Patents Issued in April 24, 2008
-
Publication number: 20080094560Abstract: A liquid crystal display includes: a first substrate; a gate line disposed on the first substrate; a data line intersecting the gate line; a thin film transistor connected to the gate line and the data line; a coupling electrode connected to the thin film transistor; a first sub-pixel electrode connected to the thin film transistor; a second sub-pixel electrode capacitively coupled to the coupling electrode; a second substrate facing the first substrate; a common electrode disposed on the second substrate; and a polarizer disposed on the first substrate or the second substrate and having a polarization axis. The coupling electrode is elongated substantially parallel to the polarization axis and has a first edge substantially parallel to or substantially perpendicular to the polarization axis.Type: ApplicationFiled: December 19, 2007Publication date: April 24, 2008Inventor: Seung-Soo Baek
-
Publication number: 20080094561Abstract: A system for providing a flat display panel is provided. A representative system includes a bottom substrate and a top substrate. The bottom substrate has an active region and a periphery region adjacent to the active region, and the bottom substrate has at least a truncated corner region in the periphery region. The top substrate is positioned on the bottom substrate, and overlaps the active region of the bottom substrate.Type: ApplicationFiled: October 19, 2006Publication date: April 24, 2008Inventors: Chih-Shun Fan, Norio Oku
-
Publication number: 20080094562Abstract: A liquid crystal display (LCD) panel including a thin film transistor (TFT) array substrate, a color filter substrate, a sealant, and a liquid crystal layer is provided. The TFT array substrate includes a substrate, a plurality of pixel structures, a plurality of scan lines, a plurality of data lines, and a light-shielding pattern. The scan lines and data lines are disposed on the substrate for controlling the operation of the pixel structures. The light-shielding pattern arranged on the periphery of the panel traverses the scan lines and data lines and is electrically insulated from the scan lines and data lines. The sealant is sandwiched between the TFT array substrate and the color filter substrate and is corresponding to the light-shielding pattern. The liquid crystal layer is disposed between the TFT array substrate, the color filter substrate, and the sealant.Type: ApplicationFiled: November 26, 2006Publication date: April 24, 2008Applicant: Au Optronics CorporationInventors: Hao-Chieh Lee, Ming-Hung Shih
-
Publication number: 20080094563Abstract: An LCD device and a repairing method thereof to prevent gravity defects by forming a dual seal pattern in a non-display area of an LCD panel and storing surplus liquid crystal in an area between the dual seal patterns, which includes an LCD panel including first and second substrates bonded to each other and having a display and non-display areas, first and second seal patterns spaced apart from each other in the non-display area and surrounding the display area to define a buffer space therebetween, and a metal pattern formed on the first substrate corresponding to the first seal pattern. In the method, the metal pattern is heat treated to form a path for surplus liquid crystal to flow to the buffer space.Type: ApplicationFiled: December 20, 2006Publication date: April 24, 2008Inventor: Sun Lee
-
Publication number: 20080094564Abstract: A method for fabricating a liquid crystal display (LCD) device includes: preparing a liquid crystal cell including a first substrate, a second substrate, liquid crystal between the first and second substrates, and a sealant surrounding the liquid crystal; forming an inlet in the liquid crystal cell while applying a first pressure to the liquid crystal cell; controlling an amount of the liquid crystal using the inlet; and sealing the inlet.Type: ApplicationFiled: December 21, 2006Publication date: April 24, 2008Inventor: Dong Shin
-
Publication number: 20080094565Abstract: A tiling mode display device is disclosed. The display device includes a first substrate having at least two lower substrates connected to each other at a boundary region between the lower substrates using a first adhesion member; a first seal pattern formed at peripheries of the lower substrates, and a second seal pattern formed at the boundary region between the lower substrates; and a second substrate attached to the first substrate by the first and second seal patterns.Type: ApplicationFiled: November 5, 2007Publication date: April 24, 2008Inventors: Young Jeong, Hyun Jin
-
Publication number: 20080094566Abstract: A film suitable for use in an ophthalmic system is provided. The film may selectively inhibit blue light within the wavelength range of 400 nm to 460 nm to reduce phototoxic light to the eye while maintaining photopic vision, and may be color balanced to allow for the system into which the film is incorporated to be perceived as colorless to a viewer observing and/or using the system. The system may have a photopic and scotopic luminous transmission of 85% or more and a phototoxicity ratio of less than 80%. When used in an ophthalmic system or other system disposed between an observer's eye and a light source, the film may reduce the flux of blue light to the internal structures of the eye while reducing or minimizing dilation of the pupil.Type: ApplicationFiled: August 23, 2007Publication date: April 24, 2008Inventors: Andrew Ishak, Joshua Haddock, William Kokonaski, Ronald Blum, Venkatramani Iyer, Mark Mattison-Shupnick
-
Publication number: 20080094567Abstract: A pair of multi-purpose eyeglasses has a main frame (10) and an inner frame (20). The main frame (10) includes a lens holder for holding lenses and a pair of temple arms (14) foldably connected to both ends of the lens holder. The main frame has a pair of side assembling grooves formed on opposite edge portion of a rear surface of the lens holder. Each of the side assembling grooves (16) extending in a vertical direction and having an open upper and a closed lower end. The inner frame is detachably assembled with a rear surface of the lens holder and has a pair of side assembling protrusions (22) which are inserted in and engaged with the side assembling grooves when the inner frame is assembled with the main frame.Type: ApplicationFiled: October 21, 2004Publication date: April 24, 2008Applicant: KBC America, Inc.Inventor: Woon-Taek Choi
-
Publication number: 20080094568Abstract: The invention relates to foldable spectacles comprising two lenses ( 1a, 1b) which can be adjusted between a support position and a folded position and which are connected to each other by means of a nose piece (10). The nose piece (10) extends on a connecting axis (I) which is arranged on a plane of the spectacle lens and comprises a folding joint (15) which is used to fold the spectacles. The folding joint (15) can be rotated about a rotatable axis (m) which extends at an acute angle (B) to the connecting axis (1), such that the spectacle lenses ( 1a, 1b) are arranged on the same plane next to each other in a folded position after a 180° rotation.Type: ApplicationFiled: January 11, 2005Publication date: April 24, 2008Applicant: DIAMOND SAInventors: Hans Gerber, Luca Nizzola, Maurizio Combi
-
Publication number: 20080094569Abstract: A frame for spectacles having arms that can be opened out resiliently includes at least one lug and at least one arm which is articulated to the lug by a tie rod hinged to the lug and slidingly associated with the arm, a resilient device is active between the arm and the tie rod in order to urge the arm towards the lug. The resilient device includes at least one helical spring extending along a substantially longitudinal axis (K), corresponding to the direction of application of the resilient urging, and axes (L) of the turns of the spring are inclined with respect to the longitudinal axis (K) in order to confer on the spring a substantially flattened configuration transverse to the longitudinal axis.Type: ApplicationFiled: September 27, 2004Publication date: April 24, 2008Inventor: Vittorio Tabacchi
-
Publication number: 20080094570Abstract: It is an object of the present invention to provide an ocular lens superior in the wettability of the surface thereof, hydrating properties, oxygen permeability, flexibility, elasticity, transparency and shape recoverability though it has a composition using a silicone-containing monomer. The present invention relates to a highly oxygen-permeable hydrated ocular lens obtained by saponifying a copolymer prepared from a specific both-terminal (meth)acryl polydimethylsiloxane, a vinyl carboxylate, a (meth)acrylamide type monomer, a vinyl type crosslinking agent, one or both of a (meth)acrylate having a tertiary structure and a (meth)acrylate having a cyclic structure as (meth)acrylates each having a bulky structure at its side chain and a monomer copolymerizable with these compounds.Type: ApplicationFiled: September 15, 2005Publication date: April 24, 2008Inventors: Takehisa Kamiya, Kazunori Kobayashi, Kenji Uno
-
Publication number: 20080094571Abstract: Over the years, eyestrain and headaches have become an increasing problem for computer users, especially those who require eyeglasses. To combat this problem, lenses and a method/system for calculating the characteristics of these lenses have been developed. The method/system takes age, height, and the user's or wearer's prescription into account to help optometrists grind lenses that are specifically adapted for use with computers. Therefore, it is now possible to have an automated system that determines characteristics for lenses that are adapted for use with computers.Type: ApplicationFiled: October 19, 2006Publication date: April 24, 2008Inventor: Larry Tarrant
-
Publication number: 20080094572Abstract: A vision correction device includes a mount and a correction part having a correction base, a first pad and a second pad, wherein the first pad and the second pad are disposed on the correction base, and the correction base is telescoped into the mount. A method for vision correction includes the following steps: (1) providing a vision correction device pressed on the eyes; (2) pressing the vision correction device on the eye continuously to get a clear vision; (3) keeping the clear vision for a predetermined time to activate a feedback reaction of brain to get used to a state of normal vision; and (4) removing the vision correction device from the eye, the eye restoring an original vision and the feedback reaction of brain adjusting the original vision back to the normal vision.Type: ApplicationFiled: October 20, 2006Publication date: April 24, 2008Inventor: Dar-Chung Lai
-
Publication number: 20080094573Abstract: Modified contact lenses and surfaces, methods for their preparation, and corresponding kits are disclosed. Also disclosed are uses of the contact lenses, such as for the administration of an agent to the eye.Type: ApplicationFiled: April 3, 2007Publication date: April 24, 2008Inventors: Patrick VERMETTE, Anne Danion
-
Publication number: 20080094574Abstract: A sterile hand held slit lamp for laser refractive surgery includes a charging base that charges a battery while a hand held slit lamp is positioned thereon. A sterile supple cover is positioned over a slit lamp handle while supported by the charging base. A sterile gloved operator grasps the slit lamp handle covered by the sterile cover and illuminates an eye with a slit lamp beam. In many embodiments, an operating microscope provides a view of the eye to an operator while the slit lamp beam illuminates the eye. Operator adjustable controls located on the slit lamp handle are manipulated through a sterile cover and control a length, a width and an intensity of the slit lamp beam. An operator wearing sterile gloves adjusts a position of a piece of tissue near an incision, and removes debris from a surgical incision in tissue after viewing the eye illuminated with the hand held slit lamp beam.Type: ApplicationFiled: December 18, 2007Publication date: April 24, 2008Applicant: VISX, INCORPORATEDInventors: Cary Spediacci, John Weberg, Brian Bliven
-
Publication number: 20080094575Abstract: Apparatus and methods for demonstrating to a patient the effects of anti-reflective (AR) coatings on the patient's eyeglass lens prescription. The apparatus comprises a refractor, or a retrofit kit for a refractor, wherein at least the strong and weak sphere lenses are provided with a high index of refraction (IR) and are treated with an anti-reflective coating producing a high light transmission (LT) percentage and a low reflectance per surface (RPS) percentage. The apparatus further includes at least one filter which is removably placeable in viewing alignment with the viewing tube of the refractor. The filter is selected to have an IR, LT value and RPS value which, when disposed in alignment with the viewing tube in combination with any of the strong and/or weak sphere lenses produces a net LT value and net RPS value corresponding to the lenses to be used in the patients eyeglass lens without an AR coating treatment.Type: ApplicationFiled: September 21, 2005Publication date: April 24, 2008Inventor: Brian Crain
-
Publication number: 20080094576Abstract: An optical system and a projection system incorporating same are disclosed. The optical system includes first and second optical elements. The second optical element is polarization insensitive in the visible. The first optical element is capable of receiving light of a first polarization along a first direction and transmitting the received light along the first direction. The first optical element is also capable of receiving light of a second polarization orthogonal to the first polarization along the first direction and reflecting the received light along a second direction different from the first direction. When the optical system receives light of the first polarization along the second direction, the first optical element transmits the received light along the second direction. The transmitted light has the first polarization and a first set of color coordinates. The second optical element transmits at least a portion of the light transmitted by the first optical element.Type: ApplicationFiled: October 4, 2006Publication date: April 24, 2008Inventor: Charles L. Bruzzone
-
Publication number: 20080094577Abstract: A light source device for projection displays is disclosed, comprising a plurality of Light Emitting Diode (LED) devices. The plurality of LED devices are arranged to sequentially operate. A light combining means are arranged to convey light from the LED devices to a light output of the light source. The light combining means comprises controllable polarisation means arranged such that the light is polarized by a structure of the light combining means. Further, a projection display system comprising a projection lens, a controller, and an image generating means, using the light source above is disclosed.Type: ApplicationFiled: July 21, 2005Publication date: April 24, 2008Applicant: KONINKLIJKE PHILIPS ELECTRONICS, N.V.Inventors: Marcellinus Petrus Carolus Michael Krijn, Siebe Tjerk De Zwart
-
Publication number: 20080094578Abstract: Optical system for a projector, comprising: at least a first polarizing beam splitter for splitting a source illumination beam into a first illumination beam linearly polarized along a first direction and a second illumination beam polarized perpendicular to the first direction; at least one colour wheel intersecting the polarized illumination beams in two different regions and producing a first colour beam linearly polarized along the first direction and a perpendicularly polarized second colour beam; and two imagers illuminated by the first and second polarized colour beams respectively.Type: ApplicationFiled: June 25, 2007Publication date: April 24, 2008Inventors: Julien Thollot, Khaled Sarayeddine, Pascal Benoit
-
Publication number: 20080094579Abstract: A projector device includes: an image generation unit that generates an image; an irradiation unit that irradiates light for projecting the image generated by the image generation unit upon a projection surface; and a change unit that changes luminance of the light irradiated from the irradiation unit.Type: ApplicationFiled: November 25, 2005Publication date: April 24, 2008Applicant: NIKON CORPORATIONInventors: Nobuhiro Fujinawa, Setsu Mitsuhashi, Hirotake Nozaki, Akira Ohmura
-
Publication number: 20080094580Abstract: A projection type image display apparatus of the invention has a lamp mounting mechanism, which has an aluminum lamp holder (166) intervening between the lamp (16) and the resin lamp holder (167) and has a section exposed out of the resin lamp holder (167). The lamp (16) is securely fixed in position on the aluminum lamp holder (166) by mounting the lamp (16) on the aluminum lamp holder (166) from above and then folding the top section (166d) towards the top end of the lamp (16). This lamp mounting mechanism can suppress the temperature of the resin lamp holder without providing a cooling fan with a large amount of power and suppress fan noise, thereby simultaneously enabling uprating of the power of the lamp and downsizing of the image display apparatus.Type: ApplicationFiled: October 19, 2007Publication date: April 24, 2008Applicant: SANYO ELECTRIC CO., LTD.Inventors: Norio NAKAGAWA, Atsushi KUBO
-
Publication number: 20080094581Abstract: An image display apparatus has a first exhaust fan (13) for mainly exhausting air from a light source unit (9) and discharging the air to the outside of the image display apparatus and a second exhaust fan (14) for mainly exhausting air from a power supply unit (11) and discharging the air to the outside of said image display apparatus. The inspiration face of the second exhaust fan is arranged to partly overlap the expiration face of the first exhaust fan. Accordingly, the internal temperature of the image display apparatus, and hence the temperature of the exhaust air, can be efficiently reduced, and at the same time fan noise of the fans can be reduced. As a result, uprating of power of the light source unit and downsizing of an image display apparatus can be simultaneously achieved.Type: ApplicationFiled: October 19, 2007Publication date: April 24, 2008Applicant: SANYO ELECTRIC CO., LTD.Inventors: Norio NAKAGAWA, Atsushi KUBO
-
Publication number: 20080094582Abstract: A projection type image display apparatus of the invention is equipped with a lamp cooling mechanism, which has a duct (121) for guiding the air sent from an air intake fan (12) in the forward direction from a position lateral to a lamp (16). The duct (121) has a curved wall (122) for directing the air in the duct (121) to the air intake port (164) formed near the open end of the lamp (16). The lamp cooling mechanism has a further guide plate (123) for spreading the air stream directed by the curved section (122) over the region from the tip (161b) to the luminous section (161a) of the lamp (16). As a consequence, relevant sections of the lamp (16) can be efficiently cooled, thereby simultaneously enabling uprating of power of the light source unit and downsizing and lightening of the image display apparatus without supplying the fan (12) with a large amount of power.Type: ApplicationFiled: October 19, 2007Publication date: April 24, 2008Applicant: SANYO ELECTRIC CO., LTD.Inventors: Norio NAKAGAWA, Atsushi KUBO
-
Publication number: 20080094583Abstract: Techniques for modifying a visible projecting image are described. The technique includes using non-visible light to control optical properties of independent regions of an active screen. The non-visible light is capable of directly interacting with the regions of the active screen to modify an optical property of the regions of the active screen.Type: ApplicationFiled: October 19, 2006Publication date: April 24, 2008Inventors: R. Stanley Williams, Philip J. Kuekes
-
Publication number: 20080094584Abstract: A projection apparatus including a lamp, a light valve and a projection lens is provided. The light valve is disposed on a transmission path of an illumination beam from the lamp for converting the illumination beam into an image beam, and the projection lens is disposed on a transmission path of the image beam. The lamp includes a lampshade, a filament, a first connector, a second connector, a lead wire and a diffuser. The lampshade has a bottom and a light-emitting section opposite to the bottom. The filament is disposed inside the lampshade, the first connector is disposed at the bottom and electrically connected to the filament, the second connector is disposed on the lampshade adjacent to the light-emitting section, the lead wire is connected between the filament and the second connector, and at least a part of the diffuser is disposed between the lead wire and the light-emitting section.Type: ApplicationFiled: July 25, 2007Publication date: April 24, 2008Applicant: CORETRONIC CORPORATIONInventors: Chun-Li Chen, Yu-Sung Lai, I-Hsien Liu
-
Publication number: 20080094585Abstract: A projector includes a cabinet (10) having a light source (12) for generating a light beam; a mirror (40) for reflecting the light beam; and a holding means (30) for holding the mirror, which is movably coupled to the cabinet. The mirror is movable relative to the holding means.Type: ApplicationFiled: May 13, 2005Publication date: April 24, 2008Applicant: KONINKLIJKE PHILIPS ELECTRONICS, N.V.Inventors: Wilhelmus Joseph Rosendaal, Johannes Bree
-
Publication number: 20080094586Abstract: Image display optical systems are disclosed that extend the angle of view longitudinally and transversely while saving space. The image display optical system includes a prism-shaped substrate transparent to an image-carrying light flux to be projected to a viewing eye, an introduction unit that guides the image-carrying light flux to a propagation path through which the image-carrying light flux propagates in a direction in which the image-carrying light flux from the outside enables internal reflection at least at three surfaces including at least one side of the substrate, and an output unit that guides the image-carrying light flux propagating through the substrate from the substrate to the viewing eye. By internally reflecting the image-carrying light flux at all the sides, i.e.Type: ApplicationFiled: August 29, 2005Publication date: April 24, 2008Inventor: Yoshikazu Hirayama
-
Publication number: 20080094587Abstract: A light source device includes first and second electrodes, an arc tube having a main body section having a discharge space in which the first and second electrodes are disposed with a distance and a sealing section disposed on each of the both ends of the main body section, a primary reflecting mirror disposed on the side of the first electrode, a secondary reflecting mirror disposed on the side of the second electrode, and a current drive device that generates an alternating current for causing the discharge between the first and second electrodes, and power control by controlling the alternating current so that supplying energy in an anodic term of the first electrode becomes smaller than supplying energy in a cathode term.Type: ApplicationFiled: October 12, 2007Publication date: April 24, 2008Applicant: SEIKO EPSON CORPORATIONInventor: Kentaro YAMAUCHI
-
Publication number: 20080094588Abstract: A projector/camera system includes a projector, configured to project a sequenced image to a projection location, and a camera, located at the projection location and oriented to take an image of a region including the projector. The camera is configured to capture a sequenced image that is synchronized and out of phase with the sequenced image of the projector, thereby to minimize light interference from the projector.Type: ApplicationFiled: October 6, 2006Publication date: April 24, 2008Inventors: James R. Cole, Lonnie D. Mandigo, Kenneth H. Bronstein
-
Publication number: 20080094589Abstract: A virtual display and control system for medical devices is provided including a patient monitor (5) and/or a therapy device (6) for a patient that is connected to a display and control panel projector (3) via an associated evaluating and control device (4) for the display and control panel projector (3). The display and control panel projector (3) is set up to project a display and control panel preset by the evaluating and control device (4) onto a projection surface (7) in the patient care area connected to the patient monitor (5) and/or to the therapy device (6). The display and control panel projector (3) is set up by means of at least one optical sensor element to detect the current manual occupation of the display and control panel.Type: ApplicationFiled: August 15, 2007Publication date: April 24, 2008Applicant: DRAGER MEDICAL AG & CO. KGInventor: Gerald PANITZ
-
Publication number: 20080094590Abstract: A substrate processing apparatus includes a device for partially sealing a gap between a final optical element (22) of a projection lens (14) and an immersion nozzle (20). In one embodiment, the apparatus includes a table configured to support a substrate (16); a patterning element defining a pattern (12); a projection system configured to project the pattern onto the substrate (16), the projection system having a last optical element (22); a gap between the substrate and the last optical element; an immersion element configured to maintain immersion fluid in the gap; and a first seal (102) positioned between the projection system and the immersion element. The first seal (104) is configured to substantially prevent immersion fluid from exiting the space between the projection system and the immersion element.Type: ApplicationFiled: May 18, 2005Publication date: April 24, 2008Applicant: Nikon CorporationInventor: Derek Coon
-
Publication number: 20080094591Abstract: A pellicle membrane is mounted between an outer frame and an inner frame. At least one of the frames is attached to the reticle without using conventional adhesives. The pellicle and reticle may be used in a lithography system. The pellicle allows radiation to pass through the pellicle to the reticle and may prevent particles from passing through the pellicle.Type: ApplicationFiled: December 14, 2007Publication date: April 24, 2008Inventors: Florence Eschbach, Paul Zimmerman, Alexander Tregub, Fu-Chang Lo
-
Publication number: 20080094592Abstract: During the drive of a stage, positional information in a movement plane of a stage is measured by three encoders that include at least one each of an X encoder and a Y encoder of an encoder system, and a controller switches an encoder used for a measurement of positional information of a stage in the movement plane from an encoder to an encoder so that the position of the stage in the movement plane is maintained before and after the switching. Therefore, although the switching of the encoder used for controlling the position of the stage is performed, the position of the stage in the movement plane is maintained before and after the switching, and a correct linkage becomes possible.Type: ApplicationFiled: August 31, 2007Publication date: April 24, 2008Applicant: NIKON CORPORATIONInventor: Yuichi Shibazaki
-
Publication number: 20080094593Abstract: A controller measures positional information of a stage within an XY plane using three encoders which at least include one each of an X encoder and a Y encoder of an encoder system, and the stage is driven in the XY plane, based on measurement results of the positional information and positional information (p1, q1), (p2, q2), and (p3, q3) in a surface parallel to the XY plane of a head (an encoder) used for measurement of the positional information. Accordingly, it becomes possible to control the movement of the stage with good precision, while switching the head (the encoder) used for control during the movement of the stage using the encoder system which includes a plurality of heads.Type: ApplicationFiled: September 4, 2007Publication date: April 24, 2008Applicant: NIKON CORPORATIONInventor: Yuichi Shibazaki
-
Publication number: 20080094594Abstract: A laser beam emitted by an encoder main body enters a wafer table via a PBS from the outside, and reaches a grating at a point that is located right under exposure area, and is diffracted by the grating. Then, by receiving interference light of a first polarized component that has returned from the grating and a second polarized component reflected by the PBS, positional information of the wafer table is measured. Accordingly, because the first polarized component, which has passed through PBS passes through the wafer table until it is synthesized with the second polarized component again, does not proceed through the atmosphere outside, position measurement of the wafer table can be performed with high precision without the measurement beam being affected by the fluctuation of the atmosphere around the wafer table.Type: ApplicationFiled: September 28, 2007Publication date: April 24, 2008Applicant: NIKON CORPORATIONInventor: Yuichi Shibazaki
-
Publication number: 20080094595Abstract: A method and system are provided of using a patterning device. An exemplary method includes performing a first exposure of a surface corresponding to image data, determining an image deficiency within a region of the first image, adjusting the image data to compensate for the image deficiency, and performing a second exposure of the surface corresponding to the adjusted image data during a second pass of the patterning device with respect to the surface. The first exposure occurs during a first pass of the patterning device with respect to the surface to produce a first image on the surface.Type: ApplicationFiled: December 13, 2007Publication date: April 24, 2008Applicant: ASML Holding N.V.Inventors: Arno Bleeker, Wenceslao Cebuhar, Justin Kreuzer, Azat Latypov, Yuli Vladimirsky
-
Publication number: 20080094596Abstract: A method and system are provided of using a patterning device. An exemplary method includes defining a first region on a surface, the first region being associated with a first element of the patterning device, defining a second region on the surface, the second region being associated with a second element of the patterning device, activating the first element to expose the overlapping region, and deactivating the second element when the first element is active. The first region and the second region overlap in an overlapping region.Type: ApplicationFiled: December 13, 2007Publication date: April 24, 2008Applicant: ASML Holding N.V.Inventors: Arno Bleeker, Wenceslao Cebuhar, Justin Kreuzer, Azat Latypov, Yuli Vladimirsky
-
Publication number: 20080094597Abstract: A projection exposure apparatus 100 projects the pattern of an original 6 onto a substrate 7 via a projection optical system PL. The projection exposure apparatus 100 includes an original stage 5 which holds the original 6, a substrate stage 8 which holds the substrate 7, and a measurement unit. The measurement unit includes a Fizeau interferometer IF including an optical unit 17 and mirror 22. The optical unit 17 includes a Fizeau surface which splits a light beam into a reference light beam and a test light beam. The mirror 22 reflects the test light beam having passed through the projection optical system PL. The optical unit 17 is mounted on the original stage 5. The mirror 22 is mounted on the substrate stage 8.Type: ApplicationFiled: October 17, 2007Publication date: April 24, 2008Applicant: CANON KABUSHIKI KAISHAInventors: Shinichiro Hirai, Yoshinori Ohsaki, Yoshiyuki Kuramoto
-
Publication number: 20080094598Abstract: A lithographic mask is illuminated with light from different directions such that intensities of a plurality of incident beams of light provide a largest possible integrated process window defined in terms of an allowed range for defining shapes. Constrained sets of intensity parameters are imposed. A first set of intensity parameters represents maximum possible intensities that can be permitted for overexposed tolerance positions. A second set of intensity parameters represents minimum possible intensities that can be permitted for underexposed tolerance positions. Optimum source intensities of incident beams are defined using a linear program and constraints. The optimum source intensities maximize an integrated range of dose and focal variations without causing printed shapes to depart from the allowed range. Apparatus are detailed and variations are described.Type: ApplicationFiled: December 17, 2007Publication date: April 24, 2008Inventor: Alan Rosenbluth
-
Publication number: 20080094599Abstract: In a projection objective for imaging a pattern arranged in the object plane of the projection objective into the image plane of the projection objective, at least one optical component is provided which has a substrate in which at least one substrate surface is covered with an interference layer system having a great spatial modulation of the reflectance and/or of the transmittance over a usable cross section of the optical component, the modulation being adapted to a spatial transmission distribution of the remaining components of the projection objective in such a way that an intensity distribution of the radiation that is measured in a pupil surface has a substantially reduced spatial modulation in comparison with a projection objective without the interference layer system.Type: ApplicationFiled: June 3, 2005Publication date: April 24, 2008Applicant: CARL ZEISS SMT AGInventors: Patrick Scheible, Alexandra Pazidis, Reiner Garreis, Michael Totzeck, Heiko Feldmann, Paul Graeupner, Hans-Juergen Rostalski, Wolfgang Singer
-
Publication number: 20080094600Abstract: Illumination devices and masks for microlithography projection exposure systems, as well as related systems and methods, are disclosed.Type: ApplicationFiled: October 19, 2007Publication date: April 24, 2008Applicant: CARL ZEISS SMT AGInventor: Rolf Freimann
-
Publication number: 20080094601Abstract: A polarization pattern assembly produces a polarization pattern. In an embodiment, a polarization pattern assembly includes a frame that supports a polarization pane in a central region of the frame. The polarization pane changes the polarization direction of light incident upon the polarization pane. Different polarization patterns in a pupil of a polarized illuminator can be generated.Type: ApplicationFiled: December 20, 2007Publication date: April 24, 2008Applicant: ASML Holding N.V.Inventor: Michael ALBERT
-
Publication number: 20080094602Abstract: An illumination optical system for, when installed in an exposure system, realizing a suitable illumination condition by varying the polarized state of the illumination light according to the pattern characteristics of the mask while suppressing the loss of the intensity of the light. The illumination optical system has a light source unit for supplying a linearly polarized light for illuminating surfaces to be illuminated therewith, and a polarized state changing device for changing the polarized state of the illuminating light from a predetermined polarized state to a nonpolarized state and vice versa. The polarized state changing device is arranged in the optical path between the light source unit and the surfaces to be illuminated. The polarized state changing device can be removed from the illumination optical path and has a depolarizer for selectively depolarizing the incident linearly polarized light.Type: ApplicationFiled: November 5, 2007Publication date: April 24, 2008Applicant: NIKON CORPORATIONInventors: Osamu Tanitsu, Hirohisa Tanaka, Kenichi Muramatsu, Norio Komine, Hisashi Nishinaga, Tomoyuki Matsuyama, Takehito Kudo
-
Publication number: 20080094603Abstract: A magnetic levitation wafer stage is used to align a wafer in an exposure apparatus of photolithographic equipment. The wafer stage includes a base, a table supported on the base and whose entire top surface exhibits magnetism of a single polarity, and motors for moving the table in the X and Y directions relative to the base. Alternatively, the wafer stage includes a wafer table having a main body and a number of electromagnets disposed in an upper portion of the main body, and electronics that selectively supply current in either direction through coils of the electromagnets respectively and independently of one another. In the exposure process, the bottom surface of the substrate is provided with a magnetic substance such that the substrate exhibits magnetism of a given polarity. The substrate is delivered to and set on the table of the stage. There, the substrate is levitated by a magnetic force of repulsion between the substrate and the table.Type: ApplicationFiled: April 10, 2007Publication date: April 24, 2008Inventor: Seok-Kyun Lee
-
Publication number: 20080094604Abstract: A controller inclines a movable body with respect to an XY plane at an angle ? in a periodic direction of a grating, based on a measurement value of an interferometer which measures an angle of inclination of the movable body to the XY plane, and based on a measurement value of an encoder system and information of angle ? before and after the inclination, and computes an Abbe offset quantity of the grating surface with respect to a reference surface (e.g., an image plane of a projection optical system) which serves as a reference for position control of the movable body in the XY plane. Then, the controller drives the movable body, based on positional information of the movable body in the XY plane measured by the encoder system and a measurement error of the encoder system corresponding to an angle of inclination of the movable body to the XY plane due to the Abbe offset quantity of the grating surface.Type: ApplicationFiled: September 4, 2007Publication date: April 24, 2008Applicant: NIKON CORPORATIONInventor: Yuichi Shibazaki
-
Publication number: 20080094605Abstract: A laser-system comprises master-oscillator/power-amplifier (51) whereby the master-oscillator comprises a pulsed diode (3) and a pumped active optical fibre power-amplifier (9). Substantially all guides of laser light (5, 9, 31, 29, 33, 25, 35, 39, 45) are optical fibres. The pulsed diode (3) is not temperature stabilized. To reduce nevertheless amplified spontaneous emission generated in the optical fibre amplifier (9), a narrow band-pass filter unit (29) is used. Filter unit (29) has a central wavelength with a temperature dependence which is matched to the temperature dependent wavelength shift of the pulsed diode (3).Type: ApplicationFiled: September 30, 2005Publication date: April 24, 2008Inventors: Ulrich Drodofsky, Marcel Zeller
-
Publication number: 20080094606Abstract: The invention relates to a geodetic total station comprising an upper part (1a) provided with a support (2) with at least one support section (2a; 2b), an electronic display control unit (4), a total station data interface (6) provided with electrical contact elements (6a), and a top attachment (20) that is mechanically coupled above the support (2) and the telescope (3), in a detachable manner, by means of at least one mechanical support interface (8a; 8b) and at least one corresponding mechanical top attachment interface (21a; 21b). The total station data interface (6) is arranged on the support section (2a; 2b), and the top attachment (20) receives the peripheral components and has a top attachment data interface (23) which comprises electrical contact elements (23a) and is connected to the peripheral components in a data-transmitting manner.Type: ApplicationFiled: January 19, 2006Publication date: April 24, 2008Applicant: LEICA GEOSYSTEMS AGInventor: Johannes Schwarz
-
Publication number: 20080094607Abstract: An optical device to measure the distance between the device itself and an obstacle/object comprising a unit to emit radiation including an aligned series of sources of radiation coupled to a series of arrangements of lenses to guide the radiation emitted by the sources. An optical acquisition unit comprising a matrix of photodetectors has a field of view including the scene in front of the optical device and including the obstacle. The signals leaving the acquisition unit are sent to a control and processing unit for calculation of the distance from the obstacle. The unit for the emission and conformation of the radiation emits a beam having a transverse section of a form elongated along an axis that is progressively rotated for transverse sections of the beam progressively more distant from the emission unit. In this manner, the distance of the obstacle may be calculated on the basis of the angular position of the section of the beam intercepted by the obstacle, as acquired by said acquisition unit.Type: ApplicationFiled: September 18, 2007Publication date: April 24, 2008Applicant: C.R.F. Societa Consortile per AzioniInventors: Stefano BERNARD, Nereo PALLARO, Piermario REPETTO
-
Publication number: 20080094608Abstract: A laser velocimetry system that employs a low power laser. The laser has a power of up to about 100 mW. Light from the laser, in one embodiment, is directed through a multimode optical fiber and an optical probe to a surface of a moving sample. Doppler-shifted light from the surface is reflected back through the optical probe and multimode optical fiber to a circulator, which directs the light reflected from the surface to a second multimode optical fiber. Unshifted (i.e., non-Doppler shifted) light is also introduced into the optical signal path. The Doppler shifted reflected light and the unshifted light are then transmitted through the second multimode optical fiber to a detector, which converts the reflected light into an electronic signal. The electronic signal of the “beat” between the Doppler shifted light and unshifted light may then be digitized by an analyzer and used to determine the velocity of the moving surface. A method of determining the velocity of a moving object is also described.Type: ApplicationFiled: October 23, 2006Publication date: April 24, 2008Inventors: David B. Holtkamp, Leonard J. Tabaka
-
Publication number: 20080094609Abstract: A method, computer program product and system for analyzing multispectral images from a plurality of regions of birefringent material, such as a polymer film, using polarized light and a corresponding polar analyzer to identify differential strain in the birefringent material. For example, the birefringement material may be low-density polyethylene (LDPE), high-density polyethylene (HDPE), polypropylene, polyethylene terephthalate (PET), polyvinyl chloride (PVC), polyvinylidene chloride, polyester, nylon, or cellophane film. Optionally, the method includes generating a real-time quantitative strain map.Type: ApplicationFiled: August 31, 2007Publication date: April 24, 2008Inventors: Anthony Ragucci, Alan Cisar, Michael Huebschman, Harold Garner