Patents Issued in August 31, 2006
  • Publication number: 20060192900
    Abstract: A liquid crystal display includes a first substrate, a second substrate and a liquid crystal layer. The first substrate includes an active matrix, a control switch, a pixel electrode and a protrusion. The active matrix includes a number of pixels. Each pixel is defined by a first scan line, a second scan line, a first data line and a second data line. The control switch is disposed inside the pixel and electrically connected with the first scan line and the first data line. The pixel electrode is disposed inside the pixel and electrically connected with the control switch. The protrusion is substantially disposed between the pixel electrode and the first data line. The second substrate is disposed above the first substrate. The liquid crystal layer is disposed between the first substrate and the second substrate.
    Type: Application
    Filed: July 29, 2005
    Publication date: August 31, 2006
    Inventors: Kuei-Sheng Tseng, Hsu-Ping Tseng, Chung-Jen Chiang
  • Publication number: 20060192901
    Abstract: A support apparatus is provided for supporting a television or other video display for movement between a viewing position and a storage position. The support apparatus is attached to the frame of an article of furniture such as a bed. The support apparatus may allow the video display to rotate from a vertical, viewing position to a horizontal position in which the video display can be retracted beneath the article of furniture for storage. The movement of the support apparatus may be manual or automatic.
    Type: Application
    Filed: February 25, 2005
    Publication date: August 31, 2006
    Inventor: Daniel Hurd
  • Publication number: 20060192902
    Abstract: In an image projection apparatus, the deflection axis of the pixels of a display device is parallel to the longer sides of the display area of the display device, and the entrance pupil of a projection optical system is displaced from the line normal to the center of the display area in the direction parallel to the shorter sides of the display device. The distance from the display device to the optical component closest thereto is determined based on the intersection between the lowermost ray of projection light that leaves the lower end of the display area and reaches the entrance pupil of the projection optical system and the uppermost ray of illumination light that leaves the illumination optical system and reaches the upper end of the display device.
    Type: Application
    Filed: August 23, 2005
    Publication date: August 31, 2006
    Inventors: Yasumasa Sawai, Tomiei Kuwa
  • Publication number: 20060192903
    Abstract: An image projection device performing pixel shift in synchronization with sequential updating of image data is disclosed that is able to start and stop pixel shift operations within a period of updating the image frames while maintaining brightness of the image. The image projection device has an intermediate image formation optical system including a light valve able to update an image frame in a line-sequential manner, a pixel shift unit to shift the light path of a light beam from the light valve so as to shift a position of an image formed on the light valve, and an intermediate image formation unit arranged on the light path between the light valve and the pixel shift unit for forming an intermediate image of the image on the light valve at a position of the pixel shift unit.
    Type: Application
    Filed: January 30, 2006
    Publication date: August 31, 2006
    Inventors: Atsushi Takaura, Takanobu Osaka, Yasuyuki Takiguchi, Toshiaki Tokita, Kazuhiro Fujita, Kazuya Miyagaki, Hiroyuki Sugimoto
  • Publication number: 20060192904
    Abstract: A method and system for defect localization includes: (i) receiving a test structure that includes at least one conductor that is at least partially covered by an electro-optically active material; (ii) providing an electrical signal to the conductor, such as charge at least a portion of the conductor; and (iii) imaging the test structure to locate a defect.
    Type: Application
    Filed: October 3, 2003
    Publication date: August 31, 2006
    Inventors: Gilad Almogy, Chris Talbot, Lior Levin
  • Publication number: 20060192905
    Abstract: This invention relates to a display device comprising at least a first substrate (4), forming part of a display area (2), and at least one electrically controlled input device (3). According to the invention a first conductor pattern (8) for driving said display area (2) and a second conductor pattern (9) for tansmitting signals from said electrically controlled input 5 device (3) are arranged on said first substrate. The invention also relates to a method for manufacturing such a display device.
    Type: Application
    Filed: April 15, 2004
    Publication date: August 31, 2006
    Applicant: Koninklike Philips Electronics N.V.
    Inventors: Peter Cirkel, Peter Slikkerveer
  • Publication number: 20060192906
    Abstract: A thin film transistor array panel is provided, which includes a gate line, a data line intersecting the gate line, a storage electrode apart from the gate and data lines, a thin film transistor connected to the gate and data lines and having a drain electrode, a pixel electrode connected to the drain electrode, a first insulating layer over the thin film transistor and disposed under the pixel electrode, and a second insulating layer disposed on the first insulating layer and having an opening exposing the first insulating layer on the storage electrode.
    Type: Application
    Filed: February 17, 2006
    Publication date: August 31, 2006
    Inventors: Hye-Young Ryu, Jang-Soo Kim, Sang-Gab Kim, Hong-Kee Chin, Min-Seok Oh, Hee-Hwan Choe, Shi-Yul Kim
  • Publication number: 20060192907
    Abstract: An array substrate having double-layered metal patterns for use in a liquid crystal display device and a manufacturing method thereof are disclosed in the present invention.
    Type: Application
    Filed: April 26, 2006
    Publication date: August 31, 2006
    Inventors: Oh-Nam Kwon, Kyoung-Mook Lee, Nack-Bong Choi
  • Publication number: 20060192908
    Abstract: An arrangement for the display of images with selectable three-dimensionally visible or two-dimensional modes, including an illuminating device a filter array to impart a structure to the light a diffusing layer, and a transmissive image display device, with a variable distance a between the filter array and the diffusing layer, so that in a first position, the structure imparted by the filter array is essentially cancelled due to the light diffusion effect of the diffusing layer, and a two-dimensional image is shown, and the structure imparted by the filter array is essentially not cancelled, so that the image display device shows a three-dimensional image.
    Type: Application
    Filed: September 2, 2004
    Publication date: August 31, 2006
    Inventors: Wolfgang Tzschoppe, Thomas Brueggert, Markus Klippstein, Ingo Relke, Uwe Hofmann
  • Publication number: 20060192909
    Abstract: In the liquid crystal display device of the present invention, channels 13 containing gaps 12 of the adjacent color filers CF are formed on the surface of a transparent thickness section 11, such that when orientation agent is applied by means of a roller to the surface of the transparent section wall 11, the surplus orientation agent is conducted to either side of the transparent thickness wall 11 through the channels 13, such that the orientation agent does not gather and is dissolved, and the orientation thickness film does not become uneven as to produce any orientation defect and defective display is thereby avoided.
    Type: Application
    Filed: February 27, 2006
    Publication date: August 31, 2006
    Applicant: SANYO EPSON IMAGING DEVICES CORP.
    Inventors: Shinichiro Tanaka, Hironori Taniguchi, Koji Yoshida
  • Publication number: 20060192910
    Abstract: The invention provides a small-sized liquid crystal display in which a frame region of an outer peripheral portion of a display region is made small without any light leak at peripheral portion of the display region of a liquid crystal display panel. The invention also provides a manufacturing process of such a liquid crystal display. Periphery shading films. (shade films 3a and 3b) of a display region of a liquid crystal display panel are alternately formed on a first substrate 1 (shade film 3a) and a second substrate 2 (shade film 3b) oppositely arranged, and a transparent portion (width Q) for irradiating a seal resin 4 used to adhere the two substrates forming the liquid crystal display panel with ultraviolet rays 7 is provided within a region (width P) where the periphery shading films are formed.
    Type: Application
    Filed: April 19, 2006
    Publication date: August 31, 2006
    Applicant: Kabushiki Kaisha Advanced Display
    Inventors: Ichiro Takasaki, Yasuhiro Morii, Masaya Mizunuma
  • Publication number: 20060192911
    Abstract: A substrate for a transflective liquid crystal display that is capable of display in both reflective and transmissive modes and a display having the same. One embodiment includes a substrate that sandwiches a liquid crystal in combination with an opposite substrate formed with a common electrode on the opposing surface, a plurality of bus lines on a top surface of the substrate that intersect each other with an insulation film interposed therebetween, and thin film transistors formed near the intersections of the plurality of bus lines. A plurality of pixel regions constituted of a plurality of reflective regions in which reflective electrodes for reflecting incident light from the side of the top surface of the substrate are formed in a matrix and transmissive regions which are provided around the reflective regions and which transmit incident light from the side of a bottom surface toward the top surface of the substrate.
    Type: Application
    Filed: January 3, 2006
    Publication date: August 31, 2006
    Inventors: Katsufumi Ohmuro, Norio Sugiura, Kunihiro Tashiro, Yoshio Koike
  • Publication number: 20060192912
    Abstract: A liquid crystal display of a transflective IPS system in which a lateral electric field is applied to a liquid crystal layer. Polarization films are arranged on the entire surface of a transmissive display unit and a reflective display unit in a manner similar to a transmissive IPS system. An inner retardation layer whose retardation is equal to a half wave is formed in the reflective display unit. A retardation of the liquid crystal layer of the reflective display unit is set to a quarter wave. Thus, a reflective display can be performed in a wide range of environment from a light place to a dark place and a transmissive display of a wide viewing angle and high picture quality can be performed.
    Type: Application
    Filed: April 4, 2006
    Publication date: August 31, 2006
    Inventors: Osamu Itou, Junji Tanno, Hirotaka Imayama, Takahiro Ochiai, Masateru Morimoto
  • Publication number: 20060192913
    Abstract: A retardation film that has an optical retardation layer whose alignment direction is controlled precisely and that is produced at a low cost, and also a method for producing the same, are provided. The explanation below relates to FIG. 1. First, a base-attached anisotropic layer 12 is prepared by laminating an optically anisotropic layer 11 on a transparent base 10. Next, on the optically anisotropic layer 11, a solution containing a polymer reacting with polarized ultraviolet light and a liquid crystalline compound is coated and dried. Then, it is irradiated with polarized ultraviolet light so as to align the liquid crystalline compound, and irradiated further with unpolarized ultraviolet light as required to crosslink the liquid crystalline compound, thereby forming a retardation film 1 having an optical retardation layer 13 that is directly formed on the optically anisotropic layer 11.
    Type: Application
    Filed: January 26, 2004
    Publication date: August 31, 2006
    Inventors: Shunsuke Shutou, Hiroaki Kobayashi, Takuya Matsunaga
  • Publication number: 20060192914
    Abstract: A liquid crystal display apparatus includes a liquid crystal cell, first and second phase plates and a first polarizing plate stacked, in this order, on the outer surface of a first transparent substrate, third and fourth phase plates and a second polarizing plate stacked, in this order, on the outer surface of a second transparent substrate. The optical characteristics of the liquid crystal cell, the first to fourth phase plates, and the first and second polarizing plates are set within a predetermined range.
    Type: Application
    Filed: December 23, 2005
    Publication date: August 31, 2006
    Inventors: Mitsuo Oizumi, Mitsuro Kano, Yuzo Hayashi
  • Publication number: 20060192915
    Abstract: It is an object to provide a highly reliable display device. It is a feature an IC is over a substrate and a material layer having the same height is thereover. An IC is provided on one side of the substrate, and a material layer having the same height as the IC is provided on at least another side. Further, an IC is provided on one side of the substrate, and material layers having the same height as the IC are provided on the other sides. Further, an IC is provided on one side of the substrate, and a material layer having the same height as the IC is provided at a corner of the substrate.
    Type: Application
    Filed: November 16, 2005
    Publication date: August 31, 2006
    Applicant: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Hajime Kimura
  • Publication number: 20060192916
    Abstract: Primary and auxiliary lens assemblies are provided that allow a wearer easy usage with a reduced risk of misalignment or detachment through the use of micromagnets. Conventional magnetic auxiliary lens assemblies are typically not compatible with frameless or rimless designs. The improved assemblies disclosed herein employ magnets embedded in either or both of the auxiliary lens assemblies and the bushings of the primary lens assemblies.
    Type: Application
    Filed: February 27, 2006
    Publication date: August 31, 2006
    Applicant: E'lite Optik, Inc.
    Inventors: Philip Langley, Greg Smith
  • Publication number: 20060192917
    Abstract: An improvement upon telemicroscopic loupes of the type which are adjustably mounted to an eyeglass frame, headmount or through-lens designs. The preferred embodiment includes a cap including an optical element to adjust for the working distance of a loupe. The cap may be frictionally fit onto the loupe or threadably attached to the loupe body. According to an alternative embodiment, one or more eyepiece components may be used alone or in combination with the end cap for adjusting prescription and/or working distance.
    Type: Application
    Filed: February 3, 2006
    Publication date: August 31, 2006
    Inventor: Byung Chang
  • Publication number: 20060192918
    Abstract: A spectacle lens is disclosed. The disclosed lens provides a vision correcting area for the correction of a wearer's refractive error. The viewing correction area provides correction for non-conventional refractive error to provide at least a part of the wearer's vision correction. The lens has a prescription based on a wave front analysis of the wearer's eye and the lens can further be modified to fit within an eyeglass frame.
    Type: Application
    Filed: April 20, 2006
    Publication date: August 31, 2006
    Inventor: Ronald Blum
  • Publication number: 20060192919
    Abstract: This invention is generally related to vision corrections by means of multifocal ophthalmic lenses or by means of corneal refractive surgery. In particular, the present invention provides a multifocal contact lens, a multifocal intraocular lens, a method for making a multifocal ophthalmic lens (contact lens and intraocular lens), and a method of correcting presbyopia by reshaping the cornea of an eye.
    Type: Application
    Filed: April 18, 2006
    Publication date: August 31, 2006
    Inventor: Joseph Lindacher
  • Publication number: 20060192920
    Abstract: An ophthalmic measurement apparatus capable of obtaining refractive power containing a skew ray component, and further obtaining wavefront aberration from the refractive power with more ease and higher precision includes an optical system projecting slit light bundles onto a fundus of an examinee's eye and scanning the light bundles in predetermined first and second directions, an optical system with photodetectors placed in positions approximately conjugate with a cornea of the eye and placed in at least one meridian direction orthogonal to an optical axis of the photo-receiving optical system, and an arithmetic part obtaining, based on signals indicating phase differences from one of the photodetectors when photo-receiving the light bundles scanned in the first and second directions, refractive power in two directions at a corneal position corresponding to the photodetector position, and further obtains at least one of refractive power and a wavefront inclination by vector-synthesizing the obtained refracti
    Type: Application
    Filed: February 3, 2006
    Publication date: August 31, 2006
    Applicant: NIDEK CO., LTD.
    Inventors: Masanao Fujieda, Yukinobu Ban
  • Publication number: 20060192921
    Abstract: A device for establishing a desired alignment between a patient's eye and a laser system to facilitate an engagement therebetween includes a light source to illuminate the eye. A moveable platform is provided to move the patient relative to the laser system. To establish alignment between the eye and the laser system, a reference marker is based on the laser system. An image of the marker, along with reflections from the illuminated eye, is then transmitted to the system controller. There, the image and reflections are processed to determine a measured alignment that is then compared to the desired alignment. An error signal that is indicative of an alignment difference is then generated and used to incrementally move the platform, or the patient, in an appropriate direction.
    Type: Application
    Filed: February 25, 2005
    Publication date: August 31, 2006
    Inventors: Frieder Loesel, Fritz Meisel, Bernhard Gress, Tobias Kuhn
  • Publication number: 20060192922
    Abstract: A projector includes an electrooptic modulator that modulates an illumination light flux in accordance with image information; a projection optical system that projects the illumination light flux modulated at the electrooptic modulator; an illuminating system that so as to illuminate an entire image forming area in one direction on an image forming area of the electrooptic modulator and to partially illuminate the image forming area in the other direction, emits an illumination light flux having a sectional form compressed in the other direction of directions; and a rotating prism that is rotated at a constant speed so that an illumination light flux from the illuminating system scan along the other direction over the image forming area of the electrooptic modulator, wherein the projector further includes: a light transmittance control module that changes a light transmittance of the illumination light flux depending on a position of the illumination light flux over the image forming area so as to reduce a d
    Type: Application
    Filed: February 15, 2006
    Publication date: August 31, 2006
    Applicant: Seiko Epson Corporation
    Inventor: Koichi Akiyama
  • Publication number: 20060192923
    Abstract: A method for controlling a lighting device that consists of at least a lighting source, a color sequential device and a single light valve consisting of an array of light processing elements that are controlled by bits, the method comprising the steps of emitting a light beam with said light source, filtering said light beam by said color sequential device to achieve a colored light beam and processing said colored light beam with a bit depth of less than 16.
    Type: Application
    Filed: November 10, 2005
    Publication date: August 31, 2006
    Inventors: Chris Colpaert, Peter Gerets
  • Publication number: 20060192924
    Abstract: To provide a projector or the like, which use a solid-state light-emitting element as light source and which provides a bright, stable, and uniform projection image, the present invention includes: a light source to emit light; a spatial light modulator to modulate the light from the light source in accordance with an image signal; and a projector lens to project the light modulated by the spatial light modulator. The spatial light modulator is a tilt mirror device including a movable mirror element that reflects the light from the light source in the direction of the projector lens or in the direction other than that of the projector lens.
    Type: Application
    Filed: April 19, 2006
    Publication date: August 31, 2006
    Applicant: Seiko Epson Corporation
    Inventors: Hideya Seki, Kaoru Yamaguchi
  • Publication number: 20060192925
    Abstract: In one aspect, a first sequence of patterns of light symbols that spatio-temporally encode two-dimensional position information in a first projection plane is projected onto a scene. A second sequence of patterns of light symbols that spatio-temporally encode two-dimensional position information in a second projection plane is projected onto the scene. Light patterns corresponding to the first and second sequences of patterns of light symbols reflected from the scene are captured at a capture plane. Captured light symbol sequence codes are determined from the captured light patterns. A correspondence mapping of the first projector plane and the second projector plane with respect to a reference coordinate system is generated based at least in part on correspondence between the captured light symbol sequence codes and the first and second sequences of light symbol patterns.
    Type: Application
    Filed: February 28, 2005
    Publication date: August 31, 2006
    Inventor: Nelson Chang
  • Publication number: 20060192926
    Abstract: The present invention relates to a video projector (10) including a housing (18) and an optical engine (40) located therein for projecting an image onto a distal surface. The optical engine (40) includes a liquid crystal display (LCD) projector and further includes an objective lens (38) to focus the image. Such a configuration makes the projector (10) ruggedised in that the optical engine (40) securely holds all of the components necessary to project an image, including the objective lens (38). Furthermore, there exists a channel (42) between the optical engine (40) and the housing (18) which, together with a fan (58) and two strategically positioned cooling vents, allows for the optical components located within the optical engine (40) to be sufficiently cooled. The projector (10) operates through the use of a cooled transformer located in a base (12) which converts mains input, typically 240/110 V, to 12 V.
    Type: Application
    Filed: March 25, 2004
    Publication date: August 31, 2006
    Inventors: Kevin Soper, Philip Banks
  • Publication number: 20060192927
    Abstract: A display comprises a casing (40) having a first lower air hole (36) and a first upper air hole (38), a liquid crystal display unit (12) arranged on the front side in the casing, a first power supply unit (15) arranged on the back side in the casing for supplying power to the backlight of the liquid crystal display unit, and a first cooling fan (23) so arranged on the back side in the casing that it is in the vicinity of the first upper air hole. A first circuit board (25) constituting the first power supply unit is so arranged that it is inclined to a first lateral face (42) of the casing. With this structure, reliability of the built-in power supply is improved and its temperature increase is suppressed.
    Type: Application
    Filed: March 22, 2004
    Publication date: August 31, 2006
    Inventors: Toshio Ikeuchi, Keiji Horibe, Kenji Fukumasa, Hiroshi Maeta
  • Publication number: 20060192928
    Abstract: A pattern transferring apparatus is disclosed which can prevent damage to a transferred pattern and realize fast mold release regardless of the type of resist. The pattern transferring apparatus transfers a pattern formed on a mold to an object by bringing the mold into contact with the apparatus has a deformer which causes deformation in the mold for releasing the mold from the object. The apparatus transfers a pattern formed on a mold to a photo-curing resin by bringing the mold into contact with the photo-curing resin and applying light thereto to cure the photo-curing resin. The apparatus has an optical system which applies light at an irradiation light intensity to a non-transfer area other than a transfer area where the pattern is to be transferred in the photo-curing resin, the intensity being different from an irradiation light intensity of light applied to the transfer area.
    Type: Application
    Filed: February 27, 2006
    Publication date: August 31, 2006
    Inventors: Kazuyuki Kasumi, Hirohisa Ota, Eigo Kawakami, Takashi Nakamura, Toshinobu Tokita
  • Publication number: 20060192929
    Abstract: A lithographic apparatus is disclosed that has a semi-permeable membrane, a liquid inlet adapted to supply liquid to a first side of the membrane, and a gas inlet adapted to supply to a second side of the membrane either: (a) a vapor of the liquid, or (b) a gas which dissociates when dissolved in the liquid.
    Type: Application
    Filed: February 28, 2005
    Publication date: August 31, 2006
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Martinus Verhagen, Roelof De Graaf, Johannes Jacobs, Franciscus Maria Teunissen, Jurgen Benischek
  • Publication number: 20060192930
    Abstract: An exposure apparatus includes a projection optical system for projecting a pattern of a reticle onto an object to be exposed, via a liquid that is filled in a space between a final optical element in the projection optical system and the object, and a liquid-holding member provided around the object and having a surface that is as high as a surface of the object, the liquid-holding member provided for retaining the liquid, wherein the surface of the liquid-holding member is processed so that a first contact angle between the liquid and the surface of the object is equal to or smaller than a second contact angle between the liquid and the surface of the liquid-holding member.
    Type: Application
    Filed: February 27, 2006
    Publication date: August 31, 2006
    Applicant: CANON KABUSHIKI KAISHA
    Inventors: AKIKO IIMURA, Sunao Mori, Noriyasu Hasegawa
  • Publication number: 20060192931
    Abstract: A system for maintaining the focus of an exposure tool includes an exposure tool and an analysis system. The exposure tool is configured to generate a sample for determining a product best center of focus, generate a first sample for determining an initial exposure tool focus, and generate a second sample for determining a second exposure tool focus. The analysis system is configured to determine an exposure tool delta baseline based on the product best center of focus and the initial exposure tool focus, set the exposure tool focus to the product best center of focus, determine a recommended focus based on the delta baseline and the second exposure tool focus, and set the exposure tool focus based on the recommended focus.
    Type: Application
    Filed: February 25, 2005
    Publication date: August 31, 2006
    Inventors: William Roberts, Christopher Gould
  • Publication number: 20060192932
    Abstract: A method and apparatus to create two dimensional and three dimensional structures using a maskless photolithography system that is semi-automated, directly reconfigurable, and does not require masks, templates or stencils to create each of the planes or layers on a multi layer two-dimensional or three dimensional structure. In an embodiment, the pattern generator comprises a micromirror array wherein the positioning of the mirrors in the micromirror array and the time duration of exposure can be modulated to produce gray scale patterns to photoform layers of continuously variable thickness. The desired pattern can be designed and stored using conventional computer aided drawing techniques and can be used to control the positioning of the individual mirrors in the micromirror array to reflect the corresponding desired pattern. A fixture for mounting of the substrate can be incorporated and can allow the substrate to be moved three dimensions. The fixture can be rotated in one, two, or three directions.
    Type: Application
    Filed: April 7, 2003
    Publication date: August 31, 2006
    Inventor: David Fries
  • Publication number: 20060192933
    Abstract: A multiple exposure system and a multiple exposure method using the same enhance the resolution of the image of the mask pattern transferred to a substrate. The system includes NA controllers that provide excellent resolution with respect to the directions of the short axis and long axis of the mask pattern. In one form of the method, a first exposure process is performed using a first NA controller that provides excellent resolution with respect to the direction of the short axis of the mask pattern and subsequently, a second exposure process is performed using a second NA controller that provides excellent resolution with respect to the direction of the long axis of the mask pattern. Alternatively, the first exposure process and the second or high order exposure process can be sequentially performed using the first and second NA controllers simultaneously.
    Type: Application
    Filed: January 13, 2006
    Publication date: August 31, 2006
    Inventors: Sang-jin Kim, Gi-sung Yeo, Joon-soo Park, Byeong-soo Kim
  • Publication number: 20060192934
    Abstract: An exposure apparatus includes a reflective element for reflecting and introducing light from a light source to a plate, at least one first driver for providing the reflective element with a force and/or a displacement in at least one directions, and at least one second driver for providing the reflective element with a force and/or a displacement in at least one directions, wherein the first and second drives are connected in series to each other.
    Type: Application
    Filed: April 20, 2006
    Publication date: August 31, 2006
    Inventor: Yoshikazu Miyajima
  • Publication number: 20060192935
    Abstract: A method for configuring the optical transfer of a patterning device pattern onto a substrate with a lithographic apparatus is presented. The method includes adjusting an intensity of a first illumination shape relative to a second illumination shape, the first and the second illumination shapes defining respectively a first illumination area and a second illumination area within a pupil plane of an illumination system of the lithographic apparatus, while maintaining the first and second illumination areas substantially constant, and illuminating the patterning device pattern with the first and second illumination shapes.
    Type: Application
    Filed: February 14, 2006
    Publication date: August 31, 2006
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Steven Hansen, Jozef Finders, Luis Alberto Colina
  • Publication number: 20060192936
    Abstract: A lithographic apparatus includes an illuminator configured to condition a beam of radiation and a support configured to hold a patterning device. The patterning device is configured to pattern the beam of radiation according to a desired pattern. The lithographic apparatus also includes a substrate table configured to hold a substrate and a projection system configured to project the patterned beam onto a target portion of the substrate to form a patterned image on the substrate. The apparatus further includes a sensor configured and arranged to intercept a portion of the beam and to measure a transmission of the beam through at least a portion of the patterning device.
    Type: Application
    Filed: February 14, 2006
    Publication date: August 31, 2006
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Koen Schenau, Maurice Henricus Janssen, Antoine Kiers, Hans Laan, Peter Vanoppen
  • Publication number: 20060192937
    Abstract: A lithographic apparatus includes an illumination system configured to condition a radiation beam; a support constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam; a substrate table constructed to hold a substrate; a projection system configured to project the patterned radiation beam onto a target portion of the substrate; and a detector for measuring the intensity of the radiation after it has passed through the projection system. The apparatus further includes a polarization changing element, such as a quarter-wave plate, that is adjustable; and a polarization analyzer, such as a linear polarizer, wherein the polarization changing element and the polarization analyzer are arranged in order in the radiation beam path at the level at which a patterning device would be held by the support.
    Type: Application
    Filed: February 25, 2005
    Publication date: August 31, 2006
    Applicant: ASML Netherlands B.V.
    Inventors: Marcus Adrianus Kerkhof, Wilhelmus Boeij, Hendrikus Robertus Greevenbroek, Michel Fransois Klaassen, Martijn Gerard Wehrens, Tammo Uitterdijk
  • Publication number: 20060192938
    Abstract: A distance image sensor for removing the background light and improving the charge transfer efficiency in a device for measuring the distance to an object by measuring the time-of-flight of the light. In a distance image sensor for determining the signals of two charge storage nodes which depend on the delay time of the modulated light, a signal by the background light is received from the third charge storage node or the two charge storage nodes in a period when the modulated light does not exist, and is subtracted from the signal which depends on the delay time of the two charge storage nodes, so as to remove the influence of the background. Also by using a buried diode as a photo-detector, and using an MOS gate as gate means, the charge transfer efficiency improves. The charge transfer efficiency is also improved by using a negative feedback amplifier where a capacitor is disposed between the input and output.
    Type: Application
    Filed: January 28, 2004
    Publication date: August 31, 2006
    Inventor: Shoji Kawahito
  • Publication number: 20060192939
    Abstract: A method making use of an optical sharpness meter for measuring and quantifying the degree of sharpness at points along a blade by directing a light at the sharpened edge and measuring the intensity of the reflected light which varies with the sharpness and using the information to direct efforts to sharpen the edge as needed.
    Type: Application
    Filed: May 2, 2006
    Publication date: August 31, 2006
    Inventor: Robert Lebeau
  • Publication number: 20060192940
    Abstract: The present invention provides a novel flow cytometry system having high sample cell throughput with simultaneous single and multi-parameter development, extraction and analysis. The invention is comprised of one or more analytic modules or chips aggregated into a stack or chain creating a common laser light transmission channel while maintaining a separate fluid sample flow path within each chip. Each flow chip includes an array of optical fiber light receivers. Each chip also includes integrated waveguides to receive and channel scatter, reflected or fluoresced light of specific frequency and wavelength to the optical fiber receiver. One or more waveguides and optical fiber receivers may be incorporated within each flow chip. Each sensing optical fiber delivers its received light emission to an electro-optical system signal processing module for measuring, digitizing and identifying the light signal.
    Type: Application
    Filed: January 20, 2006
    Publication date: August 31, 2006
    Inventor: Janette Phi-Wilson
  • Publication number: 20060192942
    Abstract: A method of measuring polarization mode dispersion (PMD) of an optical fiber, includes estimating PMD when an optical fiber is formed as an optical cable, from a beat length when the optical fiber is wound around a bobbin, and an average coupling length when the optical fiber is formed as the optical cable.
    Type: Application
    Filed: April 18, 2006
    Publication date: August 31, 2006
    Inventors: Ryuichiro Goto, Shoji Tanigawa, Shoichiro Matsuo, Kuniharu Himeno
  • Publication number: 20060192943
    Abstract: An exposure tool includes an illumination source, a blazed phase grating reticle, a lens system, a focus sensor configured for maintaining a focus of the lens system, a stage holding a sample, and a controller. The controller is configured to control the illumination source and a position of the blazed phase grating reticle and the lens system relative to the stage to expose the sample according to a product shot map to generate a blazed phase grating sample. The controller is configured to adjust a focus offset of the exposure tool by product shot to improve focal plane fitting based on feedback generated from an analysis of images of the blazed phase grating sample.
    Type: Application
    Filed: February 25, 2005
    Publication date: August 31, 2006
    Inventors: William Roberts, Gerhard Kunkel, Patrick Lomtscher, Karl Schumacher
  • Publication number: 20060192944
    Abstract: A method and an apparatus for making visible a mark on a spectacle lens are disclosed. An illumination light beam is directed to the spectacle lens. The illumination light beam runs through the spectacle lens and, after having run through the spectacle lens, is reflected on a reflector configured as a retroreflector, then runs again through the spectacle lens, and is finally fed to a camera as an observation light beam. The reflector is moved. Further, a measurement light beam is directed to said spectacle lens and fed to a sensor for measuring a physical property of the spectacle lens. The measurement light beam is generated by a first light source and the illumination light beam is generated by a second light source. The first and the second light sources are physically distinct units.
    Type: Application
    Filed: January 13, 2006
    Publication date: August 31, 2006
    Inventors: Matthias Hornauer, Adalbert Hanssen
  • Publication number: 20060192945
    Abstract: A method and an apparatus for making visible a mark on a spectacle lens are disclosed. An illumination light beam is directed to the spectacle lens. The illumination light beam runs through the spectacle lens and, after having run through the spectacle lens, is reflected on a reflector configured as a retroreflector, then runs again through the spectacle lens, and is finally fed to a camera as an observation light beam. The reflector is moved. Further, a measurement light beam is directed to said spectacle lens and fed to a sensor for measuring a physical property of the spectacle lens. The measurement light beam is generated by a first light source and the illumination light beam is generated by a second light source. The first and the second light sources are physically distinct units.
    Type: Application
    Filed: January 13, 2006
    Publication date: August 31, 2006
    Inventors: Matthias Hornauer, Adalbert Hanssen
  • Publication number: 20060192946
    Abstract: The invention relates to a method for the geodesical measurement of an object (1), using a geodesical measuring appliance (2) comprising recording means (3) for acquiring a recorded image (4) at least of the object (1) to be geodesically measured. Once the angular orientation of a coverage strip (5) of the recording means (3) has been determined, the image (4) is captured and represented at least partially in the form of a display image (6). A set of recorded image co-ordinates (7) are determined by establishing at least one set of associated display image co-ordinates (8), and the set of recorded image co-ordinates (7) is transformed into at least one geodesical measuring variable, especially a solid angle. Templates (10) which are in the form of models that can be placed on the display image and at least partially describe the object (1) are used to support the user during the fixing of the target point.
    Type: Application
    Filed: March 18, 2004
    Publication date: August 31, 2006
    Applicant: Leica Geosystems AG
    Inventor: Bernd Walser
  • Publication number: 20060192947
    Abstract: An inspection system includes an illumination source configured to illuminate a blazed phase grating sample, image collection pathways and an imaging system configured to capture an image of a sample point of the blazed phase grating sample, and a controller configured to adjust the illumination source in response to an analysis of the image of the sample point to determine illumination uniformity of the inspection system.
    Type: Application
    Filed: February 25, 2005
    Publication date: August 31, 2006
    Inventors: William Roberts, Gerhard Kunkel, Patrick Lomtscher, Karl Schumacher
  • Publication number: 20060192948
    Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. They system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.
    Type: Application
    Filed: December 17, 2005
    Publication date: August 31, 2006
    Inventors: Neil Judell, Ian Kohl, Songping Gao, Richard Bills
  • Publication number: 20060192949
    Abstract: A surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features back collectors disposed in the back quartersphere, outside the incident plane, for collecting light scattered from the surface of the workpiece. The back collectors are disposed at a relative minimum in the portion of scattered light attributable to haze relative to the portion of scattered light attributable to defect scatter portion, or, alternatively, at a relative minimum in the Rayleigh scatter.
    Type: Application
    Filed: December 17, 2005
    Publication date: August 31, 2006
    Inventors: Richard Bills, Neil Judell
  • Publication number: 20060192950
    Abstract: A surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The processing subsystem has a channel formation capability for forming selected channels and developing channel output associated with each selected channel, with the channel output developed from collector output associated with at least one collection and detection module.
    Type: Application
    Filed: December 17, 2005
    Publication date: August 31, 2006
    Inventors: Neil Judell, Songping Gao, Timothy Tiemeyer