Patents Issued in March 1, 2007
  • Publication number: 20070046894
    Abstract: A rigid contact lens is provided for correcting an irregularly curved cornea, comprising a front surface (2) and a rear surface which consists of (3) a central optical zone (4) and a peripheral zone (5). The central optical zone (4) has such an aspherical rotationally symmetric or non-rotationally symmetric design that, with equal central curvature radius in the center (Z) of the central optical zone (4), the sagittal depth (sellip) of the central optical zone (4) is increased as compared with a spherical optical zone.
    Type: Application
    Filed: August 23, 2006
    Publication date: March 1, 2007
    Inventor: Dieter Muckenhirn
  • Publication number: 20070046895
    Abstract: An eye exercise device and method for strengthening the eyes. The eye exercise device has a first portion, a second portion, a mirror, and viewing cards. The first portion has a first end and a second end with a longitudinal channel formed therethrough. The second portion has a longitudinal dimension and is positioned at an angle relative to the first portion in a connection region of the first and second portions. The second portion has at least one viewing card holder. A mirror is located in the connection region and directs light through the first and second portions. A selected viewing card is adapted to be retained by the viewing card holder. The viewing card has graphic indicia adapted to exercise the eyes by requiring a user to focus for an interval of time on the graphic indicia to strength the eye muscles.
    Type: Application
    Filed: August 24, 2006
    Publication date: March 1, 2007
    Inventor: Maxim Levinrad
  • Publication number: 20070046896
    Abstract: A miniature projector module includes: a light source unit capable of emitting source light with first and second polarizations; a polarization beam splitter capable of reflecting the source light with the first polarization, and permitting transmission of the source light with the second polarization therethrough; a first image modulator capable of converting the source light with the first polarization reflected by the beam splitter into image light with the second polarization, and directing the image light with the second polarization toward the beam splitter for further transmission therethrough; a second image modulator capable of converting the source light with the second polarization transmitted through the beam splitter into image light with the first polarization, and directing the image light with the first polarization toward the beam splitter for further reflection thereby; and a projector lens for receiving and projecting the image light from the beam splitter.
    Type: Application
    Filed: March 29, 2006
    Publication date: March 1, 2007
    Inventors: Shin-Bin Ko, Liang-Shu Wang
  • Publication number: 20070046897
    Abstract: A polarization converting system and a method of manufacturing the same are provided. The polarization converting system includes a polarization splitting unit splitting incident unpolarized light into two orthogonal polarizations and a polarization converting unit converting incident light into specific polarized light. The polarization converting unit has first and second regions that correspond to the polarization splitting unit and are different in a polarization converting extent from each other.
    Type: Application
    Filed: August 22, 2006
    Publication date: March 1, 2007
    Inventors: Seong-mo Hwang, Seung-ho Nam, Moon-gyu Lee, Young-chan Kim, Dong-ho Wee, Kyung-yeup Kim
  • Publication number: 20070046898
    Abstract: An illumination system and a projection system incorporating same are disclosed. The illumination system includes a two-dimensional array of independently operable light sources. Each light source illuminates substantially the entire active area of a pixelated optical light modulator. Each light source emits light in different emission directions. Each emission direction is directed to a respective location in the active area. Each pixel in the active area is illuminated by an incident cone of light from the two-dimensional array of independently operable light sources. The cone has a cone angle and includes at least one light ray from each light source. The cone angle of at least one such cone of light can be controlled by adjusting the intensity of one or more of the independently operable light sources.
    Type: Application
    Filed: August 29, 2005
    Publication date: March 1, 2007
    Inventor: Arlie Conner
  • Publication number: 20070046899
    Abstract: The present invention provides a stereoscopic image display apparatus. The stereoscopic image display apparatus includes a first projection element group, a second projection element group, and a reflecting optical system. The first projection element group includes a plurality of first projection elements operable to project first light fluxes in a first direction. The second projection element group includes a plurality of second projection elements operable to project second light fluxes in a second direction which is different from the first direction and in which the second light fluxes are directed to the first light fluxes. The reflecting optical system is operable to reflect the second light fluxes toward the first direction.
    Type: Application
    Filed: July 12, 2006
    Publication date: March 1, 2007
    Applicant: Sony Corporation
    Inventors: Shuji Moro, Toshitaka Kawashima, Ryota Odake, Tadashi Morimoto
  • Publication number: 20070046900
    Abstract: A projector includes an image projection device including a light source device, a optical modulation device that modulates a light beam emitted from the light source device in accordance with image information, and an projection optical device that projects enlarged projection of the light beam modulated by the optical modulation device disposed in a substantially L-shape sequentially from one end to the other end, an exterior chassis accommodating the image projection device, and provided with an air outlet for discharging inside air to the outside formed on an end face of the projection optical device, the end face being located in a direction of projection, and a ventilation device that discharges air inside the exterior chassis to the outside and includes an axial fan provided with a suction port for sucking air and a discharge port for discharging the sucked air, and disposed in an area inside the exterior chassis and surrounded by the substantially L-shape of the image projection device and adjacent to
    Type: Application
    Filed: August 8, 2006
    Publication date: March 1, 2007
    Applicant: Seiko Epson Corporation
    Inventors: Toshio Matsumiya, Takeshi Utagawa
  • Publication number: 20070046901
    Abstract: There is disclosed a projection device which includes a light source constituted of a reflector and a light source lamp, a projection system including a projection encoder for forming a light mage based on an input image signal to project it by use of light from the light source, a micromirror element and a projection lens, a photographing system including a photographing lens for photographing the projected image, a CCD and a process circuit, and a control section detecting a luminance distribution from the photographed image and correcting a luminance distribution of the light image formed by the micromirror element in accordance with the detected luminance distribution.
    Type: Application
    Filed: August 11, 2006
    Publication date: March 1, 2007
    Applicant: Casio Computer Co., Ltd.
    Inventor: Toshiya Kuno
  • Publication number: 20070046902
    Abstract: An embodiment of the invention, a projector device having a trapezoidal distortion correction mode of projected video and including, a distance measurement sensor which obtains a distance to a screen and a tilt angle, a lens barrel which projects the projected video, and a zoom ring attached to the lens barrel by use of one embodiment of this invention, an irradiation position from the distance measurement sensor to the screen is changed based on a position of the zoom ring, so that a detection precision of the tilt angle of the screen can be enhanced.
    Type: Application
    Filed: August 24, 2006
    Publication date: March 1, 2007
    Inventor: Kenichi Yajima
  • Publication number: 20070046903
    Abstract: An image display apparatus that displays an image through scanning by a plurality of beam lights, includes: a light source section that supplies the beam lights; and a scanning section that subjects to scanning the beam lights coming from the light source section. In the image display apparatus, the light source section is driven for a tone representation using the beam lights each having a light amount that is assigned a weight depending on how many bit is allocated in a range from minimum to maximum, and allocates at least two of the beam lights to at least one higher-order bit in the range.
    Type: Application
    Filed: July 24, 2006
    Publication date: March 1, 2007
    Applicant: Seiko Epson Corporation
    Inventor: Takashi Takeda
  • Publication number: 20070046904
    Abstract: A method for projector cooling includes, upon projector start-up, detecting a device orientation and then initiating a device component cooling routine according to the detected orientation.
    Type: Application
    Filed: October 31, 2005
    Publication date: March 1, 2007
    Inventors: Daniel Rudolph, Reed Lacy, John Gilman, Bert Chen, Aldon Jiang, Sammy Hsu
  • Publication number: 20070046905
    Abstract: An optical diaphragm for adjusting a light quantity of an incident light beam includes: a base plate extending along a plane orthogonal to an optical axis of the light beam, the base plate having an aperture for transmitting the light beam; a plurality of light-shielding vanes attached to a circumferential portion of the aperture of the base plate in a manner rotatable along the plane orthogonal to the optical axis of the light beam, the light-shielding being rotated to change an aperture area of the aperture for transmitting the light beam to adjust the light quantity of the light beam; a vane holder for pressing the plurality of light-shielding vanes to the base plate in a manner that the light-shielding vanes are rotatable; a plurality of rotary shafts fixed between the base plate and the vane holder, the rotary shafts each rotatably supporting each of the plurality of light-shielding vanes; and a vane-driving mechanism movably attached to the base plate and engaged with the plurality of light-shielding va
    Type: Application
    Filed: August 16, 2006
    Publication date: March 1, 2007
    Applicant: SEIKO EPSON CORPORATION
    Inventors: Kesatoshi Takeuchi, Hiroshi Kuriyama
  • Publication number: 20070046906
    Abstract: A projector has a case, a zoom lens, a zoom ring, a control plate, a lodging element, a control rod, and a handle. The case has an opening, and the zoom ring is disposed within the case and nearby the opening, the zoom ring is moved back and forth to drive the zoom rod. The control plate is mounted on the case and laid over the opening movably, the lodging element is movably contacted with the control rod, wherein the handle accepts the force along the extending direction of the rectangular opening so as to let the control plate move the lodging element along the extending direction of the rectangular opening and further to move the control rod for continuously regulating the focal length of the zoom lens.
    Type: Application
    Filed: August 24, 2006
    Publication date: March 1, 2007
    Inventors: Da Ruan, David Ho
  • Publication number: 20070046907
    Abstract: A portable projector is disclosed. The portable projector comprises a light transmission member having first and second surfaces, a multi-type laser light source including a plurality of sub laser light sources for emitting light beams onto the first surface of the member based on an external image signal, so as to allow the light beams to be transmitted into the member, one or more optical elements supported on at least one of the first and second surfaces of the member for diffracting and reflecting the light beams incident from the multi-type laser light source into the member, and at least one multi-type scan mirror supported on one of the first and second surfaces of the member for scanning the light beams diffracted and reflected from the optical elements onto an external screen located at the outside of the member, based on an external control signal.
    Type: Application
    Filed: July 7, 2006
    Publication date: March 1, 2007
    Inventor: Sung Shin
  • Publication number: 20070046908
    Abstract: A method of controlling a projection-type display device and a projection-type display device using the same optimizes the contrast ratio of a screen regardless of ambient brightness conditions. A projection-type display device having an aperture for transmitting slight toward a screen includes a sensor for detecting ambient brightness with respect to the projection-type display device; a generator for generating an aperture control signal according to the detected ambient brightness; and a controller for adjusting an open/close range of the aperture according to the generated aperture control signal.
    Type: Application
    Filed: August 29, 2006
    Publication date: March 1, 2007
    Inventor: Jeoung Choi
  • Publication number: 20070046909
    Abstract: An image display device includes a light source unit which successively emits illumination lights of different colors which have wavelength bands different from one another in accordance with color information of an image signal, an image modulating unit which successively modulates the illumination lights of different colors in accordance with the color information of the image signal and generates modulated lights, a light path shift unit capable of shifting a light path of the modulated lights, and a projection optical unit which projects the modulated lights, wherein the light path shift unit includes a first wavelength selectable polarization rotation device configured to carry out rotation control on polarization directions of the modulated lights modulated by the image modulating unit in accordance with colors and a first birefringent plate to which the modulated lights from the first wavelength selectable polarization rotation device are applied.
    Type: Application
    Filed: March 16, 2006
    Publication date: March 1, 2007
    Applicant: OLYMPUS CORPORATION
    Inventors: Hiroshi Sakai, Kazuya Yamanaka, Hideyuki Ito
  • Publication number: 20070046910
    Abstract: A apparatus and methods recover a fluid from an immersion area formed in a gap between a projection system and an object of exposure in an immersion lithography system. A porous member is disposed adjacent to the immersion area. A pressure control system provides a first low pressure to a first portion of the porous member to remove immersion fluid that escapes from the immersion area, and provides a second low pressure to a second portion of the porous member to remove immersion fluid that escapes from the immersion area. The second low pressure is different from the first low pressure.
    Type: Application
    Filed: May 31, 2006
    Publication date: March 1, 2007
    Applicant: NIKON CORPORATION
    Inventors: Alex Poon, Leonard Kho, Gaurav Keswani
  • Publication number: 20070046911
    Abstract: An exposure apparatus is disclosed, which includes an alignment station where an alignment measurement process is executed, an exposure station where an exposure process is executed, and two stages which can be swapped between the alignment station and the exposure station. The exposure apparatus includes a first blowing unit which blows temperature-adjusted gas toward the alignment station, and a second blowing unit which blows temperature-adjusted gas toward the exposure station. The directions in which the first blowing unit and the second blowing unit blow the gases are substantially perpendicular to the direction along which the alignment station and the exposure station are arranged.
    Type: Application
    Filed: August 30, 2006
    Publication date: March 1, 2007
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Shintaro AICHI
  • Publication number: 20070046912
    Abstract: A measuring device for interferometric measurement of an optical imaging system that is provided for projecting a useful pattern, provided on a mask, into the image plane of the imaging system, includes a wavefront source for generating at least one wavefront traversing the imaging system; a diffraction grating, arrangeable downstream of the imaging system, for interacting with the wavefront reshaped by the imaging system; and a spatially resolving detector, assigned to the diffraction grating, for acquiring interferometric information. The wavefront source has at least one measuring pattern that is formed on the mask in addition to the useful pattern. The useful pattern may represent the structure of a layer of a semiconductor component in a specific fabrication step. The measuring pattern may be formed as a coherence-forming structure periodic in one or two dimensions.
    Type: Application
    Filed: September 1, 2006
    Publication date: March 1, 2007
    Inventors: Martin Schriever, Ulrich Wegmann, Helmut Haidner
  • Publication number: 20070046913
    Abstract: Because an electromagnetic chuck supplies current to a specific microcoil among a plurality of microcoils and makes an object exert an electromagnetic force working together with a magnet of the object, the object can be held in a state where the object is set at a desired position (a position that corresponds to the microcoil to which current has been supplied) on a base surface. Further, by gas that blows out from a gas supply passage, a levitation force is given to the object, which can reduce effects of a friction force that acts between the object and an upper surface of the electromagnetic chuck when the position of the object is set.
    Type: Application
    Filed: August 25, 2006
    Publication date: March 1, 2007
    Applicant: Nikon Corporation
    Inventor: Yuichi Shibazaki
  • Publication number: 20070046914
    Abstract: A field sequential display apparatus that dynamically drives a light source and a panel in response to an image signal and a method thereof are provided. A method of driving a light source of a field sequential display apparatus includes: reading predetermined image information from image signals based on power sources, respectively; controlling an irradiation time and applied voltage of each light source driven in respective image sub-fields based on the read image information; correcting the image signals based on light sources altered by the control of respective light sources; and displaying the corrected image signals on a panel based on a control signal of the corrected light sources.
    Type: Application
    Filed: August 2, 2006
    Publication date: March 1, 2007
    Inventor: Young-ho Lee
  • Publication number: 20070046915
    Abstract: A lithographic apparatus and device manufacturing method is provided in which exposure is carried out by projecting through a liquid having a pH of less than 7, the liquid being in contact with a substrate to be exposed. The liquid advantageously comprises an anti-reflective topcoat.
    Type: Application
    Filed: February 16, 2006
    Publication date: March 1, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Bob Streefkerk, Marcel Mathijs Dierichs, Wendy Gehoel-Van Ansem
  • Publication number: 20070046916
    Abstract: A containment system contains an immersion fluid in an immersion area to fill a gap between a projection system and an object to be exposed with the immersion fluid. The containment system includes an immersion fluid barrier formed by a pressurized gas that is supplied to a location adjacent to the immersion area. A supply of the pressurized gas to the immersion fluid barrier is intermittently stopped during an exposure operation of the object.
    Type: Application
    Filed: June 12, 2006
    Publication date: March 1, 2007
    Applicant: NIKON CORPORATION
    Inventor: Michael Sogard
  • Publication number: 20070046917
    Abstract: A lithographic apparatus operable in a substrate exposing configuration to expose a substrate with a pattern of radiation and a radiation beam inspection configuration in which the pattern of radiation that would be exposed on the substrate if the lithographic apparatus was in the substrate exposing configuration is inspected by a radiation beam inspection device. In the radiation beam inspecting configuration, the operation of the lithographic apparatus is modified in order to minimize the difference between the pattern of radiation exposed on the substrate and the required pattern of radiation to be exposed on the substrate.
    Type: Application
    Filed: August 31, 2005
    Publication date: March 1, 2007
    Applicant: ASML Netherlands B.V.
    Inventors: Wim Tel, Hans Van Der Laan, Cassandra Owen, Todd Davis, Todd Hiar, Theodore Paxton
  • Publication number: 20070046918
    Abstract: An 8-mirror reflecting type projection optical system. A first reflecting image forming optical system forms an intermediate image of a first surface and a second reflecting image forming optical system forms an image of that intermediate image on a second surface. The first reflecting image forming optical system has a first reflecting mirror M1, a second reflecting mirror M2, a third reflecting mirror M3, and a fourth reflecting mirror M4. The second reflecting image forming optical system has a fifth reflecting mirror M5, a sixth reflecting mirror M6, a seventh reflecting mirror M7, and an eighth reflecting mirror M8. The first reflecting mirror M1, the fourth reflecting mirror M4, the fifth reflecting mirror M5, and the eighth reflecting mirror M8 have concave reflecting surfaces, and the seventh reflecting mirror M7 has a convex reflecting surface. One of the second reflecting mirror M2 and the third reflecting mirror M3 has a concave reflecting surface, and the other has a convex reflecting surface.
    Type: Application
    Filed: August 23, 2006
    Publication date: March 1, 2007
    Inventor: Tomowaki Takahashi
  • Publication number: 20070046919
    Abstract: Provided is a method and system for facilitating use of a plurality of individually controllable elements to modulate the intensity of radiation received at each focusing element of an array of focusing elements to control the intensity of the radiation in the areas on the substrate onto which the focusing elements direct the radiation.
    Type: Application
    Filed: November 6, 2006
    Publication date: March 1, 2007
    Applicant: ASML Netherlands B.V.
    Inventors: Cheng-Qun Gui, Arno Bleeker, Pieter Willem De Jager
  • Publication number: 20070046920
    Abstract: A lithographic apparatus having a controller that sets at lest one system parameter such that the difference between the critical dimension of pattern features formed on the substrate in regions of relatively high and relatively low pattern feature density is minimised for an area on the substrate on which a patterned beam of radiation is to be projected and which re-sets the at least one system parameter between a projection of the patterned radiation beam onto two areas of the substrate.
    Type: Application
    Filed: August 23, 2005
    Publication date: March 1, 2007
    Applicant: ASML Netherlands B.V.
    Inventors: Hans Laan, Johannes Quaedackers
  • Publication number: 20070046921
    Abstract: An exposure apparatus for exposing a pattern of a reticle onto a plate using a light from a light source and an optical system includes a measuring part for obtaining polarization information of the light that has passed the optical system, the polarization information including at least one of polarized light intensities, a ratio between the polarized light intensities, a degree of polarization, and a retardation of two orthogonal directions that are both parallel to the optical axis, and a controller for controlling, based on a measurement result by the measuring part, at least one exposure parameter of the light source and the optical system.
    Type: Application
    Filed: July 21, 2006
    Publication date: March 1, 2007
    Inventors: Kazuhiro Takahashi, Koji Mikami, Michio Kono
  • Publication number: 20070046922
    Abstract: An exposure apparatus includes a reticle stage for supporting a reticle, an illumination optical system for illuminating the reticle, a projection optical system for projecting an image of a pattern of the reticle onto a substrate, a polarization state measuring part for measuring a polarization state, and an optical unit, supported by the reticle stage exchangeable for the reticle, for introducing a light from the illumination optical system to the polarization state measuring part, wherein said polarization state measuring part includes a phase shifter, a polarization element, and a light detector for detecting the light from the illumination optical system via the phase shifter and the polarization element.
    Type: Application
    Filed: August 10, 2006
    Publication date: March 1, 2007
    Inventors: Ayako KADONO, Haruna Kawashima
  • Publication number: 20070046923
    Abstract: A medium is carried to a predetermined position in a carrying direction. A first pattern is formed on the medium with nozzles on the carrying direction upstream side of a nozzle row constituted by a plurality of nozzles lined up at predetermined intervals. After forming the first pattern, the medium is carried in the carrying direction by a target carry amount that is shorter than the length in the carrying direction of the nozzle row. Along with forming on the medium a second pattern that forms a boundary with the first pattern with nozzles on the carrying direction downstream side of the nozzle row, a third pattern is formed on the medium with the nozzles on the carrying direction upstream side of the nozzle row.
    Type: Application
    Filed: August 30, 2006
    Publication date: March 1, 2007
    Inventors: Tatsuya Nakano, Masahiko Yoshida
  • Publication number: 20070046924
    Abstract: In one aspect, a sequence of light patterns including cells having respective patterns of light symbols is projected onto a scene. The projected sequence of light patterns encodes pixels in a projection plane with respective temporal pixel codes corresponding to respective temporal sequences of light symbols coinciding with the locations of corresponding pixels. The projected sequence of light patterns uniquely encodes cells in the projection plane with respective temporal cell codes including respective sets of temporal pixel codes corresponding to respective sequences of light pattern cells. Respective temporal sequences of light patterns reflected from the scene are captured at regions of a capture plane.
    Type: Application
    Filed: August 30, 2005
    Publication date: March 1, 2007
    Inventor: Nelson Chang
  • Publication number: 20070046925
    Abstract: An infrared gas analyzer includes a flow sensor placed in a gas flow channel in a state in which two heating resistors are kept with a given spacing. The infrared gas analyzer further includes a substrate having a flat plane placed in parallel with the gas flow direction of the gas flow channel and a hole made in the flat plane of the substrate. The gas flow channel is provided in parallel with one face of a detector. The two heating resistors placed with a predetermined spacing on the substrate across the hole orthogonally to the gas flow direction.
    Type: Application
    Filed: August 24, 2006
    Publication date: March 1, 2007
    Inventors: Hideaki Yamagishi, Junichi Matsuo, Tomoaki Nanko, Shigeru Matsumura
  • Publication number: 20070046926
    Abstract: A fingerprint identification assembly includes a laminated lens having a first lens, a second lens and a third lens formed together with the first lens and the second lens, each of the first lens, the second lens and the third lens has a dielectric film coated thereon. At least one illuminator is located at a bottom of the laminated lens and a sensor located under the laminated lens for picking up an image of a fingerprint on top of the laminated lens. The dielectric film of the laminated lens allows light from the at least one illuminator to be partially reflected due to the fingerprint on the laminated lens and partially penetrates through the second lens and the third lens to be picked up by the sensor.
    Type: Application
    Filed: August 26, 2005
    Publication date: March 1, 2007
    Inventors: Jung-Chun Wu, Jyh-Long Chern, Ching-Shan Dai, Yung-Wen Lin, Jyh-Der Hwang
  • Publication number: 20070046927
    Abstract: Embodiments of an apparatus and method of monitoring and controlling a large area substrate processing chamber are provided. Multiple types of metrology tools can be installed in the substrate processing system to measure film properties after substrate processing in a processing chamber. Several number of a particular type of metrology tools can also be installed in the substrate processing system to measure film properties after substrate processing in a processing chamber. The metrology tools can be installed in a metrology chamber, a process chamber, a transfer chamber, or a loadlock.
    Type: Application
    Filed: August 31, 2005
    Publication date: March 1, 2007
    Inventors: Hienminh Le, Akihiro Hosokawa
  • Publication number: 20070046928
    Abstract: A method for screening fiber polarization mode dispersion using a polarization optical time domain reflectometer is disclosed. A pulse radiation is emitted into an end of the fiber under test, and the backscattered radiation is measured by the POTDR and used to obtain an OTDR trace. A pulse radiation is emitted into an opposite end of the fiber under test, and the backscattered radiation is measured by the POTDR and used to obtain another OTDR trace. Either one or both traces are analyzed to compare the variation of intensity of signals along the length of the fiber, the variation in signals relating to the PMD along the length of the fiber.
    Type: Application
    Filed: August 31, 2005
    Publication date: March 1, 2007
    Inventors: Xin Chen, Nicol Heron
  • Publication number: 20070046929
    Abstract: A measurement method for measuring an optical characteristic of a target optical system includes the steps of introducing a light from each of plural patterns that reduce diffracted lights other than a predetermined order, to a different position on a pupil plane of the target optical system, the introducing step including the step of scanning the light in a radial direction in the pupil plane of the target optical system, detecting a imaging position of the light introduced by the introducing step, on an image plane of the target optical system, and obtaining the optical characteristic of the target optical system based on a detection result of the detecting step.
    Type: Application
    Filed: August 24, 2006
    Publication date: March 1, 2007
    Inventor: Yoshihiro Shiode
  • Publication number: 20070046930
    Abstract: A method of estimating light output of a lamp in a scanner prior to the lamp being fully warmed-up. The method includes measuring a spectral characteristic of light emitted by a lamp in a scanner at a time t0 prior to the lamp being fully warmed-up and estimating the light output of the lamp at a time t1 based on the measured spectral characteristic, wherein t1 is greater than t0. A method of scanning, as well as a scanning apparatus is also provided.
    Type: Application
    Filed: September 1, 2005
    Publication date: March 1, 2007
    Inventors: Chengwu Cui, Larry Kiser
  • Publication number: 20070046931
    Abstract: The present invention aims to provide a surface defect inspection apparatus and a surface defect inspection method for properly inspecting for a concave-shaped flaw (or a part thereof) substantially in parallel with a plane of incidence. The apparatus includes an illumination unit 10 illuminating a front surface (surface under inspection 5a) of an object to be inspected 5 with illumination light for inspection, a changing unit 1, 33 which relatively rotating the object to be inspected and the illumination unit around an axis AX1 perpendicular to the surface under inspection 5a and changing illumination conditions of the illumination light, a light reception unit 20 receiving scattered light emitted from the surface under inspection when illuminated with illumination light in each illumination condition, to capture images thereof, and a combining unit 32 combining images captured by the light reception unit to generate a combined image.
    Type: Application
    Filed: August 23, 2006
    Publication date: March 1, 2007
    Applicant: NIKON CORPORATION
    Inventors: Takeo Oomori, Kazuhiko Fukazawa
  • Publication number: 20070046932
    Abstract: An optical module in which the light outputted from the light source is condensed before outputted, and yet capable of reducing the development of contaminants on the light condensing area. The optical module includes: a light source for outputting light in the short wavelength region; a transparent member having a light input face and a light output face; and a condensing optical system for inputting the light outputted from the light source to the input face of the transparent member, and focusing the light on the output face. The transparent member has an alkali metal content (e.g. Na or K) of less than 2.0% by weight, and/or with a light absorption of less than 0.65%/mm for the light outputted from the light source.
    Type: Application
    Filed: August 31, 2006
    Publication date: March 1, 2007
    Inventor: Shinichi Shimotsu
  • Publication number: 20070046933
    Abstract: In a spectroscopic process a sample for producing a test spectral line or spectrum of at least one component contained in the sample is stimulated and the transmitted and/or emitted electromagnetic rays are used to create the test spectral line or spectrum. In order to improve such a spectroscopic process to such an extent that variations of certain parameters, which alter the shape and/or occurrence of a spectral line, are compensated, a comparison spectral line or spectrum of a known comparison material is produced under substantially the same parameters as the sample. The comparison spectral line or spectrum is compared with an ideal comparison spectral line or spectrum in order to calculate a transfer function, and the transfer function is applied to the test spectral line or spectrum in order to calculate a corrected test spectral line or spectrum.
    Type: Application
    Filed: October 24, 2006
    Publication date: March 1, 2007
    Inventors: Yongdong Wang, Bernhard Radziuk, David Tracy
  • Publication number: 20070046934
    Abstract: A system is described that combines an optical spectrometer and a particle analysis spectrometer for simultaneous and/or sequential analysis of a sample placed in a sample chamber. A laser resonator generates a light beam on the sample in the sample chamber to produce a plasma formation and an aerosol formation. The optical spectrometer (spectrophotometer) analyzes a plasma formation generated from the sample surface of the sample, qualifies and/or quantifies and records chemical data of the sample. The particle analysis spectrometer analyzes an aerosol formation generated from the sample in the sample chamber, and qualifies and/or quantifies and records data of the sample. The combination of the optical spectrometer and the particle analysis spectrometer in the system enables simultaneous and/or sequential analysis, qualification and/or quantification, and recording of the chemical and physical data derived from the transfer of laser energy into a solid, liquid or gas.
    Type: Application
    Filed: August 26, 2005
    Publication date: March 1, 2007
    Applicant: New Wave Research, Inc.
    Inventor: John Roy
  • Publication number: 20070046935
    Abstract: A measuring head (4) according to the invention comprises the combination of a zone lens (26), which is preferably a diffractive lens, with a hemispherical lens (23) or a GRIN lens (33). This represents a concept capable of miniaturization, resulting in very slender measuring heads (4) having a high numeric aperture and, accordingly, leads to the best resolution capacity. Such measuring heads are insensitive to angular errors as concerns the orientation of the measuring head to the surface to be measured or to an oblique positioning of the surface relative to the optical axis of the measuring head.
    Type: Application
    Filed: September 2, 2006
    Publication date: March 1, 2007
    Inventors: Peter Lehmann, Peter Lucke, Jurgen Mohr, Carlos Moran-Iglesias, Wolfgang Osten, Aiko Ruprecht, Sven Schonfelder
  • Publication number: 20070046936
    Abstract: Color measurement using compact devices is described herein. A color measurement device can include a diffraction grating that receives light reflected from a surface whose color is being measured. The diffraction grating is responsive to a control signal to split selected components from the reflected light and to admit the components in sequence to a sensor. The components can correspond to a selected wavelength or frequency of the reflected light. The sensor measures the energy or power level of each of the admitted components. The device can support determining a spectral representation of the color of the surface by generating output signals representing the various energy or power levels of each component of the light reflected from the surface.
    Type: Application
    Filed: August 31, 2005
    Publication date: March 1, 2007
    Applicant: Microsoft Corporation
    Inventors: Charles Mauzy, Michael Stokes, Gary Starkweather, Jonathan Schwartz
  • Publication number: 20070046937
    Abstract: An data processing system 4 includes: an integral part 43 which integrates, by two mutually different times, light intensities indicating light intensity signals outputted from light detectors 24 respectively provided for detecting intensities of scattered light and transmitted light generated by irradiating a sample powder S with light and then outputs each of the integrated values; an actuator control part 44 which generates and outputs a control signal for a vibration actuator 32 which drops the sample powder S stored in a sample housing so that one of the integrated values of light intensity outputted from the integral part 43 becomes closer to a set value previously defined; and a particle size distribution calculation part 45 which calculates the particle size distribution of the sample powder S based on another of the integrated values of light intensity outputted from the integral part 43.
    Type: Application
    Filed: August 25, 2006
    Publication date: March 1, 2007
    Inventors: Yoshiaki Togawa, Hiroyuki Kitamura, Takeshi Shimizu
  • Publication number: 20070046938
    Abstract: A particle detection system uses a reflective optic comprising a curved surface to detect high angle scattered light generated by a particle in a liquid medium, when a laser beam is incident on the particle. When the particles transit the laser beam, light is scattered in all directions and is described by MIE scattering theory for particles about the size of the wavelength of light and larger or Rayleigh Scattering when the particles are smaller than the wavelength of light. By using the reflective optic, the scattered light can be detected over angles that are greater than normally obtainable.
    Type: Application
    Filed: June 13, 2006
    Publication date: March 1, 2007
    Applicant: JMAR Research, Inc.
    Inventors: John Adams, Scott Bloom, Victor Chan, Kristina Crousore, Joseph Gottlieb, Oscar Hemberg, John Lyon, Brett Spivey
  • Publication number: 20070046939
    Abstract: Method and system for positioning an assembly in an optical device.
    Type: Application
    Filed: August 23, 2005
    Publication date: March 1, 2007
    Inventors: George Tsai, John Kralik
  • Publication number: 20070046940
    Abstract: A method comprising capturing a first image that includes a target on a substrate, adjusting a first relative position between the substrate and a fabrication unit, capturing a second image that includes the target subsequent to adjusting the first relative position, and determining whether a first displacement of the target in the second image relative to the target the first image indicates that a second relative position between the substrate and the fabrication unit has been achieved is provided.
    Type: Application
    Filed: August 22, 2005
    Publication date: March 1, 2007
    Inventors: Jun Gao, Carl Picciotto
  • Publication number: 20070046941
    Abstract: Spectrophotometer color measurement with a target illumination system and a reflected illumination sensing system where the target surface is variably spaced from said spectrophotometer. Color correction calibration information corresponding to color measurements for known different spacings of a test target surface from the spectrophotometer are obtained and stored. In use, the spacing of the actual target surface from the spectrophotometer is measured to provide a target spacing information signal. That signal is automatically combined with the stored color correction calibration information for the corresponding distances to provide at least partial correction of color measurement errors of the spectrophotometer for variable spacing of the target surface relative to the spectrophotometer even with low cost fixed focus optics. The spectrophotometer output can be so corrected by changing the target illumination, such as by LED pulse width changes, and/or by corrective adjustment of the measured reflectances.
    Type: Application
    Filed: August 24, 2005
    Publication date: March 1, 2007
    Inventors: Lalit Mestha, Tonya Love, Peter Paul, Claude Fillion
  • Publication number: 20070046942
    Abstract: A meter for measuring the turbidity of a fluid includes a light source for directing a light beam through a fluid under test towards a reflective surface and a sensor for detecting light reflected from the reflective surface and passing back through the fluid under test. The meter outputs a signal indicative of the turbidity of the fluid under test.
    Type: Application
    Filed: August 31, 2005
    Publication date: March 1, 2007
    Inventors: Joh Ng, Khee Lim, Chee Chia, Selvan Maniam
  • Publication number: 20070046943
    Abstract: A system and method of using a refractive index sensor to determine a characteristic of a sample. The operation of the system and method allow for determining a change in a bulk index of the sample, and an amount of sample adsorption, using a reflected beam from an interface of the sensor. An embodiment of a system and method further provide for identifying changes in incident angles determine from reflective measurement data of the sensor, in combination with different proportionality constants of the refractive index sensor to determine a characteristic of the sample.
    Type: Application
    Filed: August 24, 2005
    Publication date: March 1, 2007
    Inventors: Gregory VanWiggeren, Scott Corzine