Patents Issued in June 1, 2010
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Patent number: 7728928Abstract: It is an object to provide a display device with the high contrast ratio by an easy method. In addition, it is an object to provide such a high performance display device at low cost. In a display device including a display element between a pair of light transmitting substrates, a layer including stacked polarizers is each provided on an outer side of the substrates. At that time, the stacked polarizers on a viewing side are arranged to deviate from a parallel nicol state. In addition, a retardation film may be provided between the stacked polarizers and the substrate.Type: GrantFiled: January 23, 2007Date of Patent: June 1, 2010Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Tetsuji Ishitani, Yuji Egi, Takeshi Nishi
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Patent number: 7728929Abstract: A transflective liquid crystal display device includes a first and a second substrates, a liquid crystal layer, and a plurality of reflective electrodes and transparent electrodes. The liquid crystal layer is interposed between the first and the second substrates and functions in an OCB mode. The reflective electrode and the transparent electrode in one picture element are spaced apart from each other to produce a transverse electric field when a voltage is applied across the liquid crystal layer.Type: GrantFiled: October 6, 2006Date of Patent: June 1, 2010Assignee: Wintek CorporationInventors: Yi-Chun Wu, Wen-Jui Liao, Chin-Chang Liu, Chian-Chang Lee
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Patent number: 7728930Abstract: A display panel and an electro-optical device thereof are provided. The display panel comprises a pair of substrates, at least one data line, at least three common lines, at least one scan line, at least one switch element, a common electrode, and a display media layer. The pair of substrates comprises a first substrate and a second substrate. The data line and the three common lines are formed on the first substrate. The data line and the common lines interlace to form a plurality of areas. Each of the areas comprises an electrode. The electrodes are connected to each other to form a pixel electrode. The scan line is formed on the first substrate and under an electrode of one of the areas. The switch element is formed under an electrode of one of the areas, and comprises a source connected to the pixel electrode, a drain connected to the data line, and a gate\ connected to the scan line. The common electrode is formed on the second substrate, with a display media layer disposed between the two substrates.Type: GrantFiled: April 18, 2008Date of Patent: June 1, 2010Assignee: AU Optronics Corp.Inventors: Shih-Chyuan Fan Jiang, Ching-Huan Lin, Chih-Ming Chang
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Patent number: 7728931Abstract: The present invention relates to a security element (30) for securing valuable articles, having a first optically active layer (32) that is present at least in some areas and comprises a cholesteric liquid crystal material. According to the present invention, a second optically active layer (34) that is present at least in some areas is provided, the first and the second layer (32, 34) being stacked in an overlap area. Here, the first optically active layer (32) selectively reflects light in a first wavelength range having a first circular polarization direction, and the second optically active layer (34), either itself or, in the overlap area, in coaction with the first optically active layer (32), selectively reflects light in a second wavelength range having a second direction of circular polarization.Type: GrantFiled: April 29, 2005Date of Patent: June 1, 2010Assignee: Giesecke & Devrient GmbHInventor: Winfried Hoffmuller
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Patent number: 7728932Abstract: The present invention provides a liquid crystal display device. An optical film having negative uniaxial double refractive index ellipsoids is arranged below a semi-transmitting liquid crystal display cell and, thereafter, a ?/4 phase difference plate, a ?/2 phase difference plate and a polarizer are arranged. The orientation axis direction of the optical film having negative uniaxial double refractive index ellipsoids is substantially equal to the direction which is rotated by 90° in the clockwise direction from a resultant vector of the orientation axis direction of the upper orientation film and the orientation axis direction of the lower orientation film of the liquid crystal display cell. Further, phase lagging axis of the upper and lower ?/4 phase difference plate is set substantially equal to the orientation axis direction of the optical film having negative uniaxial double refractive index ellipsoids.Type: GrantFiled: November 19, 2008Date of Patent: June 1, 2010Assignee: Hitachi Displays, Ltd.Inventors: Koichi Fukuda, Yoshiaki Nakamura
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Patent number: 7728933Abstract: A method for forming an alignment layer is disclosed, to prevent light leakage generated by a physical contact between a rubbing roll and a substrate, which includes preparing a substrate; coating an alignment material on the substrate, for initial alignment of liquid crystal; applying an electric field or a magnetic field to the alignment material, for determination of alignment direction in the alignment material; and curing the alignment material.Type: GrantFiled: November 30, 2005Date of Patent: June 1, 2010Assignee: LG Display Co., Ltd.Inventors: Chang Dong Kim, Hyun Sik Seo, Kwang Hoon Shin
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Patent number: 7728934Abstract: A method for fabricating a liquid crystal display (LCD) is provided. The method includes the steps stated below. At first, providing an LCD panel including a first substrate, a second substrate and a liquid crystal layer therebetween. The liquid crystal layer includes several photo-sensitive monomers and several liquid crystal molecules. The LCD panel has at least a first pixel and a second pixel. Afterwards, correspondingly driving the first pixel and the second pixel by the first voltage and the second voltage. At last, applying a ultra-violet source onto the LCD panel to enable several photo-sensitive monomers to polymerize several alignment polymers on the first substrate and the second substrate.Type: GrantFiled: December 8, 2005Date of Patent: June 1, 2010Assignee: AU Optronics Corp.Inventor: Hao-Yu Chang
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Patent number: 7728935Abstract: There is provided a liquid crystal device including a first substrate, a second substrate, a liquid crystal being held between the first substrate and the second substrate, a base layer having alternating linear grooves and linear protrusions on at least one of the first substrate and the second substrate, and an alignment layer of an oxide film covering the base layer and having wedge-shaped tops over the linear protrusions of the base layer.Type: GrantFiled: February 19, 2008Date of Patent: June 1, 2010Assignee: Seiko Epson CorporationInventor: Yasushi Kawakami
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Patent number: 7728936Abstract: Alignments of liquid crystal are obtained. A transparent magnetic thin film provides a homeotropic alignment of liquid crystal molecules. Or, a homeotropic or homogeneous alignment having an adjustable pretilt angle is further obtained through rubbing the transparent magnetic thin film. The present invention has a simple procedure with a low cost. The present invention is used in equipment with a plasma source while providing high transmittance, hardness and insulation. And the transparent magnetic thin film has potential uses in the applications of non-contact multi-domain alignment without extra procedure for alignment treatment.Type: GrantFiled: March 24, 2008Date of Patent: June 1, 2010Assignee: National Chiao Tung UniversityInventors: Ru-Pin Chao, Hsin-Ying Wu
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Patent number: 7728937Abstract: The liquid crystal display device includes a first substrate, a second substrate opposed to the first substrate, and a vertically aligned liquid crystal layer interposed between the first and second substrates, and has a plurality of pixels each including a first electrode formed on the first substrate, a second electrode formed on the second substrate, and the liquid crystal layer interposed between the first and second electrodes. The first substrate has a shading region in gaps between the plurality of pixels, and a wall structure is placed regularly on the surface of the first substrate facing the liquid crystal layer in the shading region. A color filter layer of the second substrate has at least one hole formed at a predetermined position in each pixel.Type: GrantFiled: June 16, 2005Date of Patent: June 1, 2010Assignee: Sharp Kabushiki KaishaInventors: Yasuhiro Kume, Noriaki Onishi, Kazuhiko Tamai, Hiroaki Kojima, Nobukazu Nagae
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Patent number: 7728938Abstract: Disclosed is a liquid crystal display mainly including a liquid crystal layer having negative dielectric anisotropy sandwiched between two substrates treated by vertical alignment process, and first and second domain regulators for regulating orientation of the liquid crystal layer such that the liquid crystal molecules are aligned obliquely when a voltage is applied, so that the orientation will include a plurality of first and second directions. The first directions are different from the second directions. Each pixel is provided with one of the first and second domain regulators in a manner that every two adjacent pixels or every two adjacent R pixels, two adjacent G pixels or two adjacent B pixels are provided with different domain regulators.Type: GrantFiled: October 25, 2006Date of Patent: June 1, 2010Assignee: AU Optronics CorporationInventors: Shuo-Feng Chang, Jiun-Chang Chiou, Adam Young
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Patent number: 7728939Abstract: A multi-domain liquid crystal display includes a plurality of first and second picture elements having polarities opposite to each other under the same frame of an inversion drive scheme. Each first picture element has an extension part positioned next to at least one side of the adjacent second picture element, and each second picture element has an extension part positioned next to at least one side of the adjacent first picture element.Type: GrantFiled: March 14, 2007Date of Patent: June 1, 2010Assignee: Wintek CorporationInventors: Ying-Cheng Tsai, Chien-Ting Chan, Hsi-Rong Han, Wen-Chun Wang
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Patent number: 7728940Abstract: Disclosed is an active matrix liquid crystal display device including substrates and a liquid crystal layer. The substrate includes: scan signal wiring lines; common signal wiring lines; video signal wiring lines intersecting these wiring lines; and pixels surrounded with the scan signal wiring lines and the video signal wiring lines. Each of pixels includes: a thin film transistor; source electrodes in a layer with the video signal wiring lines; pixel electrodes connected to the source electrodes; and common electrodes connected to the common signal wiring lines. The source electrodes include first parts overlapping the scan signal wiring lines and second parts connecting with the pixel electrodes, which are positioned around central parts between the video signal wiring lines. Molecular axes in the liquid crystal layer rotate under an electric field applied between the pixel electrodes and the common electrodes.Type: GrantFiled: August 2, 2007Date of Patent: June 1, 2010Assignee: NEC LCD Technologies, Ltd.Inventors: Takayuki Konno, Shinichi Nishida, Teruaki Suzuki, Yusuke Nogami
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Patent number: 7728941Abstract: A liquid crystal display device employs a white sub-pixel among RGBW-4 sub-pixels as a view control component to realize a narrow viewing angle or a wide viewing angle in a fringe field switching mode. The LCD device comprises gate lines and data lines crossing each other to define RGBW sub-pixels on a first substrate, a thin film transistor formed at each crossing of the gate and data lines; a first common electrode in each region of the RGBW sub-pixels, a pixel electrode connected to the thin film transistor and insulated from the first common electrode, the pixel electrode having at least one slit, a second substrate attached to the first substrate, wherein the first and second substrate face each other with a liquid crystal layer interposed therebetween, and a second common electrode on the second substrate and corresponding to each W sub-pixel.Type: GrantFiled: June 5, 2006Date of Patent: June 1, 2010Assignee: LG Display Co., Ltd.Inventors: Hyun Suk Jin, Hyung Seok Jang
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Patent number: 7728942Abstract: A brighter active matrix type liquid crystal electro-optical device with a higher contrast, yet having a wider visual angle is realized, said liquid crystal electro-optical device comprises a liquid crystal layer and means for applying an electric field to the liquid crystal layer in the direction parallel to the substrate, wherein the liquid crystal layer comprises a liquid crystal material dispersed in a polymer material. Also a liquid crystal electro-optical device comprising a liquid crystal layer disposed on a substrate is included, wherein the transmission mode or the dispersion mode of an incident light is selected by an electric field applied to the liquid crystal layer in the direction parallel to the liquid crystal layer.Type: GrantFiled: August 18, 2006Date of Patent: June 1, 2010Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Yoshiharu Hirakata, Takeshi Nishi, Rumo Satake
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Patent number: 7728943Abstract: The present invention is a substrate for a display device comprising an active matrix substrate and an opposed substrate which are opposed to each other with a display medium layer interposed therebetween, said active matrix substrate including a pixel electrode arranged in a matrix shape on the side of the display medium layer and said opposed substrate including a common electrode opposing to the pixel electrode on the side of the display medium layer, wherein said substrate for a display device includes an electrode slit formed in one of the pixel electrode and the common electrode; and at least one of the electrical connecting portions of said electrode slit is provided outside of a light-blocking region.Type: GrantFiled: May 20, 2005Date of Patent: June 1, 2010Assignee: Sharp Kabushiki KaishaInventors: Hidetoshi Nakagawa, Toshihide Tsubata, Nobuyoshi Nagashima, Yuhko Hisada
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Patent number: 7728944Abstract: A transflective LCD includes scan lines and data lines disposed on a substrate. The scan line and the data line forms a plurality of pixel regions. Each pixel region has a plurality of sub-pixel regions. At least three of the sub-pixel regions are as a color sub-pixel region and at least one of the sub-pixel regions is a fourth sub-pixel region. A plurality of switch devices is adapted to control the color sub-pixels and the fourth sub-pixel.Type: GrantFiled: July 12, 2007Date of Patent: June 1, 2010Assignee: AU Optronics Corp.Inventors: Chih-Jen Hu, Chih-Ming Chang
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Patent number: 7728945Abstract: A structure for circuit assembly is applied to positional alignment in bonding process. The structure for circuit assembly comprises a first substrate, having a plurality of first terminals and both a first alignment mark and a second alignment mark located in the vicinity of the first terminals, and a second substrate, having a plurality of second terminals and a transmissive area located in the vicinity of second terminals. During the first substrate bonding with the second substrate, as the edge of the transmissive area is located between the first alignment mark and the second alignment mark, and the first alignment mark is outside of the transmissive area, the first terminals are normally connected with the second terminals.Type: GrantFiled: August 17, 2006Date of Patent: June 1, 2010Assignee: Au Optronics Corp.Inventors: Po-Yuan Liu, Chuan-Mau Wei, Chih-Yuan Chien
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Patent number: 7728946Abstract: A liquid crystal display panel includes a first substrate, a second substrate, a liquid crystal layer, and a black matrix layer. A sealant is put between the first and the second substrates and connecting them to define an enclosed space, and the liquid crystal layer is provided in the enclosed space. An overlap region is formed between the sealant and the first substrate or between the sealant and the second substrate, and only part of the overlap region is spread with the black matrix layer.Type: GrantFiled: March 30, 2007Date of Patent: June 1, 2010Assignee: Wintek CorporationInventors: Wen-Jung Tsai, Hong-En Yang, Yu-Feng Chien
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Patent number: 7728947Abstract: A nano-liquid crystal on silicon (nano-LCoS) chip having carbon nanotube (CNT) pillars that are grown on a glass substrate thereof. As the heights of the CNT pillars are uniform, the CNT pillars can function as spacers providing a uniform cell gap between the glass substrate and a silicon chip of the nano-LCoS chip. Also, being excellent electrical conductors, CNT pillars can form a part of the electrical connection between an outside voltage source and the indium tin oxide (ITO) layer formed on the glass substrate. The nano-LCoS chip includes nano-LCoS alignment keys that are formed in the silicon chip and connected to the CNT pillars. By applying the same voltage to the ITO layer and keys, a portion of the liquid crystal activated by the keys become transparent fiduciary marks for optical alignment of nano-LCoS chips.Type: GrantFiled: January 19, 2009Date of Patent: June 1, 2010Assignees: Wuhan Splendid Optronics Technology Co., Ltd., Sysview Technology, Inc.Inventors: Gihong Kim, Charles Chul-Whei Koo
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Patent number: 7728948Abstract: In a method for manufacturing a liquid crystal display device in which a liquid crystal layer is formed by dropping liquid crystal by a dropping method, a surface of a sealant which is formed over a first substrate is cured by a first cure treatment before dropping the liquid crystal, and then the liquid crystal is dropped. A second substrate has a plurality of projections in a sealant adhesive region. The first substrate and the second substrate are attached to each other with the liquid crystal interposed therebetween so that the plurality of projections is in contact with an uncured region in the sealant formed over the first substrate.Type: GrantFiled: March 28, 2008Date of Patent: June 1, 2010Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Takeshi Nishi, Tetsuji Ishitani
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Patent number: 7728949Abstract: Embodiments of the present invention relate to a cholesteric liquid crystalline material which may be usable in an electro-active element for providing fail safe operation, polarization insensitivity, low electrical power consumption requirements, and a small number of electrical connections. The cholesteric liquid crystalline material may be usable in an electro-active element for providing a diffractive efficiency or focusing efficiency above 90% in an activated state of the electro-active element and a diffractive efficiency or focusing efficiency below 10% in a deactivated state of the electro-active element.Type: GrantFiled: January 22, 2008Date of Patent: June 1, 2010Assignee: PixelOptics, Inc.Inventors: Roger Clarke, Allan Carmichael, Joshua N. Haddock, William Kokonaski
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Patent number: 7728950Abstract: A method for presenting video content including displaying the video content at an enhanced frame rate selectively modified to interfere with a recording of the video content by a camcorder. For example, the video content can be displayed at a frame rate of 54 pictures per second or a frame rate of 66 pictures per second. For implementation of the enhanced frame rate, a first picture can be displayed within the video content a first number of times and at least a second picture can be displayed a different number of times.Type: GrantFiled: November 1, 2004Date of Patent: June 1, 2010Assignee: Thomson LicensingInventor: Donald Henry Willis
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Patent number: 7728951Abstract: A lithographic apparatus is disclosed that includes a first gas shower configured to supply a first gas flow to an interior space of the apparatus, and a second gas shower configured to supply a second gas flow to the interior space of the apparatus, the gas showers configured to direct the first gas flow and the second gas flow at least partly towards each other. Also, a method for conditioning an interior space of a device manufacturing apparatus is provided that includes supplying a first conditioned gas flow and a second conditioned gas flow to the interior space, such that the first conditioned gas flow and the second conditioned gas flow are at least partly directed to each other.Type: GrantFiled: September 29, 2005Date of Patent: June 1, 2010Assignee: ASML Netherlands B.V.Inventors: Tjarko Adriaan Rudolf Van Empel, Ronald Van Der Ham, Niek Jacobus Johannes Roset
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Patent number: 7728952Abstract: Aspects of the present disclosure provide a method and a system for closing plate take-over in immersion lithography. A plate holder is provided for a closing plate in a wafer holder of an immersion lithography system. An optical detector is provided below the plate holder for determining whether a light signal passing through the closing plate is aligned with the plate holder using the optical detector. If the light signal is aligned, a fluid containment mechanism is lowered, and the closing plate is placed into the plate holder. Alternatively, the fluid containment mechanism is lowered to surface of the closing plate, the closing plate is affixed to the mechanism, and the mechanism is raised with the closing plate. If the light signal is not aligned, an error is triggered and the scanner is stopped.Type: GrantFiled: January 25, 2007Date of Patent: June 1, 2010Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tzung-Chi Fu, Hsin Chang
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Patent number: 7728953Abstract: high performance and high quality micro devices, etc. are produced highly efficiently at a high throughput. Before transferring a wafer W to an exposure apparatus 200 for exposing the wafer W, marks formed on the wafer W is measured by an in-line measurement device 400 and a measurement result and/or a result of performing calculation processing on the measurement result is notified to the exposure apparatus 200. In the exposure apparatus 200, a measurement condition is optimized based on the notified result and an alignment processing and other processing are performed.Type: GrantFiled: August 31, 2006Date of Patent: June 1, 2010Assignee: Nikon CorporationInventors: Hiroyuki Suzuki, Yuuiki Ishii, Shinishi Okita
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Patent number: 7728954Abstract: A system and method are used to form incoherent beams from a coherent beam. A system comprises a source of radiation and a reflective loop system. The source of radiation produces a coherent or partially coherent beam. The reflective loop system received the partially coherent beam and reflects the partially coherent beam through a loop, or alternatively through non-overlapping loops, to form an incoherent beam.Type: GrantFiled: June 6, 2006Date of Patent: June 1, 2010Assignee: ASML Netherlands B.V.Inventors: Johannes Jacobus Matheus Baselmans, Kenji Ueyama
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Patent number: 7728955Abstract: A system for controlling the radiation dose in a pulse of radiation having a relatively large dose, in which a pulsed beam of radiation is divided into a plurality of pulsed sub-beams of radiation and the radiation dose of the pulses is adjusted after the radiation beam has been divided.Type: GrantFiled: March 21, 2006Date of Patent: June 1, 2010Assignee: ASML Netherlands B.V.Inventor: Robert-Han Munnig Schmidt
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Patent number: 7728956Abstract: A lithographic system and method are provided that allow for variations of a basic device design to be generated without substantially increasing the cost of the data path hardware. The lithographic apparatus includes an array of individually controllable elements, a control system, a first data buffer, and a second data buffer. The control system provides control signals to the array of individually controllable elements. The first data buffer stores pattern data that corresponds to a pattern to be exposed on a plurality of areas on the substrate. The second data buffer stores pattern variation data, corresponding to at least one change to a part of the pattern. The control system is configured, such that at least one variation of the pattern is exposed on one of the areas on the substrate with the pattern variation data.Type: GrantFiled: April 5, 2005Date of Patent: June 1, 2010Assignee: ASML Netherlands B.V.Inventors: Arno Jan Bleeker, Kars Zeger Troost, Adrianus Johannes Henricus Maas
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Patent number: 7728957Abstract: The invention relates to a device for optical distance measurement, in particular a device functioning in accordance with the phase measurement principle, having at least one transmission unit (12) equipped with at least one light source (22, 24) for transmitting modulated optical measurement radiation (16) toward a target object (20), and having a reception unit (18) for receiving the optical measurement radiation (17) returning from the target object (20). According to the present invention, the device has means (51, 55, 68) that enable a measurement of distances from a target object (20?) by means of a triangulation method. The invention also relates to a method for optical distance measurement in which it is possible to switch back and forth between a phase measurement method for determining a distance of a distance measuring device from a target object (20, 20?) and a triangulation method for determining this distance.Type: GrantFiled: July 1, 2005Date of Patent: June 1, 2010Assignee: Robert Bosch GmbHInventors: Bjoern Haase, Joerg Stierle, Peter Wolf, Cedric Pahud, Kai Renz, Clemens Schulte
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Patent number: 7728958Abstract: An improved condition testing system and method includes a structure including a semiconductor material with a target portion and a second portion. The target portion has a first feature when at least one of the following occurs: an external force is received by the second portion of the structure and an internal condition occurs in the target portion. The system and method further has a grating shaped and located to produce a first optical interference pattern when the target portion and the grating are exposed to non-invasive illumination and when the target portion has the first feature. Further implementations use a second grating spaced apart from the first grating.Type: GrantFiled: December 14, 2007Date of Patent: June 1, 2010Assignee: Attofemto, Inc.Inventor: Paul L. Pfaff
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Patent number: 7728959Abstract: An apparatus for image acquisition of topological features of the surface of skin. The apparatus comprises a waveguide, having an entrance edge and top and bottom surfaces; a light source, configured to direct a light beam at the entrance edge of the waveguide; a skin contact layer, disposed at or near the top surface of the waveguides; a holographic optical element (HOE), disposed at the top or at the bottom surfaces of the waveguide, configured to diffract the light beam incident from the light source to the skin contact layer; a sensor array, configured to detect light reflected from the surface of skin in contact with skin contact layer; and means for compensating for changes in the Bragg matching condition of the HOE due to temperature.Type: GrantFiled: June 21, 2004Date of Patent: June 1, 2010Assignee: Aprilis, Inc.Inventors: David A. Waldman, Vincent Fedele, Richard T. Ingwall, Daniel H. Raguin, John S. Berg, Joby Joseph, David L. Kent
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Patent number: 7728960Abstract: The invention relates to a spectroscopic arrangement and a method for combining devices for measuring material concentrations NIR associated with a spectroscopic evaluation of glass fiber and fitted with fibers Bragg gratings (FBG) for measuring temperature profiles.Type: GrantFiled: January 17, 2006Date of Patent: June 1, 2010Assignee: Bayer Technology Services GmbHInventor: Wolfgang Borchers
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Patent number: 7728961Abstract: A surface height and focus sensing system is provided. In one embodiment, an illumination focus sensor is used in combination with a collimation adjustment element which drives the system such that an illumination focus height matches the workpiece surface height, which produces a null output from the illumination focus sensor. Under the null condition, the amount of collimation adjustment is directly related to the workpiece surface height, and the resulting height determination is relatively insensitive to the workpiece surface optical properties. In one embodiment, the amount of collimation adjustment is determined according to the control signal for the collimation adjustment element. In another embodiment, a collimation adjustment sensor is utilized to measure the amount of collimation adjustment.Type: GrantFiled: March 21, 2007Date of Patent: June 1, 2010Assignee: Mitutoyo CoporationInventor: Mathew David Watson
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Patent number: 7728962Abstract: A method and an apparatus for making visible a mark on a spectacle lens are disclosed. An illumination light beam is directed to the spectacle lens. The illumination light beam runs through the spectacle lens and, after having run through the spectacle lens, is reflected on a reflector configured as a retroreflector, then runs again through the spectacle lens, and is finally fed to a camera as an observation light beam. The reflector is moved. Further, a measurement light beam is directed to said spectacle lens and fed to a sensor for measuring a physical property of the spectacle lens. The measurement light beam is generated by a first light source and the illumination light beam is generated by a second light source. The first and the second light sources are physically distinct units.Type: GrantFiled: January 13, 2006Date of Patent: June 1, 2010Assignee: Carl Zeiss Vision GmbHInventors: Matthias Hornauer, Adalbert Hanssen
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Patent number: 7728963Abstract: A separation from at least one and an image of at least three reflective regions on the orientation indicator are recorded by a separation measurement sensor and an image sensor in a measuring device, for the purpose of determining the orientation of an orientation indicator. The separation measurement and image recording are achieved by means of a directed emission of a collimated first beam and a divergent second beam with differing wavelengths and/or polarization in the direction of the orientation indicator and a simultaneous recording of the reflected and/or scattered first and second beams. The reflective regions on the orientation indicator are embodied and arranged such as to be positioned at a target point with a detectable geometric relationship to each other and to be simultaneously resolved by the image recorder. By means of the orientation determination, amongst other things, separations from target points, even not directly visible, can be precisely determined.Type: GrantFiled: November 4, 2005Date of Patent: June 1, 2010Assignee: Leica Geosystems AGInventor: Holger Kirschner
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Patent number: 7728964Abstract: A light-emitting apparatus, for enabling a beam of light to be projected on a desired target located a distance away to project the beam on the desired target without any or substantially any undesired movement. The apparatus may include a housing, a light generating device located within the housing and operable to generate a beam of light, a sensing device or devices for sensing an undesired action of the housing, a control circuit operable to provide a control signal corresponding to the sensed undesired action, and a drive device operable to counter act all or at least some of the undesired action of said housing in accordance with said control signal. The sensing device or devices may be one or more gyroscopes, accelerometers or other such devices.Type: GrantFiled: March 6, 2008Date of Patent: June 1, 2010Inventors: Matthew Feinsod, Michael Perlmutter
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Patent number: 7728965Abstract: Systems and methods for inspecting an edge of a specimen are provided. One system includes an illumination subsystem configured to direct light to the edge of the specimen at an oblique angle of incidence. The plane of incidence of the light is substantially perpendicular to a plane substantially tangent to the edge of the specimen. The system also includes a detection subsystem configured to collect light scattered from the edge and to generate signals responsive to the scattered light. One method includes directing light to the edge of the specimen at an oblique angle of incidence. The plane of incidence is substantially perpendicular to a plane substantially tangent to the edge of the specimen. The method also includes collecting light scattered from the edge and generating signals responsive to the scattered light. The signals described above can be used to detect defects on the edge of the specimen.Type: GrantFiled: June 6, 2005Date of Patent: June 1, 2010Assignee: KLA-Tencor Technologies Corp.Inventors: Kurt Lindsay Haller, Steve Yifeng Cui, Jared Lera
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Patent number: 7728966Abstract: An optical inspection tool used to detect surface defects of a substrate include a chuck for holding a substrate and a lens unit disposed over the chuck. The lens unit includes at least a pair of oblique beam paths therein, wherein light penetrating the beam paths travels without angular deflection. The beam paths take the form of spaces formed through the lens unit, or flat portions formed on a lens within the lens unit. A camera is installed on the lens unit, and the camera converts light passing through the lens unit into an image. Methods of detecting surface defects of the substrate using the inspection tool are also provided.Type: GrantFiled: June 12, 2006Date of Patent: June 1, 2010Assignee: Samsung Electronics Co., Ltd.Inventors: Jong-An Kim, Dong-Chun Lee, Chung-Sam Jun, Ik-Chul Kim, Sang-Hee Kim
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Patent number: 7728967Abstract: A laser maintenance apparatus including a laser system which includes an optical system for emitting, in a first irradiation condition, a generation laser beam for generating an ultrasonic wave in a portion of an object on which maintenance is to be performed, and including a laser source configured to generate and detect a detection laser beam which interacts with the ultrasonic wave generated by the laser light beam in the first condition. The laser maintenance apparatus also includes a light transmitting device for transmitting laser light emitted from the laser system, a laser irradiation device for irradiating laser light transmitted by the light transmitting device to the object portion, and a transporting/scanning mechanism for transporting the light transmitting device and the laser irradiation device to a portion near the object portion, and scanning over an arbitrary range at the object portion.Type: GrantFiled: July 6, 2006Date of Patent: June 1, 2010Assignee: Kabushiki Kaisha ToshibaInventors: Makoto Ochiai, Yoshiaki Ono, Takahiro Miura, Mitsuaki Shimamura, Masaki Yoda, Hidehiko Kuroda, Itaru Chida, Fukashi Osakata, Satoshi Yamamoto, Kentaro Tsuchihashi, Ryoichi Saeki
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Patent number: 7728968Abstract: A system and method for inspecting a specimen, such as a semiconductor wafer, including illuminating at least a portion of the specimen using an excimer source using at least one relatively intense wavelength from the source, detecting radiation received from the illuminated portion of the specimen, analyzing the detected radiation for potential defects present in the specimen portion.Type: GrantFiled: November 8, 2006Date of Patent: June 1, 2010Assignee: KLA-Tencor Technologies CorporationInventors: Bin-Ming Benjamin Tsai, Yung-Ho Chuang, J. Joseph Armstrong, David Lee Brown
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Patent number: 7728969Abstract: Various methods and systems for identifying defect types on a wafer are provided. One computer-implemented method for identifying defect types on a wafer includes acquiring output of an inspection system for defects detected on a wafer. The output is acquired by different combinations of illumination and collection channels of the inspection system. The method also includes identifying defect types of the defects based on the output acquired by a set of the different combinations. The set of the different combinations is selected based on the defect types to be identified on the wafer and a wafer type of the wafer such that a different set of the different combinations of the illumination and collection channels is used for identifying different defect types on different wafer types.Type: GrantFiled: December 3, 2007Date of Patent: June 1, 2010Assignee: KLA-Tencor Technologies Corp.Inventors: Jason Saito, Wei-Ning Shen
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Patent number: 7728970Abstract: A method for determining a mixture composition of a plurality of fluorescent materials includes steps of calculating a first function, calculating a second function and determining a secondary mixture composition of the plurality of fluorescent materials. The first function is calculated by comparing an objective spectrum of an objective light with a reference spectrum of a reference light. The second function is calculated by comparing a primary spectrum of the plurality of fluorescent materials mixed at a primary mixture with the reference spectrum composition. The secondary mixture composition is determined on the basis of the result of comparison between the first function and the second function.Type: GrantFiled: October 30, 2007Date of Patent: June 1, 2010Assignee: Kyocera CorporationInventor: Kousuke Katabe
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Patent number: 7728971Abstract: An analysis system, tool, and method for performing downhole fluid analysis, such as within a wellbore. The analysis system, tool, and method provide for a tool including a spectroscope for use in downhole fluid analysis which utilizes an adaptive optical element such as a Micro Mirror Array (MMA) and two distinct light channels and detectors to provide real-time scaling or normalization.Type: GrantFiled: December 23, 2008Date of Patent: June 1, 2010Assignee: Precision Energy Services, Inc.Inventors: Sean M. Christian, Jess V. Ford, Mike Ponstingl, Anthony Johnson, Sven Kruger, Margaret C. Waid, Bryan Kasperski, Enrique Prati
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Patent number: 7728972Abstract: A coupler for coupling a linear fiber array to a spectrometer is provided, the coupler having a tube, a linear fiber bundle array inserted through the tube, an alignment mechanism for aligning the linear fiber bundle array with a slit on the spectrometer, and a locking mechanism for locking the linear fiber bundle array to the tube. Further, a method for coupling a linear fiber array to a spectrometer is provided, the method having the steps of inserting a linear fiber bundle array through a tube, aligning the linear fiber bundle array with a slit on the spectrometer, and locking the linear fiber bundle array to the tube once it is aligned with the slit on the spectrometer.Type: GrantFiled: August 8, 2006Date of Patent: June 1, 2010Assignee: Lambda Solutions, Inc.Inventor: Yongwu Yang
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Patent number: 7728973Abstract: An apparatus for the detection of spectral information along a geometrical line with a dispersive element, which is suspended from an axis of rotation, for the spectral dispersion of electromagnetic radiation from a range on the geometrical line into spectral constituents, a line detector for the detection of the spectral constituents of the radiation emanating from the range on the geometrical line and a dispersive-element deflector, the deflector being designed to deflect the dispersive element on the axis of rotation, so that depending on an angle of deflection a radiation from another range of the geometrical line is incident on the line detector.Type: GrantFiled: April 25, 2007Date of Patent: June 1, 2010Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.Inventor: Heinrich Grueger
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Patent number: 7728974Abstract: An enhanced detection system can eliminate use of a sheath fluid by selecting which particles that pass through an sensing region to detect parametric characteristics thereof based upon position of each particle while it is in a sensing region relative to one or more predetermined positions, such as an in-focus position relative to one or more light beams directed into the sensing region, to enhance accuracy and robustness of particle parametric characteristics detection.Type: GrantFiled: February 7, 2008Date of Patent: June 1, 2010Assignee: Cytopeia, Inc.Inventor: Gerrit van den Engh
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Patent number: 7728975Abstract: In a method for describing, evaluating and improving optical polarization properties of a projection objective of a microlithographic projection exposure apparatus, the Jones or Stokes vectors are firstly determined at one or more points in the exit pupil of the projection objective. These are then described at least approximately as a linear superposition of predetermined vector modes with scalar superposition coefficients. The optical polarization properties can subsequently be evaluated on the basis of the superposition coefficients.Type: GrantFiled: February 22, 2006Date of Patent: June 1, 2010Assignee: Carl Zeiss SMT AGInventors: Michael Totzeck, Heiko Feldmann, Daniel Kraehmer, Olaf Dittmann
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Patent number: 7728976Abstract: To generate a simulated diffraction signal, one or more values of one or more photoresist parameters, which characterize behavior of photoresist when the photoresist undergoes processing steps in a wafer application, are obtained. One or more values of one or more profile parameters are derived using the one or more values of the one or more photoresist parameters. The one or more profile parameters characterize one or more geometric features of the structure. A simulated diffraction signal is generated using the one or more values of the one or more profile parameters. The simulated diffraction signal characterizes behavior of light diffracted from the structure. The generated simulated diffraction signal is associated with the one or more values of the one or more photoresist parameters.Type: GrantFiled: March 28, 2007Date of Patent: June 1, 2010Assignee: Tokyo Electron LimitedInventors: Joerg Bischoff, David Hetzer
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Patent number: 7728977Abstract: The present invention provides a transmitter unit for an open path gas detector for detecting a target gas and comprises: a radiation transmitter, e.g. a tuneable laser diode, capable of emitting radiation at a wavelength absorbed by the target gas, and a radiation deflector, having a deflecting part and a non-deflecting part, e.g. a mirror having a non-reflective part. The deflecting part and the non-deflecting part are located in the path of the radiation emitted by the transmitter and the non-deflecting part does not deflect the said radiation emitted by the transmitter or does so to a different extent than the deflecting part. In this way, the beam has a core in shadow that can be used to align the beam with a receiver unit. The radiation deflector is preferably a mirror having a reflective surface for reflecting radiation emitted by the transmitter and a non-reflective part that does not reflect the said radiation emitted by the transmitter or does so to a lesser extent that the reflecting surface.Type: GrantFiled: December 16, 2005Date of Patent: June 1, 2010Assignee: Honeywell Analytics AGInventors: Stephen N. Sutton, Rodney Royston Watts, Michael Proctor