Abstract: A clamp mechanism 35 holding an object W to be processed placed on a susceptor 22 in a processing vessel 16 for film formation which can be vacuumed, includes a ring-shaped clamp ring body 38 contacting a peripheral portion of the object to be processed, and an urging member 40 for urging the clamp ring body downwardly. A contact surface 38A on an inner peripheral side of the clamp ring body is formed as a tapered surface which is inclined at a predetermined angle &thgr; downwardly from the horizontal line outward in the direction of the diameter of the object to be processed. The predetermined angle is set in a range from 2 to 15 degrees, and the amount of overlap between the contact surface and the peripheral edge portion of the object to be processed is set in a range from 0.7 to 3.5 mm. Thus, formation of an unnecessary deposition film in the vicinity of the peripheral portion of the object to be processed and the side surface thereof is properly restricted.

Abstract: A method for growing bulk GaN and AlGaN single crystal boules, preferably using a modified HVPE process, is provided. The single crystal boules typically have a volume in excess of 4 cubic centimeters with a minimum dimension of approximately 1 centimeter. If desired, the bulk material can be doped during growth to achieve n-, i-, or p-type conductivity. In order to have growth cycles of sufficient duration, preferably an extended Ga source is used in which a portion of the Ga source is maintained at a relatively high temperature while most of the Ga source is maintained at a temperature close to, and just above, the melting temperature of Ga. To grow large boules of AlGaN, preferably multiple Al sources are used, the Al sources being sequentially activated to avoid Al source depletion and excessive degradation.

Abstract: There is disclosed a process for manufacturing a semiconductor device. When a metal film is formed by plasma CVD in a contact hole which penetrates an interlayer insulating film and reaches an electrode of the device, a gas comprising hydrogen and argon in a deposition chamber of a plasma CVD apparatus is introduced. Then a metal halide gas is introduced in the deposition chamber simultaneously with or before plasma generation.

Abstract: A group III nitride compound semiconductor device has a substrate and an AlN single crystal layer formed on the substrate. The AlN single crystal layer has a thickness of from 0.5 to 3 &mgr;m and has a substantially flat surface. The half-value width of an X-ray rocking curve of the AlN single crystal layer is not longer than 50 sec. In another device, a group III nitride compound semiconductor layer having a thickness of from 0.01 to 3.2 &mgr;m is grown at a temperature of from 1000 to 1180° C. on a sapphire substrate having a surface nitride layer having a thickness of not larger than 300 Å.

Abstract: A spin chuck on which a wafer is mounted is divided into a plurality of regions concentrically in a radial direction, and different temperatures are set for each of the regions so that the temperature gradually increases from the outer periphery to the center. The wafer is placed on this spin chuck, and a processing solution is applied to the wafer and spread over the wafer by centrifugal force, whereby the vaporization of a solvent of the processing solution which is spread on the outer periphery of the wafer is suppressed, and hence the timing of drying of the processing solution within the surface of the wafer can be made uniform. Consequently, a coating film with a uniform thickness within the wafer surface can be obtained.

Abstract: A method for encapsulating flip chip interconnects includes applying a limited quantity of encapsulating resin to the interconnect side of an integrated circuit chip, and thereafter bringing the chip together with a substrate under conditions that promote the bonding of bumps on the interconnect side of the chip with bonding pads on the substrate. In some embodiments, the step of applying resin to the chip includes dipping the interconnect side of the chip to a predetermined depth in a pool of resin, and then withdrawing the chip from the resin pool. In some embodiments the step of applying resin to the chip includes providing a reservoir having a bottom, providing a pool of resin in the reservoir to a shallow depth over the reservoir bottom, dipping the chip into the resin pool so that the bumps contact the reservoir bottom, and then withdrawing the chip from the resin pool.

Abstract: A painting apparatus includes a conveyor having incrementally spaced attachment structures configured to secure objects thereon for painting and being movable to move the attachment structures between consecutive incremental positions in a downstream direction. The distance between consecutive incremental positions is generally equal to an incremental spacing between consecutive attachment structures. A washing station is disposed beneath the conveyor and is operable to clean objects disposed therein. A painting station downstream of the washing station includes a paint reservoir disposed beneath the conveyor and which contains a volume of paint. The reservoir can be raised to dispose the object within the volume of paint and lowered to thereby allow the object to be conveyed downstream from the painting incremental position. A heating station downstream of the paint reservoir applies heat to objects in a heating incremental position.

Abstract: A method and apparatus for the non-contact in-situ temperature measurement of a material layer during chemical vapor deposition of the material on an underlying substrate are provided. Magnitude modulated UV light having a plurality of separated spectral components is directed at the material being deposited on the substrate. The modulated UV light has a plurality of wavelengths corresponding to different temperature dependencies of absorptance in the deposited material. The separated spectral components are within transparency spectral windows of a plasma media contained in the CVD reactor. A portion of the magnitude modulated UV light is directed as a reference into a comparison device, such as a spectrophotometer. Light reflected from the deposited material is also directed at the comparison device for comparison with the reference light. That is, the magnitudes of the magnitude modulated components of the reflected light and the reference light are compared at more than one spectral component.

Abstract: The present invention provides a method and apparatus for dispensing a small volume of a selected liquid, such as a biological sample or reagent, onto a substrate. The device includes a tube adapted to contain the liquid. An elongate fiber is disposed within the tube for axial movement therein between raised and lowered positions. Upon shifting or oscillating the fiber between its raised and lowered positions, a liquid spot can be formed at a selected position on the substrate. The device is readily adaptable for the production of micro-arrays having a great number of individual spots.

Abstract: To provide a method of manufacturing a battery capable of providing an equal amount of electrolyte in each battery and of enhancing productivity and coating machines employed thereof. The sensor detects a boundary from the collector exposed region C of the belt-shaped positive electrode to the positive electrode mixture layer exposed region B, on the basis of the detection timing, the shutter is withdrawn to open the flowing path and the proportioning pomp is driven. Following this, when the sensor detected a boundary from the positive electrode mixture layer exposed region B to a collector exposed region C, and on the basis of the detection timing, the shutter is protruded inside the flowing path to close the flowing path and the proportioning pump stops. As a result of this, the electrolyte stops to be delivered from the nozzle. The electrolyte layers are intermittently formed by repeating the same procedures.

Abstract: It is an object of the present invention to provide a plasma CVD device in which it is possible to inhibit the formation of particles resulting from the adhesion of reaction by-products of poor adhesive strength around the upper electrode.

Abstract: An installation for densification of porous substrates by CVI comprises an oven, a zone for loading substrates in the oven, means for heating substrates loaded in the loading zone, at least one inlet for admitting reactive gas in the oven, and at least one gas heating zone situated in the oven between the reactive gas inlet and the loading zone. At least one gas preheating device is located outside the oven and is connected to the gas inlet so as to preheat the reactive gas before it enters the oven.

Abstract: Disclosed are animal litters, processes for preparing animal litters, and methods for removal of animal waste. The disclosed litters are made from ingredients including plant meal, grain germ, citrus residue, and grain bran, usually in combination with a cohesiveness agent and a microbial inhibitor. The litters are provided in the form of discrete plural articles which tend to agglomerate when wetted.

Abstract: A venting system for an animal stall comprises a ventilation layer and an animal bedding layer. Stall flooring configurations comprising an animal bedding layer having moisture dissipating properties and a ventilation layer which circulates air through the animal bedding layer are most efficient. Additionally, a separation layer and/or an airflow dissipation layer may be included. By providing airflow through the animal bedding layer, moisture from the bedding is transferred to the air and carried away. Moisture within animal bedding encourages growth of bacteria, virus and other coliform pathogens and encourages decomposition. Specific ventilation layer examples include pipes buried in the ground and covered with gravel, clay support tiles, urethane and gravel mixture mats and finished surfaces. Perforations or porosity through the ventilation layer surface to the air passageways therein provide paths for airflow into or out of the ventilation layer.

Abstract: A dog bone or chew toy holder having a cylindrical anchoring base having a top wall, a bottom end, and a sidewall extending between the top wall and the bottom end. The top and side walls are preferably made of plastic, but any durable resilient material will suffice. The anchoring base is filled with concrete or other dense material. A rod with a top end and bottom is anchored in the base and extends vertically from the top wall of the base along its central axis. The rod is threaded and a nylon dog bone or other chew toy is attached to the top of the rod, preferably beyond the base. The dog bone or chew toy is preferably mounted near one end thereof. A cylindrical sheath covers the rod between the bone and the top wall of the base. A rim extends from the bottom end of the base.

Abstract: This invention relates to a method of using meal alternatives and diet methods to maintain and enhance an animal's health, particularly a dog. Obese dogs face a higher risk of many different ailments and a shorter lifespan. An animal chew meal alternative fortified with health affecting additives is safe, entertaining, and promotes good health. The invention enhances a dog's diet by substituting a healthy, high protein, palatable meal alternative of known caloric content for daily treats and table scraps of unknown caloric content that can result in reduced caloric intake. In addition, a collaborative exercise regimen for the dog and the dog's owner further improves health and wellness of the pet. Overall, the invention reduces the time required by a pet owner to administer a healthy, satisfying diet for his pet.

Abstract: A method and system for monitoring the physiological condition, and/or suitability of animal feed, of ruminant animals, by: sensing actions of the animal indicating a ruminating activity; and accumulating the time of the ruminating activities over a predetermined time period to provide an indication of the physiological condition of the animal, and/or of desirable changes in its feed for maximizing milk production and/or for maintaining animal health. In one described preferred embodiment, the sensed actions of the animal are chewing actions produced by the animal while chewing animal feed according to a predetermined chewing rhythm indicating a ruminating activity as distinguished from an eating activity. In a second described embodiment, the sensed actions of the animal are regurgitations of a bolus from the animal's rumen to the animal's mouth sensed by a collar around the animal's neck.

Abstract: An environmentally-friendly heating apparatus which can collect and recover heat of exhaust gas discharged from a boiler in order to use the heat for heating an indoor space. The heating apparatus filters the exhaust gas, using a mist filter formed by vapor generated in a flue, thereby minimizing the quantity of exhaust fumes containing noxious substances.

Abstract: A method and apparatus for sootblowing a recovery boiler. Sootblowers of the recovery boiler are divided into sootblowing groups, and a sootblowing interval is determined for the sootblowers. A fouling index is produced for each sootblowing group of the recovery boiler, and relative frequency values are calculated.

Abstract: A cam-drive engine having one or more cylinder assemblies detachably affixed to an engine core that does not include a cylinder block per se. Each cylinder assembly can be attached to or detached from the engine core without the need for disassembly of the cylinder assembly unit. This allows cylinder assemblies to be easily removed or replaced for repair or cylinder assemblies to be easily added to an existing engine. The cylinder assemblies can include cylinder pressure and solenoid actuated intake and exhaust valves that facilitate attachment. The engine can further include a catalytic converter contained in a central hub proximate to the cylinder assemblies thereby facilitating rapid warm-up of the catalyst.

Abstract: This invention relates to an improvement of two stroke engine in which a sleeve piston is employed to move up and down in the cylinder and to control alternatively the opening and closing of the intake guide and exhaust guide and to prevent the lubricant from exuding out of the crank case in an effort to ensure an environmental-friendly clean exhaust.

Abstract: A guided rotor compressor that contains at least three hollow rollers, each of which has a sheath surrounding a core. The coefficient of friction of the sheath and the core is from about 0.01 to about 0.15, but the coefficient of friction of the core is at least 1.2 times as great as the coefficient of friction of the sheath. The core has a cross-sectional area that is at least about 1.5 times as great as the cross-sectional area of the said sheath. Each of the core and the sheath has a coefficient of thermal expansion of from about 1×10−5 to about 20×10−5. Each of the core and the sheath has a a notch Izod impact strength of from about 50 Joule-meters to about 100 Joule-meters.

Abstract: A throttle body spacer (FIG. 1) with Six (6) rapid twisting slots (radius) (FIG. 2-3) the six (6) equally spaced rapid twisting slots maintaining a constant radial slot depth having a pitch of 0.5 (½) per 1 inch on a 1.0 inch thick spacer, and 0.375 (⅜) per 1 inch on a 0.75 inch thick spacer, the rapid twisting slot is a combination of three (3) radius (FIG. 3) this is accomplished by using a 90 degree dove tail tool with a 0.046 radius on the corner in conjunction with the ½ and ⅜ pitch slots, the bottom edge of the slots is extended into the tapered bore from top to bottom allowing it to grab the incoming air, this causes a vortex of air for better fuel atomization giving the engine more horsepower, torque and improved gas mileage.

Abstract: An engine idle speed control device enhances engine cold-start performance even in engines of large displacement. The device reduces noise created by intersecting air flows after bypassing the throttle valve. The device includes first and second passages, each mounted on a throttle body for enabling air flow bypassing the throttle valve, an ISA so mounted as to control the opening of the first passage, and temperature valve unit so mounted as to control the opening of the second passage in response to engine temperature.

Abstract: A wire guide (101) is disposable on a device such as a fuel injector (103). The wire guide (101) includes a channel (215) having one or more intermittently spaced fingers (213) along an open side of the channel (215). The fingers (213) may allow wires (205, 207) to enter the channel (215) easily, but inhibit the ability of the wires (205, 207) to leave the channel (215) once they enter. The channel (215) comprises an inner wall (301) that at least partially follows an outer contour of a device such as a fuel injector (103). One or more retaining members (219, 221) are included with the wire guide (101), such that the wire guide (101) is securable to the device, such as a fuel injector (103).

Abstract: Our invention is new to the art of fuel manufacturing, fuel identification, fuel handling, fuel transporting, fuel dispensing, and fuel injection because it will facilitate the delivery of the information about the fuel (the fuel's characteristics) along with the fuel. The fuel injection system will use this information (the data) to more accurately inject the fuel based on the fuel's characteristics into the engine, thus achieving better fuel economy, lower emissions, and more power output. As disclosed herein, after the data concerning the fuel's properties has been ascertained and preserved during transportation and delivery to the gas station it will be downloaded along with the fuel that is being pumped into the vehicle, the vehicle's fuel injection control module will then modify the amount of fuel that is going to be injected in relation to the fuel's properties to more accurately meter and inject the fuel being delivered.

Abstract: Our invention is new to the art of fuel injection because it enables the fuel injection system to evaluate the properties of the fuel in the system and then modify the quantity of fuel or time the injector is open for any given location on the fuel injection map with regards to and in relation to the fuel that is to be injected. The amount of fuel that is injected will be more accurate or a better match to the fuel that is going to be injected. We will have a more precise amount of fuel injected and their by have better fuel economy better power output and lower emissions. The present invention addresses the above and other needs by providing a method and system to achieve better fuel economy, lower emissions and better performance, than is available in today's fuel injection systems. As disclosed herein, after one or more sensors evaluates the fuel, the control module will modify the amount of fuel that is going to be injected. This modification will be in relation to the fuel's properties.

Abstract: A fluid cooling system having a heat exchanger (2) with a pressure differential between an inlet area (31) and a cooling area created by use of a venturi between the areas and enhanced flow of cooling medium by use of connecting the output (32) of the exchanger (2) to an exhaust pipe (34).

Abstract: A motorized beach vehicle with a safety remote control and emergency safety switch power shutoff device includes a CDI unit having an engine operation stopping line that is connected to a relay, a remote control unit, and a safety switch. The safety switch includes two lines connected to the relay. An electrically conductive seat is mounted on the two lines, and an elastic sleeve is mounted on the electrically conductive seat. A rubber cap is mounted on the safety switch, and is connected to a first end of a strap which has a second end that may be tied on a driver's body, so that the rubber cap may be detached from the safety switch by the strap in an emergency condition.

Abstract: A method for cutting thin film filter work pieces has two embodiments. In a first embodiment, an intermediate layer (13) binds an augmenting substrate (14) to a glass substrate (12) of the work piece (16) prior to cutting of the work piece. In a second embodiment, the work piece (23) comprises a glass substrate (22) which is thicker than a final desired thickness. After the work piece is cut, a surplus portion (222) of the glass substrate is removed. Both embodiments of the method increase the effective thickness of the work piece, which reduces the residual stress in the final thin film filter product, and reduces the risk of a film stack (11, 21) of the work piece peeling from the glass substrate during the cutting process.

Abstract: An oven construction includes a heat exchanger with substantially vertically arrange heat exchange tubes and an anchor-free and adjustable floor construction for the baking chamber.

Abstract: The present invention provides a burner tube. The burner tube has a proximal segment, a distal segment, a terminal end, and a plurality of fuel outlet ports. The proximal segment has a union region and is adapted to be connected to a fuel source. The terminal end of the burner tube is connected to the union region such that the terminal end is in fluid communication with the union region. The connection between the terminal end and union region forms a continuous burner tube, or a burner loop for the flow of fuel. An initial flow of fuel diverges in the union region into a first portion and a second portion. The first portion flows through the union region and downstream through the distal segment. The second portion of fuel from the fuel source flows through the union region and downstream through the terminal end.

Abstract: A thermic module for a self-heating container. The container includes a bottom end with a cavity having internal walls formed therein for receiving the thermic module. The thermic module will be comprised of a first cup having plastic walls and containing a first chemical reactant. The module will also include a second cup containing a second chemical reactant and a dividing wall positioned between the first and second cups such that the first and second chemical reactants cannot mix. An end cap will be positioned below the second cup and will retain the second chemical reactant within the second cup. An actuator for puncturing the dividing wall will be positioned between the end cap and the dividing wall. Finally, the walls of the first cup are formed of a plastic of sufficient thinness and having a sufficiently low Vicat Softening Point such that the plastic walls will expand into contact with the internal walls of the container cavity upon mixing of the first and second chemical reactants.

Abstract: The present invention provides a high-efficiency water pump and heater assembly for use with a pool or spa as a device that facilitates the filtering and heating of the pool water. A water pump and turbine engine are combined using an inventive linkage assembly that incorporates a revolutions per minute (rpm) reducing device. The rpm reducing device is operative to reduce the rpm speed associated with the turbine engine substantially to a revolutions-per-minute speed commonly associated with pool water pumps. A heat exchanger is disposed in the exhaust path of the turbine engine whereby water flowing through the heat exchanger coils is heated to a predetermined threshold as monitored by a temperature-monitoring device. The temperature-monitoring device causes a bypass device to redirect the flow of exhaust air once the predetermined temperature threshold has been reached such that the heat exchanger coils are bypassed as long as the water temperature is at or above the predetermined threshold.

Abstract: An apparatus for use in conjunction with a metered dose inhaler which includes a novel valve system to aid in the delivery of aerosolized medicament to a subject. The apparatus also includes a novel rotational flow generator to aid in the useable delivery of said medication and avoid its loss either in the apparatus or by non-useful delivery to said subject.

Abstract: A refillable medical device comprising a base unit (4) adapted to be engaged with a refill unit (2), the device comprising means for counting the number of different refill units which are engaged with the base unit (4). The device may be in the form of a dry powder or pressurised aerosol inhaler, needleless injector, intravenous drip system etc. The device may comprise means to disable the device after a predetermined number of refill units have been used with the base.

Abstract: A fluid vaporizing device useful for vaporizing fluid into an aerosol and includes first and second capillary tubes connected electrically in series by providing separate electrodes at the inlet ends of each capillary tube, and connecting the outlet ends of the capillary tubes by an electrical connection that connects the outlet ends both electrically and thermally. The capillary tubes are heated by the flow of electricity therethrough, and liquid flowing through the tubes is vaporized. The outlet ends of the capillary tubes are easily maintained at a temperature for optimizing aerosol generation since there is minimal heat loss through the connection connecting the outlet ends.

Abstract: A drug delivery apparatus comprising: a drug delivery device for selectively delivering drug-laden air or air not laden with the drug; a sensor for monitoring the breathing pattern of a patient; a controller arranged to control the drug delivery device to deliver drug-laden air in pulses which begin when the patient is monitored by the sensor to begin inhalation, the pulses having a duration which is adjusted by the controller on the basis of the monitored breathing pattern of the patient; a feedback indicator which indicates to a patient whether the monitored breathing pattern is effective for inhaling drug-laden air or not a dose calculator which calculates the dose delivered to the patient; and an indicator which indicates to the patient when a desired dose has been delivered, whereby the apparatus is configured to deliver the full amount of the desired dose in at least 80% of treatments.

Abstract: An ambient pressure control ventilation apparatus for mechanical ventilation of a patient comprising a sealable chamber (5) adapted to accommodate a whole body of a patient, a pump (2) fluidly connected to the chamber adapted to alternatively compress and decompress a ventilating gas within the chamber, a relief valve (14) fluidly connected to the chamber and a control unit (1) adapted to control the pump and the relief valve to facilitate a periodic regime of alternating compression and decompression of the ventilating gas within the chamber about a predetermined baseline.

Abstract: A mask comprising a mask main body and a face seal, wherein the outer periphery part of the main body and the outer periphery part of the face seal are adhered, said face seal is composed of a sheet prepared by laminating soft resin such as polyurethane resin on one surface of elastic fabric made of nylon or polyester fibers, and said laminated sheet is cut off to have a modified ring shape.

Abstract: A hand pad apparatus (10) for protecting the median nerve, dampening vibration, and absorbing shock including a protecting mechanism (12) for preventing the application of pressure to the median nerve. The protecting mechanism (12) includes parallel cushion portions (24) defining a recess (14) therebetween and a recess maintaining mechanism (22) for maintaining the recess between the cushion portion from reducing the size of the recess. A method of combining median nerve protection, vibration dampening, and shock absorbing to inhibit or prevent carpal tunnel syndrome and a method of determining the proper width of a recess defined by parallel portions of a cushioned pads by determining the type of the cushioned pad material.

Abstract: A disposable surgical drape for use in cardiovascular surgical procedures which may optionally be used to isolate a sterile pumping mechanism from a non-sterile pump driving mechanism and/or provide support for medical equipment, such as medical tubing.

Abstract: A dental device has a U-shaped carrier with at least one channel for embracing an arch of teeth. The carrier has recessed insets in the channel. Discrete inserts carrying a beneficial agent can fit into the insets and release the agent gradually. When the device is used in a primarily therapeutic application, the inserts may be installed into all or less than all of the insets to form various insert patterns. Thus, different oral regions can be affected by different insert patterns. When the device is used as an athletic mouthguard, temporary blanks may be initially fitted in the insets, while a portion of the mouthguard is softened before an arch of teeth is pressed into the channel to make a custom impression. The inserts that are later installed in the insets possess different physical properties than the carrier and may be positioned and shaped to mechanically buffer teeth of the arch from mechanical shocks as well as release beneficial agents.

Abstract: A curling device for a filter tip attachment comprises an element placed in contact with a strip of paper material advancing continuously along a given path, and serving to deform the strip in such a way that single tipping papers obtained by cutting the strip are invested with a curled profile; the curling device is associated with a mechanism such as will cause it to vibrate, describing rectilinear or looped trajectories at a predetermined frequency, so as to reduce friction between the curling element and the strip.

Abstract: A cosmetic compact includes a base member, a pair of covers having a first cover and a second cover, and the first cover and the second cover are pivotally connected to the base member. A plurality of flexible members are attached to both sides of the base member, and at least one latch structure is formed on the pair of covers.

Abstract: A method of cleaning the interior of a processing chamber first performs a halogenation treatment by supplying a treatment gas containing a halogenating gas into the processing chamber and heating a support member for a target substrate, thereby halogenating a metal element in a by-product film. A reduction treatment is then performed by supplying a treatment gas containing a reducing gas into the processing chamber, thereby reducing a halide of the metal element and liberating the metal element. An oxidation treatment is then performed by supplying a treatment gas containing an oxidizing gas into the processing chamber and heating the casing walls of the processing chamber, thereby passivating the liberated metal element by oxidation.

Abstract: A method of cleaning a substrate comprises placing the substrate on a rotating fixture, placing a liquid on at least one side of the substrate, and creating a standing wave of megasonic energy oriented generally parallel to the substrate. The standing wave generates an associated pattern of high-agitation regions in the liquid. The method further comprises moving the standing wave back-and-forth so as to move the pattern of high-agitation regions about with respect to the substrate. An apparatus for cleaning substrates comprises a support to rotate the substrate about a first axis, and a transmitter extending generally parallel to a surface of the substrate. The apparatus further comprises a megasonic transducer in acoustically coupled relation to the transmitter, and a reciprocation drive in fixed relation to the transmitter. The reciprocation drive moves the transmitter back-and-forth within a plane generally parallel to the surface of the substrate.

Abstract: A conditioning disk and a conditioner for a chemical mechanical polishing (CMP) pad, and a method of fabricating, reworking, and cleaning the conditioning disk, are utilized to improve conditioning efficiency, and to reduce production expenses. The conditioning disk for a CMP pad is divided into regions defined by a size difference of abrasive grains formed on the body surface in each region of the conditioning disk. The method of fabricating the conditioning disk is performed by forming adhesive films for attaching the abrasive grains onto the body surface multiple times. In addition, a used conditioning disk may be reworked by detaching the abrasive grains from the body, and attaching new abrasive grains. A used conditioning disk can also be cleaned of by-products of the conditioning process by a cleaning method using a HF solution or BOE (buffered oxide etch) solution.

Abstract: In a method for processing a workpiece to remove material from a first surface of the workpiece, steam is introduced onto the first surface under conditions so that at least some of the steam condenses and forms a liquid boundary layer on the first surface. The condensing steam helps to maintain the first surface of the workpiece at an elevated temperature. Ozone is provided around the workpiece under conditions where the ozone diffuses through the boundary layer and reacts with the material on the first surface. The temperature of the first surface is controlled to maintain condensation of the steam.

Abstract: The invention provides a semiconductor washing solution which can suppress occurrence of variation of the shape of a semiconductor device when the semiconductor device is washed and can maintain a stabilized washing capacity for a long period of time. An organic acid ammonium salt is added to a mixed solution of ammonium hydroxide, hydrogen peroxide and water (NH4OH:H2O2:H2O) to prepare the semiconductor washing solution. The organic acid ammonium salt to be added is one or more selected from ammonium acetate, ammonium citrate, ammonium formate and ammonium oxalate. The concentration of the added organic acid ammonium salt ranges from 0.1 mol/l to 20 mol/l.