at the end face of said light guide body, and (iii) a reflecting body placed at the opposite side to the light emission face side of said light guide body, and mainly emitting linearly polarized light of one vibration direction, and (II) a polarizing plate placed at the emission face side of the above-mentioned light guide body in such a manner that the polarization axis is parallel to the direction having the largest haze value in the abov

Abstract: The display device includes a spatial modulator having a plurality of pixels and a periodical structural body having condenser elements corresponding to the pixels of the spatial modulator. Each of the pixels of the spatial modulator includes a plurality of color dots arranged in a first direction. A length of a peripheral region of the respective pixel encircling the plurality of color dots, measured in the first direction, is longer than a length of the condenser element of the periodical structural body, measured in the first direction. In addition, combinations of the pixels in the square, delta or mosaic arrangement with the condenser elements in the square, delta or mosaic arrangement are disclosed.

Abstract: A polarization light splitting film having a light receiving side and a light transmitting side. The polarization light splitting film includes an optical rotation selection layer at the light receiving side for reflecting one of right and left circularly polarized components of a light beam that is incident on the light receiving side and for transmitting the other one of the right and left circular polarization components of the light beam, and a quarter-wave layer laminated over the optical rotation selection layer at the light transmitting side.

Abstract: A liquid crystal display can be optically compensated by only one cellulose acetate film. The film comprises cellulose acetate and an aromatic compound having at least two aromatic rings. The cellulose acetate has an acetic acid content in the range of 59.0 to 61.5%. The aromatic compound is contained in the film in an amount of 0.01 to 20 weight parts based on 100 weight parts of the cellulose acetate. The film gives an Re retardation value of 20 to 70 nm and an Rth retardation value of 70 to 400 nm.

Abstract: There is presented a liquid crystal display device having, on a transparent insulating substrate, an underneath light-shielding film, a thin film transistor (TFT) in which, over an interlayer film on said underneath light-shielding film, an active layer made of polysilicon, a gate insulating film and a gate electrode connected with the gate line are successively formed, a data line that feeds the data signals into said TFT, and a black matrix formed over said data line to cut off the incident light, with said active layer of the TFT being formed in the region where said gate line and data line intersect each other, wherein the underneath light-shielding film and the data line are formed to have substantially equal widths, at least, in said active-layer formation area.

Abstract: A liquid crystal display device is described in which the TFTs are located directly below the spaces between pixels. The black matrix comprises an array of opaque conductive elements with one such element being above each TFT. The black matrix is incorporated into the TFT structure. By using highly conductive material for the black matrix elements their thickness is held to a minimum, thereby minimizing their impact on planarity. Optionally, this highly conductive layer may be laminated with layers of a non-reflective conductor that makes good ohmic contact to silicon. In one embodiment, metal filled via holes are added that connect the TFTs to the transparent conductive pixel control elements by way of the black matrix layer. In another embodiment, the black matrix layer is connected to be in parallel with the gate electrode, thereby reducing the series resistance of the latter. A process for manufacturing the display is also described.

Abstract: The present invention relates to an optical film having matt property and a matted film having a high transmittance which can be used for producing polarizing plates or liquid crystal display device excellent in display brightness and display quality by using the aforesaid films adjusted in a specific surface roughness or by using a specific two kinds of fine particles in a hard coat layer of the films. The present invention relates also to a polarizing plate of a high transmittance having an optical compensative capacity and matt property. A liquid crystal display device and a color liquid crystal display device using the aforesaid polarizing plate possessing an excellent viewing angle characteristics and is improved in Newton ring caused by contact with a light-tuning film and in non-uniformity in brightness due to the light-tuning film.

Abstract: A reflective guest-host liquid-crystal display device includes a first substrate for receiving incident light, on the inner surface of which transparent electrodes are formed; a second substrate which has a reflective film formed thereon and which is spaced to face the first substrate with a predetermined spacing; an electro-optical element held between the first and second substrates, which electro-optical element has a lamination structure including a guest-host liquid-crystal layer which contains a dichroic dye and which is uniformly oriented with respect to the transparent electrode, and an optical thin-film layer which has a predetermined optical anisotropic axis and which is formed at least on the reflective film, the optical thin-film layer being formed from a polymer liquid crystal having liquid crystal molecules which are uniaxially oriented along the optical anisotropic axis; and a passivation layer which is interposed between the optical thin-film layer and the liquid crystal layer.

Abstract: Openings each having various opening area are formed in a photosensitive organic film by one-time exposure. A polyvinyl alcohol (PVA) film for increasing the thermal fluidity of the photosensitive organic film is coated on the photosensitive organic film, followed by a heat treatment to flow the polyvinyl alcohol film and the photosensitive organic film. After the heat treatment, the openings each having a small area are closed and smooth ruggedness of a surface of the photosensitive organic film results, and further the polyvinyl alcohol film is removed. Accordingly, a reflective electrode formed on the photosensitive organic film has ruggedness having a small average angle of inclination in its surface layer, and becomes thereby an ideal reflective electrode.

Abstract: The liquid crystal display has a liquid crystal cell (15) containing a bistable ferroelectric liquid crystal (12). The liquid crystal cell (15) is a quarter wave cell and includes two opposing covering electrodes (13) arranged in a flexible, preferably plastic, substrate (11) on opposite sides of the bistable ferroelectric liquide crystal (12) and spacers (16) distributed between the covering electrodes (13). A diffuser or reflector (18) is arranged on a rear side of the substrate (11) so that light passes twice through the liquid crystal cell (15). The bistable liquid crystal display with the quarter wave liquid crystal cell is flexible but mechanically stable to mechanical impacts, torsion and bending. Orienting layers (14) for the liquid crystal are applied obliquely or diagonally to the surface of the substrate.

Abstract: In the manufacture of a ferroelectric liquid crystal cell, alignment layers provided on the inside surfaces of the substrate structures for imparting a preferred alignment to the molecules of the liquid crystal layer in the vicinity of the layers are formed by deposition of two different alignment solutions, such as LQT120 and JALS212 for example, on the substrate structures. A mixture of the alignment solutions was applied by spin coating and subsequently the solvent was evaporated by prebaking prior to a further baking step and a rubbing step to impart a preferred alignment direction. The resulting alignment layers have a speckled structure in which areas of one type are interspersed within areas of another type. The different areas have different alignment properties which serve to control switching of molecules of the liquid crystal material between alignment states in response to an applied electric field.

Abstract: The present invention discloses a method of manufacturing a liquid crystal display device, including: providing a substrate; depositing sequentially a first metal layer and a first insulating layer on the substrate; patterning the first metal layer and the first insulating layer using a first mask to form a gate line and a first gate insulating layer; depositing sequentially a second gate insulating layer, a pure semiconductor layer, a doped semiconductor layer and a second metal layer over the whole substrate; patterning the second metal layer using a second mask to form a data line, source and drain electrodes, a capacitor electrode, the capacitor electrode overlapping a portion of the gate line; etching the doped semiconductor layer between the source and drain electrodes to form a channel region; depositing a third insulating layer over the whole substrate; patterning the third insulating layer using a third mask to form a passivation film, the passivation film having a smaller width than the data line an

Abstract: A non-blocking N×N cross-connect is provided that has an array of liquid crystal (LC) switches in a grid of planar optical waveguides within a light optical circuit (LOC). LC filled trenches are used in a planar optical waveguide and each trench provides the functionality of a waveguide polarization splitter, a transverse electric (TE) switch cross point, a transverse magnetic (TM) switch cross point, or a waveguide polarization combiner. By combining these elements, a cross-connect system is fabricated.

Abstract: A method and apparatus for providing a purged optical path between an optical source surface and an optical target surface and for permitting relative movement between the optical source surface and the optical target surface is described. The apparatus includes a body, a central cavity, at least one gas supply bore, and at least one gas removal bore. The body defines first and second opposing surfaces. The first opposing surface is configured for positioning closely adjacent to the optical target surface. The second opposing surface is configured to mate with the optical source surface. The central cavity is formed in the body for passing light through the body, the central cavity being open at the first and second opposing surfaces. The at least one gas supply bore is formed in the body for suppling a flow of a purge gas to the central cavity.

Abstract: An image reproducing apparatus to reproduce input image data supplied from an image data supply source as a visible image, which comprises a display, a printer, and an image processing device which shares hardware for processing the input image data to obtain image data to be represented on the display and image data for image recording with the printer. The image processing device includes an image processing section to subject the input image data to specified image processing steps and a data converting section to convert the thus processed data to the image data for displaying and the image data for image recording. The apparatus can reduce the distinction between the image to be represented on the display and the image to be reproduced on the hard copy, or the distinction found on the images reproduced in the image output devices due to the output properties thereof, with reduced cost of the image processing device.

Abstract: An alignment method includes the steps of (i) in order to expose a pattern of a first object onto a second object, measuring positions of a plurality of marks on the second object with a mark detection device and aligning the first and second objects with each other, and (ii) measuring shapes of the plurality of marks on the second object, thereby obtaining offsets that should be reflected in the measured values of the mark detection device. The shapes of the plurality of the marks are measured with a shape measurement device with no possibility of coming into contact with the mark, through calibration with reference to a shape measurement device with a possibility of coming into contact with the mark.

Abstract: A scanning exposure method and apparatus in which a scanning exposure is performed while a mask is moved in a first direction and a substrate is moved in a second direction, and in which, during the scanning exposure, positional information of the mask is measured using a first interferometer system and positional information of the substrate is measured using a second interferometer system which has five measurement axes including two first measurement axes parallel to the second direction and two second measurement axes perpendicular to the second direction.

Abstract: A pattern forming apparatus for forming a pattern on a substrate includes a first exposure section capable of conducting pattern exposure for a predetermined line width, a second exposure section for conducting pattern exposure for a line width greater than the predetermined linewidth of the first exposure section, and a device for detecting the relative positional relationship between the first exposure section and the second exposure section. Pattern exposure is conducted by using the first exposure section and the second exposure section on the basis of the detected positional relationship.

Abstract: An exposure apparatus includes a gap measuring device for measuring a gap between a mask, having a mask membrane, and a substrate, a gap adjuster for adjusting the gap between the mask and the substrate and a driver for relatively moving the mask and the substrate relative to each other. The gap adjusting device adjusts the gap when the mask and the substrate are placed at a position at which they are opposed to each other in an area smaller than a predetermined area.

Abstract: A substrate supporting apparatus and a substrate holder are prepared, the substrate supporting apparatus including an opening portion having a plurality of openings smaller than the substrate and a support portion made up of portions other than the opening portion, and the substrate holder having a housing portion which houses at least a portion of the support portion. The substrate supporting apparatus supporting the substrate is mounted on the holder in a state where at least a portion of the support portion is housed in the housing portion. Accordingly, the substrate and the substrate supporting apparatus are integrally supported by the holder in a state where the substrate directly contacts an upper surface of the holder.

Abstract: A heat development and transfer process in which a photosensitive material and an image receiving material are laminated and wound around an outer peripheral surface of a drum, the photosensitive material and the image receiving material being pressed and laminated between at least one roller and the drum. The photosensitive material and the image receiving material are heated while being conveyed along the outer peripheral surface of the drum synchronously with a rotation of the drum. The photosensitive material and the image receiving material laminated are kept in a state in which they are pressed onto the outer peripheral surface of the drum by a belt supporting mechanism or a roller support mechanism. Subsequently, the photosensitive material and the image receiving material are passed through the entrance of the heating conveying path again, and then the photosensitive material and the image receiving material are stripped.

Abstract: An image exposure apparatus in which positioning of a photosensitive material, such as a printing plate to be wound around a rotating drum, is implemented in a small space. A turning unit and a transport conveyor are provided at a plate supply/transport section. The turning unit trains the printing plate about the rotating drum and feeds the plate to the transport conveyor. At the transport conveyor, the printing plate is transported and a leading end of the printing plate abuts pin rollers. Then, a positioning motor is operated to move the turning unit and the transport conveyor integrally. Thus, the printing plate abuts another pin roller in a width direction to implement positioning of the printing plate. The leading end of the positioned printing plate is then fed to a puncher by the transport conveyor.

Abstract: A 3-D coordinate measurement is performed in such a way that an electrooptical distance-measuring device is used to measure a linear distance to a target point set on a surface of a measurement object, an angle measuring device is used to measure shifted angles of an optical axis of the electrooptical distance-measuring device, and a 3-D coordinate of the target point is measured according to a measured distance and a measured angle after the optical axis of the electrooptical distance-measuring device has been aligned to the target point.

Abstract: An incoherent ladar transmitter (12) adapted for use with synthetic aperture processing. The system (12) includes a first mechanism (44, 48, 50) for generating a laser beam (18). A second mechanism (44, 68) records phase information pertaining to the laser beam (18) and subsequently transmits the laser beam (18) from the system in response thereto. A third mechanism (40) receives a reflected version (20) of the laser beam and provides a received signal in response thereto. A fourth mechanism (72) corrects the received signal based on the phase information recorded by the second mechanism (44, 68). In a more specific embodiment, the ladar system (12) includes a synthetic aperture processor (46) for correcting the received signal based on the phase information and providing a corrected laser signal in response thereto.

Abstract: A robot sentry with a scanning laser observes the sky just above the geographic skyline looking for a vertical airflow pattern characteristic of the rotor inflow to a helicopter rotor. The presence of this vertical airflow pattern indicates the probable presence of a reconnaissance helicopter that is using terrain masking.

Abstract: A method of determining the dimensions of a laser beam spot, comprising: scanning the laser beam in a path across a reference-edge having a photodetector positioned therebehind; and measuring an output signal from the photodetector during the scanning, the output signal corresponding to an area of the laser beam spot incident on the photodetector during the scanning. A method of aligning a laser beam delivery system, the method comprising: positioning a measurement/alignment tool at a target location; firing the laser beam on the tool; observing the laser beam using the tool; and adjusting the system in response to the sensed laser beam.

Abstract: An optical position and orientation determining system determines yaw, pitch, roll, lateral translation and longitudinal translation of a body with respect to a direction and intensity sensing receiver. The system comprises two energy beam emitters, mechanically mounted on a body, which illuminate the position sensing receiver. The energy beams are intermittently energized in a predefined fashion to enable the receiver and its associated signal porcessing means to determine the position and orientation of the body with respect to the receiver. The system can also be used to determine velocities and accelerations of the body relative to the receiver.

Abstract: Attitude angles of motor vehicles are measured, in particular the toe-in and camber angles or the wheels. According to the invention: a) four laser-beam measuring heads are arranged in predetermined positions, one for each wheel, so as to define an invariable spatial reference system; b) a laser beam sweeping over a plurality of horizontal planes which are situated at a relative distance from each other and which pass through the plane of the wheel is emitted by each measuring head, and a signal representing the spatial position of measurement transition points (p1, p2, pj, pn) on the said wheel is captured on the beam reflected by the surface of the wheel; c) and finally, on the basis of the spatial position of a set of said measurement points (p1, p2, pj, pn), the position of the plane of the wheel and its axis of rotation as well as the characteristic angles formed by the plane of the wheel, with respect to said spatial reference system, are calculated.

Abstract: An image of an inspection target having a concave and convex pattern is picked up in an off-focus state by an image pickup element 4. Further, the image of the inspection target picked up in the off-focus state is taken in by an image processing computer 6. Based on the image, the image processing computer 6 prepares a light intensity profile having a peak corresponding to a boundary portion between a concave portion and a convex portion of the concave and convex pattern of the inspection target. For example, a change of the width of the concave or convex portion of the concave and convex portion can be detected very accurately, by measuring the width of the concave or convex portion of the concave and convex portion on the basis of the intensity profile.

Abstract: A system for simultaneously inspecting the frontsides and backsides of semiconductor wafers for defects is disclosed. The system rotates the semiconductor wafer while the frontside and backside surfaces are generally simultaneously optically scanned for defects. Rotation is induced by providing contact between the beveled edges of the semiconductor wafer and roller bearings rotationally driven by a motor. The wafer is supported in a tilted or semi-upright orientation such that support is provided by gravity. This tilted supporting orientation permits both the frontside and the backside of the wafer to be viewed simultaneously by a frontside inspection device and a backside inspection device.

Abstract: Disclosed are apparatus and associated methods for determining haze for various materials. More particularly, an efficient, high throughput screening methodology for the determination of haze of a plurality of materials is provided whereby contrast reduction characteristics of materials are utilized to determine haze. When utilized with a plurality of materials displayed in an array on a carrier, the present invention provides a substantive increase in the rate of discovery of haze characteristics of materials.

Abstract: A measuring cell is formed of base plates joined together. A passage groove is formed on a joining surface of one base plate. Through-holes for introducing and discharging a fluid sample are formed on the other base plate, and the joining surface is provided with an optically opaque Si film as slits. Further, the joining surfaces of the base plates and the inner surface of the passage groove are covered with SiO2 films. Thus, a measuring cell having a sufficiently small passage sectional area, a high air-tightness, a chemically stable measuring chamber, and a high measuring sensitivity can be obtained.

Abstract: An ultraviolet/visible/infrared spectrophotometer, with a pulsed light source (10), has a monochromator with variable slit width to provide variable spectral resolution. The dynamic range at the detectors (24, 28) is reduced by varying the pulse energy emitted by the light source (10) in accordance with the wavelength and slit width settings (34, 36), and/or by varying the slit height in accordance with the slit width. The ligth source (10) may be a xenon flash lamp.

Abstract: A substrate is etched in a process zone by placing the substrate in the process zone, providing an energized process gas in the process zone, and exhausting the process gas. A first stage of the etching process is monitored to determine completion of the first stage by detecting the intensities of one or more wavelengths of a radiation emission generated by the energized gas, generating a first signal in relation to the detected intensities, and evaluating the first signal. A second stage of the etching process is monitored to determine completion of the second stage by detecting the intensities of one or more wavelengths of a polarized radiation reflected from the substrate being etched, generating a second signal in relation to the detected intensities, and evaluating the second signal.

Abstract: A fiber optic system includes an optical fiber carrying an optical signal having a wavelength peak, an optical detector coupled to the optical fiber for detecting a current optical level (e.g. a photon power level), and a tunable optical filter coupled to the optical fiber upstream from the optical detector. The system further includes a controller connected to the optical detector and the tunable optical filter, for stepping the tunable optical filter over a sequence of wavelengths while analyzing respective optical levels, and for reversing the stepping direction of the tunable optical filter, based upon the current optical level being less than a prior optical level, to locate the wavelength peak of the at least one optical signal. A sample rate is reduced when the wavelength peak of the optical signal is located, to thereby reduce a power consumption of the controller.

Abstract: A method for maintaining substantial reliability of color measurements obtained by a number of color measuring instruments includes by measuring color values of a set of master color standards on a master color measuring instrument at a master color lab, and measuring color values of sets of working color standards on the same instrument to determine calibration values. The working sets are provided to remote locations for use on remote color measuring instruments and the working sets are measured on the remote color measuring instruments to obtain color value measurements which are transmitted to the master color lab. The measurements from the remote instruments are compared with the calibration values obtained from measurements on the master instrument to generate profiles which are provided to the remote color labs. The profiles are applied to measured color values for the set of working color standards to obtain corrected color values.

Abstract: The spectral absorption of a body, placed between a source for emitting electromagnetic radiation and a detector for detecting the radiation, is measured. The technique includes emitting the electromagnetic radiation in a determined spectral range towards the body, filtering the electromagnetic radiation, and detecting the electromagnetic radiation attenuated by the absorption due to the body and deducing therefrom a measure of the spectral absorption of the body. The filtering and detection steps are implemented by a detector of the quantum type. The technique also applies to determining the calorific value of a gas, for measuring the energy of electromagnetic radiation, and an apparatus for implementing the technique.

Abstract: A method and apparatus for minimizing the effects of noise when measuring a response of a device under test to laser light. Laser light provided from a laser source is provided to an interferometer, which splits the source laser light into a first laser light portion and a second laser light portion and then interferometrically combines the first laser light and the second laser light, resulting in a time-varying interference modulated test laser light and a time-varying interference modulated reference laser light. The time-varying interference modulated test laser light is propagated to a device under test so as to cause the device under test to propagate responsive time-varying interference modulated test laser light. The responsive time-varying interference modulated test laser light is converted to an responsive amplitude modulated electrical test signal, which is high pass filtered.

Abstract: Fringe counting in a Michelson type interferometer is carried out by detecting when the amplitude of the reference fringe attains a given value eg a zero crossing. Reversals in scan direction are recognized by monitoring parameters of the waveform such as amplitude and time occurence of successive half fringes and identifying a reversal by the occurrence of a particular sequence or state of the monitored parameters.

Abstract: A structure (22) is located relative to a reference surface (26a, 42) using an optical target (28) affixed to the structure (22) and having a reflective angular-reference hologram (30) thereon with an effective angular orientation. An alignment light beam (38) is directed perpendicular to the reference surface (26a, 42) and incident upon the angular-reference hologram (30) on the optical target (28), and a signal return of the alignment light beam (38) is received at a measurement location. The angular orientation of the structure (22) is adjusted to achieve a signal return of the alignment light beam (38) corresponding to an alignment of the alignment light beam (38) to the effective angular orientation of the reflective angular-reference hologram (30). Multiple reflective angular-reference holograms (30) may be spatially superimposed upon each other in the optical target (28) or spatially separated from each other on the optical target (28).

Abstract: A gyro comprises a first laser adapted to generate a first laser beam propagating in a single direction as a main mode of operation, and a second laser adapted to generate a second laser beam propagating in a single direction as a main mode of operation. The gyro may have a beat signal detection means and a photodetector for receiving the first and second laser beams. The first laser beam and the second laser beam have different respective oscillation frequencies and interfere with each other.

Abstract: The specification describes a method for monitoring a characteristic of a mixture of particles suspended in a liquid medium by generating a first interference signal by combining first and second radiation beams after the first beam traverses a reference path and the second beam traverses a path extending into the mixture, allowing the particles in the mixture to partially settle, then generating a second interference signal by the same technique as used for the first. The second interference signal is then compared to the first interference signal to determine a change in, e.g., the particle density.

Abstract: An optical measuring light path formed by a vacuum-side laser beam (Pa) as a reference standard and an optical measuring light path formed by a gas-side laser beam (Pb) as a dimension to be measured are coaxially located sandwiching a movable end (optical transparent body 12) of a vacuum container (11) in order to satisfy Abbe's principle requiring linear disposition of the reference standard and the dimension to be measured in measurement direction, thereby reducing measurement error in measuring air refractive index and improving measurement accuracy therefor.

Abstract: An improved phase-shifting point diffraction interferometer can measure both distortion and wavefront aberration. In the preferred embodiment, the interferometer employs an object-plane pinhole array comprising a plurality of object pinholes located between the test optic and the source of electromagnetic radiation and an image-plane mask array that is positioned in the image plane of the test optic. The image-plane mask array comprises a plurality of test windows and corresponding reference pinholes, wherein the positions of the plurality of pinholes in the object-plane pinhole array register with those of the plurality of test windows in image-plane mask array. Electromagnetic radiation that is directed into a first pinhole of object-plane pinhole array thereby creating a first corresponding test beam image on the image-plane mask array.

Abstract: The present invention comprises a tool for and a method of inspecting a mask used in photolithography to determine errors in phase, amplitude, and pattern edges. An embodiment of the tool comprises a laser source, a polarizing beam splitter, a first shutter, a mask, a second shutter, a quarter wave retarder, a single-mode optical fiber, and a CCD detector array. An embodiment of the method comprises four independent measurements of light intensity, comprising: a pattern of a mask, a diffraction pattern of a reference pinhole, an interference pattern of the mask and the reference pinhole, and an interference pattern of the mask and the reference pinhole with a known phase difference. Calculations are performed to determine phase and amplitude information as a function of location on the mask. The phase and amplitude information is then compared with a design layout of the mask to determine pattern edge information and identify possible defects in the mask.

Abstract: A 3D shape measurement method and a device using the method eliminate harmful influences of periodic inconstancy in the phase shift method. Optical intensity patterns following periodic functions of sine waves are irradiated on an object while shifting the phases thereof. Based on the image picked up from the object, the 3D shape of the object is measured. In this method, a plurality of optical intensity patterns following periodic functions with varying wavelengths are projected onto the object so as not to interfere with each other. The least common multiple of the wavelengths of the periodic functions is larger than the extent having periodic inconstancy within the image pickup area.