Patents Issued in December 16, 2004
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Publication number: 20040250729Abstract: A fast-setting two-part calcium phosphate cement formulation that, when mixed, is capable of hardening and forming an integral mass in less than four minutes. The integral mass is approximately 2 to 10 wt % carbonate-substituted hydroxyapatite that has a calcium/phosphate molar ratio of about 1.33 to 2.0. The cement formulation contains: (a) ultra-fine dry powder ingredients, with an average particle size smaller than 2 &mgr;m (preferably smaller than 0.5 &mgr;m and most preferably smaller than 100 nanometers) in diameter, comprising a partially neutralized phosphoric acid, a calcium phosphate source, and calcium carbonate in an amount ranging from about 9.33 to 70 wt % of the dry powder ingredients; and (b) a physiologically acceptable aqueous lubricant solution selected from the group consisting of 0.01 to 2M sodium phosphate solution at pH 6 to 11 and 0.Type: ApplicationFiled: June 16, 2003Publication date: December 16, 2004Inventors: Bor Z. Jang, Laixia Yang
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Publication number: 20040250730Abstract: Methods are provide for producing flowable compositions, e.g. pastes, that set into calcium phosphate products. In the subject methods, dry reactants that include a calcium source and a phosphate source are combined with a silicate-phosphate setting fluid, and the combined liquids and solids are mixed to produce the flowable composition. Also provided are the compositions themselves as well as kits for preparing the same. The subject methods and compositions produced thereby find use in a variety of applications, including the repair of hard tissue defects, e.g., bone defects.Type: ApplicationFiled: June 12, 2003Publication date: December 16, 2004Inventors: David Delaney, Brent R. Constantz
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Publication number: 20040250731Abstract: In order to provide a method of manufacturing an aluminum flake pigment having a small mean particle size as well as high brightness, a method of manufacturing an aluminum flake pigment including a step of flaking aluminum powder in an organic solvent with a grinder having grinding media, which grinding media contain steel ball grinding media formed by spherical media consisting of a material including steel and having diameters in the range of 0.3 mm to 1.0 mm, is provided. The mean particle size (D50Al) of this aluminum powder is preferably in the range of 1.0 to 10.0 &mgr;m. Further, this grinder is preferably a ball mill.Type: ApplicationFiled: March 4, 2004Publication date: December 16, 2004Inventors: Keita Nagano, Takao Mizoshita
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Publication number: 20040250732Abstract: The invention relates to a process for preparing pigments, which comprisesType: ApplicationFiled: July 8, 2004Publication date: December 16, 2004Inventors: Yves Grandidier, Albert Riegler, Klaus Ruf, Urs Schlatter, Takashi Deno
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Publication number: 20040250733Abstract: The invention relates to a process for preparing pigments, which comprisesType: ApplicationFiled: July 8, 2004Publication date: December 16, 2004Inventors: Yves Grandidier, Albert Riegler, Klaus Ruf, Urs Schlatter, Takashi Deno
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Publication number: 20040250734Abstract: A process for the production of a &bgr; type copper phthalocyanine pigment having an average primary crystal diameter of 80±40 nm and a primary crystal aspect ratio of 2.0±1.Type: ApplicationFiled: June 10, 2004Publication date: December 16, 2004Inventors: Osamu Shiromaru, Yuusaku Ide, Toshio Oshiba, Takuya Kotani
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Publication number: 20040250735Abstract: This invention relates to a process for preparing conditioned titanium dioxide pigments comprising (a) during pigment manufacture, admixing the following components to form a conditioned pigment:(1) a crude titanium dioxide pigment material; (2) at least about 0.1% by weight, relative to the inorganic pigment, of one or more copolymer dispersants; and(3) an optional processing liquid (preferably water); and, (b) isolating the conditioned pigment as dry powder.Type: ApplicationFiled: November 19, 2003Publication date: December 16, 2004Inventors: Patrick F. McIntyre, Karyn B. Visscher, Michael P. Diebold, Brian W. Sullivan
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Publication number: 20040250736Abstract: A white pozzolan derived from by-products of manufacturing vitreous low alkali, low iron glass fibers, and to the method for producing the white pozzolan. The invention relates as well to cement compositions based on the white pozzolan, such as white and pigmented blended pozzolanic cements of high durability for use in applications such as white or colored architectural concrete, building materials, and manufactured cementitious products. The white pozzolan also functions as a high performance pozzolan with grey cement.Type: ApplicationFiled: June 21, 2004Publication date: December 16, 2004Inventors: Raymond T. Hemmings, Robert D. Nelson, Philip L. Graves, Bruce J. Cornelius
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Publication number: 20040250737Abstract: A workability-improving agent for improvingt the workability of cementitious compositions comprises at least one polyalkylene oxide derivative represented by the formula (I): R1—(CO)a—(O)b-(AO)n—X, wherein R1 is a hydrocarbon group of from 3 to 18 carbon atoms or a residual group of a polyamine derivative; a and b are 0 or 1; AO is an alkylene oxide of from 2 to 3 carbon atoms; (AO)n is a homopolymer or a block or random copolymer of alkylene oxide units of from 2 to 3 carbon atoms, n is an integer of from 1 to 30; X is H, methyl, ethyl, propyl, butyl, SO3Y1 is H, Na and NH4; and/or a hydrocarbon derivative of formula (II): R2—(CO)c—OH wherein R2 is a aliphatic hydrocarbon group of 8 to 18 carbon atoms, and c is an integer of 0 or 1.Type: ApplicationFiled: August 2, 2004Publication date: December 16, 2004Inventors: Minoru Yaguchi, Toshimi Matsumoto, Kenichi Umezawa
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Publication number: 20040250738Abstract: A raised lap top work surface utilizes a concave area for comfortable use and positioning on a user's legs. V-shaped arching leg support surfaces provide reliable positioning of the raised lap top work surface on the user's lap. The raised lap top work surface has a raised working surface level located at the proper sight distance for reading or writing. A large cover gives the user a surface area large enough to display any reference material needed and still have ample room for writing.Type: ApplicationFiled: June 10, 2003Publication date: December 16, 2004Inventor: Ralph B. Conlee
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Publication number: 20040250739Abstract: An extendable sectional table, which is tough and easily foldable, can be extended in length as needed. Depending on the length thereof, the extendable sectional table is composed of a number of supporting units and a tabletop unit having a corresponding number of laths. A supporting unit further consists of a plurality of legs, collapsible connecting frames, cross bars, and fixers and sleeves for combining the above components. A tabletop unit consists of a plurality of laths, connecting tubes, a string, and a couple of fixing covers. The supporting units and the tabletop unit combine to form a firm body, which can be taken apart without tools and can be folded to fit in with a compact storage space.Type: ApplicationFiled: June 11, 2003Publication date: December 16, 2004Inventor: Jung Wen Yang
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Publication number: 20040250740Abstract: A worktop of glass that is frosted after acid treatment, for working and rolling out balls of dough in order to make them thin, like the disks for pizza obtained from already-prepared dough balls.Type: ApplicationFiled: June 4, 2004Publication date: December 16, 2004Inventor: Riccardo Scaioli
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Publication number: 20040250741Abstract: The invention relates to arc-heating plasma reactors for simultaneous making of refractory, metal and non-metal material melt and sublimates having a high degree of a melt viscosity and can be used in cement, chemical industries and metallurgy. The aim of the present invention is to provide the increase of a performance of a furnace lining, the serviceability, a furnace capacity, a finished product quality, the decrease of a power supply, making and separation of associated binding agents, non-ferrous metals in the form of melts and sublimates.Type: ApplicationFiled: April 20, 2004Publication date: December 16, 2004Inventors: Jury Aleksandrovich Burlov, Ivan Jurievich Burlov, Alexandr Jrievich Burlov
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Publication number: 20040250742Abstract: An improved collector assembly comprises a generally hollow body mounted below a product supply tank for receiving plural streams of materials metered from the tank. Individual upright passages through the body corresponding in number to the metered streams from the tank receive the gravitating product streams and direct each stream into either or both of an upper loading zone and a lower loading zone in the passage. A diverter valve associated with each upper loading zone can be set to close off the upper loading zone entirely while opening only the lower zone or closing off the lower loading zone while opening only the upper loading zone. Thus, air streams passing transversely through the upper and lower loading zones respectively can be supplied with variable amounts of metered product, depending upon the position of the diverter valve within each passage.Type: ApplicationFiled: June 10, 2003Publication date: December 16, 2004Inventors: Jason M. Fuessel, Kevin A. Anderson, Cory W. K. Ochitwa, Barry B. Barsi, Lawrence S. Grodecki
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Publication number: 20040250743Abstract: A float structure having a mainframe and pontoons is described. The mainframe includes floor support beams transversely attached to pontoon connector beams. The pontoon connector beams are operatively connected to the pontoons such that there are no weak points in the mainframe. A motor mount is removably mounted to the connector beams and is adjustable to accommodate various lengths of motor shafts.Type: ApplicationFiled: June 10, 2004Publication date: December 16, 2004Applicant: Rettey CorporationInventors: Lloyd Yetter, Roger Yetter
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Publication number: 20040250744Abstract: A compact safety cone that can self-right when in use and be reduced to a compact size when not. The compact safety cone has a base, flexible means, and cover. The spring flexible means coils around the center of the base in decreasing diameters without overlapping. The compact safety cone has a substantially low center of gravity due to the weight distribution among its components. By design, the compact safety cone has a fast impulse response to direct (contact) and indirect (no-contact) perturbations and is capable of being run over or hit by a vehicle and “self-right” substantially immediately after the impact. When not in use, an integrated holding means conveniently and securely keeps the flexible means to the base. The holding means can be, e.g., a cover, lid, light, sign, mirror, box, case, hook, latch, strap, Velcro, pin, lock, etc. In some cases, an optional handle may be included.Type: ApplicationFiled: January 30, 2004Publication date: December 16, 2004Inventor: Guadalupe C. Garcia
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Publication number: 20040250745Abstract: This invention provides PEG-modified semiconductor nanoparticles of which fluorescence intensity is effectively inhibited from lowering, which are capable of forming a stable dispersion in water, and which are capable of bonding easily with biomolecules having specific recognition, as well as methods for conveniently preparing such nanoparticles, and a material for biological diagnosis. The water-soluble PEG-modified semiconductor nanoparticles of the present invention includes a structure having PEG of a number average molecular weight of 300 to 20000 having a thiol group at one end, bonded via cadmium to II-VI semiconductor nanocrystals of a core-shell structure having a ZnX (wherein X stands for O, S, Se, or Te) shell.Type: ApplicationFiled: March 26, 2004Publication date: December 16, 2004Applicant: NOF CorporationInventors: Atsuhiko Ogura, Eui-chul Kang, Kazunori Kataoka, Yukio Nagasaki
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Publication number: 20040250746Abstract: The invention relates to a crystallization method for forming crystals of a substance in a solution, a suspension, or a mixture of liquids, in particular ice crystals from an aqueous solution or organic crystals from an organic melt. The method comprises the steps of crystallizing the solution to form a crystal slurry by means of cooling in a heat exchanger and feeding the crystal slurry from an outflow side of the heat exchanger to an inflow side of the heat exchanger via a recirculation duct and separating at least a part of the crystals from the liquid. A recirculation pump is included in the recirculation duct wherein the slurry is continuously supplied through the recirculation duct such that the crystals are homogeneously distributed in the duct and the heat exchanger and such that the under cooling at the outlet of the heat exchange is the equilibrium temperature Teq minus 0.5 to 0.9 times the meta-stable region &Dgr;Tmax.Type: ApplicationFiled: September 10, 2003Publication date: December 16, 2004Inventors: Rene-Jeroen Verschuur, Reinhard Uwe Scholz, Bartholomeus Antonius Scheurs, Arnout Roos
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Publication number: 20040250747Abstract: The present invention provides a method of manufacturing a gallium nitride single crystal that can suppress the decomposition of gallium nitride and improve production efficiency in a sublimation method. According to the manufacturing method, a material (GaN powder) for the gallium nitride (GaN) single crystal is placed inside a crucible, sublimed or evaporated by heating, and cooled on a substrate surface to return to a solid again, so that the gallium nitride single crystal is grown on the substrate surface. The growth of the single crystal is performed under pressure. The pressure is preferably not less than 5 atm (5×1.013×105 Pa). The single crystal is grown preferably in a mixed gas atmosphere containing NH3 and N2.Type: ApplicationFiled: March 25, 2004Publication date: December 16, 2004Applicants: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.Inventors: Takatomo Sasaki, Yusuke Mori, Fumio Kawamura, Masashi Yoshimura, Yasunori Kai, Mamoru Imade, Yasuo Kitaoka, Hisashi Minemoto, Isao Kidoguchi
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Publication number: 20040250748Abstract: This invention is a method for forming a chemical conversion coating on ferrous metal substrates, the chemical solutions used in the coating and the articles coated thereby. By modifying and combining the features of two existing, but heretofore unrelated, coating technologies, a hybrid conversion coating is formed. Specifically, a molecular iron/oxygen-enriched intermediate coating, such as a dicarboxylate or phosphate, is applied to a ferrous substrate by a first oxidation. The intermediate coating pre-conditions the substrate to form a surface rich in molecular iron and oxygen in a form easily accessible for further reaction. This oxidation procedure is followed by a coloring procedure using a heated (about 120-220 F) oxidizing solution containing alkali metal hydroxide, alkali metal nitrate, alkali metal nitrite or mixtures thereof, which reacts with the iron and oxygen enriched intermediate coating to form magnetite (Fe3O4).Type: ApplicationFiled: May 5, 2004Publication date: December 16, 2004Inventors: Keith N. Ravenscroft, William V. Block
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Publication number: 20040250749Abstract: The present invention provides methods and apparatuses for writing information to, reading information from, and erasing information on a luminescent data storage medium comprising Al2O3. The method includes writing and erasing of the information using photoionization via sequential two-photon absorption and non-destructive reading the information using fluorescent detection. The apparatuses for writing and reading the information incorporate confocal detection and spherical aberration correction for multilayer volumetric fluorescent data storage. The methods also allow multilevel recording and readout of information for increased storage capacity.Type: ApplicationFiled: June 9, 2003Publication date: December 16, 2004Inventors: Mark S. Akselrod, Anna E. Akselrod
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Publication number: 20040250750Abstract: The present invention provides a method for preparing stable sols of surface-modified nanoparticle aggregates. The methods involves the steps of: (i) producing a sol of nanoparticles; (ii) adding at least one functionalising agent to the sol of nanoparticles; (iii) allowing the nanoparticles and the at least one functionalising agent to react to form a sol of surface-modified nanoparticle aggregates; and (iv) purifying the sol of surface-modified nanoparticle aggregates to obtain a purified sol of surface-modified nanoparticle aggregates in which the aggregates are of a size range of about 4 nm in diameter and greater than about 10 &mgr;m in diameter.Type: ApplicationFiled: August 11, 2004Publication date: December 16, 2004Inventors: Torsten Reda, Geoffrey Raymond Baxter
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Publication number: 20040250751Abstract: The present invention provides crystals of glutathione oxidized n hydrate (wherein n is an integer or a fraction of not less than 0 and less than 8) useful, for example, as final products of, as raw materials for, or as intermediates of health foods, pharmaceuticals, cosmetics or the like, and a process for producing crystals of glutathione oxidized, which comprises a step of crystallizing glutathione oxidized from a mixture of an aqueous solution containing glutathione oxidized and a water-miscible organic solvent and which is suitable for large-scale synthesis or industrialization.Type: ApplicationFiled: April 7, 2004Publication date: December 16, 2004Inventors: Tsuyoshi Shimose, Hideki Murata
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Publication number: 20040250752Abstract: A method for forming, by epitaxy, a heteroatomic single-crystal semiconductor layer on a single-crystal semiconductor wafer, the crystal lattices of the layer and of the wafer being different, including forming, before the epitaxy, in the wafer surface, at least one ring of discontinuities around a useful region.Type: ApplicationFiled: April 1, 2004Publication date: December 16, 2004Inventors: Daniel Bensahel, Olivier Kermarrec, Yves Morand, Yves Campidelli, Vincent Cosnier
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Publication number: 20040250753Abstract: Carbon nanotubes are formed on a surface of a substrate using a plasma chemical deposition process. After the nanotubes have been grown, a post-treatment step is performed on the newly formed nanotube structures. The post-treatment removes graphite and other carbon particles from the walls of the grown nanotubes and controls the thickness of the nanotube layer. The post-treatment is performed with the plasma at the same substrate temperature. For the post-treatment, the hydrogen containing gas is used as a plasma source gas. During the transition from the nanotube growth step to the post-treatment step, the pressure in the plasma process chamber is stabilized with the aforementioned purifying gas without shutting off the plasma in the chamber. This eliminates the need to purge and evacuate the plasma process chamber.Type: ApplicationFiled: November 22, 2002Publication date: December 16, 2004Inventors: Sung Gu Kang, Craig Bae
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Publication number: 20040250754Abstract: An amorphous silicon pattern is formed first. A first region, a second region, at least one first pointed region adjacent to the second region and having a second height, at least one fourth region between the first region and each first pointed region are included in the amorphous silicon pattern. Each fourth region has a fourth height smaller than the second height. A laser crystallization process is performed to form a first single crystal silicon grain in each fourth region.Type: ApplicationFiled: June 10, 2004Publication date: December 16, 2004Inventor: Ching-Wei Lin
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Publication number: 20040250755Abstract: A process chamber is provided which includes a gate configured to align barriers with an opening of the gate and an opening of the process chamber such that the two openings are either sealed or provide an air passage to the chamber. A method is provided and includes sealing an opening of a chamber with a gate latch and exposing a topography to a first set of process steps, opening the gate latch such that an air passage is provided to the process chamber, and exposing the topography to a second set of process steps without allowing liquids within the chamber to flow through the air passage. A substrate holder comprising a clamping jaw with a lever and a support member coupled to the lever is also contemplated herein. A process chamber with a reservoir arranged above a substrate holder is also provided herein.Type: ApplicationFiled: June 16, 2003Publication date: December 16, 2004Inventors: Igor C. Ivanov, Weiguo Zhang
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Publication number: 20040250756Abstract: The invention relates to a device for applying lubricants on the peripheral surfaces of rollers in roll stands for rolling strips, more particularly multiple roll stands with support rollers and working rollers (SW; AW), wherein the lubricants are applied in an area of the peripheral surfaces of the working cylinder (AW) which impinges upon the rolling strip (WB) located between the upper or bottom strip surface and the strippers (AS) placed against the peripheral surfaces. The improvement to said device is characterized in that the lubricant is applied by means of the application rollers (ATW) that can be pressed against the peripheral surfaces of the working roller (AW), whose periphery is impinged upon by the periphery of a coaxially mounted transmission roller (UW) on the peripheral surface of which lubricant is applied by means of spraying, splashing or dipping devices (SD; TW).Type: ApplicationFiled: February 19, 2004Publication date: December 16, 2004Inventors: Andreas Lohr, Matthias Kipping
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Publication number: 20040250757Abstract: The orientation and the height of a spray gun are adjusted so that a spray distance (a distance between the injection outlet of the spray gun and the rolling bed of the powder particles) reaches a desired value, and the spray gun is used under the conditions that an injection pressure of atomized air is 0.2 MPa or above and preferably 0.2 to 0.6 MPa, and an air flow rate of atomized air is 10 to 180 Nl/min.Type: ApplicationFiled: November 7, 2003Publication date: December 16, 2004Inventors: Susumu Natsuyama, Kouji Hasegawa, Takayuki Morita, Hiroshi Matuura, Kazuo Ooishi
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Publication number: 20040250758Abstract: An apparatus for depositing droplets on a substrate is disclosed. The apparatus includes a support for the substrate, a droplet ejection assembly which includes a pumping chamber, a controller and a source of static pressure to maintain the total pressure in the pumping chamber above a threshold pressure level to avoid rectified diffusion type bubble growth in the pumping chamber. The droplet ejection assembly is positioned over the support for depositing the droplets on the substrate and includes, in addition to a pumping chamber, a displacement member and an orifice that ejects the droplets. The controller provides signals to the displacement member to eject drops.Type: ApplicationFiled: June 13, 2003Publication date: December 16, 2004Inventors: Paul A. Hoisington, Melvin L. Biggs, Steven H. Barss
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Publication number: 20040250759Abstract: A painting device suitable to use for painting, for example, the body of a vehicle and capable of improving the spraying state of paint, comprising a painting device body (4) having a compressed air feed passage (2) for feeding compressed air and a paint feeding passage (3) for feeding the paint, a paint injection nozzle (5) installed in the painting device body and having an injection port for injecting the paint, and a needle valve (6) for opening and closing the injection port to regulate the injection amount of the paint, the needle valve (6) having a tip part (14) with reduced diameter toward a tip side positioned on the injection port (8) side further comprising a first linear part (28) having a specified length inside the paint injection nozzle (5) and provided continuously with the tip part (14).Type: ApplicationFiled: July 12, 2004Publication date: December 16, 2004Inventor: Makoto Ueno
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Publication number: 20040250760Abstract: First link members (56A and 56B), a pair of second link members (57A and 57B), and three head holders (51R, 51G, and 51B) are installed rotatably. Rotational pivots (50A and 50B) provided at intermediate portions of the second link members (57A and 57B) and a reference nozzle of the reference head holder (51R) are positioned on the same line in a main scanning direction. The reference head holder (51R) is rotated about the reference nozzle, and the other head holders (51G and 51B) are also rotated simultaneously. The head holders (51G and 51B) are formed to be movable parallel to a sub scanning direction, irrespective of the rotation angles thereof.Type: ApplicationFiled: March 26, 2004Publication date: December 16, 2004Inventor: Makoto Goto
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Publication number: 20040250761Abstract: Systems and methods are provided whereby pumpable viscous fibrous material may be applied onto surfaces of high temperature process vessels while hot (i.e., while at or near such vessels' high operational temperatures of several hundreds up to several thousands of degrees Fahrenheit). More specifically, there are preferably provided a lance having a nozzle structure at a distal end thereof, and a pump system for pumping a pumpable fibrous refractory material to the nozzle. The lance has a length sufficient to allow it to be inserted into the high temperature process vessel so that the nozzle structure is adjacent an area in need of repair while an operator holds a proximal end thereof outside the vessel.Type: ApplicationFiled: May 14, 2004Publication date: December 16, 2004Applicant: Fosbel Intellectual AGInventors: Kevin D. Pendleton, Stephen D. Cherico
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Publication number: 20040250762Abstract: Immediately after a cold substrate G is placed on a substrate table 3, a large electric power P1 is supplied to a heating element 32 embedded in the substrate table for a time period T1 so that temperature of the substrate table overshoots a target temperature, and thereafter zero or very small electric power P2 is supplied to the heating element for a time period T2 so that the temperature of the substrate table 3 is lowered to the target temperature while temperature of the substrate continues to rise up to the target temperature. When both the temperature of the substrate table and of the substrate reaches approximately to the target temperature after the time period T2 has elapsed, control of the electric power is entrusted to a PID controller.Type: ApplicationFiled: June 16, 2004Publication date: December 16, 2004Applicant: TOKYO ELECTRON LIMITEDInventors: Kenichi Shigetomi, Nobuyuki Sata, Toshichika Takei, Masatoshi Kaneda
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Publication number: 20040250763Abstract: A cathode for use in a deposition chamber for the plasma enhanced deposition of semiconductor materials onto one or more webs of substrate material. The cathode is a planar fountain cathode which serves the dual functions of (1) an electrode for the plasma deposition process and (2) a fountain-like distribution conduit for the flow of fresh reaction gas to and for the evacuation of the spent reaction gas from the plasma region to maintain a uniform, constant pressure plasma reaction. The gas outlets of the inventive cathode are covered by gas dispersion plates which prevent direct, line-of-sight, flow of the process gases to the adjacent deposition substrate and more uniformly distributes the gases flowing into the plasma region between the cathode and the substrate.Type: ApplicationFiled: January 11, 2002Publication date: December 16, 2004Inventor: Stanford R. Ovshinsky
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Publication number: 20040250764Abstract: High purity silicon usable for production of solar cells is easily produced with high production efficiency. In a rotary chamber (50) made of quartz, which is evacuated and filled with an hydrogen-argon atmosphere containing SiF4, a plasma area (60) is generated by supplying electric power from a coil (51) to decompose SiF4 and produce silicon as being fine powder particles. Fine particles of seed silicon (Si) in the rotating reaction chamber are picked up and transported upward by weirs (52), and then they can fall by gravity into the plasma area where silicon elements produced by decomposition of SiF4 are deposited onto surfaces of the silicon fine particles.Type: ApplicationFiled: December 6, 2002Publication date: December 16, 2004Inventors: Mitsugu Nagano, Takehiko Moriya, Takehiro Takoshima, Nobuyuki Mori, Fumiteru Yamaguchi
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Publication number: 20040250765Abstract: In a processing apparatus which performs a film deposition by alternately supplying a plurality of source gases, the source gases are prevented from reacting within an exhaust pipe so as to prevent the exhaust pipe from clogging due to a reaction by-product. A gas supply to a processing container is switched between a TiCl4 supply system and a NH3 supply system. Additionally, a gas exhaust from the processing container is switched between a TiCl4 exhaust system and a NH3 exhaust system. The gas exhaust is switched to the TiCl4 exhaust system when the gas supply is switched to the TiCl4 supply system, and the gas exhaust is switched to the NH3 exhaust system when the gas supply is switched to the NH3 supply system. The switching is performed by a stop valve provided to each of the supply system and the exhaust system.Type: ApplicationFiled: October 3, 2003Publication date: December 16, 2004Applicant: Tokyo Electron LimitedInventors: Tadahiro Ishizaka, Hiroshi Kannan, Yasuhiko Kojima, Takashi Shigeoka, Yasuhiro Oshima, Kohei Kawamura
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Publication number: 20040250766Abstract: The present invention uses hybrid ball-lock devices as an alternate for threaded fasteners. Parts of the fastener exposed directly to the plasma act as a shield for the remaining pieces of the fastener or are used as a material to actually enhance plasma characteristics. The present invention also provides consistent electrical and mechanical contact between parts, without the use of any tools.Type: ApplicationFiled: March 25, 2004Publication date: December 16, 2004Applicant: TOKYO ELECTRON LIMITEDInventor: Steven T. Fink
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Publication number: 20040250767Abstract: A method and apparatus for coating a surface of a substrate using combustion chemical vapor deposition is disclosed. A chemical vapor deposition stream, composed of a coating precursor and a combustible medium, is directed toward a substrate and combusted to provide a reacted coating precursor in a gaseous plume. The plume is modified by exposing it to a shield prior to the plume contacting the surface of the substrate and depositing a coating thereon. The shield serves to control the coating thickness and material characteristics of the deposited material.Type: ApplicationFiled: April 21, 2004Publication date: December 16, 2004Applicant: Rohm and Haas Electronic Materials, L.L.C.Inventors: Marc Langlois, Anthony A. Cox
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Publication number: 20040250768Abstract: An ozone processing device includes: a mounting base on which a substrate is mounted; a heating device to heat the substrate on the mounting base; a plurality of plates facing the substrate on the mounting base and equipped with discharge openings on the surface facing the substrate that discharge ozone gas in the direction of the substrate; and a gas supply device supplying ozone gas to the discharge openings of the plates to allow them to discharge gas. The plates are arranged in a co-planar manner with gaps formed between adjacent plates. The plates have a small volume so that even if there is heat transfer between the plates and the substrate, thermal equilibrium is achieved between the plates and the substrate in a short time, thus making temperature management of the substrate easy.Type: ApplicationFiled: July 12, 2004Publication date: December 16, 2004Applicant: Sumitomo Precision Products Co., Ltd.Inventors: Tatsuo Kikuchi, Takeo Yamanaka, Yukitaka Yamaguchi, Tokiko Kanayama
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Publication number: 20040250769Abstract: A unique system and method for laser vapor deposition of a material onto a substrate are disclosed. The system includes a laser source configured to emit a laser beam, a target material positioned in front of the laser source to be struck by the laser beam, and a substrate positioned behind the target material in relation to the laser beam. The laser beam strikes the target material causing a portion thereof to melt. The melting zone propagates through the target material until is reaches the opposing surface, and a vaporized portion of the target material is ejected onto the substrate. The target material can be deposited onto the substrate in a pre-determined pattern with a pre-determined thickness. In another embodiment of the invention, the target material can be deposited on a cassette structure to facilitate easy access.Type: ApplicationFiled: January 13, 2004Publication date: December 16, 2004Applicant: Finisar CorporationInventors: William Freeman, Ming K. Shi
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Publication number: 20040250770Abstract: The performance of a plasma processing apparatus which is disassembled, transferred, and reassembled is evaluated. The plasma processing apparatus has a plasma processing chamber having an electrode for exciting a plasma, a radiofrequency generator connected to the electrode, and an impedance matching circuit for performing the impedance matching between the plasma processing chamber and the radiofrequency generator. The performance of the apparatus is evaluated whether or not three times the first series resonant frequency of the plasma processing chamber is larger than the power frequency supplied to the plasma processing chamber.Type: ApplicationFiled: July 9, 2004Publication date: December 16, 2004Inventors: Akira Nakano, Tadahiro Ohmi
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Publication number: 20040250771Abstract: A microwave plasma substrate processing apparatus is formed of a processing vessel defining a process space in which a plasma processing is conducted, a stage provided in the process space for supporting the substrate to be processed, an evacuation passage formed between the processing vessel and the stage so as to surround the stage, an evacuation system connected to the processing vessel for evacuating the process space via the evacuation passage, a process gas supplying system for introducing a process gas into the process space, a microwave window provided so as to face the substrate to be processed on the stage and formed of a dielectric material and extending substantially parallel to the substrate to be processed, the microwave window forming a part of an outer wall of the processing vessel, and a microwave antenna coupled to the microwave window, wherein at least a part of the processing vessel is covered with an insulation layer.Type: ApplicationFiled: April 16, 2004Publication date: December 16, 2004Inventors: Shigenori Ozaki, Tamaki Yuasa
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Publication number: 20040250772Abstract: The cylinder includes a core and a coating covering most of the core. The core is made from a heat-resistant or insulating material. The core has inner and outer side walls and opposing first and second ends. The outer side wall is further away from a central longitudinal axis of the cylinder than the inner wall. The first end is configured to contact an edge ring that supports a semiconductor substrate. The coating is substantially opaque to infrared radiation, and covers all external surfaces of the core except for the first end. The core is preferably made from quartz or ceramics, while the coating is preferably made from a polysilicon.Type: ApplicationFiled: June 16, 2003Publication date: December 16, 2004Inventors: Sundar Ramamurthy, Vedapuram Achutharaman, Ho T. Fang
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Publication number: 20040250773Abstract: A semiconductor film formation device has: a reaction vessel that includes a gas flow path to allow source gas to pass through and a substrate mount site provided in the gas flow path to mount a substrate; a temperature control means that is disposed opposite to the substrate mount site and close to the reaction vessel to control the internal temperature of the reaction vessel; and a thermal conductivity adjusting member that is disposed between the reaction vessel and the temperature control means. The thermal conductivity adjusting member has a section with a thermal conductivity different from the other section along the gas flow path.Type: ApplicationFiled: March 18, 2004Publication date: December 16, 2004Inventors: Mitsuru Hasegawa, Akihiro Miyauchi, Kazutoshi Watanabe, Meguro Takeshi
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Publication number: 20040250774Abstract: The present invention satisfies this and other needs by providing a novel wafer heater, which isolates a heater element from the vacuum environment. Thus, a non-aluminum heater element can be used in a wafer heater of the current invention. The novel wafer heater of the invention has an interface with high vacuum integrity, minimal dead space and reduced potential for vacuum contamination.Type: ApplicationFiled: June 16, 2003Publication date: December 16, 2004Inventors: Brent Elliot, Frank Balma
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Publication number: 20040250775Abstract: It is an object to provide a cleaning method in a CVD apparatus capable of efficiently removing a by-product such as SiO2 or Si3N4 which is adhered to and deposited on the surfaces of an inner wall, an electrode and the like in a reaction chamber at a film forming step, in which the amount of a cleaning gas to be discharged is very small, an influence on an environment such as global warming is also lessened and a cost can also be reduced.Type: ApplicationFiled: April 27, 2004Publication date: December 16, 2004Inventors: Katsuo Sakai, Seiji Okura, Masaji Sakamura, Kaoru Abe, Hitoshi Murata, Etsuo Wani, Kenji Kameda, Yuki Mitsui, Yutaka Ohira, Taisuke Yonemura, Akira Sekiya
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Publication number: 20040250776Abstract: To realize the temperature control of the sample-setting portion and enable to perform exposure or inspection of samples accurately while preventing the generation of dust, deterioration of the degree of vacuum and contamination in a vacuum atmosphere.Type: ApplicationFiled: March 26, 2004Publication date: December 16, 2004Inventors: Masaki Mizuochi, Yoshimasa Fukushima, Tadayuki Kubo
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Publication number: 20040250777Abstract: A window bird feeder. In a described embodiment, a window bird feeder includes a bird feed storage compartment bounded by an arch fastened to a base. The arch has openings therethrough for dispensing bird feed from the storage compartment onto the base. A rail on a front wall of the storage compartment separates a bird feed dispensing area of the base from a bird positioning area of the base. An upper lip and a lid of the bird feeder are configured for ease of filling the storage compartment.Type: ApplicationFiled: June 11, 2003Publication date: December 16, 2004Inventor: Robert S. Stachowiak
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Publication number: 20040250778Abstract: A thermal treatment device for the neck of animals comprises three distinct elements: 1) a cover element, 2) a thermal (e.g., preferably cooling) element within the cover element and 3) an attachment element within the cover element (and preferably within the thermal element). The device may be comfortably secured about the neck of the animal and the thermal element may comfort the neck and generally the body of the animal. The thermal treatment element is activated (e.g., refrigerated), then associated with the cover element and the attachment element and applied to the animal. The activation may also be done while the thermal treatment element is already associated with one or more of the cover element and the attachment element.Type: ApplicationFiled: June 10, 2003Publication date: December 16, 2004Inventors: Jacqueline A. Bennis, Susan Skramstad