Abstract: A temperature control and method of operating the temperature control, for an inductively heated heating element. The heating element is heated by an inductor to which electrical power is supplied via a control circuit, which can also be a control circuit for an induction hob or oven. The temperature control is activated at a first point in time subject to at least one electrical value of the control circuit, which depends on the temperature of the heating element. A reference value is determined at the first point in time and a comparison value and a deviation value from the reference value is determined at least one later point in time. Depending upon the deviation value, the inductor is supplied with power so that the heating element is adjusted to a substantially constant value corresponding to the reference value.

Abstract: A ceramic heat conductor support disc for supporting an electrical heating element for electrically heated furnace installations. The support disc has a center aperture lying parallel to the longitudinal axis of the heating element, and one or more apertures located between the center aperture and the periphery of the disc. The disc is provided with one or more elongated openings running from the periphery to one of the apertures or to the center aperture, wherein each elongated opening penetrates the entire thickness of the disc.

Abstract: A manufacturing machine manufactures a heat-source rod having a rod-like extrusion-molded article made from a combustible material with axial grooves in the cylindrical surface thereof and a heat-insulating web enveloping the article, and is provided with a apparatus 10 for spouting water to the web W in the process of the web W being fed to a wrapping section 4. The spout apparatus 10 includes an air vibrator 12 with a vibrating rod 34, and a flexible nozzle 36 attached to the rod 34 to extend across the rod 34 and supplied with water from a rate regulating pump 42. While the web W is being fed, the end of the nozzle 36 spouts water to the web W, reciprocating widthways relative to the web W due to vibration of the rod 34, and the water spouted dissolves a binder used in the web W to bind heat-insulating fiber, thereby forming a wet band H, where the wet band H has a waveform continuing along the longitudinal direction of the web W and provides a adhesive region for bonding the article.

Abstract: Provided is an air flow passage of a microwave oven including: a cavity for accommodating foods therein; an electric component chamber disposed at a predetermined portion of the cavity; a suction hole formed at one sided portion of the cavity such that the cavity communicates with the electric component chamber; an exhaust hole formed at the other sided portion of the cavity, through which air sucked through the suction hole is exhausted; an exhaust guide covering an outer wall of the cavity where the exhaust hole is formed, for guiding air exhausted through the exhaust hole to an outside of the microwave oven; and a back plate having an exhaust passage hole communicating with one end of the exhaust guide, through which air is exhausted. According to the present invention, hot air of an inside of the microwave oven can be smoothly exhausted. In particular, since the exhausted air does not return to the electric component chamber, cooling efficiency can be enhanced.

Abstract: An apparatus includes a radome and an evanescent wave-coupled windowing system in the radome. In operation, the apparatus receives radiation reflected from an object that is incident upon a windowing system; emits evanescent waves from the windowing system whose amplitudes are proportional to the angle of incidence of the radiation; and non-coherent, Fresnel direction finds the object.

Abstract: The invention concerns a device for countering and tracking a threat with optical delay device in the form of a homing-head missile, comprising a homing head adapted to receive an incident coherent light beam and in deflecting same to produce a transmitted beam. The invention is characterized in that the homing head comprises a biprism dividing the transmitted beam into two sub-beams, the biprism being associated with an optical delay device introducing an optical path difference between the two sub-beams greater than the coherence length of the incident beam.

Abstract: A MEMS apparatus includes a substrate; electrical contacts disposed on the substrate; a thermal arch beam supported by and connected between the contacts, the thermal arch beam including a midpoint and a protrusion located at about the midpoint; a lever having an axis of rotation and a bearing surface upon which the protrusion is operable to bear, a pair of lever supports disposed on the substrate for rotatably supporting the lever about the axis of rotation, an area of contact between the protrusion and the bearing surface being positioned vertically between the axis of rotation and the plane of the substrate. A voltage difference between the electrical contacts causes the thermal arch beam to move horizontally in the plane and the protrusion to bear against the lever causing rotation of the lever out of the plane.

Abstract: A focus control method able to further correctly control a focal point of an optical system or optical apparatus. A reference system of the system as a whole is set by using a reference pattern for focal point control. A focal point of an optical apparatus for inspecting a sample or measuring a physical quantity of the sample and the focal point of an auto-focus mechanism are matched with the reference system. Then, a displaced object of the auto-focus mechanism is set on a sample surface, a displacement amount of the sample surface from a reference point is measured, and the focal point of an object lens of the optical apparatus is controlled by using the displaced point as an operation point of the control of the auto-focus mechanism. When setting the reference system, the focus is judged by utilizing the Becke effect for the reference pattern.

Abstract: The present invention provides a solid-state imaging apparatus and the like which is able to support an optical system whose incident angle is wide. Each pixel is 2.25 ?m square in size, and includes a distributed index lens (1), a color filter (for example, for green) (2), an Al interconnections (3), a signal transmitting unit (4), a planarized layer (5), a light-receiving device (Si photodiodes) (6), and an Si substrate (7). The two-stage concentric circle structure of the distributed index lens is formed by SiO2 (n=2) with the film thickness 1.2 ?m (“grey color”), the film thickness 0.8 ?m (“dots pattern”) and the film thickness of 0 ?m (“without pattern: white color”), and the medium surrounding the distributed index lens (1)is air (n=1).

Abstract: A CMOS image sensor and active pixel cell design that provides an output signal representing an incident illumination light level that is adapted for time domain analysis. Thus, the noise sources associated with charge integration and the contribution of dark current to it, is avoided. The active pixel cell design implements only three FETs: a transfer device, a reset device and an output transistor device having one diffusion connected to a Row Select signal. In this mode of operation, use is made of the voltage decay at the photo diode to generate a pixel output at one diffusion of the output transistor device, which is a pulse with fixed amplitude independent of the incident illumination level. For use of an NFET output transistor device, the pulse width is an inverse function of the incident illumination level. For a PFET output transistor device, the output pulse has a time delay, from a reference signal, by an amount that is an inverse function of the incident illumination level.

Abstract: An imaging system, methodology, and various applications are provided to facilitate optical imaging performance. The system contains a sensor having one or more receptors and an image transfer medium to scale the sensor and receptors in accordance with resolvable characteristics of the medium, and as defined with certain ratios. A computer, memory, and/or display associated with the sensor provides storage and/or display of information relating to output from the receptors to produce and/or process an image, wherein a plurality of illumination sources can also be utilized in conjunction with the image transfer medium. The image transfer medium can be configured as a k-space filter that correlates projected receptor size to a diffraction-limited spot associated with the image transfer medium, wherein the projected receptor size can be unit-mapped within a certain ratio to the size of the diffraction-limited spot, both in the object plane.

Abstract: Provided is a photoelectric conversion device for outputting an output voltage according to incident light, including photoelectric conversion unit for holding an optical charge generated by the incident light, a signal processing circuit impressed with a reference voltage for outputting the output voltage according to the incident light by applying a predetermined process to an output signal of the photoelectric conversion unit, and a switch provided between a terminal externally supplied with the reference voltage, and the signal processing circuit.

Abstract: A light sensor cell includes a photosensitive element, a floating diffusion region, and a gate oxide disposed between the photosensitive element and the floating diffusion region. The gate oxide has a non-uniform thickness, with a greater thickness near the photosensitive element and a lesser thickness near the floating diffusion region. A transfer gate is disposed on the gate oxide. The transfer gate has a non-uniform threshold voltage, with a greater threshold voltage near the photosensitive element and a lesser threshold voltage near the floating diffusion region.

Abstract: A detector includes a light detecting layer and a grating structure. The light detecting layer, which can be a photodiode, has an optical mode that resonates in the light detecting layer, and the grating structure is positioned to interact with the optical mode. The grating structure further couples incident light having a resonant frequency into the optical mode, and causes destructive interference to prevent light having the resonant frequency from escaping the detecting layer. The light detecting layer can be made transparent to light having other frequencies, so that a stack of such detectors, each having a different resonant frequency, can be integrated into a WDM detector that is compact and efficient.

Abstract: A portable illumination device, for illuminating an object through a medium having an absorption coefficient, has a lighting unit including at least two differently colored light sources for emitting light having a color distribution and a control unit for adjusting the color distribution. The control unit is adapted to receive a distance estimate corresponding to the distance between the illumination device and the object, and adjust the color distribution depending on the distance estimate, such that light reflected from the object is perceived to have substantially correct color reproduction.

Abstract: A photographing section photographs a photographing object, a light-projector projects a light spot parallel to or approximately parallel to an optical axis of the photographing section onto the photographing object, and a detector detects, from an image of the photographing object photographed by the photographing section, a light spot from the light-projector reflected by the photographing object on the basis of an arrangement position of the light-projector relative to the photographing section. A reflected light spot of light projected onto a detection object can be detected with certainty, and erroneous detection of the reflected light spot, in particular, erroneous detection due to disturbance light, can be prevented at a low cost, without an increase in size of the apparatus.

Abstract: A combination confocal and scanning probe microscope system permits accurate location of a sample within the field of view as the sample translates from one type of microscope to the other. Alternate embodiments permit both microscopes to view the same sample location at the same time. Further alternate embodiments include a confocal and a probe microscope integrated into a common optical path.

Abstract: A system for ion beam neutralization includes a beamguide configured to transport an ion beam through a dipole field, a first array of magnets and a second array of magnets configured to generate a multi-cusp magnetic field, the first array of magnets being on a first side of the ion beam path and the second array of magnets being on a second side of the ion beam path. The system may further include a charged particle source having one or more apertures configured to inject charged particles into the ion beam. The system may furthermore align the one or more apertures with at least one of the first array of magnets and the second array of magnets to align the injected charged particles from the charged particle source with one or more magnetic regions for an effective charged particle diffusion into the ion beam.

Abstract: In one aspect of the invention, a downhole tool string component comprises a tubular body with a first and a second tool joint adapted to connect to adjacent tool string components, and a central bore adapted to pass drilling mud between the joints. A sleeve circumferentially disposed about an outer surface of the tubular body. The sleeve is rigidly attached to the outer surface at first and second sleeve ends and forming at least three stabilizer blades. A nuclear source and at least one nuclear detector are disposed within a gap formed between the inner surface of the sleeve and the outer surface of the tubular body.

Abstract: A MEMS device with an overhanging ‘polymer’ capillary provides vital and significant improvements in interfacing a MEMS electrospray nozzle to an MS inlet or other macroscopic instrumentation. The fabrication methodology associated therewith is easily expanded to include built-in micro particle filters and centimeter long serpentine micro channels provided on-chip and fabricated using a low temperature process.

Abstract: A dual ion trap mass analyzer includes adjacently positioned first and second two-dimensional ion traps respectively maintained at relatively high and low pressures. Functions favoring high pressure (cooling and fragmentation) may be performed in the first trap, and functions favoring low pressure (isolation and analytical scanning) may be performed in the second trap. Ions may be transferred between the first and second trap through a plate lens having a small aperture that presents a pumping restriction and allows different pressures to be maintained in the two traps. The differential-pressure environment of the dual ion trap mass analyzer facilitates the use of high-resolution analytical scan modes without sacrificing ion capture and fragmentation efficiencies.

Abstract: A method of operating a mass spectrometer having an elongated rod set and a set of auxiliary electrodes is provided, the rod set having an entrance end and an exit end and a longitudinal axis. The method comprises a) admitting ions into the entrance end of the rod set; b) trapping at least some of the ions in the rod set by producing a barrier field at an exit member adjacent to the exit end of the rod set and by producing an RF field between the rods of the rod set; and, c) providing an auxiliary AC excitement voltage to the set of auxiliary electrodes to energize a first group of ions of a selected mass to charge.

Abstract: A method and apparatus for assessing a height of a specimen includes an electron beam unit having an electron beam source, lenses, a table for setting a specimen and controllable in a height direction, and a detector, and a height detection system for detecting height of the specimen set on the table while the specimen is irradiated by an electron beam. The height detection system further includes an illumination system, a collection system, first and second detectors, a device configured to receive output signals from the first and second detectors while the specimen is irradiated by the electron beam and to generate a comparison signal from the output signals, wherein the comparison signal is responsive to the height of the specimen.

Abstract: The present invention relates generally to a method for analyzing the surface and the near-surface layers of a solid and, more specifically, to a method that utilizes activating actions to analyze the physical and the chemical properties of the layers. The instant abstract is neither intended to define the invention disclosed in this specification nor intended to limit the scope of the invention in any way.

Abstract: This detector comprises an assembly of elementary sensors capable of detecting said radiation. This assembly comprises at least two separate detection areas, a first detection area comprising elementary sensors having a first thermal time constant and a second detection area comprising elementary sensors having a second thermal time constant which is different to said first thermal time constant.

Abstract: The present invention generally provides a terahertz (THz) imaging system that includes a source for generating radiation (e.g., a quantum cascade laser) having one or more frequencies in a range of about 0.1 THz to about 10 THz, and a two-dimensional detector array comprising a plurality of radiation detecting elements that are capable of detecting radiation in that frequency range. An optical system directs radiation from the source to an object to be imaged. The detector array detects at least a portion of the radiation transmitted through the object (or reflected by the object) so as to form a THz image of that object.

Abstract: The invention provides a sensor element formed in a first substrate and having a thermal barrier disposed between the sensor element and a heat source provided elsewhere on the first substrate. The thermal barrier includes at least one pair of trenches formed within the first substrate, individual trenches of the pair being separated by a cavity.

Abstract: Embodiments of the present disclosure include systems, device, and methods of providing optical sensing. Various embodiment include an optical transmitting and receiving apparatus that can include an optical fiber bundle having an end located proximate to a lens and an aperture through which optical energy is received by the optical fiber bundle, and a sensor array, where the optical fiber bundle receives optical energy and passes the optical energy through the bundle to the sensor array, and where the sensor array is located remotely from the lens.

Abstract: A passive millimeter wave system of this invention is comprised of; human body detector sensors which detect human bodies passing a scanner; passive millimeter wave image sensor modules arranged horizontally or vertically to acquire millimeter wave images radiated from human body in horizontal and vertical axes at certain time intervals; amplifier which amplifies the DC voltage from passive millimeter image sensor modules to a certain level; analog-digital converter which transforms the amplified DC voltage to digital signals; mobility detector which detects movement of human body passing predetermined position to acquire millimeter wave signals from human body; digital signal processor which interlinks and reconstructs signals with the time and position of the object obtained from mobility detector and the signals obtained by passive millimeter image sensor modules; monitor which displays the image of the signals processed with digital signal processor.

Abstract: A device (10) for analyzing a circuit (14) includes at least one element (22) for observing light emitted by at least one localized observation zone of the circuit resulting from the electric current flowing in the zone; elements (26) for exciting the circuit. The circuit exciting elements include a laser source (26) and elements (30) for applying a laser beam generated by the source on the observation zone (22). The device includes members (M1, M2) for protecting the observation zone (22) against the incident and reflected laser beams.

Abstract: A radiation detecting apparatus includes: a sensor panel that has a substrate, and has a plurality of pixels each of which has a photoelectric conversion element for converting light into an electric signal, arranged on the substrate; and a scintillator layer arranged on a reverse side of the pixels with respect to the substrate, wherein the scintillator layer contains an activator added in a main ingredient, and has a higher concentration of the activator in a peripheral area than in a center area, in a surface direction of the scintillator layer.

Abstract: A scintillator crystal represented by the following general formula (1). Ln(1-y)CeyX3:M??(1) wherein Ln(1-y)CeyX3 represents the chemical composition of the matrix material, Ln represents one or more elements selected from the group consisting of rare earth elements, X represents one or more elements selected from the group consisting of halogen elements, M is the constituent element of the dopant which is doped in the matrix material and represents one or more elements selected from the group consisting of Li, Na, K, Rb, Cs, Al, Zn, Ga, Be, Mg, Ca, Sr, Ba, Sc, Ge, Ti, V, Cu, Nb, Cr, Mn, Fe, Co, Ni, Mo, Ru, Rh, Pb, Ag, Cd, In, Sn, Sb, Ta, W, Re, Os, Ir, Pt, Au, Hg, Tl and Bi, and y represents a numerical value satisfying the condition represented by the following inequality (A): 0.0001?y?1??(A).

Abstract: A collimator incorporating shielding shaped according to the formula L 0 2 = y 2 + [ y 2 ? z 2 ( y + D ) 2 ] where y is the minimum thickness of encased shielding needed to shield the collimator from un-collimated radiation entering the collimator at a distance, z, along the longitudinal axis of the collimator, z measured from the bottom of a cylindrical detector, and D is the inner diameter of the collimator as established by the outer diameter of the detector. Select embodiments may be employed for collecting collimated high energy gamma rays from soil using a gamma ray detector.

Abstract: Disclosed herein is a method of determining a characteristic of radiation detected by a radiation detector via a multiple-pixel event having a plurality of radiation interactions. The method includes determining a cathode-to-anode signal ratio for a selected interaction of the plurality of radiation interactions based on electron drift time data for the selected interaction, and determining the radiation characteristic for the multiple-pixel event based on both the cathode-to-anode signal ratio and the electron drift time data. In some embodiments, the method further includes determining a correction factor for the radiation characteristic based on an interaction depth of the plurality of radiation interactions, a lateral distance between the selected interaction and a further interaction of the plurality of radiation interactions, and the lateral positioning of the plurality of radiation interactions.

Abstract: The present invention provides radiation detectors and methods, including radiation detection devices having beam-oriented scintillators capable of high-performance, high resolution imaging, methods of fabricating scintillators, and methods of radiation detection. A radiation detection device includes a beam-oriented pixellated scintillator disposed on a substrate, the scintillator having a first pixel having a first pixel axis and a second pixel having a second pixel axis, wherein the first and second axes are at an angle relative to each other, and wherein each axis is substantially parallel to a predetermined beam direction for illuminating the corresponding pixel.

Abstract: An x-ray image detector suitable for radiology has an active matrix substrate with scanning and read-out circuits. Over this active matrix substrate, which can be a two dimensional array of TFTs associated with a storage capacitance, there is deposited a photoreceptor made of a thin layer of amorphous selenium based multilayer structure. The photoreceptor is covered with a light-transparent electrode on top of which there is provided a scintillator. The indices of refraction of the scintillator and of the selenium based multilayer may be matched with the use of the biasing electrode.

Abstract: A charged beam drawing apparatus deflects, by an electrostatic deflector, a charged beam generated from a charged beam source, and applies the charged beam to a desired position on a sample to draw a pattern. The electrostatic deflector includes a plurality of deflecting electrodes arranged symmetrically with respect to a point around an optical axis of the charged beam, a ground external cylinder which is disposed coaxially with the optical axis and which is provided to enclose the deflecting electrodes, a resistive film provided on an inner surface of the ground external cylinder, and a conductive film provided on a surface of the resistive film. A capacitance is formed between the deflecting electrodes and the conductive film, and a resistance is formed between the ground conductor and the conductive film.

Abstract: A system and method for sterilizing a surface on an input device is disclosed. A chamber is configured to enclose an input device such as a keyboard and is configured to be switched between an open and a closed state. A drive unit may be provided to switch the chamber between states. In an embodiment, the drive unit may include a motor. A sensor provides a signal to a controller when the chamber is the closed state and the controller actuates a UV light. In an embodiment, the controller actuates the drive unit and the UV light in response to a trigger. In an embodiment, the trigger may be provided from a change in state in a computer coupled to the input device.

Abstract: A method and system for fluorescence imaging of a target in a subject comprising a scattering medium is provided. The method comprises illuminating one or more points on a surface of the scattering medium using an illumination source, wherein the plurality of points define an illumination region, collecting emitted light from an illumination region and an area away from the illumination region, and generating an image of the scattering medium using the emitted light.

Abstract: A computed radiography plate including a substrate is provided. The computed radiography plate also includes at least one phosphor layer disposed above the substrate. The computed radiography plate also includes a protective layer disposed above the phosphor layer. The computed radiography plate further includes multiple patterns inscribed within at least one of the phosphor layer, the protective layer or the substrate.

Abstract: Images of two-dimensional chromatograms or other sample arrays are formed on a scanning instrument that utilizes a line of illumination light that sweeps the length of the array either by moving across the array or by the array moving relative to the light, in either case scanning the entire two-dimensional array with a unidirectional pass of the moving component. The use of a CCD equipped with time delay integration allows the instrument to form an enhanced image.

Abstract: A charged particle beam apparatus includes a column, the column having: a charged particle beam source which generates a charged particle beam to apply a charged particle beam to the surface of a substrate, a position where the charged particle beam is irradiated to the substrate being a beam position; and a gas mechanism provided in proximity to the substrate to supply a gas to the surface of the substrate, the gas mechanism having an opening which permits passage of the charged particle beam, a gas supply opening which locally injects the gas to the vicinity of the beam position, and a gas exhaust opening which exhausts the injected gas in the vicinity of the beam position to exhaust the gas.

Abstract: Non uniform ion implantations in a pendulum type of ion implantation are mitigated by adjusting movement of a wafer according to a corresponding non uniform function. More particularly, a non uniform ion implantation function is obtained by measuring and/or modeling ion implantations. Then, movement of a wafer along a second non arcuate scan path is adjusted according to the non uniform ion implantation function to facilitate uniform ion implantations.

Abstract: The present invention provides a charged particle beam device for irradiating a specimen with ions. The charged particle beam device comprises a gas field ion source unit for generating a beam of ions, the gas field ion source having an emitter unit having an emitter unit tip; and a gas supply system for directing gas to the emitter unit tip. The gas supply system comprises an array of capillary tubes. Further, the present invention provides a method for irradiating a specimen with ions by operating a charged particle beam device having a gas field ion source, wherein the method comprises the step of directing a gas flow to an emitter unit tip, wherein the gas flow has a gas beam aperture angle of 3° or less.

Abstract: An exposure apparatus which draws a pattern on a substrate with a charged particle beam is disclosed. The exposure apparatus includes a detector which detects a charged particle beam, a deflector which deflects the charged particle beam to scan the substrate or the detector with the charged particle beam, and a controller which controls the deflector to scan each of a plurality of scanning ranges on the detector with the charged particle beam, and calculates, on the basis of the charged particle beam amount detected by the detector upon scanning the plurality of scanning ranges, the intensity distribution of the charged particle beam which strikes the detector.

Abstract: One embodiment pertains to an apparatus for reflection electron beam lithography, including at least illumination electron-optics, an electron-reflective pattern generator, projection electron-optics, a moving stage holding a target substrate, control circuitry, and a deflection system. The illumination electron-optics is configured to form an illumination electron beam. The electron-reflective pattern generator configured to generate an electron-reflective pattern of pixels and to reflect the illumination electron beam using the pattern to form a patterned electron beam. The projection electron-optics is configured to project the patterned electron beam onto the moving target substrate. The control circuitry is configured to shift the generated pattern in discrete steps in synchronization with the stage motion. The deflection system is configured to deflect said projected patterned electron beam so as to compensate for said stage motion in between discrete shifts of said generated pattern.

Abstract: The present invention improves the accuracy of therapy by checking in real time whether an spread-out Bragg peak (SOBP) width agrees with a desired width during irradiation with a beam. The device for outputting a charged particle beam includes a charged particle beam generator 1 including a synchrotron 4; a range modulation device such as a range modulation wheel (RMW) 28 which forms a Bragg peak of an ion beam extracted from this charged particle beam generator 1; an irradiation device 16 which is located in the direction of ion beam propagation of this RMW device 28 and includes a dose monitor 31 for detecting a dose of the ion beam; and an SOBP width calculation device 73 which calculates ion beam Bragg peak formed by the RMW device 28 based on a detection value of the dose monitor 31.

Abstract: A method for filtering particles out of a beam of radiation propagating from a radiation source is provided. The method includes passing the beam of radiation through a filter having a first portion within the beam of radiation and a second portion outside of the beam of radiation, capturing at least some of the particles in the beam of radiation with the first portion, and moving the filter in a direction that is transverse to the beam of radiation so that the first portion is moved outside of the beam of radiation and the second portion is moved into the beam of radiation.

Abstract: Disclosed is a radiation apparatus for technical uses, especially a UV crosslinking apparatus of a printing press, coating machine, or similar. Said radiation apparatus comprises at least one radiation source emitting a processing radiation, at least one controllable and particularly wavelength-selective reflector which is assigned to the radiation source and is used for selectively directing the processing radiation onto a substrate that is to be processed or away therefrom, a driving mechanism which is effectively connected to the reflector, and a housing accommodating at least the at least one radiation source and the at least one reflector. At least one first and second radiation source are provided between which the controllable reflector is disposed and which can be operated above all in a separate manner.

Abstract: Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing a dielectric material disposed on a substrate and to methods of curing dielectric materials using UV radiation. A substrate processing tool according to one embodiment comprises a body defining a substrate processing region; a substrate support adapted to support a substrate within the substrate processing region; an ultraviolet radiation lamp spaced apart from the substrate support, the lamp configured to transmit ultraviolet radiation to a substrate positioned on the substrate support; and a motor operatively coupled to rotate at least one of the ultraviolet radiation lamp or substrate support at least 180 degrees relative to each other.