Patents Issued in March 6, 2012
  • Patent number: 8129773
    Abstract: Disclosed herein are improved fin-type field effect transistor (FinFET) structures and the associated methods of manufacturing the structures. In one embodiment FinFET drive current is optimized by configuring the FinFET asymmetrically to decrease fin resistance between the gate and the source region and to decrease capacitance between the gate and the drain region. In another embodiment device destruction at high voltages is prevented by ballasting the FinFET. Specifically, resistance is optimized in the fin between the gate and both the source and drain regions (e.g., by increasing fin length, by blocking source/drain implant from the fin, and by blocking silicide formation on the top surface of the fin) so that the FinFET is operable at a predetermined maximum voltage.
    Type: Grant
    Filed: December 13, 2007
    Date of Patent: March 6, 2012
    Assignee: International Business Machines Corporation
    Inventor: Edward J. Nowak
  • Patent number: 8129774
    Abstract: In an EEPROM consisting of a NAND cell in which a plurality of memory cells are connected in series, the control gate voltage Vread of the memory cell in a block selected by the data read operation is made different from the each of the voltages Vsg1, Vsg2 of the select gate of the select transistor in the selected block so as to make it possible to achieve a high speed reading without bringing about the breakdown of the insulating film interposed between the select gate and the channel of the select transistor. The high speed reading can also be made possible in the DINOR cell, the AND cell, NOR cell and the NAND cell having a single memory cell connected thereto, if the control gate voltage of the memory cell is made different from the voltage of the select gate of the select transistor.
    Type: Grant
    Filed: July 9, 2010
    Date of Patent: March 6, 2012
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hiroshi Nakamura, Kenichi Imamiya
  • Patent number: 8129775
    Abstract: The semiconductor device has a stacked structure in which a tunnel oxide layer, a charge trapping layer, a blocking oxide layer, and a gate electrode are sequentially formed on a silicon substrate, wherein the blocking oxide layer includes a crystalline layer disposed adjacent to the charge trapping layer and an amorphous layer disposed adjacent to the gate electrode.
    Type: Grant
    Filed: December 3, 2009
    Date of Patent: March 6, 2012
    Assignee: Tokyo Electron Limited
    Inventors: Koji Akiyama, Hirokazu Higashijima, Tetsushi Ozaki, Tetsuya Shibata
  • Patent number: 8129776
    Abstract: A semiconductor device includes a memory cell array area, a peripheral circuit area on a periphery of the memory cell array area, and a boundary area having a specific width between the memory cell array area and the peripheral circuit area, the memory cell array area including a cell area including nonvolatile semiconductor memory cells, linear wirings extending from inside of the cell area to an area outside the cell area, and lower layer wirings in a lower layer than the linear wirings in the boundary area and electrically connected to the linear wirings, and wiring widths of the lower layer wirings being larger than widths of the linear wirings, the peripheral circuit area including a patterns electrically connected to the linear wirings via the lower layer wirings, the boundary area failing to be provided with the linear wirings and a wiring in same layer as the linear wirings.
    Type: Grant
    Filed: July 14, 2011
    Date of Patent: March 6, 2012
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Makoto Sakuma, Takuya Futatsuyama
  • Patent number: 8129777
    Abstract: In a method of manufacturing a semiconductor device, an active channel pattern is formed on a substrate. The active channel pattern includes preliminary gate patterns and single crystalline silicon patterns that are alternately stacked with each other. A source/drain layer is formed on a sidewall of the active channel pattern. Mask pattern structures including a gate trench are formed on the active channel pattern and the source/drain layer. The patterns are selectively etched to form tunnels. The gate trench is then filled with a gate electrode. The gate electrode surrounds the active channel pattern. The gate electrode is protruded from the active channel pattern. The mask pattern structures are then removed. Impurities are implanted into the source/drain regions to form source/drain regions. A silicidation process is carried out on the source/drain regions to form a metal silicide layer, thereby completing a semiconductor device having a MOS transistor.
    Type: Grant
    Filed: February 23, 2010
    Date of Patent: March 6, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Min-Sang Kim, Sung-Young Lee, Sung-Min Kim, Eun-Jung Yun, In-Hyuk Choi
  • Patent number: 8129778
    Abstract: Semiconductor devices and methods for making such devices that are especially suited for high-frequency applications are described. The semiconductor devices combine a SIT (or a junction field-effect transistor [JFET]) architecture with a PN super-junction structure. The SIT architecture can be made using a trench formation containing a gate that is sandwiched between thick dielectric layers. While the gate is vertically sandwiched between the two isolating regions in the trench, it is also connected to a region of one conductivity type of the super-junction structure, thereby allowing control of the current path of the semiconductor device. Such semiconductor devices have a lower specific resistance and capacitance relative to conventional planar gate and recessed gate SIT semiconductor devices. Other embodiments are described.
    Type: Grant
    Filed: December 2, 2009
    Date of Patent: March 6, 2012
    Assignee: Fairchild Semiconductor Corporation
    Inventors: Suku Kim, James J. Murphy, Gary Dolny
  • Patent number: 8129779
    Abstract: A semiconductor device according to the present invention includes a semiconductor layer. A first conductivity type region is formed on a base layer portion of the semiconductor layer. A body region of a second conductivity type is formed on the semiconductor layer to be in contact with the first conductivity type region. A trench in which a gate electrode is embedded through a gate insulating film is formed on the semiconductor layer. The trench penetrates through the body region, so that a deepest portion thereof reaches the first conductivity type region. A source region of the first conductivity type is formed on a surface layer portion of the semiconductor layer around the trench. The gate insulating film includes a thick-film portion having a relatively large thickness on a bottom surface of the trench.
    Type: Grant
    Filed: September 2, 2008
    Date of Patent: March 6, 2012
    Assignee: Rohm Co., Ltd.
    Inventor: Naoki Izumi
  • Patent number: 8129780
    Abstract: The present invention provides a technique capable of attaining an improvement in current detection accuracy in a trench gate type power MISFET equipped with a current detection circuit. Inactive cells are disposed so as to surround the periphery of a sense cell. That is, the inactive cell is provided between the sense cell and an active cell. All of the sense cell, active cell and inactive cells are respectively formed of a trench gate type power MISFET equipped with a dummy gate electrode. At this time, the depth of each trench extends through a channel forming region and is formed up to the deep inside (the neighborhood of a boundary with a semiconductor substrate) of an n-type epitaxial layer. Further, a p-type semiconductor region is provided at a lower portion of each trench. The p-type semiconductor region is formed so as to contact the semiconductor substrate.
    Type: Grant
    Filed: November 25, 2008
    Date of Patent: March 6, 2012
    Assignee: Renesas Electronics Corporation
    Inventors: Atsushi Shinbori, Yoshito Nakazawa
  • Patent number: 8129781
    Abstract: Disclosed is a method of forming memory devices employing halogen ion implantation and diffusion processes. In one illustrative embodiment, the method includes forming a plurality of word line structures above a semiconducting substrate, each of the word line structures comprising a gate insulation layer, performing an LDD ion implantation process to form LDD doped regions in the substrate between the word line structures, performing a halogen ion implantation process to implant atoms of halogen into the semiconducting substrate between the word line structures, and performing at least one anneal process to cause at least some of the atoms of halogen to diffuse into the gate insulation layers on adjacent word line structures.
    Type: Grant
    Filed: September 28, 2010
    Date of Patent: March 6, 2012
    Assignee: Micron Technology, Inc.
    Inventors: Kirk D Prall, Behnam Moradi, Seiichi Aritome, Di Li, Chris Larsen
  • Patent number: 8129782
    Abstract: A high-voltage transistor is provided with a well of a first conductivity type, which is arranged in a substrate (10) of a second conductivity type, with a source (14), a drain (12), and a gate electrode (18) above a channel region (KN, KP) formed between the source and the drain, wherein several staggered and nested wells (11, 13, 15, 17) of the same conductivity type extend from the source (14) or the drain (12) into the substrate (10) and wherein the doping concentration (log c) of the wells essentially decreases and is smoothed from the substrate surface with increasing depth (T) and also laterally. In this way, field-strength increases and also unintentional breakdown are prevented. Furthermore, a production method is specified.
    Type: Grant
    Filed: September 20, 2005
    Date of Patent: March 6, 2012
    Assignee: austriamicrosystems AG
    Inventor: Martin Knaipp
  • Patent number: 8129783
    Abstract: A semiconductor device with high breakdown voltage and low on-resistance is provided. An embodiment comprises a substrate having a buried layer in a portion of the top region of the substrate in order to extend the drift region. A layer is formed over the buried layer and the substrate, and high-voltage N-well and P-well regions are formed adjacent to each other. Field dielectrics are located over portions of the high-voltage N-wells and P-wells, and a gate dielectric and a gate conductor are formed over the channel region between the high-voltage P-well and the high-voltage N-well. Source and drain regions for the transistor are located in the high-voltage P-well and high-voltage N-well. Optionally, a P field ring is formed in the N-well region under the field dielectric. In another embodiment, a lateral power superjunction MOSFET with partition regions located in the high-voltage N-well is manufactured with an extended drift region.
    Type: Grant
    Filed: December 5, 2008
    Date of Patent: March 6, 2012
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tsung-Yi Huang, Puo-Yu Chiang, Ruey-Hsin Liu, Shun-Liang Hsu
  • Patent number: 8129784
    Abstract: The invention improves the performance of a semiconductor device. A metal silicide film is formed by a silicide process on a gate electrode and an n+-type source region of an LDMOSFET, and no such metal silicide film is formed on an n?-type offset drain region, an n-type offset drain region, and an n+-type drain region. A side wall spacer comprising a silicon film is formed via an insulating film on the side wall of the gate electrode over the drain side thereof, and a field plate electrode is formed by this side wall spacer. The field plate electrode does not extend above the gate electrode, and a metal silicide film is formed over the entire upper surface of the gate electrode in the silicide process.
    Type: Grant
    Filed: March 26, 2009
    Date of Patent: March 6, 2012
    Assignee: Renesas Electronics Corporation
    Inventors: Makoto Hatori, Yutaka Hoshino
  • Patent number: 8129785
    Abstract: A semiconductor device according to the present invention includes: a semiconductor layer of a first conductivity type; an annular deep trench penetrating the semiconductor layer in the depth direction to surround an element forming region; a drain region of a second conductivity type formed in a surface layer portion of the semiconductor layer in the element forming region; a drift region of the second conductivity type formed in the surface layer portion of the semiconductor layer to come into contact with the drain region in the element forming region; a body region of the first conductivity type formed in the surface layer portion of the semiconductor layer at an interval from the drift region in the element forming region; a source region of the second conductivity type formed in a surface layer portion of the body region; and a first high-concentration buried region, formed in the semiconductor layer between a portion opposed to the source region in the depth direction and the deep trench, having a high
    Type: Grant
    Filed: September 26, 2008
    Date of Patent: March 6, 2012
    Assignee: Rohm Co., Ltd.
    Inventors: Naoki Izumi, Tomoyasu Sada
  • Patent number: 8129787
    Abstract: A method and apparatus for use in improving the linearity characteristics of MOSFET devices using an accumulated charge sink (ACS) are disclosed. The method and apparatus are adapted to remove, reduce, or otherwise control accumulated charge in SOI MOSFETs, thereby yielding improvements in FET performance characteristics. In one exemplary embodiment, a circuit having at least one SOI MOSFET is configured to operate in an accumulated charge regime. An accumulated charge sink, operatively coupled to the body of the SOI MOSFET, eliminates, removes or otherwise controls accumulated charge when the FET is operated in the accumulated charge regime, thereby reducing the nonlinearity of the parasitic off-state source-to-drain capacitance of the SOI MOSFET. In RF switch circuits implemented with the improved SOI MOSFET devices, harmonic and intermodulation distortion is reduced by removing or otherwise controlling the accumulated charge when the SOI MOSFET operates in an accumulated charge regime.
    Type: Grant
    Filed: March 22, 2011
    Date of Patent: March 6, 2012
    Assignee: Peregrine Semiconductor Corporation
    Inventors: Christopher N. Brindle, Michael A. Stuber, Dylan J. Kelly, Clint L. Kemerling, George P. Imthurn, Robert B. Welstand, Mark L. Burgener
  • Patent number: 8129788
    Abstract: A protection circuit and method are provided for protecting semiconductor devices from electrostatic discharge (ESD). Generally, the ESD protection circuit includes a silicon controlled rectifier (SCR) formed in a substrate and configured to transfer charge from a protected node to a negative power supply, VSS, during an ESD event, and a trigger device to activate transfer of charge by the SCR when a voltage on the protected node reaches a predetermined trigger voltage. The trigger device includes a gated-diode and MOS capacitor formed in a well formed in the substrate, the trigger device configured to inject electrons into the well during charging of the MOS capacitor, forward biasing a node of the SCR, hence allowing fast triggering of the SCR device. The trigger voltage can be set independent of a holding voltage by adjusting the length of the well and area of the capacitor. Other embodiments are also disclosed.
    Type: Grant
    Filed: January 22, 2007
    Date of Patent: March 6, 2012
    Assignee: Cypress Semiconductor Corporation
    Inventors: Andrew Walker, Helmut Puchner
  • Patent number: 8129789
    Abstract: A semiconductor chip includes a semiconductor body having an upper surface. At least one power semiconductor component is integrated in the semiconductor chip together with other circuitry. Two or more vertically spaced metallization layers are arranged on the surface of the semiconductor body. The top metallization layer includes terminals establishing an electrical connection to load terminals of the power semiconductor component. A current measurement resistor is formed by a portion of the top metallization layer for sensing a load current of the power semiconductor component. A temperature measurement resistor is formed by a portion of at least one of the vertically spaced metallization layers, electrically isolated from current measurement resistor but thermally coupled thereto such that the current measurement resistor and the temperature measurement resistor have the same temperature.
    Type: Grant
    Filed: May 28, 2010
    Date of Patent: March 6, 2012
    Assignee: Infineon Technologies AG
    Inventors: Alexander Mayer, Guenter Herzele, Andreas Tschmelitsch, Matthias Kogler
  • Patent number: 8129790
    Abstract: A structure and method for forming SRAMs on HOT substrates with STI is described. Logic circuits may also be fabricated on the same chip with some devices on the SOI regions and other devices on the SOI regions.
    Type: Grant
    Filed: March 13, 2009
    Date of Patent: March 6, 2012
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Gaku Sudo
  • Patent number: 8129791
    Abstract: There is provided a semiconductor device that includes: a transistor having a gate electrode, a source region, and a drain region; a first inter-layer insulation film covering the transistor; a first contact plug formed penetrating through the first inter-layer insulation film and connected to either the source region or the drain region; a second inter-layer insulation film covering the first contact plug; a groove extending in the second inter-layer insulation film in a same direction as an extending direction of the gate electrode and exposing a top surface of the first contact plug at a bottom thereof; a second contact plug connected to the first contact plug and formed in the groove; and a wiring pattern extending on the second inter-layer insulation film so as to traverse the groove and integrated with the second contact plug.
    Type: Grant
    Filed: August 21, 2009
    Date of Patent: March 6, 2012
    Assignee: Elpida Memory, Inc.
    Inventor: Atsushi Maekawa
  • Patent number: 8129792
    Abstract: A semiconductor device includes n- and p-type semiconductor regions separately formed on a substrate, an interlayer insulator formed on the substrate and having first and second trenches formed to reach the n- and p-type regions. There are further included first and second gate insulators formed inside of the first and second trenches, a first metal layer formed inside of the first trench via the first gate insulator, a second metal layer formed in a thickness of 1 monolayer or more and 1.5 nm or less inside of the second trench via the second gate insulator, a third metal layer formed on the second metal layer and containing at least one of a simple substance, a nitride, a carbide and an oxide of at least one metal element of alkaline earth metal elements and group III elements, first and second source/drain regions formed on the n- and p-type regions.
    Type: Grant
    Filed: September 18, 2008
    Date of Patent: March 6, 2012
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Reika Ichihara, Yoshinori Tsuchiya, Hiroki Tanaka, Masahiko Yoshiki, Masato Koyama
  • Patent number: 8129793
    Abstract: A first exemplary aspect of an exemplary embodiment of the present invention is a semiconductor integrated device comprising a semiconductor substrate, a first impurity layer of a first conductivity type formed in the semiconductor substrate, a second impurity layer of a second conductivity type formed on the first impurity layer, a first well of the first conductivity type formed on the second impurity layer and supplied with potential from the first impurity layer via an impurity region of the first conductivity type selectively formed in a part of the second impurity layer, and a second well of the second conductivity type formed on the second impurity layer and supplied with potential from the second impurity layer, wherein the impurity concentrations of the first impurity layer and the impurity region are higher than that of the first well, and the impurity concentration of the second impurity layer is higher than that of the second well.
    Type: Grant
    Filed: December 2, 2008
    Date of Patent: March 6, 2012
    Assignee: Renesas Electronics Corporation
    Inventor: Hitoshi Okamoto
  • Patent number: 8129794
    Abstract: A semiconductor device includes a first MIS transistor, and a second MIS transistor having a threshold voltage higher than that of the first MIS transistor. The first MIS transistor includes a first gate insulating film made of a high-k insulating film formed on a first channel region, and a first gate electrode having a first conductive portion provided on and contacting the first gate insulating film and a second conductive portion. The second MIS transistor includes a second gate insulating film made of the high-k insulating film formed on a second channel region, and a second gate electrode having a third conductive portion provided on and contacting the second gate insulating film and a fourth conductive portion. The third conductive portion has a film thickness smaller than that of the first conductive portion, and is made of the same composition material as that of the first conductive portion.
    Type: Grant
    Filed: January 22, 2009
    Date of Patent: March 6, 2012
    Assignee: Panasonic Corporation
    Inventor: Junji Hirase
  • Patent number: 8129795
    Abstract: In a metal gate replacement process, strain may be selectively induced in the channels of NMOS and PMOS transistors. For example, a material having a higher coefficient of thermal expansion than the substrate may be used to form the gate electrodes of PMOS transistors. A material with a lower coefficient of thermal expansion than that of the substrate may be used to form the gate electrodes of NMOS transistors.
    Type: Grant
    Filed: January 26, 2011
    Date of Patent: March 6, 2012
    Assignee: Intel Corporation
    Inventors: Suman Datta, Jack Kavalieros, Mark L. Doczy, Matthew V. Metz, Justin K. Brask, Robert S. Chau, Brian S. Doyle
  • Patent number: 8129796
    Abstract: There is provided a high-integrated complementary metal-oxide semiconductor static random-access memory including an inverter.
    Type: Grant
    Filed: March 23, 2011
    Date of Patent: March 6, 2012
    Assignee: Unisantis Electronics Singapore Pte. Ltd.
    Inventors: Fujio Masuoka, Hiroki Nakamura
  • Patent number: 8129797
    Abstract: Embedded DRAM MOSFETs including an array NFET having a gate stack comprising a high-K dielectric layer upon which is deposited a first metal oxide layer (CD1) then a conductive layer (TiN), and then a polysilicon layer (Poly). A logic PFET having substantially the same gate stack as the array NFET, and a logic NFET having a third gate stack comprising the high-K dielectric layer upon which is deposited the conductive layer (TiN) and then the polysilicon layer (Poly), without the first metal oxide layer (CD1) between the high-K dielectric layer and the conductive layer (TiN). The array NFET may therefore have a higher gate stack work function than the logic NFET, but substantially the same gate stack work function as the logic PFET.
    Type: Grant
    Filed: June 18, 2008
    Date of Patent: March 6, 2012
    Assignee: International Business Machines Corporation
    Inventors: Xiangdong Chen, Herbert L. Ho, Geng Wang
  • Patent number: 8129798
    Abstract: A semiconductor device includes a circuit comprising a first transistor in a first Fin; a power supply circuit in a second Fin, the power supply circuit comprising a second transistor connected between the circuit and a power supply line; and a substrate contact electrically connected to the semiconductor substrate and configured to apply a substrate voltage to a substrate, wherein a width of the first Fin in a cross-section of the first Fin perpendicular to a channel length direction of the first transistor is equal to or smaller than a twofold of a largest depletion layer width of a depletion layer formed in a channel part of the first transistor, and a width of the second Fin in a cross-section of the second Fin perpendicular to a channel length direction of the second transistor is larger than a twofold of a largest depletion layer width of a depletion layer in a channel of the second transistor.
    Type: Grant
    Filed: December 3, 2009
    Date of Patent: March 6, 2012
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Satoshi Inaba
  • Patent number: 8129799
    Abstract: A field-effect transistor (142) includes a lowly p-doped region 110 formed on a surface of a substrate (102), an n-doped drain region 112 and n-doped source region 114 arranged on a surface of the lowly p-doped region 110, and a device isolation insulating film 132 and device isolation insulating film 134. Here, the device isolation insulating film 132 is formed greater in film thickness than the device isolation insulating film 134; and in the n-doped source region 114, the peak concentration section having a highest dopant concentration is formed in a deeper position than in the n-doped drain region 112.
    Type: Grant
    Filed: September 29, 2009
    Date of Patent: March 6, 2012
    Assignee: Renesas Electronics Corporation
    Inventor: Hiroki Fujii
  • Patent number: 8129800
    Abstract: Gate-all-around integrated circuit devices include first and second source/drain regions on an active area of an integrated circuit substrate. The first and second source/drain regions form p-n rectifying junctions with the active area. A channel region extends between the first and second source/drain regions. An insulated gate electrode surrounds the channel region.
    Type: Grant
    Filed: March 13, 2006
    Date of Patent: March 6, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Eun-jung Yun, Sung-young Lee, Min-sang Kim, Sung-min Kim
  • Patent number: 8129801
    Abstract: A discrete stress isolation apparatus for a Micro Electro-Mechanical System (MEMS) inertial sensor device having a mechanism die and a package. A capacitive device mechanism is formed in a substrate layer positioned between the mechanism die and package substrate. A discrete stress isolation structure is formed in the same substrate layer with but physically separated from the capacitive device mechanism. The discrete stress isolation structure is interposed between the mechanism die and the package substrate and provides the mechanical and electrical attachment therebetween.
    Type: Grant
    Filed: January 6, 2006
    Date of Patent: March 6, 2012
    Assignee: Honeywell International Inc.
    Inventor: Mark H. Eskridge
  • Patent number: 8129802
    Abstract: In the manufacturing technology of an integrated MEMS in which a semiconductor integrated circuit (CMOS or the like) and a micro machine are monolithically integrated on a semiconductor substrate, a technology capable of manufacturing the integrated MEMS without using a special process different from the normal manufacturing technology of a semiconductor integrated circuit is provided. A MEMS structure is formed together with an integrated circuit by using the CMOS integrated circuit process. For example, when forming an acceleration sensor, a structure composed of a movable mass, an elastic beam and a fixed beam is formed by using the CMOS interconnect technology. Thereafter, an interlayer dielectric and the like are etched by using the CMOS process to form a cavity. Then, fine holes used in the etching are sealed with a dielectric.
    Type: Grant
    Filed: July 2, 2008
    Date of Patent: March 6, 2012
    Assignee: Hitachi, Ltd.
    Inventors: Hiroshi Fukuda, Tsukasa Fujimori, Natsuki Yokoyama, Yuko Hanaoka, Takafumi Matsumura
  • Patent number: 8129803
    Abstract: A micromachined microphone is formed from a silicon or silicon-on-insulator (SOI) wafer. A fixed sensing electrode for the microphone is formed from a top silicon layer of the wafer. Various polysilicon microphone structures are formed above a front side of the top silicon layer by depositing at least one oxide layer, forming the structures, and then removing a portion of the oxide underlying the structures from a back side of the top silicon layer through trenches formed through the top silicon layer. The trenches allow sound waves to reach the diaphragm from the back side of the top silicon layer. In an SOI wafer, a cavity is formed through a bottom silicon layer and an intermediate oxide layer to expose the trenches for both removing the oxide and allowing the sound waves to reach the diaphragm. An inertial sensor may be formed on the same wafer, with various inertial sensor structures formed at substantially the same time and using substantially the same processes as corresponding microphone structures.
    Type: Grant
    Filed: July 16, 2010
    Date of Patent: March 6, 2012
    Assignee: Analog Devices, Inc.
    Inventors: John R. Martin, Timothy J. Brosnihan, Craig Core, Thomas Kieran Nunan, Jason Weigold, Xin Zhang
  • Patent number: 8129804
    Abstract: An electronic device includes a substrate, a functional structural body formed on the substrate and a covering structure for defining a cavity part having the functional structural body disposed therein, wherein the covering structure is provided with a side wall provided on the substrate and comprising an interlayer insulating layer surrounding the cavity part and a wiring layer; a first covering layer covering an upper portion of the cavity part and having an opening penetrating through the cavity part and composed of a laminated structure including a corrosion-resistant layer; and a second covering layer for closing the opening.
    Type: Grant
    Filed: June 24, 2011
    Date of Patent: March 6, 2012
    Assignee: Seiko Epson Corporation
    Inventors: Shogo Inaba, Akira Sato
  • Patent number: 8129805
    Abstract: A method of fabricating a microelectromechanical system (MEMS) device includes providing a semiconductor substrate having a semiconductor layer and an interconnect structure. A passivation layer and a photoresist layer are formed over the interconnect structure and a plurality of openings are formed in the photoresist layer to expose portions of the passivation layer. The passivation layer exposed by the openings and the interconnect structure thereunder are removed, forming a plurality of first trenches. The semiconductor layer exposed by the first trenches is removed, forming a plurality of second trenches in the semiconductor layer. An upper capping substrate is provided over the passivation layer, forming a first composite substrate. The semiconductor layer in the first composite substrate is thinned and portions of the thinned semiconductor layer are etched to form a third trench, wherein a suspended micromachined structure is formed in a region between the first, second and third trenches.
    Type: Grant
    Filed: April 14, 2010
    Date of Patent: March 6, 2012
    Assignee: Richwave Technology Corp.
    Inventor: Tsyr-Shyang Liou
  • Patent number: 8129806
    Abstract: A magnetic memory device includes a magnetic tunnel junction (MTJ) structure and an electrode embedded in a dielectric structure. The MTJ structure includes a free layer. The electrode is formed of silicon-germanium and is electrically connected to the MTJ. The electrode heats the free layer to reduce the coercive force of the free layer to reduce a critical current density.
    Type: Grant
    Filed: January 12, 2010
    Date of Patent: March 6, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Kyungtae Nam, Sukhun Choi, Jangeun Lee, Sechung Oh, Junho Jeong
  • Patent number: 8129807
    Abstract: An electro-optical device includes a semiconductor layer including a channel region having a channel length along one of a first direction and a second direction, a source region having a source length along the second direction and electrically connected to a data line, a drain region having a drain length including a portion along the first direction and electrically connected to a pixel electrode, and a junction region formed between the channel region and the drain region, and bent in the drain region in plan view; a gate electrode including a main body portion facing the channel region with a gate insulating film interposed therebetween and an enclosure portion including an L-shaped portion enclosing the junction region along the portion bent in the drain region; and a sidewall portion rising or falling from the enclosure portion and including a portion arranged along the side of the second junction region.
    Type: Grant
    Filed: September 24, 2009
    Date of Patent: March 6, 2012
    Assignee: Seiko Epson Corporation
    Inventor: Masashi Nakagawa
  • Patent number: 8129809
    Abstract: Disclosed are an image sensor and a manufacturing method thereof. The image sensor includes a circuit layer on a first surface of a semiconductor substrate, a metal interconnection layer on the circuit layer, trenches formed in a second surface of the semiconductor substrate along a boundary of a pixel, and a light blocking layer in the trenches. The backside illumination type image sensor according to the embodiment has a light blocking structure at a rear surface of the semiconductor substrate, thereby improving sensing efficiency while inhibiting interference between adjacent pixels.
    Type: Grant
    Filed: December 15, 2009
    Date of Patent: March 6, 2012
    Assignee: Dongbu Hitek Co., Ltd.
    Inventor: Hoon Jang
  • Patent number: 8129810
    Abstract: A vertically-integrated image sensor is proposed with the performance characteristics of single crystal silicon but with the area coverage and cost of arrays fabricated on glass. The image sensor can include a backplane array having readout elements implemented in silicon-on-glass, a frontplane array of photosensitive elements vertically integrated above the backplane, and an interconnect layer disposed between the backplane array and the image sensing array. Since large area silicon-on-glass backplanes are formed by tiling thin single-crystal silicon layers cleaved from a thick silicon wafer side-by-side on large area glass gaps between the tiled silicon backplane would normally result in gaps in the image captured by the array. Therefore, embodiments further propose that the pixel pitch in both horizontal and vertical directions of the frontplane be larger than the pixel pitch of the backplane, with the pixel pitch difference being sufficient that the frontplane bridges the gap between backplane tiles.
    Type: Grant
    Filed: June 19, 2009
    Date of Patent: March 6, 2012
    Assignee: Carestream Health, Inc.
    Inventor: Timothy J. Tredwell
  • Patent number: 8129811
    Abstract: Integrated circuits having complementary metal-oxide semiconductor (CMOS) and photonics circuitry and techniques for three-dimensional integration thereof are provided. In one aspect, a three-dimensional integrated circuit comprises a bottom device layer and a top device layer. The bottom device layer comprises a digital CMOS circuitry layer; and a first bonding oxide layer adjacent to the digital CMOS circuitry layer. The top device layer comprises a substrate; an analog CMOS and photonics circuitry layer formed in a silicon-on-insulator (SOI) layer adjacent to the substrate, the SOI layer having a buried oxide (BOX) with a thickness of greater than or equal to about one micrometer; and a second bonding oxide layer adjacent to a side of the analog CMOS and photonics circuitry layer opposite the substrate. The bottom device layer is bonded to the top device layer by an oxide-to-oxide bond between the first bonding oxide layer and the second bonding oxide layer.
    Type: Grant
    Filed: April 16, 2011
    Date of Patent: March 6, 2012
    Assignee: International Business Machines Corporation
    Inventors: Solomon Assefa, Kuan-Neng Chen, Steven J. Koester, Yuri A. Vlasov
  • Patent number: 8129812
    Abstract: In general, the present invention discloses at least one trench isolation region formed in a semiconductor substrate to electrically and/or optically isolate at least one active region from another active region. The at least one trench isolation region comprises a bottom portion and first and second trench sidewalls. At least one trench sidewall is adjacent a doped region. The at least one sidewall adjacent a doped region has a higher impurity dopant concentration than impurity doped regions surrounding the at least one trench isolation region.
    Type: Grant
    Filed: June 9, 2006
    Date of Patent: March 6, 2012
    Assignee: Aptina Imaging Corporation
    Inventor: Joohyun Jin
  • Patent number: 8129813
    Abstract: The present invention relates to an optoelectronic sensor for 5 demodulating a modulated photon flux (50), and to a measuring device, in particular for 3D distance measurement, having at least one optoelectronic sensor of this type. The optoelectronic sensor has at least two collecting zones 10 introduced in a semiconductor region (10), which collecting zones are for example diffused into the semiconductor region and doped inversely with respect to the semiconductor region (10). The collecting zones serve for collecting and tapping off minority carriers generated upon penetration of a modulated photon flux (50). Furthermore, at least two control zones are introduced in the semiconductor region (10), which control zones generate a drift field in a manner dependent on a control voltage that can be applied to the control zones, the control zones being of the same doping type as the semiconductor region (10).
    Type: Grant
    Filed: July 28, 2004
    Date of Patent: March 6, 2012
    Assignee: IC-Haus GmbH
    Inventor: Manfred Herz
  • Patent number: 8129814
    Abstract: An integrated circuit includes a Schottky diode having a cathode defined by an n-type semiconductor region, an anode defined by a cobalt silicide region, and a p-type region laterally annularly encircling the cobalt silicide region. The resulting p-n junction forms a depletion region under the Schottky junction that reduces leakage current through the Schottky diodes in reverse bias operation. An n+-type contact region is laterally separated by the p-type region from the first silicide region and a second cobalt silicide region is formed in the n-type contact region. The silicided regions are defined by openings in a silicon blocking dielectric layer. Dielectric material is left over the p-type region. The p-type region may be formed simultaneously with source/drain regions of a PMOS transistor.
    Type: Grant
    Filed: April 12, 2011
    Date of Patent: March 6, 2012
    Assignee: Texas Instruments Incorporated
    Inventors: Sameer Prakash Pendharkar, Eugen Pompiliu Mindricelu
  • Patent number: 8129815
    Abstract: A high-voltage device structure comprises a resistor coupled to a tap transistor that includes a JFET in a configuration wherein a voltage provided at a terminal of the JFET is substantially proportional to an external voltage when the external voltage is less than a pinch-off voltage of the JFET. The voltage provided at the terminal being substantially constant when the external voltage is greater than the pinch-off voltage. One end of the resistor is substantially at the external voltage when the external voltage is greater than the pinch-off voltage. When the external voltage is negative, the resistor limits current injected into the substrate. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure.
    Type: Grant
    Filed: August 20, 2009
    Date of Patent: March 6, 2012
    Assignee: Power Integrations, Inc
    Inventors: Sujit Banerjee, Vijay Parthasarathy
  • Patent number: 8129816
    Abstract: A semiconductor device including a semiconductor substrate; an element isolation region formed in the substrate including trenches formed at a first depth and being filled with an element isolation insulating film; an element forming region formed on the substrate and being surrounded by the trenches; a gate electrode formed along a first direction on the element forming region via a gate insulating film, the gate electrode extending over the element insulating film filled the trenches extending along a second direction; a source/drain region having a second depth less than the first depth formed in the element forming region beside the gate electrode and having an exposed surface exposed to a trench sidewall; wherein the upper surface of the element isolation insulating film exclusive of a portion underlying the gate electrode is located at a third depth greater than the second depth and less than the first depth.
    Type: Grant
    Filed: June 19, 2008
    Date of Patent: March 6, 2012
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Koichi Matsuno
  • Patent number: 8129817
    Abstract: An integrated circuit structure includes a semiconductor substrate of a first conductivity type; and a depletion region in the semiconductor substrate. A deep well region is substantially enclosed by the depletion region, wherein the deep well region is of a second conductivity type opposite the first conductivity type. The depletion region includes a first portion directly over the deep well region and a second portion directly under the deep well region. An integrated circuit device is directly over the depletion region.
    Type: Grant
    Filed: December 31, 2008
    Date of Patent: March 6, 2012
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chewn-Pu Jou, Ho-Hsiang Chen
  • Patent number: 8129818
    Abstract: The present invention is a power device includes, a first conductive type semiconductor substrate, a second conductive type base region formed on a surface of the semiconductor substrate, a second conductive type collector region formed on a rear surface of the semiconductor substrate, a first conductive type emitter region formed on a surface of the base region, a trench gate formed via a gate insulating film in a first trench groove formed in the base region so as to penetrate the emitter region, a dent formed in the base region in proximity to the emitter region, a second conductive type contact layer formed on an inner wall of the dent, having a higher dopant density than that of the base region, a dummy trench formed via a dummy trench insulating film in a second trench groove formed at a bottom of the dent, and an emitter electrode electrically connected to the emitter region, the contact layer and the dummy trench, wherein the trench gate and the dummy trench reach the semiconductor substrate.
    Type: Grant
    Filed: October 14, 2008
    Date of Patent: March 6, 2012
    Assignee: Mitsubishi Electric Corporation
    Inventors: Shigeo Tooi, Tetsujiro Tsunoda
  • Patent number: 8129819
    Abstract: A layout of a cell of a semiconductor device is disclosed to include a diffusion level layout including a plurality of diffusion region layout shapes, including p-type and n-type diffusion regions. The layout of the cell also includes a gate electrode level layout is defined to include a number of linear-shaped layout features placed to extend in only a first parallel direction. Each of the number of the linear-shaped layout features within the gate electrode level layout of the restricted layout region is rectangular-shaped. Linear-shaped layout features within the gate electrode level layout extend over one or more of the p-type and/or n-type diffusion regions to form PMOS and NMOS transistor devices. A number of the PMOS transistor devices is equal to a number of the NMOS transistor devices in the cell.
    Type: Grant
    Filed: September 25, 2009
    Date of Patent: March 6, 2012
    Assignee: Tela Innovations, Inc.
    Inventors: Scott T. Becker, Michael C. Smayling
  • Patent number: 8129820
    Abstract: A bipolar transistor for semiconductor device has a collector region having a first conductivity type disposed on a surface of a semiconductor substrate having the first conductivity type. A base region having a second conductivity type is disposed in the collector region. An emitter region having the first conductivity type is disposed in the base region. A high concentration first conductivity type region for a collector electrode is disposed in the collector region. A high concentration second conductivity type region for a base electrode is disposed in the base region. The high concentration first conductivity type region for a collector electrode and the high concentration second conductivity type region for a base electrode contact directly with each other so that the collector region and the base region have a same potential.
    Type: Grant
    Filed: August 27, 2008
    Date of Patent: March 6, 2012
    Assignee: Seiko Instruments Inc.
    Inventors: Hideo Yoshino, Hisashi Hasegawa
  • Patent number: 8129821
    Abstract: A semiconductor device and a method for fabricating a semiconductor device involve a semiconductor layer that includes a first material and a second material. The first and second materials can be silicon and germanium. A contact of the device has a portion proximal to the semiconductor layer and a portion distal to the semiconductor layer. The distal portion includes the first material and the second material. A metal layer formed adjacent to the relaxed semiconductor layer and adjacent to the distal portion of the contact is simultaneously reacted with the relaxed semiconductor layer and with the distal portion of the contact to provide metallic contact material.
    Type: Grant
    Filed: September 17, 2004
    Date of Patent: March 6, 2012
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Matthew T. Currie, Richard Hammond
  • Patent number: 8129822
    Abstract: A template 100 for three-dimensional thin-film solar cell substrate formation for use in three-dimensional thin-film solar cells. The template 100 comprises a substrate which comprises a plurality of posts 102 and a plurality of trenches 104 between said plurality of posts 102. The template 100 forms an environment for three-dimensional thin-film solar cell substrate formation.
    Type: Grant
    Filed: October 6, 2007
    Date of Patent: March 6, 2012
    Assignee: Solexel, Inc.
    Inventor: Mehrdad Moslehi
  • Patent number: 8129823
    Abstract: Highly reliable interconnections for microelectronic packaging. In one embodiment, dielectric layers in a build-up interconnect have a gradation in glass transition temperature; and the later applied dielectric layers are laminated at temperatures lower than the glass transition temperatures of the earlier applied dielectric layers. In one embodiment, the glass transition temperatures of earlier applied dielectric films in a build-up interconnect are increased through a thermosetting process to exceed the temperature for laminating the later applied dielectric films. In one embodiment, a polyimide material is formed with embedded catalysts to promote cross-linking after a film of the polyimide material is laminated (e.g., through photo-chemical or thermal degradation of the encapsulant of the catalysts).
    Type: Grant
    Filed: November 27, 2007
    Date of Patent: March 6, 2012
    Assignee: Intel Corporation
    Inventor: Ravindra V. Tanikella
  • Patent number: 8129824
    Abstract: A semiconductor device has a substrate. A first die is electrically attached to a first surface of the substrate. A shield spacer having a first and second surface is provided wherein the second surface of the shield spacer is attached to a first surface of the first die. A plurality of wirebonds are attached to the shield spacer and to the substrate. A mold compound is provided for encapsulating the first die, the shield spacer, and the wirebonds.
    Type: Grant
    Filed: December 3, 2008
    Date of Patent: March 6, 2012
    Assignee: Amkor Technology, Inc.
    Inventors: Roger D. St. Amand, Nozad O. Karim, Joseph M. Longo, Lee J. Smith, Robert F. Darveaux, Jong Ok Chun, Jingkun Mao