Abstract: Long rod shaped M13 viruses were used to fabricate one dimensional (1D) micro- and nanosized diameter fibers by mimic the spinning process of the silk spider. Liquid crystalline virus suspensions were extruded through the micrometer diameter capillary tubes in cross-linking solution (glutaraldehyde). Resulting fibers were tens of micrometers in diameter depending on the inner diameter of the capillary tip. AFM image verified that molecular long axis of the virus fibers were parallel to the fiber long axis. Although aqueous M13 virus suspension could not be spun by electrospinning, M13 viruses suspended in 1,1,1,3,3,3-hexafluoro-2-propanol were spun into fibers. After blending with highly water soluble polymer, polyvinyl 2-pyrolidone (PVP), M13 viruses was spun into continuous uniform virus blended PVP (virus-PVP) fibers. Resulting virus-PVP electrospun fibers showed intact infecting ability to bacterial hosts after suspending in the buffer solution.

Abstract: The present invention provides a Venezuelan equine encephalitis virus replicon RNA useful in the development of stable lines of mammalian, avian and insect cells in which these replicons will persistently replicate. Venezuelan equine encephalitis (VEE) virus replicons contain a number of unique adaptive mutations that make the replicons noncytopathic. The replicons remain resistant to IFN-?/?. Replicon replication leads to high-level production of heterologous proteins, which are encoded by the replicons' genome and are under the control of a viral subgenomic promoter. Also provided are methods of screening for inhibitory compounds of Venezuelan equine encephalitis virus replication and eastern equine encephalitis virus replication.

Abstract: The present invention concerns a new epoxypolysaccharide-producing bacterium, the exopolysaccharide isolated from this bacterium and the use of the exopolysaccharide.

Abstract: A Coccidioides spp. fungus that is attenuated by the loss of endosporulation potential of the fungus wherein said fungus does not replicate when transformed into the parasitic phase.

Abstract: A biological method for removing organic polymers is provided. The method includes the cultivation of a bacterial strain Pseudomonas nitroreducens TX1. The deposit numbers are PTA-6168 at ATCC and BCRC910228 at Bioresources Collection and Research Center in Taiwan (Republic of China). A nitrogen source and inorganic salts are required for bacterial growth. Moreover, the method also provides the information of the supply of air and the water content in soils when this invention is applied to the removal of organic polymers in soils. In addition, the viability of cultivated bacteria is not affected by endogenous bacteria in soils and able to maintain the capacity of degrading organic polymers in the method. The present invention is able to remove the organic polymers in a wide range of amounts effectively and useful in the bioremediation of contamination from organic polymers in both soils and water.

Abstract: This invention relates to methods and apparatus for performing microanalytic and microsynthetic analyses and procedures. The invention provides a microsystem platform and a micromanipulation device for manipulating the platform that utilizes the centripetal force resulting from rotation of the platform to motivate fluid movement through microchannels. The microsystem platforms of the invention are provided having arrays of thermal control regions, wherein fluid applied to the platform can be placed at a temperature and maintained at that temperature for a time that is dependent on the path length of the channel in the region, the cross-section dimension of the channel, and the rotational speed of the platform. Methods specific for the apparatus of the invention for performing any of a wide variety of microanalytical or microsynthetic processes are provided.

Abstract: In a method for analysis biomolecules (3) attached to a solid surface of a substrate (1) are used for detecting the presence of analytes (4) in a sample by binding of the analytes to the biomolecules. The biomolecules (3) are attached directly to the surface of the substrate together with biomolecule-repellent molecules (5), which cover the surface between the biomolecules (3) to prevent nonspecific binding of analytes (4) and other biomolecules. The invention relates also to a biosensor where biomolecules (3) are attached directly to the substrate (1) together with biomolecule-repellent molecules (5), which cover the surface between the biomolecules (3) to prevent non-specific binding of analytes (4) and other biomolecules. The biomolecules (5) can be self-assembled hydrophilic polymers. One example of using the invention is immunological analysis using surface plasmon resonance (SPR).

Abstract: A device and methods for performing biological or chemical analysis is provided. The device includes an array of three-dimensional microcolumns projecting away from a support plate. Each microcolumn has a relatively planar, first surface remote from the support plate. An array of multiple, different biological materials may be attached to the first surface. The device, when used in combination with existent micro-titer well plates, can improve efficiency of binding assays using microarrays for high-throughput capacity.

Abstract: A substrate for testing a carrier liquid for biomolecules using SPR or other techniques provides a metallic island surrounded by a hydrophobic layer, the islands being a location for the attachment of probe molecules. The hydrophobic layer may also be a dielectric material providing improved sensitivity in SPR imaging.

Abstract: A device and a method of maintaining vascularization near an implant, especially a bioartificial hemofilter. By associating cells that excrete angiogenic factors with such an implant, vascularization to the tissue surrounding the implant can be maintained. In a bioartificial hemofilter, this facilitates filtrate transport to a collection fiber for drainage from the body. The cells can be genetically engineered, for example using an adenovirus vector encoding for vascular endothelial growth factor. Myoblasts and myotubes may be used in one embodiment of the present invention.

Abstract: The invention provides a plasmid shuttle vector characterized by being replicable in both of bacteria of the genus Brevibacillus and Escherichia coli, and by comprising a promoter capable of functioning in bacteria of the genus Brevibacillus and a DNA sequence(s) capable of functioning as a selective marker(s) for Escherichia coli and bacteria of the genus Brevibacillus, and a method of transforming bacteria of the genus Brevibacillus using the said plasmid shuttle vector. The plasmid shuttle vector enables the efficient transformation of bacteria of the genus Brevibacillus.

Abstract: The invention relates to a buffer solution for suspending animal or human cells and for dissolving biologically active molecules in order to introduce biologically active molecules into cells using an electric current. The inventive buffer solution has a buffering capacity of at least 20 mmol?1×pH?1 and an ionic strength of at least 200 mmol×1?1 during a change to the pH value from pH 7 to pH 8 and at a temperature of 25° C. The use of a buffer solution of this type allows biologically active molecules to be introduced into animal and human cells with a high degree of transfection efficiency and at the same time a low cell mortality. Different cell types, in particular dormant and actively dividing cells of low activity, can be successfully transfected in the buffer solution.

Abstract: The present invention relates to the production of proteins in host cells, and more particularly to host cells containing multiple integrated copies of an integrating vector. Suitable integrating vectors for use in the present invention include retrovirus vectors, lentivirus vectors, transposon vectors, and adeno-associated virus vectors. Methods are provided in which the host cells are prepared by using the integrating vectors at a high multiplicity of infection. The host cells are useful for producing pharmaceutical proteins, variants of proteins for use in screening assays, and for direct use in high throughput screening.

Abstract: A method of in vitro fucosylation of selectin ligands on cord blood-derived hematopoietic stem cells for bone marrow transplantation is disclosed. In this method, an effective amount of an ?1,3-fucosyltransferase, e.g., ?1,3-fucosyltransferase VI, is used in vitro to treat cord blood-derived hematopoietic stem cells to convert non-functional PSGL-1 or other ligands on the cell surface into functional forms that bind selectins, especially P-selectin or E-selectin. The treated cells have enhanced effectiveness in reconstituting bone marrow in patients in need of such therapy.

Abstract: The invention provides a method of increasing expression of p21WAF1/Cip 1 in cells to decrease proliferation of the cells, the method comprising decreasing levels of PP5 protein in the cells. The invention further provides a method of treating or preventing an abnormal condition resulting from a defect in a tumor suppressor gene in a subject that results in decreased induction of p21WAF1/Cip 1 in the cells of the subject, the method comprising administering to the subject an amount of a compound effective to decrease levels of PP5 protein in the cells of the subject.

Abstract: The present invention provides methods for inducing the differentiation of pluripotent cells. The present inventors succeeded in differentiating hepatocytes from ES cells without EB formation, using simple adherent monoculturing in media comprising several growth factors in culture dishes with two different matrices.

Abstract: The present invention relates to methods of introducing an expressible non-viral nucleic acid sequence into a T lymphocyte cell, a B-cell, or a mast cell, comprising contacting the cell with a viral particle containing a modified viral coat proteins containing adenoviral amino acid sequence from an adenoviral serotype Ad35 or Ad51 fiber protein, arrays of subpopulations of cells made by such methods, and a method for a ex vivo transduction of a population of cells.

Abstract: Methods and vectors (both DNA and retroviral) are provided for the construction of a Library of mutated cells. The Library will preferably contain mutations in essentially all genes present in the genome of the cells. The nature of the Library and the vectors allow for methods of screening for mutations in specific genes, and for gathering nucleotide sequence data from each mutated gene to provide a database of tagged gene sequences. Such a database provides a means to access the individual mutant cell clones contained in the Library. The invention includes the described Library, methods of making the same, and vectors used to construct the Library. Methods are also provided for accessing individual parts of the Library either by sequence or by pooling and screening. The invention also provides for the generation of non-human transgenic animals which are mutant for specific genes as isolated and generated from the cells of the Library.

Abstract: Porous and/or polycrystalline silicon are used in the delivery of substances into cells. The porous and/or polycrystalline silicon can be formed into micropiercers, microneedles and biolistic bullets for penetration of the cell. The control of the pore size and porosity of the porous and/or polycrystalline silicon allows tuning of the bioactivity of the porous silicon. The porous and/or polycrystalline silicon is also resorbable and is therefore resorbed from the cells without leaving any particles or being seen as a foreign body. Methods of manufacturing the porous silicon micropiercers, microneedles, microelectrodes, biolistic bullets, and precipitation of calcium phosphate on a bioactive substrate, and their advantages over known methods of delivering materials into cells.

Abstract: The present invention relates to a process for identifying a novel target for use for the development of therapeutic modalities and drugs effective against tuberculosis comprising testing M. tuberculosis devR mutant strain for virulence in guinea pigs.

Abstract: The present invention relates to mutants cells comprising a marker-free modification of a gene, and methods for obtaining and using such mutant cells.

Abstract: An object of the present invention is to provide a method for evaluating the physical strength of husks of a barley ingredient for malt manufacture. Barley kernels with husks are disposed in a sulfuric acid solution with a concentration of approximately 40% to 60%, and are agitated for a prescribed time (e.g. approximately 1 hour) using a stirrer bar or the like. After agitation, the barley kernels are treated with a mixed liquid of Methylene Blue and Eosin, and the degree of peeled husk (remaining degree) is examined by referring to the degree of dyed barley kernels, to thereby evaluate the physical strength of the husks of the barley kernels.

Abstract: The invention includes an enantioselective indicator-displacement assay useful to determine enantiomeric excess (ee) enantiomeric samples calorimetrically. Determination may be by inspection of color with the naked eye, spectrographic measurement, or mathematical calculation. Concentration may also be determined. The assay may involve two independent absorption measurements. On suitable group of enantiomeric molecules to be assayed include ?-hydroxyacids. The inherent relationship between the absorbance of the indicator-displacement ensemble and the overall concentration and ee of the analyte is established through solution equilibria. The invention also includes use of the assay in drug screening and manufacturing, high throughput screening of catalysts and kits for use in conducting assays of the invention.

Abstract: A method of detecting an analyte is described in which an up-converting luminescent species that is excited by absorption of long wavelength light is provided as a donor of energy to an acceptor species that can be bound to, or generated in proximity to, the luminescent species. The analyte either alters the proximity between the luminescent species and the acceptor species or alters the absorbance or luminescence properties of the acceptor species. The luminescent energy donor is excited with long wavelength light and transfers up-converted energy to the proximate acceptor species and this transfer of energy is detected by measurement of appropriate luminescence properties of either the donor or of the acceptor or both.

Abstract: A chemical sensing apparatus and method for the detection of sub parts-per-trillion concentrations of molecules in a sample by optimizing electron utilization in the formation of negative ions is provided. A variety of media may be sampled including air, seawater, dry sediment, or undersea sediment. An electrostatic mirror is used to reduce the kinetic energy of an electron beam to zero or near-zero kinetic energy.

Abstract: The method is intended to detect with high sensitivity and high accuracy chemically contaminating impurities in which there exist chemically contaminating impurity constituents of basic series, acidic series, and organic substance series, in gaseous and particle states, and constituents of compounds thereof, contained in air inside a clean room, as constituents having every property. To this end, ions composed of various cations and anions, constituting the chemically contaminating impurities in fine particle, gaseous, or molecular state, are caused to continuously undergo dissolution reaction and dissociation reaction in a solution in sequence from those constituting salts having strong solubility or strong dissociative tendency.

Abstract: An apparatus for concentrating and collecting one or more analytes in a flowing liquid stream of a carrier solvent composed of one or more solvent components is provided, which includes a transfer tube which forms a bore having an inlet and an outlet, the inlet being adapted to accept the flowing liquid stream, and the outlet being adapted to form continuously replaced, hanging droplets of the liquid stream, and a collection device mounted below the outlet of the transfer tube for collecting the droplets. The apparatus includes a device for heating the liquid stream in the transfer tube to a temperature sufficient to cause partial evaporation of the carrier solvent from the hanging droplets but not exceeding the boiling point of the carrier solvent, and a device for heating the collection device to a temperature sufficient to cause further evaporation of the carrier solvent from the collected droplets.

Abstract: A sample substrate configured for samples of biological material is provided. The sample substrate has a dual chambered sample well separated by a wall that may be punctured or otherwise breached to allow mixing of material contained in the two initially separate chambers. The chambers are connected by channels to fluid reservoirs, wherein the channels can be staked to prevent further fluid flow into and out of the chambers. Methods of loading a sample substrate are also provided.

Abstract: Disclosed are methods relating to cell membrane fragments associated with microbeads, so that the characteristics of the cells the fragments originated from can be determined. The fragments can be oriented with what was the outer surface of the cell membrane facing outwardly, so that the antigens associated with the membrane can be contacted with ligands (including antibodies) to antigens in the membranes which would be accessible to antibodies in vivo. The system is useful, inter alia, for detection of panel reactive antibodies in donor serum, as well as detection of other cell membrane antigens; or quantitation of particular cell membrane antigens.

Abstract: A one-step diagnostic device for simultaneously detecting and distinguishing between a normal pregnancy and an ectopic pregnancy and methods for preparing the device are disclosed. Utilizing the device and principles of the present invention, normal pregnancy and ectopic pregnancy can be rapidly and accurately determined at an early stage by immunologically detecting the morphological differences between human chorionic gonadotropin (hCG) and modified forms thereof, which are secreted into the body fluid of a pregnant female.

Abstract: Disclosed are silica-coated nanoparticles and a process for producing silica-coated nanoparticles. Silica-coated nanoparticles are prepared by precipitating nano-sized cores from reagents dissolved in the aqueous compartment of a water-in-oil microemulsion. A reactive silicate is added to coat the cores with silica. Also disclosed are methods for functionalizing silica-coated nanoparticles for use in a variety of applications.

Abstract: A composition comprising colloidal Fe3O4 particles coated with streptavidin is disclosed. These particles can be used in a method for separating biotinylated compounds from a solution in which the biotinylated compounds bind to the streptavidin-coated particles which are attracted to a surface by a magnet. Also disclosed is a method for making said streptavidin-coated composition, said method comprising the steps of forming colloidal Fe3O4 particles by mixing aqueous FeCl2 with aqueous FeCl3, adding aliquots of the mixture to an alkaline solution and adding streptavidin.

Abstract: The invention concerns a method for detecting and/or quantifying at least an analyte in a liquid medium, characterized in that it consists in using magnetic colloidal particles functionalized at the surface with at least a ligand specific of the analyte to be detected and/or assayed and in that it comprises: contacting said particles with said medium to be analyzed; applying a magnetic field to said medium, at an intensity sufficient to cause said magnetic particles to be structured in the form of chains; maintaining said magnetic field for a sufficient time interval to enable coupling or combination of the analyte concerned with at least two specific ligands present respectively on two neighbouring particles of a chain; cancelling the magnetic field, and determining the presence and/or absence of said analyte and, as the case may be, its concentration via the presence and/or the absence of said permanent chains of magnetic particles.

Abstract: The present invention relates to a chemical compound comprising a light emitting moiety precursor and a precursor of a leaving group, bound to each other by an amide or by an ester bond and characterized in that the leaving group precursor upon oxidation is converted into the leaving group. The invention also relates to compounds additionally comprising a coupling group to the use of such compounds for labeling of biomolecules and more generally to the use of such compounds in chemiluminescence detection procedures.

Abstract: The invention provides methods and compositions for the rapid and sensitive detection of post-translationally modified proteins, and particularly of those with post-translational glycosylations. The methods can be used to detect O-GlcNAc post-translational modifications on proteins on which such modifications were undetectable using other techniques. In one embodiment, the method exploits the ability of an engineered mutant of ?-1,4-galactosyltransferase to selectively transfer an unnatural ketone functionality onto O-GlcNAc glycosylated proteins. Once transferred, the ketone moiety serves as a versatile handle for the attachment of biotin, thereby enabling detection of the modified protein. The approach permits the rapid visualization of proteins that are at the limits of detection using traditional methods. Further, the preferred embodiments can be used for detection of certain disease states, such as cancer, Alzheimer's disease, neurodegeneration, cardiovascular disease, and diabetes.

Abstract: The present invention is directed to novel polypeptides, termed fluorettes, that bind with high avidity to fluorophore dyes. The peptides find use in a variety of methods and approaches involving fluorophore dyes.

Abstract: A conduction film 36 is formed in a larger design thickness value on a ferroelectric film 32 by MOCVD, and the entire surface of the conduction film 36 is anisotropically etched back, whereby the surface morphology of the conduction film 36 can be improved. The conduction film 36, whose surface morphology has been improved and which has been flattened, can be patterned by photolithography without the reflection of the incident exposure light in various directions, and a desired pattern as designed can be formed. The method for fabricating a semiconductor device can improve the surface morphology of a ferroelectric film formed by organic metal chemical vapor deposition.

Abstract: A MOSFET has its gate voltage controlled to provide a constant drain current of the MOSFET, for example to limit inrush current for charging a capacitance of a power supply arrangement. A decrease in the gate voltage supplied to the MOSFET, corresponding to an increase in the junction temperature of the MOSFET, by more than a determined amount is detected and used to reduce the gate voltage, and hence the drain current, for example to zero, to prevent heating of the MOSFET beyond a maximum operating temperature.

Abstract: Techniques for inspecting semiconductor devices. An inspection condition using chip matrix data and chip size data is set. The intricate circuit patterns of at least one semiconductor device is inspected with the inspection condition. In an embodiment of the present invention, inspection uses images formed by the irradiation of white light, a laser light, or an electron beam. Data obtained from the inspection is used to generate a revised inspection condition. Semiconductor devices are inspected using the revised inspection condition.

Abstract: The present invention generally provides an apparatus and a method for inspecting a substrate in a substrate processing system. In one aspect, a voltage or current source is used in conjunction with a power density receiving device, such as a spectrometer, to inspect a substrate for various noise spectrum signatures. In one embodiment, spectral data collected from a given substrate is used to generate a current or voltage spectral signature. This spectral signature may then be compared to a reference spectral density signature to predict reliability of a feature structure of a substrate in processing and feedback to the substrate processing system for substrate processing control. Embodiments of the invention further include computer-readable media containing instructions for controlling the substrate processing system, and computer program products having computer-readable program code embodied therein for controlling the substrate processing system and inspecting defects on semiconductor features.

Abstract: Xerographic micro-assembler systems and methods are disclosed. The systems and methods involve manipulating charge-encoded micro-objects. The charge encoding identifies each micro-object and specifies its orientation for sorting. The micro-objects are sorted in a sorting unit so that they have defined positions and orientations. The sorting unit has the capability of electrostatically and magnetically manipulating the micro-objects based on their select charge encoding. The sorted micro-objects are provided to an image transfer unit. The image transfer unit is adapted to receive the sorted micro-objects, maintain them in their sorted order and orientation, and deliver them to a substrate. Maintaining the sorted order as the micro-objects are delivered to the substrate may be accomplished through the use of an electrostatic image, as is done in xerography.

Abstract: A wafer is irradiated with laser light having a wavelength which is transmitted through an inside of a crystal of the wafer and does not generate an electromotive force due to photo-excitation while the laser light is scanned. When a temperature of the wafer is increased by the irradiation, a thermo-electromotive force is generated in a crystalline abnormal part of the wafer by a Seebeck effect. A defect inside the crystal is detected such that the thermo-electromotive force is detected by a change in voltage or current which appears between an anode and a cathode of the wafer and the thermo-electromotive force is displayed on a CRT.

Abstract: An integrated battery package, that contains semiconductor chips, for example to control and regulate battery charging and to monitor the package operation, uses a single lead frame to interconnect several internal chips, to internally connect said control chips to the battery and to connect the whole package assembly externally. The invention eliminates the need for any additional connecting mechanism. The invention uses established production processes. A molding process, similar to plastic chip encapsulation, encloses the battery controlling chips and forms at the same time the body of the battery package. An additional cover, sealed to said body, closes the battery package.

Abstract: A p-n junction interface 3 is formed between an n-type ZnTe1-xOx (0.5?x?1) layer 8 and a p-type ZnTe1-xOx (0?x<0.5) layer 7, and the n-type ZnTeO layer 8 and/or p-type ZnTeO layer 7 are formed by thermal oxidation of the main surficial side of a p-type ZnTe wafer. This is successful in providing a Zn-base semiconductor light emitting device and a method of fabricating thereof possibly be improved in the emission efficiency at a light emitting layer composed of a Zn-base semiconductor light emitting device.

Abstract: A method according to the present invention for fabricating high light extraction photonic devices comprising growing an epitaxial semiconductor structure on a substrate and depositing a first mirror layer on the epitaxial semiconductor structure such that the epitaxial semiconductor structure is sandwiched between the first mirror layer and the substrate. Flip-chip mounting the epitaxial semiconductor structure, with its first mirror and substrate on a submount such that the epitaxial semiconductor device structure is sandwiched between the submount and substrate. The substrate is then removed from the epitaxial structure by introducing an etch environment to the substrate. A second mirror layer is deposited on the epitaxial semiconductor structure such that the epitaxial semiconductor structure is sandwiched between the first and second mirror layers. A device according to the present invention comprising a resonant cavity light emitting diode (RCLED) mounted to a submount.

Abstract: A light-emitting semiconductor device (10) consecutively includes a sapphire substrate (1), an AlN buffer layer (2), a silicon (Si) doped GaN n+-layer (3) of high carrier (n-type) concentration, a Si-doped (Alx3Ga1-x3)y3In1-y3N n+-layer (4) of high carrier (n-type) concentration, a zinc (Zn) and Si-doped (Alx2Ga1-x2)y2In1-y2N emission layer (5), and a Mg-doped (Alx1Ga1-x1)y1In1-y1N p-layer (6). The AlN layer (2) has a 500 ? thickness. The GaN n+-layer (3) has about a 2.0 ?m thickness and a 2×1018/cm3 electron concentration. The n+-layer (4) has about a 2.0 ?m thickness and a 2×1018/cm3 electron concentration. The emission layer (5) has about a 0.5 ?m thickness. The p-layer 6 has about a 1.0 ?m thickness and a 2×1017/cm3 hole concentration. Nickel electrodes (7, 8) are connected to the p-layer (6) and n+-layer (4), respectively. A groove (9) electrically insulates the electrodes (7, 8).

Abstract: A MEMS apparatus for scanning an optical beam comprises a mirror operative to perform a rotational motion to a maximum rotation angle around a mirror rotation axis formed in a double active layer silicon-on-insulator (SOI) substrate. The apparatus may include a bouncing mechanism operative to provide a bouncing event and to reverse the rotational motion. The bouncing event provides the mirror with a piecewise linear response to actuation by intrinsically nonlinear electrostatic forces. In a particular embodiment, the bouncing mechanism includes a vertical comb drive stator built in the same active layer of the double active layer SOI substrate, while actuator comb drive stators are built in a different active layer.

Abstract: A new method to form an image sensor device is achieved. The method comprises forming an image sensing array in a substrate comprising a plurality of light detecting diodes with spaces between the diodes. A first dielectric layer is formed overlying the diodes but not the spaces. The first dielectric layer has a first refractive index. A second dielectric layer is formed overlying the spaces but not the diodes. The second dielectric layer has a second refractive index that is larger than the first refractive index. A new image sensor device is disclosed.

Abstract: A method for forming an organic electronic device, which method comprises the steps of: a) forming a negative image of a desired pattern on a substrate or device layer with a lift-off ink; b) coating a first device layer to be patterned on top of the negative image; c) coating one or more further device layers to be patterned on top of the first device layer to be patterned; and d) removing the lift-off ink and unwanted portions of the device layers above it, thereby leaving the desired pattern of device layers. The method allows the formation of a device structure wherein the device layers to be patterned are self-aligned. The method enables a multiplicity of layers to be patterned in a single set of printing and lift-off steps using one pattern which ensures the excellent vertical alignment of edges, which would be difficult to achieve by direct printing. Horizontal alignment can also be achieved. The size of the device features can be reduced below the actual printing resolution.

Abstract: To effectively lower the current required for changing a phase of a phase change layer in a phase change RAM device, metal pads are formed on a semiconductor substrate, and an oxide layer is formed on the metal pads. Nano-sized copolymer patterns aligned with the metal pads covered by the oxide layer are formed on the oxide layer. The oxide layer is etched to form oxide layer patterns by using the nano-sized copolymer patterns as barrier. The nano-sized copolymer patterns are then removed. A nitride layer is deposited and then etched to expose the oxide layer patterns. The exposed oxide layer patterns are removed to form nano-sized holes exposing the metal pads. Bottom electrodes are then formed in the nano-sized holes. A phase change layer and a top electrode are formed on each of the bottom electrodes.