Abstract: Disclosed are a fragrance supply apparatus and a washing/drying machine having the same, wherein the washing/drying machine comprises a fragrance supply apparatus installed in a washing/drying machine body for collecting clothes to be treated such that a fragrance solution contained therein is uniformly effused by a pressure difference to be supplied into the clothes within the washing/drying machine body, whereby the fragrance solution can be supplied at a desired time so as to prevent an unnecessary consumption thereof, and also prevent an occurrence of a deviation of an effused amount due to an amount of the fragrance solution contained in the fragrance supply apparatus.

Abstract: A laundry machine includes a body for defining an exterior; a water supply valve provided in the body and connected with an outer water supply; a drum rotatably mounted within the tub; at least one steam generator to supply steam ino the drum; and a water-adjust-valve to adjust the water amount supplied to the steam generator.

Abstract: A multiple function lock comprising a body, an engaging element having a first end and a second end, a locking mechanism for securing the first end and the second end of the engaging element to the body, and a gate mechanism for selectively concealing or revealing a passage in the body through which the second end may move to unlock the lock. In. embodiments, a multiple function lock may comprise a body, a U-shaped shackle having toe and heel portions, the heel portion rotatably secured within the body, a locking mechanism for locking the heel and the toe portions within the body, a passage through the body adjacent to the toe portion, the toe portion adapted to move through the passage to unlock the lock, and either a retaining cup, an adjustable gate, or an outer housing, each being adapted to selectively block or reveal the passage.

Abstract: An access identification assembly allows the owner of a piece of luggage or some other accessible structure to identify when someone has gained access to it. The assembly includes a housing which defines an interior space. The housing includes first and second openings. A locking member defines a fixed end, a movable end and an elongated body extending therebetween. The fixed end is fixedly secured to the housing and the movable end extends out and away from the housing. The movable end is selectively insertable into the housing to secure the access identification assembly. The access identification assembly also includes a releasing mechanism that is operatively connected to the housing for permanently unsecuring the access identification assembly. When either the releasing mechanism is broken or the locking member is severed, the user of the luggage knows that access has been obtained.

Abstract: The present invention relates to the technical field of coded locks, in particular to a fixed coded lock. The fixed coded lock comprises a casing, a latch hook return device that is used to push the front end portion of a latch hook into the casing is arranged inside the casing; the middle portion of the latch hook return device is hinged to the casing, and the latch hook return device respectively extends to form a pushing portion and a pressing portion respectively from the hinge point; the pushing portion pushes against the latch hook, and the pressing portion extends outside the casing; the front end portion of the latch hook is withdrawn into the casing through the latch hook return device which is manufactured by applying the lever principle, and the latch hook is withdrawn into the casing by pressing a key, so that unlocking becomes easier and more labor-saving for users.

Abstract: A method for leveling parts in a roller leveling machine, which includes an upper and a lower roller frame, and in which upper and lower leveling rollers are each arranged in a separate leveling roller block, at least one of the leveling roller blocks being variable in its position and angle so that the leveling gap can be adjusted, wherein at least one leveling gap setting device is arranged at the infeed side and at the outfeed side of the leveling machine, and an automatic leveling gap control is provided to set the leveling gap. The method includes determining, for each leveling triangle of the roller leveling machine, an offset value based on the thickness, width, and bending moment of the part to be leveled and characteristics of the leveling machine including a max deflection of the roller frame, and readjusting a setting device of the leveling gap as a function of the leveling triangles mapped onto the part to be leveled as it moves through the leveling gap.

Abstract: The invention describes a bending press (1), in particular a press brake (2), with a stationary bottom press beam (12) or press table (73) and a top press beam (10) which can be displaced relative to the bottom press beam (12) or press table (73) by means of a displacement drive (11). The bottom press beam (12) or press table (73) or a machine table or machine frame (13) supporting the bottom press beam (12) has at least one recess (5) affording foot room (6)) for an operator on a control side (3) of the bending press (1).

Abstract: In a method for winding hot-rolled strip (1), comprising a decoiler mandrel (4), at least one first pressing device (7), at least one second pressing device (8), wherein the hot-rolled strip (1) is pressed from the first pressing device (7) and the second pressing device (8) toward the decoiler mandrel (4), the hot-rolled strip (1) is pushed or pulled away from the decoiler mandrel (4) between the first pressing device (7) and the second pressing device (8), thereby subjecting the hot-rolled strip (1) to a prebending step. The invention further relates to a device for winding hot-rolled strip (1).

Abstract: This circular rolling mill (1), used for shaping annular workpieces (100), comprises a pair of rollers, an inner one (12) and an outer one (10), capable of working (F1+F2) the radial inner (102) and outer (101) faces of a workpiece, and a pair of conical rollers, an upper one (22) and a lower one (20), capable of working (F4+F5) the front faces (103, 104) of the workpiece, and also means (66) for moving some of these rollers (22) with respect to a frame (41) of the rolling mill (1). The means for moving at least one of the rollers (22) comprise at least one pinion (54, 55) and at least one rack (26, 28) which is secured to a member for the movement (F3) of the roller. This pinion (54, 55) is rotated by the output shaft of an electrically operated geared motor (66) mounted on a support (72) which is articulated with respect to the frame about the axis (X56) parallel to the axis of rotation of the pinion.

Abstract: The present invention solves a problem with conventional tube expanding method for heat exchanger tubes that is susceptible, when carrying out tube expansion on U-shaped heat exchanger tubes that have a narrower diameter than in the past and forming flare portions in opening portions that have been subjected to tube expansion, to a buckling phenomenon at boundaries between straight portions and hairpin portions of the heat exchanger tubes or a vicinity thereof. Opening portions of U-shaped heat exchanger tubes 56 that pass through a fin layer 54 protrude from an upper end surface of the fin layer 54, hairpin portions 56b of the heat exchanger tubes 56 protrude from a lower end surface of the fin layer 54, and tube expanding billets 22 are inserted into each opening portion of the heat exchanger tubes 56 to carry out primary tube expansion that expands the diameter of each straight tube portion 56a of the heat exchanger tubes 56 to integrate the heat exchanger tubes 56 and fins 50.

Abstract: Solutions for robotic fastener peening in turbine machines are disclosed. In one embodiment, an apparatus includes: a peening machine having a peening head; a robotic apparatus including: a robotic arm coupled to the peening machine; and a base member coupled to the robotic arm, the base member mounted independently of the machine element; a vision system for locating a fastener on the machine element; and a control system coupled to the vision system, the peening machine and the robotic apparatus, the control system configured to control movement of the robotic apparatus and the peening machine based upon vision system data and spatial information about the fastener and the machine element.

Abstract: An output calibration apparatus for an NOx sensor according to the present invention includes a urea addition valve provided in an exhaust passage in an internal combustion engine to allow urea to be added to inside of the exhaust passage, and an NOx sensor provided at least downstream of the urea addition valve, the NOx sensor being capable of detecting not only an NOx concentration but also an ammonia concentration. The output calibration apparatus executes fuel cut on the internal combustion engine, and calibrates a gain of the NOx sensor based on ammonia obtained from the urea added via the urea addition valve during execution of the fuel cut. The ammonia obtained from the urea added during execution of the fuel cut is used as standard gas to calibrate the gain of the NOx sensor.

Abstract: A method for manufacturing a gas sensor element includes (a) printing a wiring pattern of a conductive paste on a green sheet for an oxygen-ion conductive solid electrolyte; (b) laminating a plurality of green sheets including the green sheet having been subjected to step (a) and integrating the plurality of green sheets; (c) cutting out a plurality of element bodies from the laminated body; (d) baking the element body cut out by step (c); (e) heating the element body having been subjected to step (d), in a reducing atmosphere; (f) driving the element body having been subjected to step (e), in an inspection-purpose gas atmosphere for a predetermined time period; and (g) inspecting electrical characteristics of the element body having been subjected to step (f). The element body having passed the inspection of step (g) is assembled as a sensor element in a gas sensor.

Abstract: An exhaust as catalytic converter is laden with oxygen until it is saturated at least upstream of an exhaust as probe. A predefined first rich air/fuel ration is set in a combustion chamber of a cylinder. A first oxygen storage capacity value is determined as a function of the measurement signal of an exhaust as probe and the predefined first rich air/fuel ratio. The exhaust as catalytic converter is laden with oxygen until it is saturated. A predefined second rich air/fuel ration is set in the combustion chamber of the cylinder. A second oxygen storage capacity value is determined as a function of the measurement signal of the exhaust as probe and the predefined second rich air/fuel ration. A corrected oxygen storage capacity value is determined as a function of the first and second oxygen storage capacity values.

Abstract: A system for recycling helium carrier gas comprises: a bladder, the bladder interior fluidically configured so as to receive helium-bearing gas output from at least one of a split vent and a septum purge vent of a gas chromatograph; a compartment containing the bladder; a source of pressurized air or gas operable so as to supply pressurized air or gas into the compartment interior so as to compress the bladder containing the helium-bearing gas; a gas reservoir fluidically coupled to the bladder interior so as to receive the helium bearing gas from the compressed bladder interior; and at least one gas purification module configured so as to receive the helium-bearing gas from the gas reservoir and operable to remove contaminants from the helium-bearing gas, an output of the at least one gas purification module being fluidically coupled to a carrier gas inlet of the gas chromatograph.

Abstract: A carbon dioxide sensor comprising a first beam that includes a functionalized surface and a second beam that includes a functionalized surface such that reduced-drift differential sensing of carbon dioxide may be performed by monitoring changes in the resonant frequency of the first beam relative to the resonant frequency of second beam.

Abstract: A method (500, 600) is described for detecting a gas concentration of a gas from a gas mixture, a plurality of gas detectors (304, 402, 404) sensitive to the gas or one gas detector (304, 404) sensitive to the gas being used in different operating states for this detection, and the method (500, 600) includes a step of providing (502) the gas detector (304, 404), the gas detector (304, 404) having a first operating temperature (310). In a next step of the method (500, 600), the gas mixture is supplied (504) to the gas detector (304, 404), a gas concentration of the gas from the gas mixture being measured by the gas detector (304, 404) at the first operating temperature (310), and a first signal (202) characteristic of the measured gas concentration being provided.

Abstract: A sensor apparatus includes a metal oxide semiconductor (“MOS”) sensor with a gas-sensing surface normally having a first sensitivity to a first species of flammable gas and a second sensitivity to a second, different species of flammable gas. A selective sensitivity-enhancement layer is disposed on the gas-sensing surface such that the first sensitivity becomes increased and the second sensitivity remains substantially unchanged.

Abstract: A sensor apparatus includes a metal oxide semiconductor sensor and a housing having an internal chamber in which the sensor is disposed. The housing includes at least one window for the ingress of a gas into the internal chamber from an atmosphere exterior to the housing. A gas-selective barrier is disposed across the at least one window.

Abstract: Provided are a structure and operating method of a semiconductor gas sensor having low power consumption. The semiconductor gas sensor is adapted to adsorb gas to a low-dimensional semiconductor nanomaterial at room temperature, output a change in resistance of the low-dimensional semiconductor nanomaterial, apply power to a heater, desorb the gas adsorbed to the low-dimensional semiconductor nanomaterial, and return the resistance of the low-dimensional semiconductor nanomaterial back to initial resistance. The semiconductor gas sensor senses the gas at room temperature using the low-dimensional semiconductor nanomaterial having a high-sensitivity characteristic at room temperature, and drives the heater only when the adsorbed gas is desorbed. Thereby, it is possible to improve a gas sensing characteristic, reduce power consumption, and provide a rapid response speed.

Abstract: A method for determining the amount of fuel flow from a high pressure gas tank to the anode side of a fuel cell stack through pulsed injector. The anode sub-system pressure is measured just before the injector pulse and just after injector pulse and a difference between the pressures is determined. The difference between the pressures, the volume of the anode sub-system, the ideal gas constant, the anode sub-system temperature, the fuel consumed from the reaction in the fuel cell stack during the injection event and the fuel cross-over through membranes in the fuel cells of the fuel cell stack are used to determine the amount of hydrogen gas injected by the injector.

Abstract: An apparatus for testing a protective mask. The apparatus includes a testing unit for testing a protective mask. The testing unit includes a headform upon which a protective mask to be tested is mounted. The testing unit is configured to take a sample of the challenge from two different locations about the protective mask. The testing unit may also be configured to inflate and deflate a neck seal protective mask when mounted on the headform prior to performing a mask leakage test to eliminate or significantly reduce pockets or folds that may hide a leak.

Abstract: A vane pump has an upper casing, a lower casing, a rotor and a motor. First to fourth points are defined on an outer peripheral end of a lower flat surface of the lower casing. The first point is farthest from an intersection between an axis of a shaft of the motor and the lower flat surface. A suction passage passing through the third point and a discharge passage passing through the second point are formed between the upper casing and the lower casing. The fourth point is defined in a range from the third point to the first point. The lower flat surface is provided to incline with respect to the axis of the shaft of the motor such that the fourth point is farthest from a motor case of the motor among points on the outer peripheral end.

Abstract: A method involves inspecting/testing a refrigeration system. One or more conduits or other components cooperate with the compressor, heat rejection heat exchanger, expansion device, and heat absorption heat exchanger to define a refrigerant flowpath. The inspecting/testing method comprises placing a plurality of collars over respective joints along the refrigerant flowpath. The collars each define a space that may be exposed to one or more sensors. Based upon input from the sensors, the presence or absence of leaks at the joints is determined.

Abstract: An apparatus and a method for monitoring a ratio of at least two mixed components use a sensor for detecting taggant particles in one of the components of the mixed material after installation. The sensor is positioned adjacent a surface of the installed mixture and is connected to a control device for displaying an indication of a mixture ratio of the components below the surface. The control device also generates a profile of the mixture ratio of the installed mixed material versus a distance from the surface.

Abstract: The present disclosure relates to the treatment, e.g. reduction, of body fat mass levels for example in overweight and obese subjects. The present disclosure also relates to weight control in a subject where obesity should be avoided. Disclosed herein are methods of reducing body fat mass e.g reducing obesity or preventing weight gain and agents used in such methods whereby the agents inhibit a sulphur containing amino acid. Also included in the present disclosure include, without being limited to, methods for determining regimes for the treatment of obesity as well as other subject matter.

Abstract: According to the method of evaluating prostatic disease of the present invention, amino acid concentration data on concentration values of amino acids in blood collected from a subject to be evaluated is measured, and the state of prostatic disease including at least one of prostatic cancer and prostatic hypertrophy in the subject is evaluated based on the concentration value of at least one of Tau, Thr, Ser, Asn, Glu, Pro, Gly, Ala, Cit, ABA, Val, Met, Ile, Leu, Phe, His, Trp, Orn, Lys, and Cys2 contained in the measured amino acid concentration data of the subject.

Abstract: Disclosed herein is a cell for testing microbeads, used for testing microbeads each formed in a cylindrical shape having an upper surface and a lower surface opposite to and substantially parallel to each other and a side surface continuous with the upper and lower surfaces, at least one of the upper surface and the lower surface being provided with an identification pattern, the cell including: a support substrate; and a cover disposed opposite to the support substrate, wherein a space between the support substrate and the cover forms a containing space in which to dispose the microbeads, and the distance between the support substrate and the cover is greater than the thickness of the microbeads and smaller than twice the thickness of the microbeads.

Abstract: The invention provides a device for the gravimetric detection of particles in a fluid medium, comprising a flat electromechanical oscillator (1), means for supporting the oscillator, means (15a, 15b, 15c, 15d) for actuating said oscillator and, on either side of the plane of the oscillator (1), two cavities (3, 5) enabling the oscillator (1) to vibrate when it is activated by the actuation means (15a, 15b, 15c, 15d), characterized in that at least one of the two cavities (3, 5) forms an integral part of a channel (2, 4) for the passage of a fluid over at least one of the faces (1a, 1b) of the oscillator and in that said actuation means (15a, 15b, 15c, 15d) take the form of at least one electrode (15a, 15b, 15c, 15d) lying in the same plane as that of the electromechanical oscillator and at a defined distance (g) from the oscillator, so as to ensure that the oscillator vibrates in its plane.

Abstract: Methods and systems for using force measurements to determine the amount of material in a container and/or the rate at which material is discharged from a container are disclosed. A container for storing a desired material is positioned so that the center of gravity of the container shifts horizontally with changes in level of the material in the container. A plurality of load sensors are symmetrically arranged at a base of the container and are used to monitor the amount of materials in the container.

Abstract: The unevenness of the upper surface of a top flange of a wind turbine generator tower is adjusted by arranging shim plates on the upper surface of the top flange and by adjusting the thicknesses and/or number of the shim plates to be disposed at individual positions. First, the roughness levels of the upper surface of the top flange are measured at a plurality of measuring points in a state in which a nacelle of the wind turbine generator is not mounted on the tower, which is vertically erected. Next, the thicknesses and/or number of the shim plates to be disposed on the individual plurality of measuring points to adjust the unevenness of the upper surface of the top flange are determined in accordance with the measured roughness levels of the upper surface of the top flange.

Abstract: An improved method and computer system is provided, for analyzing the two- or three-dimensional movement of a fluid in an absorbent article that comprises fluid-swellable composite material, which comprises a fluid-swellable solid material, and that comprises void spaces in the fluid-swellable composite material, the fluid-swellable composite material being defined by a virtual two-dimensional or three-dimensional mesh, to determine the performance or property of at least one feature of the fluid-swellable composite material thereof, or the absorbent article, the method comprising: inputting one or more properties for the fluid-swellable (composite) material into a model and evaluating this to determine the performance of a feature of the absorbent article or fluid-swellable composite material thereof, the virtual model.

Abstract: A surface texture measuring device includes a rotation driving device configured to rotate a measured substance, a roughness detector including a stylus provided displaceably at a tip of a detector main body and at least one skid provided at the tip of the detector main body and in the proximity of the stylus and outputting displacement of the stylus based on the skid as an electric signal, and a detector driving device configured to drive a detector holder. The detector holder includes a guide member driven by the detector driving device, a slide member configured to hold the roughness detector and provided slidably in a displacement direction of the stylus to the guide member, and an urging member configured to urge the slide member so that the skid always comes in contact with the measurement face of the measured substance.

Abstract: A transducer assembly (100) for connecting a transducer (102) to a device, the transducer assembly comprising: a transducer mount (110) adapted to receive the transducer; and a clamp (120) comprising first and second jaws (122, 124), the first and second jaws being adapted to selectively clamp to a flange portion (106) of the device. The transducer mount (110) may comprise a housing (112), a resilient member (114) and first and second end walls (115, 116). The first end wall may be operatively connected to the device. The transducer (102) may be held within the housing and adjacent to the first end wall. The resilient member being disposed between the transducer and the second end wall.

Abstract: A method for testing a cooling system for use in a gas turbine engine control system is provided. The method includes connecting an inlet of the cooling system to a differential pressure sensor, connecting an outlet of the cooling system to the differential pressure sensor, and determining whether or not a difference in pressure exists between the inlet and outlet, wherein such a pressure difference is indicative of whether cooling fluid is flowing through the cooling system.

Abstract: A variator fault detection system for a continuously variable transmission is incorporated into a hydraulic control circuit that controls fluid pressure applied to a variator of the continuously variable transmission. The hydraulic control circuit for the variator includes a number of electrically-controlled shift valves and pressure control valves. Sensing devices are multiplexed to these valves to detect a number of different possible fault states relating to the variator shift valves and the variator pressure control valves.

Abstract: A tire testing device which can improve reliability in measurement of loss in tire is provided. The tire testing device can include a tire motor connected with the rotational shaft of the tire, a tire shaft torque meter for detecting torque applied to the rotational shaft of the tire, a roller on to which the tire is pressed to be contact with, a roller motor connected with the rotational shaft of the roller, and a roller shaft torque meter for detecting the torque applied to the rotational shaft of the roller. The device measures loss of power in tire from the difference in power of the tire obtained by adding the torque measured by the tire shaft torque meter and the difference in power of the roller obtained by adding the torque measured by the roller shaft torque meter.

Abstract: A piezoresistive sensor assembly is provided that has a flex circuit having at least one air flow aperture formed therein. A sensor die is coupled to an absolute support and the flex circuit. The sensor die has a diaphragm that deflects in response to air flow that flows through the air flow aperture and is incident on the diaphragm. The sensor die includes one or more gages positioned on or in the diaphragm.

Abstract: A method of wind tunnel measurement of airfoil, includes a step of providing a wind tunnel test apparatus. The wind tunnel test apparatus includes two walls, two supporting members, and two load measuring units. The method further includes steps of: coupling both ends of an airfoil model under test with the two supporting members, respectively; generating a flow of a fluid in the wind tunnel flow path; and measuring a load applied to the airfoil model by using the two load measuring units. A thin film member is stuck on each end of the airfoil model so that a part of the thin film member protrudes from the each end of the airfoil model along an outer circumference throughout an entire circumference. The thin film member has a strength at which the thin film member enables to endure a pressure of the fluid, and is formed of a material which is elastically deformable.

Abstract: The present invention relates to microelectromechanical systems (MEMS). In particular, the present invention relates to MEMS arrays for use in acoustics and other applications.

Abstract: A borehole logging tool includes a housing oriented along a longitudinal axis, and a centralizer assembly that positions the housing substantially at the center of the borehole. In one example, the centralizer assembly includes a plurality of centralizer arms radially extendable outward from the longitudinal axis. The borehole logging tool further includes a scanning head that rotates a plurality of scanning sensors axially within the borehole about the longitudinal axis. The scanning head further includes a plurality of linkage arms coupled to the plurality of scanning sensors such that the scanning sensors are radially extendable outward from the longitudinal axis. The borehole logging tool further includes an extension assembly adapted to substantially concurrently control the radial extension of the centralizer arms and the plurality of sensors.

Abstract: A fluid measurement device includes a fluid measurement unit which includes a plurality of fluid measurement sections configured to measure a measurement fluid introduced into a measurement chamber from the outside, each of the fluid measurement sections including a fluid measurement sensor on which the measurement fluid introduced into the measurement chamber acts. The fluid measurement devise includes a measurement controller which sequentially introduces the measurement fluid into each of the fluid measurement sections every set time shorter than a fluid measurement time required for one of the fluid measurement sections to conduct one fluid measurement, the measurement controller measuring the fluid to provide a time difference for each of the fluid measurement sections, and a central controller which accumulates fluid measurement data from the fluid measurement sensors and rapidly measures a change of the external measurement fluid.

Abstract: A lighting apparatus is disclosed. The lighting apparatus is capable of achieving improved aesthetics by irradiating mood lighting into a storage container and also, of functioning to display a variety of status information about the storage container to the outside and to sterilize the interior of the storage container.

Abstract: A system and method for measuring liquid levels is provided. The system includes a sensing device disposed within an enclosure comprising a liquid therein, the sensing device generates a raw signal indicative of a surface level of the liquid in the enclosure; and an programmable device circuit in signal communication with the sensing device, the programmable device circuit samples and processes the raw signal producing a variation in voltage at an output of the programmable device circuit, the variation in voltage emulates a variable resistor at the output of the programmable device circuit.

Abstract: A liquid level sensor employs a set of axially displaced magnetic sensing switches and a magnet on a float that may rise and fall on liquid level to activate and deactivate the switches. The switches and magnet are configured so that movement of the magnetic float activates a new switch before deactivation of an adjacent previously activated switch. An electronic circuit provides a signal based on the uppermost activated switch to provide a signal that is monotonic with liquid level. The design may be readily implemented using reed switches and a resistive ladder.

Abstract: A humidity sensing circuit with temperature compensation includes a wave producing module, a phase processing module, a sensing module and a detecting module. The wave producing module outputs a wave signal. The phase processing module outputs an oscillatory wave and an invert oscillatory wave according to the wave signal. The sensing module has a temperature sensor and a humidity sensor which are connected in series. The temperature sensor and the humidity sensor respectively receive the oscillatory wave and the invert oscillatory wave. The sensing module outputs a parameter signal according to the oscillatory wave and the invert oscillatory wave. The detecting module outputs a detection signal according to the parameter signal. Hence, the humidity sensing circuit with temperature compensation senses the temperature and humidity by the simple circuit design. Moreover, it is feasible for circuit design and application.

Abstract: The present disclosure provides a gravity gradiometer that comprises a detector for detecting a gravity gradient. The detector comprises at least one movable sensing element and that is arranged to generate a signal in response to a change in gravity gradient. The gravity gradiometer also comprises a support structure for supporting the detector in an aircraft and a component that is arranged to reduce transmission of an aircraft acceleration to the detector. The at least one movable sensing element and the support structure together are arranged to reduce an influence of the aircraft acceleration on the signal by a factor of at least 107 when the gravity gradiometer is airborne and exposed to the aircraft acceleration.

Abstract: A protruding portion of a rotational speed detecting unit which is attached to a stationary side seal unit which is fixed to a stationary member which protruding portion protrudes axially and outer circumferentially of the stationary member is formed into a shape which has projecting portions in an axial direction, whereby the protrusion to the axial direction is reduced without reducing a bending strength in the axial direction, as a result of which the rotational speed detecting unit is miniaturized in the axial direction. Further, reinforcement members are embedded in an interior of the protruding portion, whereby the rotational speed detecting unit is miniaturized further in the axial direction.

Abstract: A resonator element includes: drive beams including a first beam and a second beam that vibrate in torsional vibration modes and are elongated side by side in a first direction; support parts that couple one ends and the other ends of the first beam and the second beam; and detection arms elongated from the respective first beam and second beam in a second direction orthogonal to the first direction in a plan view, wherein, in a drive mode, the first beam and the second beam torsionally vibrate in opposite directions to each other, the respective detection arms vibrate in a normal direction of a plane containing the first direction and the second direction, and the detection arm elongated from the first beam and the detection arm elongated from the second beam vibrate in the same direction as each other.

Abstract: In order to provide a technology capable of suppressing degradation of measurement accuracy due to fluctuation of detection sensitivity of an MEMS by suppressing fluctuation in natural frequency of the MEMS caused by a stress, first, fixed portions 3a to 3d are displaced outward in a y-direction of a semiconductor substrate 2 by deformation of the semiconductor substrate 2. Since a movable body 5 is disposed in a state of floating above the semiconductor substrate 2, it is not affected and displaced by the deformation of the semiconductor substrate 2. Therefore, a tensile stress (+?1) occurs in the beam 4a and a compressive stress (??2) occurs in the beam 4b. At this time, in terms of a spring system made by combining the beam 4a and the beam 4b, increase in spring constant due to the tensile stress acting on the beam 4a and decrease in spring constant due to the compressive stress acting on the beam 4b are offset against each other.