Patents Issued in October 25, 2007
  • Publication number: 20070247591
    Abstract: A digital light processing (DLP) projection apparatus including an illumination system, a digital micro-mirror device (DMD) and an imaging system is provided. The DMD having a common plane and micro mirrors disposed on the common plane is disposed on a transmission path of the illumination beam to convert an illumination beam from the illumination system into an imaging beam into a screen. The imaging system includes a projection lens disposed on a transmission path of the imaging beam and a total internal reflection (TIR) prism disposed between the DMD and the projection lens. The projection lens has an optical axis, which is not parallel to a normal vector of the common plane and a chief beam of the imaging beam. At least one of the normal vectors of the surfaces of the TIR prism opposite to the projection lens and the DMD is not parallel to the optical axis.
    Type: Application
    Filed: July 17, 2006
    Publication date: October 25, 2007
    Applicant: YOUNG OPTICS INC.
    Inventors: Jyh-Horng Shyu, Chia-Chen Liao, Chu-Ming Cheng, Huang-Ming Chen
  • Publication number: 20070247592
    Abstract: A projection apparatus having a temperature controlling system is provided. The projection apparatus comprises at least a heat generating element, while the temperature controlling system comprises a liquid flow system, a heat generating device, and a heat transferring device. The liquid flow system is disposed along the heat generating element. The heat generating device produces heat with a positive value (endothermic) or a negative value (exothermic) in response to an environment dependent on the location of the projection apparatus. The heat transferring device transfers the heat generated by the heat generating device along the liquid flow system. The present invention maintains the operation of the projection apparatus under the desired working temperature and enables a thermal equilibrium of the projection apparatus without being influenced by the over-temperature or under-temperature of the external environment.
    Type: Application
    Filed: April 13, 2007
    Publication date: October 25, 2007
    Applicant: DELTA ELECTRONICS, INC.
    Inventors: Chia-Jui Lin, Hsiu-Ming Chang, Kuo-Ching Chang, Hui-Chih Lin, Yu-Ho Tsao
  • Publication number: 20070247593
    Abstract: A projector includes a housing, an optical engine module, a light source, a system fan and a lamp cooling fan. The housing includes a air vent and an intake. The optical engine module is disposed in the housing. The light source is disposed on one end of the optical engine module for providing light. The light source includes a first side and a opposite second side opposite to the first side. The system fan is disposed adjacent to the first side for generating an airflow flowing from the first side toward the light source. The lamp cooling fan is disposed adjacent to the second side for generating an airflow flowing from the second side toward inside of the light source and the first side. The airflow generated by the lamp cooling fan mixes with the airflow generated by the system fan and then is exhausted through the air vent.
    Type: Application
    Filed: February 15, 2007
    Publication date: October 25, 2007
    Inventors: Chih-Cheng Chou, Sen-Ming Hsu, Wen-Hsien Su
  • Publication number: 20070247594
    Abstract: In order to provide a display apparatus with high image quality which can detect a change in light on an entire display frame without any influence on user's appreciation, a rear-projection type display apparatus which projects irradiating light from a light source unit onto a fresnel screen through a light valve includes a light measurement unit which is placed at a position where reflected light from the fresnel screen is condensed, and a control unit which controls the light valve on the basis of the measurement result obtained by the light measurement unit.
    Type: Application
    Filed: April 11, 2007
    Publication date: October 25, 2007
    Inventor: Atsushi TANAKA
  • Publication number: 20070247595
    Abstract: A light surface display for providing a three-dimensional image including a plurality of particles suspended within a volumetric display. A first projection system projects sequential slices of electromagnetic energy of one or more wavelengths along the length and width of the volumetric display energizing particles to form a two-dimensional image. A second projection system projects translational slices of electromagnetic energy of one or more wavelengths that intersect with the energized particles across the depth of the volumetric display. A control system synchronizes the projection of the image source and the activation source such that the two-dimensional image and the translational slices energize the particles for a pre-determined length of time so that the particles illuminate to form an illuminated three-dimensional image.
    Type: Application
    Filed: April 25, 2007
    Publication date: October 25, 2007
    Inventors: Hakki Refai, Erik Petrich, James Sluss, Monte Tull, Pramode Verma, Gerald Newman, Martina Dreyer
  • Publication number: 20070247596
    Abstract: A projection-type display device includes: a light source 21; a spatial light modulation element 25 which modulates incident light according to an applied image signal and emits the modulated light; an illumination optical system 23 which condenses light from the light source 21 and illuminates the spatial light modulation element 25; a projection lens 27 which projects the light emitted from the spatial light modulation element 25; shielding unit 1, positioned along the path of light on the side of either the illumination optical system 23 or the projection lens 27 with respect to the spatial light modulation element 25, and which can change the amount of shielding of transmitted light; and image signal correction units 3, 4, 5, and 6 which divide the picture plane of the spatial light modulation element 25 into a plurality of areas, and perform correction on the image signal applied to the spatial light modulation element 25 according to the current shielding amount of the shielding unit 1 for each of the p
    Type: Application
    Filed: June 21, 2007
    Publication date: October 25, 2007
    Applicant: Sony Corporation
    Inventor: Yoshihisa Sato
  • Publication number: 20070247597
    Abstract: An image forming apparatus includes a casing, a mirror, and an adjustment device for adjusting a position of the mirror. The adjustment device is disposed within the casing and includes a frame, a plate, a connection unit, a first adjustment unit, a connection element, and a first adjustment element. The frame includes a vertical surface and a horizontal surface with a hole therein. The plate is configured to hold the mirror. The connection unit and the adjustment unit are protrudedly disposed on the plate. The connection element connects the plate to the vertical surface of the frame. The first adjustment unit includes a first groove. The first adjustment element couples with the hole through the first groove. By adjusting the position of the first adjustment element in the first groove, a position of the plate relative to the frame is adjusted.
    Type: Application
    Filed: April 19, 2007
    Publication date: October 25, 2007
    Applicant: BENQ CORPORATION
    Inventors: Edward Hy Lin, Aiven Huang
  • Publication number: 20070247598
    Abstract: A volumetric liquid crystal display for producing a three-dimensional image is disclosed. The volumetric liquid crystal display includes a volumetric image space having at least two layers of LCD sheeting wherein each layer of LCD sheeting is selectively energized to form image slices. At least one projection system projects at least one array of electromagnetic energy of one or more wavelengths to intersect the energized layer of LCD sheeting illuminating image slices. Successive illumination of image slices on the layers of LCD sheeting provides the appearance of a three-dimensional image. Embodiments and methods of controlling and fabricating a three-dimensional image are disclosed.
    Type: Application
    Filed: April 25, 2007
    Publication date: October 25, 2007
    Inventors: Hakki Refai, Erik Petrich, James Sluss, Monte Tull, Pramode Verma
  • Publication number: 20070247599
    Abstract: There is disclosed a projector supportable on a support surface which is defined as at least a surface coplanar with or parallel to a projection surface, for use in projecting imaging light representative of a display image onto the projection surface, to thereby display the display image on the projection surface. The projector includes: a projection device arranged to project the imaging light toward the projection surface, to thereby focus the image onto the projection surface as a projected image; and a supporting device arranged, when placed on the support surface, to support the projection device such that a distance between an exit face at which the imaging light exits the projection device and the projection surface is adjustable.
    Type: Application
    Filed: June 27, 2007
    Publication date: October 25, 2007
    Applicant: BROTHER KOGYO KABUSHIKI KAISHA
    Inventors: Seijiro KADOWAKI, Hiroshi UCHIGASHIMA
  • Publication number: 20070247600
    Abstract: There is provided an exposure apparatus capable of forming a desirable device pattern by removing unnecessary liquid when performing exposure by projecting a pattern onto the substrate via a projection optical system and the liquid. The exposure device projects an image of the pattern onto the substrate P via the projection optical system and the liquid so as to expose the substrate P. The exposure device includes a liquid removing mechanism 40 which removes the liquid remaining on a part 7 arranged in the vicinity of the image plane of the projection optical system.
    Type: Application
    Filed: June 22, 2007
    Publication date: October 25, 2007
    Applicant: NIKON CORPORATION
    Inventors: Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Kenichi Shiraishi, Katsushi Nakano, Soichi Owa
  • Publication number: 20070247601
    Abstract: An immersion lithography apparatus has a reticle stage arranged to retain a reticle, a working stage arranged to retain a workpiece, and an optical system including an illumination source and an optical element opposite the workpiece for having an image pattern of the reticle projected by radiation from the illumination source. A gap is defined between the optical element and the workpiece, and a fluid-supplying device serves to supply an immersion liquid into this gap such that the supplied immersion liquid contacts both the optical element and the workpiece during an immersion lithography process. A cleaning device is incorporated for removing absorbed liquid from the optical element during a cleanup process. The cleaning device may make use of a cleaning liquid having affinity to the absorbed liquid, heat, a vacuum condition, ultrasonic vibrations or cavitating bubbles for the removal of the absorbed liquid.
    Type: Application
    Filed: June 22, 2007
    Publication date: October 25, 2007
    Applicant: NIKON CORPORATION
    Inventors: Andrew Hazelton, Hidemi Kawai, Douglas Watson, W. Novak
  • Publication number: 20070247602
    Abstract: An apparatus and method maintain immersion fluid in the gap adjacent to the projection lens during the exchange of a work piece in a lithography machine. The apparatus and method include an optical assembly that projects an image onto a work piece and a stage assembly including a work piece table that supports the work piece adjacent to the optical assembly. An environmental system is provided to supply and remove an immersion fluid from the gap between the optical assembly and the work piece on the stage assembly. After exposure of the work piece is complete, an exchange system removes the work piece and replaces it with a second work piece. An immersion fluid containment system maintains the immersion liquid in the gap during removal of the first work piece and replacement with the second work piece.
    Type: Application
    Filed: June 22, 2007
    Publication date: October 25, 2007
    Applicant: NIKON CORPORATION
    Inventor: Michael Binnard
  • Publication number: 20070247603
    Abstract: An environmental system controls an environment in a gap between an optical assembly and a device and includes a fluid barrier and an immersion fluid system. The fluid barrier is positioned near the device. The immersion fluid system delivers an immersion fluid that fills the gap and collects the immersion fluid that is directly between the fluid barrier and the device. The fluid barrier can include a scavenge inlet that is positioned near the device, and the immersion fluid system can include a low pressure source that is in fluid communication with the scavenge inlet. The fluid barrier confines any vapor of the immersion fluid and prevents it from perturbing a measurement system. Additionally, the environmental system can include a bearing fluid source that directs a bearing fluid between the fluid barrier and the device to support the fluid barrier relative to the device.
    Type: Application
    Filed: June 25, 2007
    Publication date: October 25, 2007
    Applicant: NIKON CORPORATION
    Inventors: Andrew Hazelton, Michael Sogard
  • Publication number: 20070247604
    Abstract: The present invention provides an optimized direct write lithography system using optical mirrors. That is, a maskless lithography system is provided. The maskless direct-write lithography system provided uses an array of mirrors configured to operate in a tilting mode, a piston-displacement mode, or both in combination. The controlled mirror array is used as a substitute for the traditional chrome on glass masks. In order to avoid constraining the system to forming edges of patterns aligned with the array of mirrors, gray-scale techniques are used for subpixel feature placement. The direct-writing of a pattern portion may rely on a single mirror mode or a combination of modes.
    Type: Application
    Filed: June 27, 2007
    Publication date: October 25, 2007
    Inventors: Nicholas Eib, Ebo Croffie, Neal Callan
  • Publication number: 20070247605
    Abstract: An optical element for correcting aberrations in an optical apparatus has a casing. The casing is filled with liquid and has a support layer and a cover layer designed to pass light of a predetermined wavelength range. The casing accommodates several actuators. Each actuator has a first end supporting the cover layer and a second end supporting the support layer. Each actuator is able to locally change a local distance between the support layer and the cover layer to correct for local aberrations in a light beam directed to the optical element by providing local phase shifts. The optical element may be used in a lithographic apparatus.
    Type: Application
    Filed: April 25, 2006
    Publication date: October 25, 2007
    Applicant: ASML Netherlands B.V.
    Inventors: Erik Loopstra, Paul Graupner, Johannes Mulkens
  • Publication number: 20070247606
    Abstract: A system and method are used to substantially homogenize and remove at least some coherence from a beam of radiation.
    Type: Application
    Filed: November 30, 2006
    Publication date: October 25, 2007
    Applicants: ASML Holding N.V., ASML Netherlands B.V.
    Inventors: Huibert Visser, Jacob Klinkhamer, Lev Ryzhikov, Scott Coston, Adel Joobeur, Henri Vink, Yevgeniy Shmarev
  • Publication number: 20070247607
    Abstract: When a transition from a first state where one stage is positioned at a first area directly below projection optical system to which liquid is supplied to a state where the other stage-is positioned at the first area, both stages are simultaneously driven while a state where both stages are close together in the X-axis direction is maintained. Therefore, it becomes possible to make a transition from the first state to the second state in a state where liquid is supplied in the space between the projection optical system and the specific stage directly under the projection optical system. Accordingly, the time from the completion of exposure operation on one stage side until the exposure operation begins on the other stage side can be reduced, which allows processing with high throughput. Further, because the liquid can constantly exist on the image plane side of the projection optical system, generation of water marks on optical members of the projection optical system on the image plane side is prevented.
    Type: Application
    Filed: June 22, 2007
    Publication date: October 25, 2007
    Applicant: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Publication number: 20070247608
    Abstract: The present invention is directed towards a choice of the shape of the patterned fields for Level 0 (patterned by imprint or photolithography or e-beam, etc.) and Level 1 (patterned by imprint) such that these shapes when tessellated together eliminate the open areas causes by the moats.
    Type: Application
    Filed: March 30, 2007
    Publication date: October 25, 2007
    Applicant: MOLECULAR IMPRINTS, INC.
    Inventors: Sidlgata Sreenivasan, Philip Schumaker, Ian McMackin
  • Publication number: 20070247609
    Abstract: A system for use in a lithographic apparatus includes an assembly of a reticle and a reticle holder. The reticle includes a marker. The system also includes a position detector arranged to detect the reticle marker to position the reticle with respect to the reticle holder, and a storage container constructed and arranged to store the assembly during the positioning of the reticle with respect to the reticle holder. The reticle holder and the detector are arranged to be kinematically aligned with respect to each other.
    Type: Application
    Filed: June 15, 2007
    Publication date: October 25, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Gert-Jan Heerens, Bastiaan Lambertus Van De Ven
  • Publication number: 20070247610
    Abstract: A method for generating models for simulating the imaging performance of a plurality of exposure tools. The method includes the steps of: generating a calibrated model for a first exposure tool capable of estimating an image to be produced by the first exposure tool for a given photolithography process, where the calibrated model includes a first set of basis functions; generating a model of a second exposure tool capable of estimating an image to be produced by the second exposure tool for the photolithography process, where the model includes a second set of basis functions; and representing the second set of basis functions as a linear combination of the first set of basis functions so as to generate an equivalent model function corresponding to the second exposure tool, where the equivalent model function produces a simulated image corresponding to the image generated by the second exposure tool for the photolithography process.
    Type: Application
    Filed: June 27, 2007
    Publication date: October 25, 2007
    Applicant: ASML MASKTOOLS B.V.
    Inventors: Xuelong Shi, Jang Chen
  • Publication number: 20070247611
    Abstract: A plurality of lenses (1a-1d) of a lens module (1), a plurality of wavelength selection regions (2a-2d) each having at least one optical filter, and a plurality of imaging regions (4a-4d) are placed in one-to-one correspondence. At least two of the plurality of wavelength selection regions transmit light in at least one wavelength band among infrared light, red light, green light, and blue light. The distance to an object is calculated based on at least two pieces of image information outputted respectively from at least two imaging regions respectively corresponding to the at least two wavelength selection regions. Furthermore, a camera module outputs an image signal based on image information outputted from at least one of the plurality of imaging regions. This can realize a small and low-cost camera module capable of measuring the distance to an object and capturing the object.
    Type: Application
    Filed: April 11, 2005
    Publication date: October 25, 2007
    Applicant: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
    Inventors: Satoshi Tamaki, Michiyoshi Nagashima
  • Publication number: 20070247612
    Abstract: A lidar and digital camera system collect data and generate a three-dimensional image. A lidar generates a laser beam to form a lidar shot and to receive a reflected laser beam to provide range data. A digital camera includes an array of pixels to receive optical radiation and provide electro-optical data. An optical bench passes the laser beam, reflected laser beam, and optical radiation and is positioned to align each pixel to known positions within the lidar shot. Pixels are matched to form a lidar point-cloud which is used to generate an image.
    Type: Application
    Filed: October 5, 2005
    Publication date: October 25, 2007
    Inventors: Robert Pack, Scott Budge
  • Publication number: 20070247613
    Abstract: An optical acceleration sensor includes a target having a reflective portion and a non-reflective portion. A conveyor causes light to be irradiated on the target. A receiver receives light from the target. An inertial mass is coupled to at least one of the conveyor and the receiver, wherein movement of the inertial mass relative to the target causes a change in intensity of an amount of light impinging on the portions to change an amount of light received at the receiver. The conveyor and the receiver may be optical fibers and may be disposed at least partially in an opaque conduit and held substantially parallel in a sensor head.
    Type: Application
    Filed: November 7, 2006
    Publication date: October 25, 2007
    Inventors: Mathieu Cloutier, Jean Pronovost, Marius Cloutier
  • Publication number: 20070247614
    Abstract: There is disclosed an inspection system that combines 2-D inspection and 3-D inspection of the components of an electronic device into one compact module. The inspection system of the present invention comprises a 2-D image acquisition assembly for inspecting 2-D criteria of the components, a 3-D image acquisition assembly for inspecting 3-D criteria of the components, and a computer for control and data analyzing. The 3-D image acquisition assembly comprises a 3-D image sensor and a 3-D light source. The 3-D light source is preferably a laser capable of generating a planar sheet of light that is substantially perpendicular to the inspection plane of the electronic device. The 2-D image acquisition assembly comprises a 2-D sensor and a 2-D light source positioned above the holder. The 2D and 3D image acquisition assemblies are arranged so that the 2D inspection and 3D inspection can be done while the electronic device is being held in one location.
    Type: Application
    Filed: September 1, 2005
    Publication date: October 25, 2007
    Inventors: Yong Puah, Hak Tang, Fan Hua
  • Publication number: 20070247615
    Abstract: An embodiment may comprise a camera based target coordinate measuring system or apparatus for use in measuring the position of objects in manner that preserves a high level of accuracy. This high level of measurement accuracy is usually only associated with more expensive laser based devices. Many different arrangements are possible. Other embodiments may comprise related methods of using a camera based target coordinate measuring method for use in measuring the position of objects. Many variations on the methods are possible.
    Type: Application
    Filed: April 20, 2007
    Publication date: October 25, 2007
    Applicant: FARO TECHNOLOGIES, INC.
    Inventor: Robert E. Bridges
  • Publication number: 20070247616
    Abstract: The present invention is an apparatus for inspecting foreign particles/defects, comprises an illumination optical system, a detection optical system, a shielding unit which is provided in said detection optical system to selectively shield diffracted light pattern coming from circuit pattern existing on an inspection object and an arithmetic processing system, wherein said shielding unit comprises a micro-mirror array device or a reflected type liquid crystal, or a transmission type liquid crystal, or an object which is transferred a shielding pattern to an optical transparent substrate, or a substrate or a film which is etched so as to leave shielding patterns, or an optical transparent substrate which can be changed in transmission by heating, sudden cold, or light illumination, or change of electric field or magnetic field, or a shielding plate of cylindrical shape or plate shape.
    Type: Application
    Filed: June 28, 2007
    Publication date: October 25, 2007
    Inventors: AKIRA HAMAMATSU, Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu, Sachio Uto
  • Publication number: 20070247617
    Abstract: An apparatus for detecting defects on a disk surface includes a light source that generates a light beam and an acoustic-optic deflector that continuously dithers the light beam transmitted by the light source back and forth, producing a dithered output beam. The apparatus also includes at least one lens that forms a scan line on a disk surface from the dithered output beam with the scan line generating multiple scans and a detector that detects scattered light from defects on the disk surface passing through the dithered output beam of the scan line.
    Type: Application
    Filed: April 18, 2007
    Publication date: October 25, 2007
    Inventors: Peter Jann, Douglas Peale, Wafaa Abdalla
  • Publication number: 20070247618
    Abstract: Previously used examination devices and methods mostly operate with reflected visible or UV light to analyze microstructured samples of a wafer (38), for example. The aim of the invention is to increase the possible uses of said devices, i.e. particularly in order to represent structural details, e.g. of wafers that are structured on both sides, which are not visible in VIS or UV because coatings or intermediate materials are not transparent. Said aim is achieved by using IR light as reflected light while creating transillumination (52) which significantly improves contrast in the IR image, among other things, thus allowing the sample to be simultaneously represented in reflected or transmitted IR light and in reflected visible light.
    Type: Application
    Filed: May 23, 2005
    Publication date: October 25, 2007
    Applicant: VISTEC SEMICONDUCTOR SYSTEMS GMBH
    Inventors: Uwe Graf, Lambert Danner
  • Publication number: 20070247619
    Abstract: An inspecting system (100) includes a stage (10), a white light source (20), a CCD camera (40), a laser diode assembly (60), at least one beam splitter (36, 34), a photo diode (50), and an oscilloscope (52). The white light source emits a white light (22) to illuminate a color filter (200). The CCD camera photographs the color filter and is linked with an image processing and displaying device (42). The laser diode assembly emits a laser light (62). The at least one beam splitter is arranged in a path of the laser light and transmits the laser light to the color filter. The photo diode receives the laser light reflected by the color filter and generates an electronic signal. The oscilloscope is connected with the photo diode and displays the electronic signal. The inspecting system facilitates the convenient and accurate inspection/evaluation of color filters.
    Type: Application
    Filed: April 24, 2006
    Publication date: October 25, 2007
    Applicant: ICF Technology Limited
    Inventor: Ren-Sue Wong
  • Publication number: 20070247620
    Abstract: The embodiments of the invention are directed to improved SERS and SECARS devices and method of manufacturing and using the same. In one embodiment of the invention, a device having at least one laser, a sample stage and a detector, wherein the sample stage is moveable and has as SERS active material is disclosed. In another embodiment of the invention, the device has at least one laser, a scanning mirror, a sample stage having a SERS active material and a detector, wherein the scanning mirror is adapted to steer a laser beam across a surface of the sample stage.
    Type: Application
    Filed: April 21, 2006
    Publication date: October 25, 2007
    Inventor: Tae-Woong Koo
  • Publication number: 20070247621
    Abstract: An optical emission analysis apparatus includes a discharge gap, an ignitor circuit, and a main discharge power supply. The ignitor circuit includes an ignition transformer, a pair of current control devices, and an excitation power supply. On a secondary coil of the ignition transformer, the discharge gap and the main discharge power supply are connected in series to form a main discharge current path. On a primary coil of the ignition transformer, the pair of current control devices and the excitation power supply are connected in series to form an excitation current path. A pair of current control devices is connected to each other via mutually opposite polarities. The polarity of the high voltage generated in the secondary coil is reversed by reversing the polarity of the voltage of the excitation power supply. The direction of the main discharge current is reversed by reversing the polarity of the voltage of the main discharge power supply.
    Type: Application
    Filed: March 14, 2007
    Publication date: October 25, 2007
    Applicant: SHIMADZU CORPORATION
    Inventor: EIZO KAWATO
  • Publication number: 20070247622
    Abstract: A system and method for inspection a substrate for various defects is herein disclosed. Polarizing filters are used to improve the contrast of polarization dependent defects such as defocus and exposure defects, while retaining the same sensitivity to polarization independent defects, such as pits, voids, cracks, chips and particles.
    Type: Application
    Filed: February 23, 2007
    Publication date: October 25, 2007
    Inventor: Gang Sun
  • Publication number: 20070247623
    Abstract: A polarization measuring device includes a diffraction grating and a detector. The diffraction grating is configured to diffract incident light to observe the polarization state of the light. The detector is configured to receive the light diffracted by the diffraction grating and display the polarization state of the light.
    Type: Application
    Filed: March 23, 2007
    Publication date: October 25, 2007
    Inventors: Dong-wan Kim, Dong-gun Lee, Kyoung-yoon Bang
  • Publication number: 20070247624
    Abstract: The present invention discloses an optical measurement and/or inspection device that, in one application, may be used for inspection of semiconductor devices. A method is disclosed for extracting information of a device-under-test for an ellipsometer, comprising the steps: providing a plurality of incoming polarized beams using a plurality of polarizers, where each of the beams being polarized at a designated polarizing angle; using a parabolic reflector to focus said plurality of incoming polarized beams on a spot on a DUT; using a parabolic reflector to collect a plurality of beams reflected from said DUT; and analyzing said collected beams using a plurality of analyzers, wherein each of the analyzers having a designated polarizing angle with respect to its respective polarizer.
    Type: Application
    Filed: April 24, 2007
    Publication date: October 25, 2007
    Applicant: Raintree Scientific Instruments (Shanghai) Corporation
    Inventors: Tongxin Lu, Xiaohan Wang
  • Publication number: 20070247625
    Abstract: An illuminated aiming device for an observation instrument comprises a reticle plate, an aiming mark provided at the reticle plate, and a light source directed onto the aiming mark via a light guide. The light guide is configured as a wave guide within the reticle plate.
    Type: Application
    Filed: April 18, 2007
    Publication date: October 25, 2007
    Inventors: Gerd Schreiter, Torsten Possner
  • Publication number: 20070247626
    Abstract: Apparatus for buffering of a web feed system using feedback based on the amount, or extent, of loop of the web within a buffering module. The extent of the loop is measured optically. An opaque extensor is inserted within the loop to mark the extent of the loop so as to enable the optical sensor to work accurately even if the web is transparent.
    Type: Application
    Filed: April 19, 2006
    Publication date: October 25, 2007
    Inventors: Ziv Rozenblum, Erez Segal, Haim Belinkov
  • Publication number: 20070247627
    Abstract: The present invention relates to the detection of optical sensors by means of measurement of information relative to the signal intensity and signal modulation phase shift. The proposed method employs the use of CMOS and/or CCD imager and illuminations with different wavelengths. The system is able realize a contactless measurement of a phase shift to curse on a gas concentration an distance.
    Type: Application
    Filed: July 27, 2005
    Publication date: October 25, 2007
    Applicant: IEE INTERNATIONAL ELECTRONICS & ENGINEERING S.A.
    Inventors: Pierre Orlewski, Laurent Federspiel
  • Publication number: 20070247628
    Abstract: The present invention relates generally to the field of biochemical laboratory instrumentation for different applications of measuring properties of samples on microtitration plates and corresponding sample supports. An optical measurement instrumentation is provided, a sample is activated and the emission is detected, wherein between the activation and detection phases of measuring the sample, a shift is made in the relative position between the sample and elements directing the activation radiation to the sample as well as in the relative position between the sample and the elements receiving the emission radiation from the sample. This can be implemented e.g. by moving the sample assay plate and/or a measuring head between the activation and emission phases of a sample. The invention allows a simultaneous activation of a first sample and detecting emission from a second sample thus enhancing efficiency of the measurement.
    Type: Application
    Filed: September 10, 2004
    Publication date: October 25, 2007
    Applicant: WALLAC OY
    Inventor: Petri Kivelä
  • Publication number: 20070247629
    Abstract: Photography is employed to objectively quantify opacity of fluids such as smoke plumes and dust via a method termed the Digital Optical Method (DOM™). The DOM™ quantifies the ratio of radiance values by means of a camera response curve obtained using objective measures. The radiance ratios are then used to calculate opacity of target fluids such as smoke plumes. The DOM™ quantifies opacity during both daytime and nighttime conditions with a much broader range of subject types, e.g., white, gray and black smoke plumes, and environmental conditions, e.g., non-blue-sky, building, and mountain backgrounds, than existing systems while not requiring human interpretation for any application. In one embodiment, the DOM™ quantifies opacity from digital photos using a pre-designed algorithm and an inexpensive digital camera. Very little training is needed to implement the DOM™ and it yields consistent objective quantitative results, while providing a permanent photographic record easily digitally archived.
    Type: Application
    Filed: April 20, 2006
    Publication date: October 25, 2007
    Inventors: Byung Kim, Mark Rood, Ke Du
  • Publication number: 20070247630
    Abstract: A confocal scanning holography microscope for use with a suitably selected detector for providing three dimensional information on the state of an object. The microscope has a coherent wavelength source for producing a coherent beam, scanning means for moving said coherent beam in a suitably selected pattern, and means for producing and focusing an object beam and a reference beam to an object focal point and a reference focal point, respectively. The object beam has a transmission path of essentially the same length of a transmission path of the reference beam. The object beam intercepts an object at the object focal point while the reference beam passes by the object. There are also means for defining the object beam and the reference beam based on the position of the object focal point and the geometry of the convergence angles and means for producing an interference pattern between the object focal point and the reference focal point.
    Type: Application
    Filed: July 22, 2005
    Publication date: October 25, 2007
    Inventor: Rodney Herring
  • Publication number: 20070247631
    Abstract: This invention uses an interferometric fibre optic sensor, particularly a Sagnac or Michelson interferometer, in a first fibre to monitor a sensing length of the first fibre and to detect disturbances. Signals indicating disturbances are classified as being of interest or not of interest, depending on predetermined criteria. Disturbances of interest can be, for example, the breaking of reinforcement wires in concrete pipe, the breaking of wires in suspension cables, a fire, a pipeline leak, or an intrusion. A location sensor system is used to determine the location of disturbances of interest, and to confirm the interferometer signal to reduce noise. The location sensor system is a fibre optic sensor, such as a phase OTDR sensor or a Brillouin effect sensor, which can detect the location of events it senses. It is present either in the first fibre or in a separate fibre laid adjacent the first fibre along its sensing length, as for example in the same optical cable.
    Type: Application
    Filed: May 24, 2005
    Publication date: October 25, 2007
    Inventor: Peter Paulson
  • Publication number: 20070247632
    Abstract: A heterodyne interferometer having two interferometer arms and one optical modulator for changing the frequency of a radiation conducted via one interferometer arm and having a control device for setting the frequency change of the radiation and a detector device for analyzing the interfered output radiation. The amplitude of an input beam conducted into the heterodyne interferometer is modulated using a frequency which is different from the frequency change of the radiation in the optical modulator prior to being split between the interferometer arms. A heterodyne frequency corresponding to the difference of the frequency change of the radiation and the frequency of the amplitude modulation of the radiation may be achieved.
    Type: Application
    Filed: January 11, 2007
    Publication date: October 25, 2007
    Inventors: Stefan Franz, Matthias Fleischer
  • Publication number: 20070247633
    Abstract: [Problems to be Solved] To obtain a laminated quarter-wave plate having a bandwidth of a plurality of wavelengths to be a phase difference of 90 degrees broadened [Means to Solve the Problem] A laminated wave plate of the present invention includes a first wave plate having a phase difference of ?1 and a second wave plate having a phase difference of ?2 with respect to a wavelength ?, the first wave plate and the second wave plate being bonded together so that an optical axis of the first wave plate and an optical axis of the second wave plate are intersected each other to function as a quarter-wave plate as a whole, the laminated wave plate comprising following equations from (1) to (6): ?1=360×(n1+1) . . . (1); ?2=90×(2×n2+1) . . . (2); ??1=(?12a??11a)/(?12??11) . . . (3); ??2=(?12b??11b)/(?12??11) . . . (4); cos 2?1=1?(1?cos ??2)/2(1?cos ??1) . . . (5); and ?2=45°±5° . . .
    Type: Application
    Filed: April 18, 2007
    Publication date: October 25, 2007
    Applicant: EPSON TOYOCOM CORPORATION
    Inventor: Masayuki Oto
  • Publication number: 20070247634
    Abstract: An apparatus for monitoring a trench profile of a substrate includes a radiation-emitting unit for irradiating the substrate with infrared radiation. The intensity and/or polarization state of the infrared radiation reflected from the substrate is measured at a multitude of measuring frequencies. An analyzing unit determines the respective reflectance and relative phase change and/or relative amplitude change in relation to the respective measuring frequency. In addition, a reflectance spectrum, a relative phase change spectrum and/or a relative amplitude change spectrum may be obtained. By performing a Fourier transformation of the respective spectrum, a secondary Fourier spectrum is obtained. The secondary Fourier spectrum plots a virtual amplitude against corresponding values of a frequency periodicity that correspond to a substrate depth. Peaks of the virtual amplitude may indicate reflective planes within the substrate at respective depths.
    Type: Application
    Filed: April 20, 2006
    Publication date: October 25, 2007
    Inventors: Zhen-Long Chen, Peter Weidner, Pierre-Yves Guittet, Alexander Kasic, Barbara Schmidt, Anita Klee
  • Publication number: 20070247635
    Abstract: The present invention relates to a polarization interference microscope (1) for imaging objects (5). The polarization interference microscope (1) comprises a light source (2), an illumination beam path (6), an imaging beam path (7) and an objective (4). The illumination beam path (6) extends from the light source (2) to the object (5). The imaging beam path (7) extends from the object (5) to a detector or a tube (3). At least one polarization means (9) is provided in the illumination beam path (6) and/or in the imaging beam path (7), by which at least one polarization means the light of the respective beam path (6, 7) can be converted into a predeterminable polarization state. An analyzer means (10) is provided in the imaging beam path (7). A birefringent component is provided between the polarization means (9) and the analyzer means (10), by which birefringent component the light polarized by the polarization means (9) can be divided into two partial beams (13, 14) having different polarization directions.
    Type: Application
    Filed: April 10, 2007
    Publication date: October 25, 2007
    Inventors: Ralf Kruger, Christian Schulz
  • Publication number: 20070247636
    Abstract: An image forming apparatus which can form an even image while maintaining high resolution. A speckle pattern detecting unit detects a speckle pattern on a surface of a photosensitive drum. A motor drive circuit controls the rotational speed of the photosensitive drum based on the detected speckle pattern on the surface of the photosensitive drum detected by the speckle pattern detecting unit.
    Type: Application
    Filed: April 19, 2007
    Publication date: October 25, 2007
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Nobuo MATSUOKA
  • Publication number: 20070247637
    Abstract: A method including: imaging test light emerging from a test object over a range of angles to interfere with reference light on a detector, wherein the test and reference light are derived from a common source; for each of the angles, simultaneously varying an optical path length difference from the source to the detector between interfering portions of the test and reference light at a rate that depends on the angle at which the test light emerges from the test object; and determining an angle-dependence of an optical property of the test object based on the interference between the test and reference light as the optical path length difference is varied for each of the angles.
    Type: Application
    Filed: June 8, 2007
    Publication date: October 25, 2007
    Inventor: Peter de Groot
  • Publication number: 20070247638
    Abstract: The present invention relates to an adaptive optics sensor intended for simultaneous detection of several wave fronts on a common camera target. The sensor is intended for use in connection with multi-conjugate adaptive optics (MCAO), where several wave front measurements are needed at the same time. The sensor includes a spatial filter taking out signals resulting from parasitic reflections of the reference sources and from unwanted parts of the object.
    Type: Application
    Filed: April 11, 2007
    Publication date: October 25, 2007
    Inventors: Mette Owner-Petersen, Jorgen Thaung, Zoran Popovic
  • Publication number: 20070247639
    Abstract: A device and method of optical precision measurement of a component. In the method, an optical probe is provided at a location relative to the component (120) and a source beam directed to the component (122). Deviation is detected (124) and stored in a component characteristic dataset (126). The optical source is moved to other locations relative to the component (128) and additional data acquired (130). The device includes an optical probe (24) providing a source beam (38), a probe stage (22) operable to rotate the optical probe (24) about a ?-axis, a component stage (26) operable to rotate the component (28) about a ?-axis, and a position sensitive detector. The probe (22) directs the source beam (38) to the component (28), the source beam (38) generates a resultant beam from the component (28), and the position sensitive detector detects the resultant beam.
    Type: Application
    Filed: May 6, 2005
    Publication date: October 25, 2007
    Applicant: KONINKLIJKE PHILIPS ELECTRONICS, N.V.
    Inventors: Willem Amstel, Niels Beek, Stefan Baumer
  • Publication number: 20070247640
    Abstract: In subroutine 201 and step 205, a best image-forming plane of a projection optical system and an offset component of a multipoint AF system are detected as calibration information. During measurement of a wafer alignment mark by an alignment system in step 215, the multipoint AF system detects information related to a surface shape of a surface subject to exposure of a wafer (Z map). In step 219, a Z position order profile regarding position order (Z, ?x, ?y) related to autofocus leveling control is made, along with an XY position order profile of a wafer stage during scanning exposure, and in step 221, scanning exposure is performed while performing open control based on the position order.
    Type: Application
    Filed: March 30, 2005
    Publication date: October 25, 2007
    Applicant: Nikon Corporation
    Inventors: Nobutaka Magome, Hideo Mizutani, Yasuhiro Hidaka