Patents Issued in March 6, 2012
-
Patent number: 8130327Abstract: A video processing apparatus, comprises a signal receiving part receiving a video signal through one of a plurality of channels, a user inputting part in which the channel is selected and inputted by a user, a video processing part processing the video signal received by the signal receiving part, and a controller controlling the signal receiving part to start receiving a video signal through a first channel upon the first channel selection among the plurality of channels by the user, and to start receiving a video signal through a second channel upon the second channel selection among the plurality of channels by the user, wherein the second channel selection is made during the receiving process of the first channel. Thus, the present invention provides a video processing apparatus and a video processing method capable of performing a channel change rapidly to solve the above-described problem.Type: GrantFiled: November 21, 2006Date of Patent: March 6, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Kum-yon Han, Mi-young Yoo, Min-gu Kang
-
Patent number: 8130328Abstract: The present invention is a mounted rotatable television unit for installing a television in one of a wall and a cabinet wherein when installed therein the television is rotatable at least 180 degrees. The unit has an inner frame and an outer frame. The inner frame is adapted to receive a television. The outer frame is adapted to be installed in one of the wall and the cabinet and is rotatably attached to the inner frame whereby the inner frame may be pivoted such that the television is rotatable at least 180 degrees.Type: GrantFiled: July 25, 2006Date of Patent: March 6, 2012Inventor: Timothy John Vermeulen
-
Patent number: 8130329Abstract: A monitor apparatus includes a display panel housed in a housed position, a driving section, a detecting section, and a controlling section. The driving section includes a gear transmission mechanism for driving the display panel and causes the display panel to perform a first operation in which the display panel is moved from the housed position to an upright position via a horizontal position and a second operation in which the display panel is lowered from the upright position and is drawn into the housed position via the horizontal position. The detecting section detects when an external force is applied to the display panel placed in the upright position. When the detecting section detects that an external force is applied, the controlling section causes the driving section to drive the display panel in a direction in which the external force was applied.Type: GrantFiled: January 22, 2007Date of Patent: March 6, 2012Assignee: Alpine Electronics, Inc.Inventors: Noriyuki Sano, Hideto Katsunuma, Naotoshi Endo
-
Patent number: 8130330Abstract: A surround visual field that has a characteristic or characteristics that relate to an audio/visual presentation is described. In one embodiment, the surround visual field is projected on an area partially surrounding or surrounding video content being displayed on a device. This surround visual field may be comprised of a plurality of elements that further enhance the visual effect of the content being displayed. For example, one embodiment of the invention provides for elements within the surround visual field to move in relation to motion within the video content being displayed. Other characteristics of the video content may also be supplemented by the surround visual field or the surround visual field may simply be authored to correspond to the content itself.Type: GrantFiled: December 5, 2005Date of Patent: March 6, 2012Assignee: Seiko Epson CorporationInventors: Kar-Han Tan, Anoop K. Bhattacharjya
-
Patent number: 8130331Abstract: Provided are an illumination optical system allowing light beams to be condensed and enter an illumination area at different angles from each other, color separating elements that separate colors of the light beams from the illumination optical systems, liquid crystal light valves that modulate the color lights to form image light for the right and the left eyes, a color combining element that combines the color light beams, a wavelength-selective polarization rotating element that rotates the polarization direction of a predetermined color light so as to align the polarization direction with that of a light beam of another color, and a projection lens that magnifies and projects images. The liquid crystal light valves are provided with an incident side microlens array that causes the light beams for the right and the left eyes to pass respectively through the right and the left eye image pixels, and an exit side microlens array that condenses the light that has passed through the pixels.Type: GrantFiled: June 23, 2010Date of Patent: March 6, 2012Assignee: Panasonic CorporationInventor: Takaaki Tanaka
-
Patent number: 8130332Abstract: A liquid crystal spatial light modulator for adjusting an optical signal is configured in such a manner that a region of one element is partitioned into two regions so as to perform intensity modulation in one region and phase modulation in the other region. Since the region for performing the intensity modulation and the region for performing the phase modulation can be formed by partitioning one region of the liquid crystal spatial light modulator, only one element allows adjusting functions, both the optical signal intensity modulation and phase modulation.Type: GrantFiled: November 12, 2007Date of Patent: March 6, 2012Assignee: Citizen Holdings Co., Ltd.Inventor: Masafumi Ide
-
Patent number: 8130333Abstract: An electric optical device includes a transistor that includes a semiconductor layer having a source region connected to a data line, a drain region connected to a pixel electrode, and a channel region, and a gate electrode, a first light blocking film that is formed to be wider than the gate electrode and that is connected to the gate electrode via a first contact hole which is opened in a first insulating film disposed on the gate electrode, and a second light blocking film that is provided between the semiconductor layer and a substrate and is connected to the first light blocking film via a second contact hole which is opened to penetrate the first insulating film, a gate insulating film, and a second insulating film.Type: GrantFiled: March 4, 2011Date of Patent: March 6, 2012Assignee: Seiko Epson CorporationInventor: Takafumi Egami
-
Patent number: 8130334Abstract: An active matrix substrate comprises a substrate made of a plastic material and a plurality of TFTs which are arranged in matrix configuration on one side of the substrate and connected to signal wires. Inorganic insulating films are formed on both sides of the substrate. A conductive film is formed on the other side of the substrate on which the TFTs are not formed and the conductive film is electrically grounded. This configuration prevents dielectric breakdown caused in the TFTs by static charge, avoids defects derived from long-term static buildup and suppresses expansion, contraction and warpage of the plastic substrate.Type: GrantFiled: February 25, 2005Date of Patent: March 6, 2012Assignee: Sharp Kabushiki KaishaInventor: Tohru Okabe
-
Patent number: 8130335Abstract: Stray light in an oblique direction penetrates a channel part of a thin-film transistor, which sometimes causes light leakage current. This phenomenon becomes more pronounced in the case of using an optical system with high intensity, leading to deterioration in an image quality. To prevent the light that possibly penetrates an equivalent optical waveguide from reaching the channel part, on the condition that a first insulating layer is set to have a layer-thickness t (nm) and a refraction index n, a relation is to be expressed by the following expression. t<(0.61×?)/(n×sin ?) A value of ? is set to a lower limit 400 (nm) of a visible light wavelength and a value Lc (nm) is set to a distance between an end of a light-shielding layer and an end of a channel region. With those values, an expression of nt2/244 (nm)<Lc (nm) is set up.Type: GrantFiled: February 5, 2008Date of Patent: March 6, 2012Assignee: Seiko Epson CorporationInventor: Yasushi Hiroshima
-
Patent number: 8130336Abstract: A backlight apparatus can avoid a situation where a light source cannot be turned on and includes a light source having a base portion, a connector member including a contact portion having a recessed shape and electrically connected to the base portion of the light source, and a contact correcting portion arranged to contact with the contact portion of the connector member, wherein the light source is arranged inside a recessed portion, having the recessed shape, of the contact portion, and the contact correcting portion is arranged to press the contact portion of the connector member toward the base portion of the light source so as to close the recessed portion on a side of open ends of the contact portion.Type: GrantFiled: January 24, 2008Date of Patent: March 6, 2012Assignee: Sharp Kabushiki KaishaInventor: Tamotsu Satoh
-
Patent number: 8130337Abstract: A liquid crystal display module for preventing noise caused by friction between a support main and a light guide plate is provided. In the module, a hole is formed by removing a portion of a side frame of the support main, the hole having a quadrangle shape. A light guide plate is disposed on the support main. A protrusion which protrudes from a side surface of the light guide plate is inserted into the hole. The protrusion has a quadrangle shape. A center of the hole has a stepped portion.Type: GrantFiled: January 21, 2010Date of Patent: March 6, 2012Assignee: LG Display Co., Ltd.Inventor: Jae Woo Park
-
Patent number: 8130338Abstract: A liquid crystal display device that is capable of preventing the damage to optical sheets and a liquid crystal panel due to vibration and impact is disclosed. The liquid crystal display device includes a liquid crystal panel for controlling transmissivity of liquid crystal to display images, a backlight unit configured to include a plurality of optical sheets for irradiating light to the liquid crystal panel, and a support main for supporting the liquid crystal panel and the backlight unit, the support main having a protrusion curved to prevent the droop of the liquid crystal panel at the middle thereof. With the above construction, it is possible to minimize the friction between the liquid crystal panel and the optical sheets, prevent the formation of wrinkles or scratches at the optical sheets, and prevent the optical sheets from being rubbed.Type: GrantFiled: October 24, 2008Date of Patent: March 6, 2012Assignee: LG. Display Co. Ltd.Inventor: Hyung Dal Joo
-
Patent number: 8130339Abstract: A backlight module includes a back housing, a top housing, a lamp, a light-guide plate, and a reflecting sheet. The back housing includes a bottom plate. The back housing and top housing form an accommodating space; the lamp is situated in the accommodating space. The light-guide plate is disposed on the bottom plate and has a lateral light-inputting surface and a bottom surface. Light emitted from the lamp enters the light-guide plate through the lateral light-inputting surface. The reflecting sheet is disposed between the light-guide plate and the bottom plate. The reflecting sheet includes a curved portion to enable the light-guide plate and the reflecting sheet to be combined conformingly.Type: GrantFiled: December 19, 2006Date of Patent: March 6, 2012Assignee: Chimei Innolux CorporationInventors: Chen-Yi Wu, Chien-Chao Jaw, Hsueh-Chien Tseng
-
Patent number: 8130340Abstract: A large liquid crystal display (100) comprises a light guide plate (3) arranged on the back side of a liquid crystal panel (1). The front surface of the light guide plate (3) is flat, while the back surface thereof is concave. The upper and lower end faces of the light guide plate (3) respectively facing hot cathode fluorescent lamps (2a, 2b) have a convex shape projecting toward the respective lamps. White light from the fluorescent lamps is incident on the upper and lower end faces of the light guide plate directly or by being reflected by reflectors (4a, 4b), and propagates within the light guide plate while being reflected by the front and back surfaces of the light guide plate. At the front surface of the light guide plate, a part of the white light is directed toward the back side of the liquid crystal panel (1) by a light guide portion (5).Type: GrantFiled: August 14, 2006Date of Patent: March 6, 2012Assignees: Tohoku University, Kuraray Co., Ltd., Sharp CorporationInventors: Tadahiro Ohmi, Yasuyuki Shirai, Kiwamu Takehisa, Mitsuo Matsumoto, Tokuo Ikari, Toshiaki Sato, Ikuo Onishi, Etsuo Nakazato, Yuichiro Yamada, Tokihiko Shinomiya, Takashi Ishizumi, Yuhsaku Ajichi
-
Patent number: 8130341Abstract: A backlight is provided for illuminating an at least partially transmissive display. The backlight includes a light source. A light guide receives the light from an edge surface and guides the light by total internal reflection. The light is extracted from the lightguide using sub-wavelength extraction features designed on the basis of one grating structure with a second interlinks structure cut into the first structure. The first structure determines the extraction properties. The second structure determines the extraction efficiency and uniformity of the system. Higher efficiency and more uniform sub-wavelength extraction are possible with a device in accordance with the invention.Type: GrantFiled: August 25, 2009Date of Patent: March 6, 2012Assignee: Sharp Kabushiki KaishaInventors: Ioannis Papakonstantinou, David J. Montgomery
-
Patent number: 8130342Abstract: Disclosed a liquid crystal display device including a backlight device including a white-emitting LED device which emits a white light arising from a color mixture created through a combination of a blue-emitting LED, a red-emitting phosphor and a green-emitting phosphor, and a color filter equipping color pixels exhibiting plural colors including a red pixel and formed on a transparent substrate, wherein the white-emitting LED device is enabled to exhibit an emission spectrum having a first peak wavelength falling within a range of 440-470 nm, a second peak wavelength falling within a range of 510-550 nm and a third peak wavelength falling within a range of 630-670 nm, and a red display chromaticity of the liquid crystal display device is confined within a region bounded by lines connecting four points (0.620, 0.280), (0.620, 0.300), (0.680, 0.315) and (0.680, 0.280) based on an xy chromaticity coordinate system.Type: GrantFiled: February 26, 2010Date of Patent: March 6, 2012Assignees: Toppan Printing Co., Ltd., Nichia CorporationInventors: Yoshiko Ishimaru, Hidesato Hagiwara, Yoshinori Murazaki, Suguru Takashima, Masafumi Harada
-
Patent number: 8130343Abstract: The main object of the present invention is to provide a color filter for a transflective type color liquid crystal display which is easily produced and capable of displaying the same color tone with both of a reflecting light and a transmitting light, and shows light scattering in a reflective light region.Type: GrantFiled: June 21, 2010Date of Patent: March 6, 2012Assignee: Dai Nippon Printing Co., Ltd.Inventors: Masayuki Sugawara, Mitsuru Iida, Ryutaro Harada, Tomohisa Ishizawa
-
Patent number: 8130344Abstract: A liquid crystal device includes: a liquid crystal layer which is sandwiched between a pair of substrates; a color filter layer has a first coloration layer for transmitting a first light and a second coloration layer for transmitting a second light; first electrodes has a first pixel electrode disposed on a first sub-pixel region corresponding to a planar region of the first coloration layer and a second pixel electrode disposed on a second sub-pixel region corresponding to a planar region of the second coloration layer; and second electrodes each of which faces each first electrode. Any one electrode of each first electrode and each second electrode has a plurality of band-like portions which are arranged at predetermined intervals. A layer thickness of the liquid crystal layer, a width of each band-like portion, and the predetermined intervals within the first sub-pixel region are smaller than they within the second sub-pixel region.Type: GrantFiled: July 29, 2009Date of Patent: March 6, 2012Assignee: Seiko Epson CorporationInventors: Hitoshi Tsuchiya, Tomo Ikebe, Osamu Okumura
-
Patent number: 8130345Abstract: Disclosed is a liquid crystal display which can switch between a wide viewing angle and a narrow viewing angle in a quad type pixel structure including white subpixels. The liquid crystal display comprises: a plurality of quad type pixels each having an R subpixel, a G subpixel, a B subpixel, and a W subpixel; and a plurality of light blocking patterns disposed on the W subpixels, for guiding light from the W subpixels to a side viewing angle, wherein the W subpixels are fixed at specific positions of the quad type pixels respectively, and the R, G, and B subpixels have a different arrangement for each of the quad type pixels adjacent horizontally or vertically to each other.Type: GrantFiled: December 18, 2008Date of Patent: March 6, 2012Assignee: LG Display Co., Ltd.Inventors: Jonghoon Woo, Youngbok Lee
-
Patent number: 8130346Abstract: A pixel structure of a display including a first substrate, a second substrate, and a liquid crystal (LC) layer disposed therebetween. The pixel structure comprises a plurality of first, second, and third sub-pixels; a plurality of alignment controlling patterns, respectively formed in the first, second and third sub-pixels for controlling alignment direction of LC molecules of the LC layer; a plurality of opaque regions, respectively formed in the first, second, and third sub-pixels, and substantially aligned with the portion of the alignment controlling patterns, so that the alignment controlling patterns are shielded by the substantially corresponded opaque regions having different areas in at least two of the colored sub-pixels.Type: GrantFiled: May 17, 2007Date of Patent: March 6, 2012Assignee: AU Optronics Corp.Inventors: Ming-Feng Tien, Kun-Yu Lin, Po-Lun Chen
-
Patent number: 8130347Abstract: A control and display unit for differentiated colored marking of texts or symbols provided with a monochrome LC-display and a backlight of the LC-display. A film, which is provided with a microstructure on at least one side, is arranged between the backlight and the LC-display.Type: GrantFiled: November 9, 2005Date of Patent: March 6, 2012Assignee: BSH Bosch und Siemens Hausgeraete GmbHInventors: Gerhard Mager, Christian Eric Sechelmann, Ralph Staud
-
Patent number: 8130348Abstract: To provide: a production method of a liquid crystal display device, the production method being capable of efficiently and stably providing alignment treatment for an alignment film of the liquid crystal display device, in which a plurality of domains is formed in a pixel region; and an exposure device for alignment treatment.Type: GrantFiled: November 13, 2006Date of Patent: March 6, 2012Assignee: Sharp Kabushiki KaishaInventors: Hiroyuki Hakoi, Iichiro Inoue, Koichi Miyachi
-
Patent number: 8130349Abstract: A substrate for a display apparatus includes a plate, a switching element, an insulating layer, and a partition wall. The plate has a reflection region on which a light that is provided from an exterior to the substrate is reflected and a transmission region through which a light generated from a backlight assembly passes. The switching element is on the plate. The insulating layer is on the plate having the switching element. The transmission region of the insulating layer is recessed when compared to the reflection region of the insulating layer. The insulating layer has a contact hole through which a first electrode of the switching element is partially exposed. The partition wall divides the transmission region into a plurality of transmission portions. Advantageously, an image display quality of the display apparatus is improved, and manufacturing cost is decreased.Type: GrantFiled: February 2, 2010Date of Patent: March 6, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Won-Sang Park, Sang-Woo Kim, Jae-Young Lee, Sung-Eun Cha, Jae-Ik Lim, Jae-Hyun Kim
-
Patent number: 8130350Abstract: The present invention provides a liquid crystal display device including a liquid crystal layer disposed between a first substrate and a second substrate, a pixel electrode in a reflection region and a transmission region over the first substrate, a film for adjusting a cell gap in the reflection region over the first substrate, and an opposite electrode in the reflection region and the transmission region over the second substrate. The pixel electrode in the reflection region is provided over the film and reflects light. The pixel electrode in the transmission region transmits light. The pixel electrode in the reflection region and the transmission region includes a slit. The slit is overlapped with at least a part of a step portion which is provided by the film between the reflection region and the transmission region.Type: GrantFiled: February 8, 2011Date of Patent: March 6, 2012Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Hajime Kimura
-
Patent number: 8130351Abstract: An array substrate for an in-plane switching mode liquid crystal display device includes a substrate, a gate line along a first direction on the substrate, a data line along a second direction and crossing the gate line to define a pixel region, a common line on the substrate, a thin film transistor connected to the gate and data lines, a pixel electrode in the pixel region and connected to the thin film transistor, the pixel electrode including horizontal parts along the first direction, and a common electrode in the pixel region and connected to the common line, the common electrode including horizontal portions along the first direction, wherein the pixel electrode and the common electrode are formed on a same layer.Type: GrantFiled: December 28, 2006Date of Patent: March 6, 2012Assignee: LG Display Co., Ltd.Inventors: Byoung-Ho Lim, Hyun-Kyu Lee, Do-Sung Kim, Byung-Koo Kang, Do-Young Lee, Eui-Tae Kim, Sang-Wook Park
-
Patent number: 8130352Abstract: A semi-transmissive in-plane switching (IPS) mode liquid crystal display (LCD) panel, in which each pixel region can exhibit the same luminance in transmissive and reflective portions thereof while having a single cell gap structure, is disclosed. A method for fabricating the semi-transmissive IPS mode LCD panel is also disclosed.Type: GrantFiled: December 28, 2007Date of Patent: March 6, 2012Assignee: LG Display Co., Ltd.Inventor: Hyun Suk Jin
-
Patent number: 8130353Abstract: A liquid crystal display device includes a gate line and a data line crossing each other to define a pixel region on a substrate; a thin film transistor connected to the gate and data lines; a pixel electrode in the pixel region and including a first pixel portion which has a plurality of bent portions and first and second pixel protrusion portions protruding from the bent portions alternately in an opposing direction; and a common electrode in the pixel region and including first and second common portions between which the first pixel portion is located, and first and second common protrusion portions protruding from the first and second common portions, respectively, alternately in a direction toward the bent portions.Type: GrantFiled: December 28, 2007Date of Patent: March 6, 2012Assignee: LG Display Co., Ltd.Inventor: Won-Ho Lee
-
Patent number: 8130354Abstract: To provide a semiconductor device, a liquid crystal display device, and an electronic device which have a wide viewing angle and in which the number of manufacturing steps, the number of masks, and manufacturing cost are reduced compared with a conventional one. The liquid crystal display device includes a first electrode formed over an entire surface of one side of a substrate; a first insulating film formed over the first electrode; a thin film transistor formed over the first insulating film; a second insulating film formed over the thin film transistor; a second electrode formed over the second insulating film and having a plurality of openings; and a liquid crystal over the second electrode. The liquid crystal is controlled by an electric field between the first electrode and the second electrode.Type: GrantFiled: December 23, 2010Date of Patent: March 6, 2012Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Hajime Kimura
-
Patent number: 8130355Abstract: A liquid crystal display device includes a first substrate having a common electrode thereon; a second substrate coupled to the first substrate, the second substrate having a connection electrode facing a portion of the common electrode on the first substrate, the connection electrode including a lower electrode made of metal, an insulating layer formed over the lower electrode and having a plurality of contact holes, and an upper electrode made of oxide conductor over the insulating layer, the upper electrode being electrically connected to the lower electrode via the plurality of contact holes; and a plurality of conductive gap members disposed between said portion of the common electrode and the upper electrode of the connection electrode to electrically connect said portion of the common electrode to the upper electrode of the connection electrode.Type: GrantFiled: September 26, 2008Date of Patent: March 6, 2012Assignee: Casio Computer Co., Ltd.Inventors: Kunihiro Matsuda, Norihisa Yamada
-
Patent number: 8130356Abstract: Disclosed are a flexible printed circuit board capable of improving the display quality and a display device having the flexible printed circuit board. The flexible printed circuit board includes a base film, a signal interconnection layer and a protective layer. The signal interconnection layer is formed on the base film. The protective layer is formed on the signal interconnection layer. The protective layer includes a first region and a second region. The second region has a stiffness smaller than a stiffness of the first region.Type: GrantFiled: January 5, 2009Date of Patent: March 6, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Jung-Sun Lee, Young-Kwang Kim
-
Patent number: 8130357Abstract: A TFT array panel includes a substrate, a first gate line and a second gate line disposed on the substrate, a storage electrode line disposed on the substrate, a first data line intersecting the first and second gate lines, a second data line intersecting the first and second gate lines and spaced apart from the first data line, a drain electrode facing a part of the first data line and the second data line, an organic insulating layer disposed on the first data line and the second data line, the organic insulating layer having a contact hole exposing the drain electrode, a pixel electrode disposed on the organic insulating layer, the pixel electrode electrically connected to the drain electrode, and a storage electrode making a storage conductor with the pixel electrode, wherein the pixel electrode comprises a first part overlapping the first data line, and a second part overlapping the second data line, and wherein the width of the first part is different from that of the second part.Type: GrantFiled: September 30, 2009Date of Patent: March 6, 2012Assignee: Samsung Electronics Co, Ltd.Inventors: Dong-Gyu Kim, Hyang-Shik Kong, Jang-Soo Kim
-
Patent number: 8130358Abstract: A liquid crystal display, using a ferroelectric liquid crystal exhibiting mono-stability, which makes it possible to control the direction of the spontaneous polarization of the ferroelectric liquid crystal. The liquid crystal display includes: a first alignment treatment substrate having a first alignment layer which is a rubbed layer; a second alignment treatment substrate having a second alignment layer which is a photo alignment layer using a photo-dimerization type material; and a liquid crystal layer containing a ferroelectric liquid crystal and held between the first alignment treatment substrate and the second alignment treatment substrate. The ferroelectric liquid crystal exhibits mono-stability, and when a negative voltage is applied to a second electrode layer of the second alignment treatment substrate, a molecular direction of the ferroelectric liquid crystal is changed by about 2 times a tilt angle of the ferroelectric liquid crystal parallel to a surface of the substrate.Type: GrantFiled: November 19, 2007Date of Patent: March 6, 2012Assignee: Dai Nippon Printing Co., Ltd.Inventors: Naoko Sawatari, Masato Okabe
-
Patent number: 8130359Abstract: A lithographic apparatus includes an illumination system configured to condition a radiation beam and a support constructed to support a patterning device. The patterning device is configured to impart the radiation beam with a pattern in its cross-section to form a patterned radiation beam. A substrate table is constructed to hold a substrate, and a projection system is configured to project the patterned radiation beam onto a target portion of the substrate. The projection system includes a vacuum chamber and a controller configured to control an actuator of an optical device arranged in the vacuum chamber. The vacuum chamber includes a hermetically sealed housing in which the controller is accommodated. The housing is provided with an electrical connection configured to electrically connect the controller to the optical device, and is connected to an exterior wall of the vacuum chamber via a fluid cooling channel configured to cool the controller.Type: GrantFiled: March 27, 2009Date of Patent: March 6, 2012Assignee: ASML Netherlands B.V.Inventor: Johannes Wilhelmus Damen
-
Patent number: 8130360Abstract: An exposure apparatus includes an image sensor, a measurement optical system configured to guide measurement light to obliquely enter the projection optical system, and further, to guide the measurement light returned from the projection optical system to the image sensor, and a control unit configured to calculate surface position information of the substrate based on the output from the image sensor. The control unit calculates the surface position information of the substrate based on an interval between the image, of a mark arranged on the original stage, formed by the measurement light, which has passed through the mark, and the image of the mark formed by the measurement light reflected by the mark.Type: GrantFiled: August 7, 2007Date of Patent: March 6, 2012Assignee: Canon Kabushiki KaishaInventors: Shinichiro Hirai, Tetsuya Mori, Seiya Miura, Yoshinori Ohsaki
-
Patent number: 8130361Abstract: An exposure apparatus includes a substrate stage movable while holding a substrate, a substrate alignment system which detects an alignment mark (1) on the substrate held by the substrate stage and detects a reference mark (PFM) provided on the substrate stage, and a mask alignment system which detects, via a projection optical system, a reference mark (MFM) provided on the substrate stage. The reference mark (PFM) on the substrate stage is detected without a liquid by using the substrate alignment system, and the reference mark (MFM) on the substrate stage is detected using the mask alignment system via the projection optical system and the liquid. Then, a positional relationship between a detection reference position of the substrate alignment system and a projection position of an image of a pattern is obtained, thereby accurately performing alignment processing in the liquid immersion exposure.Type: GrantFiled: April 7, 2006Date of Patent: March 6, 2012Assignee: Nikon CorporationInventors: Masahiko Yasuda, Takahiro Masada, Yuho Kanaya, Tadashi Nagayama, Kenichi Shiraishi
-
Patent number: 8130362Abstract: At Step 602, the grid of a wafer loaded into an exposure apparatus is approximated by a mathematical function fitting up to, for example, a cubic function, and at Step 612, the magnitude of a residual error between the position of a sample shot area obtained by the function and an actually measured position is compared with a predetermined threshold value. GCM measurement is performed in a mathematical function mode in a subroutine 616, or it is performed in a map mode in a subroutine 616, on the basis of the result of the comparison. In addition, it is determined whether to extract non-linear components from the wafer in each lot on the basis of a variation in the temperature of the wafer (Step 622) and a variation in random error between the wafers (Step 624).Type: GrantFiled: September 12, 2005Date of Patent: March 6, 2012Assignee: Nikon CorporationInventor: Masaharu Kawakubo
-
Patent number: 8130363Abstract: A liquid immersion exposure apparatus includes an optical element via which a patterned beam is projected onto a substrate in an exposure operation, a liquid supply system having a supply port from which exposure liquid is supplied, and a member which has a surface and which is different from the substrate. In the exposure operation, the liquid supply system supplies the exposure liquid from the supply port to a space between the optical element and the substrate. In a cleaning operation, the member is moved to a position at which the surface of the member faces the optical element, and the liquid supply system supplies the exposure liquid from the supply port to a space between the optical element and the surface of the member.Type: GrantFiled: May 16, 2008Date of Patent: March 6, 2012Assignee: Nikon CorporationInventors: Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Kenichi Shiraishi, Katsushi Nakano, Soichi Owa
-
Patent number: 8130364Abstract: When forming a magnified image of a mask pattern on an object with a plurality of projection optical systems, projected images of the projection optical systems are formed to be accurately continuous to enable satisfactory pattern transfer. A first projection optical system directs light beam from point a on a mask to point A on a plate and forms a magnified image of the mask on the plate. A second projection optical system directs light beam from point b on the mask to point on the plate and forms a magnified image of the mask on the plate. A first line segment linking point A and point a?, which orthogonally projects point a on the plate, and a second line segment linking point B and point b?, which orthogonally projects point b on the plate PT, overlap each other as viewed in a non-scanning direction.Type: GrantFiled: December 7, 2007Date of Patent: March 6, 2012Assignee: Nikon CorporationInventors: Masato Kumazawa, Hitoshi Hatada
-
Patent number: 8130365Abstract: An immersion flow field maintenance system for an immersion lithography machine. The machine includes a projection objective lens, a wafer stage for supporting the wafer, and an immersion supplying system distributed around the lens for producing an immersion flow field under the lens. The system includes a horizontal guideway, a flat board connected with the horizontal guideway through a cantilever, and drivers for moving the board. When the wafer is unloading and the wafer stage is moving out of the exposure area under the lens, the board connects to and moves synchronously with the wafer stage to transfer the flow field from above the wafer stage to above the board. When the wafer is loaded and the wafer stage is moving into the exposure area, the board connects to and moves synchronously with the wafer stage to transfer the flow field from above the board to above the wafer stage.Type: GrantFiled: December 25, 2006Date of Patent: March 6, 2012Assignee: Shanghai Micro Electronics Equipment Co., Ltd.Inventor: Zhiyong Yang
-
Patent number: 8130366Abstract: A method for alignment of a substrate, in which the substrate includes a mark in a scribe lane, and the scribe lane extends along a longitudinal direction as a first direction. The mark has a periodic structure in the first direction. The method includes providing an illumination beam for scanning the mark in a direction perpendicular to a direction of the mark's periodic structure along a first scan path across the mark, scanning the spot of the illumination beam along a second scan path across the mark, the second scan path being parallel to the first scan path, wherein the second scan path is shifted relative to the first scan path over a first shift that corresponds to a fraction of the repeating distance of the periodic structure.Type: GrantFiled: February 27, 2009Date of Patent: March 6, 2012Assignee: ASML Netherlands B.V.Inventors: Patrick Warnaar, Franciscus Godefridus Casper Bijnen
-
Patent number: 8130367Abstract: By using 3-D focal plane arrays, the present invention tracks or locates small moving objects, or generates a 3-D frame of data with minimum laser energy and a minimum of mechanically moving parts. In another embodiment the invention is used to determine the direction of a laser designating a target with a minimum of moving parts. In another embodiment the invention is used as a 3-D movie/video camera. In yet another embodiment the device is used to provide data for autonomous navigation.Type: GrantFiled: December 8, 2006Date of Patent: March 6, 2012Inventors: Roger Stettner, Howard W. Bailey
-
Patent number: 8130368Abstract: A distance measuring apparatus for measuring a distance to a target point in a target area comprises a laser oscillator for generating a laser beam having a first wavelength, a nonlinear crystal into which the laser beam having the first wavelength generated by the laser oscillator enters, the nonlinear crystal generating a laser beam having a second wavelength, a collimator lens at which the laser beam having the first wavelength generated by the laser oscillator and the laser beam having the second wavelength generated by the nonlinear crystal are concentrated and are transformed into parallel light flux, a laser device provided with the laser oscillator, the nonlinear crystal, and the collimator lens, an output unit for outputting the laser beam having the first wavelength and the laser beam having the second wavelength at the same time, which are emitted by the laser device, while scanning the target area, a selective reflective mirror for selectively reflecting the laser beam having the first wavelengthType: GrantFiled: May 23, 2008Date of Patent: March 6, 2012Assignee: Kabushiki Kaisha TopconInventors: Taizo Eno, Masayuki Momiuchi
-
Patent number: 8130369Abstract: An optical blood monitoring system with a ratiometric model determines hematocrit values for a hemodialysis patient, from which hemoglobin values for the patient are estimated. The ratiometric model is calibrated, normally against a cell counter, using blood from a blood bank. The blood from a blood bank is preserved in a long term preservative which is typically different than that found in clinical settings. The hematocrit value determined by the ratiometric model is scaled by scaling factor so that the estimated hemoglobin level output from the monitor consistently matches that measured in a clinical setting. The hematocrit scaling factor is substantially about 1.033 when the patient's blood sample is stored in a short term preservative ethylene diamine tetra acetic, and is substantially about 1.06 when the hematocrit is measured in the blood sample without preservative being added to the blood sample. The hemoglobin value can also be adjusted for altitude.Type: GrantFiled: November 5, 2008Date of Patent: March 6, 2012Assignee: Fresenius Medical Care Holdings, Inc.Inventors: Louis LeeGrande Barrett, David Wayne Peterson, Kristian Allen Sammann
-
Patent number: 8130370Abstract: Methods and systems for analyzing optical parameters of a selected optical fiber member are disclosed. A signal input from an optical fiber member may be selected by instructing a corresponding optical separation device. The output from the corresponding optical separation device may be combined with the outputs of other optical separation devices using an optical coupler. A measurement circuit may measure the optical parameter from the output. Proper operation of an optical separation device may be validated by a monitoring circuit. The monitoring circuit may provide an indication to a user or may be processed by a diagnostic processor. A processing circuit may select one of the optical separation devices in order to measure the optical parameter for a corresponding optical fiber member and consequently may instruct an adjustment circuit to cause the selected optical fiber member to conform to a desired value of the optical parameter.Type: GrantFiled: December 7, 2010Date of Patent: March 6, 2012Assignee: AT&T Intellectual Property II, L.P.Inventors: Martin Birk, Philip H. Gerard
-
Patent number: 8130371Abstract: A reflection characteristic measuring apparatus capable of scanning a specimen surface of a sheet specimen at a high speed is provided. The reflection characteristic measuring apparatus includes a group of illuminating and light-receiving systems for directing illuminating light onto the specimen surface of the sheet specimen held by a specimen holding roller pair and for receiving reflected light from the specimen surface. The illuminating and light-receiving systems measure a spectral characteristic of the received reflected light. The illuminating and light-receiving systems are disposed over one-dimensional arrays of color samples which extend in the longitudinal direction of the sheet specimen, and scan the one-dimensional arrays in a direction opposite to a direction in which the sheet specimen is transported.Type: GrantFiled: May 19, 2011Date of Patent: March 6, 2012Assignee: Konica Minolta Sensing, Inc.Inventor: Kenji Imura
-
Patent number: 8130372Abstract: A wafer holding mechanism for holding a wafer of the type used in the manufacture of semiconductor devices is herein described. The mechanism has a first plate having a number of offsets that define at least one lip that extends radially inward of the offsets. A second plate is positioned adjacent the first plate and generally between the first plate and the lip such that one or more fingers coupled to the second plate oppose the lip that depends from the first plate. When the second plate is moved to a closed position, the at least one lip and the one or more fingers cooperatively grasp an edge of a wafer therebetween. The wafer holding mechanism is coupled to a drive that rotates the wafer before an imaging mechanism for capturing images of the wafer as it rotates.Type: GrantFiled: March 12, 2010Date of Patent: March 6, 2012Assignee: Rudolph Technologies, Inc.Inventors: Mark Harless, Cory Watkins, Pat Simpkins, Kevin Barr
-
Patent number: 8130373Abstract: An addressable micromirror array is employed in conjunction with circuit topology navigation software to rapidly wavelength sample selected measurement points in an integrated circuit region.Type: GrantFiled: June 28, 2011Date of Patent: March 6, 2012Assignee: Applied Materials, Inc.Inventors: Edgar Genio, Edward W. Budiarto
-
Patent number: 8130374Abstract: A method for calibrating a spatial light modulator comprising an array of channels includes selecting a plurality of channel sets; operating each of the channel sets to provide corresponding output radiation; providing a detector for measuring the output radiation; determining a plurality of intensity values, each representing an intensity of the output radiation provided by a different one of the channel sets; providing a correction factor for each of the channels sets, wherein each correction factor remains constant during a subsequent recalibration of the spatial light modulator; modifying each determined intensity value in accordance with a corresponding one of the correction factors; determining a difference between one of the modified intensity values and a target intensity value; and reducing the determined difference by adjusting a control level of at least one channel in the channel set corresponding to the one of the modified intensity values.Type: GrantFiled: September 26, 2011Date of Patent: March 6, 2012Assignee: Eastman Kodak CompanyInventor: Valentine A. Karassiouk
-
Patent number: 8130375Abstract: A small internal volume cell having fluid entry, and exit ports wherein at least one bubble trap is present in a fluid pathway which is continuous with the fluid exit port. There further being present an input/output aperture, for entering and exiting electromagnetic radiation, positioned to allow causing an input beam of electromagnetic radiation to impinge on a sample substrate at a location thereon at which, during use, fluid contacts; and a mirror for directing electromagnetic radiation which reflects from said sample substrate, toward and out of said input/output aperture; as well as methodology of its use.Type: GrantFiled: July 28, 2009Date of Patent: March 6, 2012Assignee: J.A. Woollam Co., Inc.Inventors: Galen L. Pfeiffer, Thomas E. Tiwald, Martin M. Liphardt
-
Patent number: 8130376Abstract: Certain examples described herein are directed to optical devices and systems that include first and second optical elements. In some examples, the first optical element may be configured to pass light received from an excitation source, and the second optical element may be optically coupled to the first optical element and may be configured to reflect incident light from the first optical element back to the first optical element and configured to pass the light reflected from the first optical element. Methods using the devices and systems are also described.Type: GrantFiled: June 4, 2009Date of Patent: March 6, 2012Assignee: Avalon Instruments Ltd.Inventor: Julien S. Villaumie