Abstract: Various aspects of the subject technology provide systems and methods for transmitting a radio frequency (RF) signal from a desired location on the surface of a photoconversion material by simply directing a laser beam or other energy beam to the desired location on the photoconversion material. In one aspect, the laser beam causes electrons in the photoconversion material to accelerate and emit the RF signal by forming a dead region on the photoconversion material that the electrons must flow around. In one aspect, the dead region has an asymmetrical shape to prevent a cancellation effect and produce a net positive RF signal. Various aspects of the subject technology also provide systems and methods for drawing a circuit element on the photoconversion material by tracing one or more dead regions on the photoconversion material with a laser beam or other energy beam to construct the circuit element.

Abstract: A portable electronic device, for example an electronic card, includes at least one electronic unit associated to an optical switch which can be actuated by a user and which includes two photo-detectors arranged sufficiently far from each other in the electronic device to enable the user to cover only one of the two photo-detectors with one finger. The switch includes a logical circuit to which are provided a first and a second light reception signal respectively coming from the two photo-detectors. The logical circuit is arranged to supply a signal which only indicates actuation of the optical switch when the first and second light reception signals correspond to two different logical states for the logic circuit.

Abstract: An optical operating element comprises a light-emitting transmitter, an optical receiver, a prism, and a cover. The prism has a side surface that is an active sensor area, and the prism is arranged below the cover such that the active sensor area is oriented substantially parallel to the underside of the cover. The cover has a sensor region which is above the active sensor area and which has a transmittance of at most 99%, at most 95%, at most 90%, at most 80% or at most 50%. Light emitted by the transmitter is guided through the prism and passes through the active sensor area and the cover. The emitted light reflected at an object enters through the sensor region and the active sensor area and is guided through the prism to the receiver. A change in reflection is identified by an evaluation circuit and is interpreted as switching.

Abstract: A polarization diversity detector includes at least one optical fiber having a first end for receiving a beam of light and a second end for transmitting the beam of light. A collimator receives the beam of the light from the optical fiber and outputs a collimated beam. A polarization diversity element includes a birefringent material which is positioned for receiving the collimated beam and resolving the collimated beam into a first beam having a first polarization and a second beam having a second polarization different from the first polarization. The first beam and second beam are angled relative to one another. At least one photodetector array pair includes a first photodetector array positioned to receive the first beam and a second photodetector array positioned to receive the second beam.

Abstract: An apparatus and method for reducing the visibility of speckle in coherent light comprises propagating the coherent light through a multimode optical waveguide 106 to reduce a coherence length of the coherent light by intermodal dispersion. A vibratable membrane mirror 104 is arranged to reflect the coherent light either before or after passing through the multimode optical fiber further to reduce the coherence length by distributing wave packets across different propagating modes and to erase the modal structure by averaging the distribution of energy across the modes leading to a more uniform illumination. The invention may be used for speckle removal in a laser scanning projector.

Abstract: A method detects a loss of calibration of a thermal imaging radiometer including an array of imaging microbolometers and a gauge microbolometer. The detection method includes applying a first and a second electrical stimulation to the gauge microbolometer to bring it to a first and a second predetermined temperature, followed by measuring an ohmic responsivity of the gauge microbolometer that is representative of a difference between the first and second electrical stimulations. The measured ohmic responsivity is compared with a reference ohmic responsivity, such that a loss of calibration is signaled whenever the measured and reference ohmic responsivities differ by more than a predetermined threshold. A correction method includes steps of the detection method, to yield a corrected voltage response function for each imaging microbolometer. Advantageously, the methods involve probing the electrical response of the gauge microbolometer without requiring thermoregulated blackbody calibrations sources.

Abstract: A method of obtaining and analyzing a mass spectrum of a sample comprising components is characterized by: setting values of a first energy level and a second energy level; chromatographically separating the components; ionizing a portion of the separated components to create precursor ions; introducing a first portion of the precursor ions into a collision or reaction cell and generating a first sub-population of ions corresponding to the first energy level; introducing a second portion of the precursor ions into the cell and generating a second sub-population of ions corresponding to the second energy level; transferring a mixture of the first and second sub-populations of ions into a mass analyzer; producing an analysis of the ions of the mixture; varying the value of at least one of the first and the second energy levels according to a pre-determined cyclical variation; repeating various above steps; and analyzing the time-variation of the analyses.

Abstract: Methods are described for measuring the amount of a vitamin B2 in a sample. More specifically, mass spectrometric methods are described for detecting and quantifying vitamin B2 in a sample utilizing on-line extraction methods coupled with tandem mass spectrometric techniques.

Abstract: A mass analysis of a sample having a known mass-to-charge ratio is carried out by performing a scan at a first-stage quadrupole over a predetermined mass range, under the condition that a collision induced dissociation gas is introduced into a collision cell and a voltage applied to a third-stage quadrupole is set so that no substantial mass separation occurs in this quadrupole. Various product ions originating from a precursor ion selected by the first-stage quadrupole arrive at and are detected by a detector without being mass separated. Accordingly, based on the detection data, a data processor can obtain a relationship between the voltage applied to the first-stage quadrupole and the mass-to-charge ratio of the selected ions, with a time delay in the collision cell reflected in that relationship. This relationship is stored in a calibration data memory, to be utilized in a neutral loss scan measurement or the like.

Abstract: A field asymmetric ion mobility spectrometer (FAIMS) has an analyte ion source assembly by which an analyte substance is ionized and supplied to the inlet of the spectrometer. The ion source assembly has an upstream source of clean, dry air and two ion sources of opposite polarity arranged at the same distance along the flow path. The ion sources are arranged so that the overall charge of the plasma produced is substantially neutral. The analyte substance is admitted via an inlet downstream of the ion sources and flows into a reaction region of enlarged cross section to slow the flow and increase the time for which the analyte molecules are exposed to the plasma.

Abstract: In one embodiment, a mass spectrometer includes an RF drive circuit for generating RF signals, a quadrupole mass filter, and a fixed connection assembly for delivering RF signals from the RF drive circuit to the quadrupole mass filter, the fixed connection assembly representing the entire delivery path of RF signals from the RF drive circuit to the quadrupole mass filter. By avoiding flexible components such as a freestanding wires or flexible circuit boards, the need for retuning when parts are removed or disturbed for testing or servicing is reduced, and a modular instrument in which components and connections are standardized and therefore interchangeable is realized.

Abstract: This invention provides a test structure for inspecting word line array fabricated by SADP process, wherein the test structure comprises a contour circuit to cover one end of the WL array, and is alternatively float and ground to the word line array. The word line array then can be inspected by using E-beam inspection tool to identify open and short defects.

Abstract: A method and system for detecting or reviewing defective contacts on a semiconductor device are disclosed. In a first embodiment, the method and system comprise providing a positive charge sufficient enough to turn on a gate of an associated MOS device and scanning an area of interest within the MOS device with a primary electron beam of proper landing energy to generate image. The method and system include analyzing the signal of contacts and identify the open contacts. In a second embodiment, the method and system comprises pre-scanning or irradiating the wafer surface defect with an accessory beam, a plurality of times, to achieve positive charged/sufficient to turn on the gate on the associated MOS devices of the wafer; and scanning the at least a portion of the device circuits with a primary electron beam of proper landing energy to generate images wafer or area of interest. The method and system include analyzing the signal and/or image of contacts and identify the open contacts.

Abstract: Information from multiple detectors acquiring different types of information is combined to determine one or more properties of a sample more efficiently than the properties could be determined using a single type of information from a single type of detector. In some embodiments, information is collected simultaneously from the different detectors which can greatly reduce data acquisition time. In some embodiments, information from different points on the sample are grouped based on information from one type of detector and information from the second type of detector related to these points is combined, for example, to create a single spectrum from a second detector of a region of common composition as determined by the first detector. In some embodiments, the data collection is adaptive, that is, the data is analyzed during collection to determine whether sufficient data has been collected to determine a desired property with the desired confidence.

Abstract: Methods of orientation imaging microscopy (OIM) techniques generally performed using transmission electron microscopy (TEM) for nanomaterials using dynamical theory is presented. Methods disclosed may use a wide angle convergent beam electron diffraction for performing OIM by generating a diffraction pattern having at least three diffraction discs that may provide additional information that is not available otherwise.

Abstract: A transmission electron microscope includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. An aberration corrector corrects the electron beam for at least a spherical aberration. A specimen holder is provided to hold a specimen in the path of the electron beam. A detector is used to detect the electron beam transmitted through the specimen. The transmission electron microscope may operate in an incoherent mode and may be used to locate a sequence of objects on a molecule.

Abstract: A transmission electron microscopy system has an illumination system and an objective lens system. A first projection system images the diffraction plane of the objective lens system into a first intermediate diffraction plane. A second projection system images the first intermediate diffraction plane into a second intermediate diffraction plane. A first aperture located in the first intermediate diffraction plane has a central opening of a first radius. A bright field detector located in the second intermediate diffraction plane has a detection surface defined by an inner edge of a second radius. The first radius and the second radius define a maximum angle and a minimum angle, respectively, relative to the optical axis of directions of bright field electrons traversing the sample plane and detectable by the bright field detector.

Abstract: A projection type display system having a position detection function which projects an image from an image projection device and optically detects a position of a target object between a surface on which the image is projected and the image projection device, includes: a position detection light source unit disposed on the image projection device to emit position detection light toward the target object; alight detector which detects the position detection light reflected by the target object in a detection area; and a position detection unit which detects the position of the target object based on a light reception result obtained by the light detector, wherein an intensity distribution of the position detection light is produced in an area to which the position detection light is supplied.

Abstract: The present invention is related to an energy recycling device. The energy recycling device includes a substrate, multiple miniature receivers, for receiving infrared radiation, on the substrate and multiple current rectifiers electrically connected to the miniature receivers respectively. The miniature receivers transform the infrared radiation into alternating currents (AC). The current rectifiers rectify the alternating currents (AC) so as to transform the alternating currents (AC) into direct currents (DC). Thereby, the infrared radiation received by the miniature receivers can be first transformed into the alternating currents (AC) with extremely high frequencies, and then the alternating currents (AC) with extremely high frequencies can be transformed into direct currents (DC) usable by an electronic device. Accordingly, infrared can be used to supply power.

Abstract: Terahertz spectroscopy methods that are fast and have excellent spectral resolution and that do not require background correction of the instrument response without sample are disclosed. In one instance, the methods include phase coherent chirp pulse generation and phase coherent detection.

Abstract: An optical fiber can include a polymer and a scintillation quencher. The optical fiber can be a member of a radiation sensor or radiation detecting system. The scintillation quencher can include a UV-absorber or a scintillation resistant material. In one embodiment, the radiation sensor includes a scintillator that is capable of generating a first radiation having a wavelength of at least about 420 nm; and a scintillation quencher is capable of absorbing a second radiation having a wavelength of less than about 420 nm. The optical fiber including a scintillation quencher provides for a method to detect neutrons in a radiation detecting system.

Abstract: An apparatus comprising a radiation source, coincident positron emission detectors configured to detect coincident positron annihilation emissions originating within a coordinate system, and a controller coupled to the radiation source and the coincident positron emission detectors, the controller configured to identify coincident positron annihilation emission paths intersecting one or more volumes in the coordinate system and align the radiation source along an identified coincident positron annihilation emission path.

Abstract: A method for imaging is providing, including administering a teboroxime species to an adult human subject, administering TI-201-thallous chloride to the subject, performing a teboroxime species SPECT imaging procedure of the teboroxime species on a region of interest (ROI) of the subject, and, after administering the teboroxime species, performing a TI-201-thallous chloride SPECT imaging procedure of the TI-201-thallous chloride on the ROI. Administering the teboroxime species and the TI-201-thallous chloride and performing the teboroxime species and the TI-201-thallous chloride SPECT imaging procedures comprise administering the teboroxime species and the TI-201-thallous chloride and performing the teboroxime species and the TI-201-thallous chloride SPECT imaging procedures during a time period having a duration of no more than 30 minutes. Other embodiments are also described.

Abstract: A system of performing a volumetric scan. The system comprises a surface of positioning a patient in a space parallel thereto, a plurality of extendable detector arms each the detector arm having a detection unit having at least one radiation detector, and an actuator which moves the detection unit along a linear path, and a gantry which supports the plurality of extendable detector arms around the surface so that each the linear path of each respective the extendable detector arm being directed toward the space.

Abstract: The present invention includes an interposer disposed on a surface of a substrate, a light sensing array sensor disposed on the interposer, the light sensing array sensor being back-thinned and configured for back illumination, the light sensing array sensor including columns of pixels, one or more amplification circuitry elements configured to amplify an output of the light sensing array sensor, the amplification circuits being operatively connected to the interposer, one or more analog-to-digital conversion circuitry elements configured to convert an output of the light sensing array sensor to a digital signal, the ADC circuitry elements being operatively connected to the interposer, one or more driver circuitry elements configured to drive a clock or control signal of the array sensor, the interposer configured to electrically couple at least two of the light sensing array sensor, the amplification circuits, the conversion circuits, the driver circuits, or one or more additional circuits.

Abstract: An ultraviolet curing system separates the source of ultraviolet radiation and the controller, allowing an operator to stand at a relatively great distance away from the ultraviolet radiation when applied. The apparatus includes a base unit and a source of intense ultraviolet (UV) radiation coupled to the base unit by way of a pivoting arm. A controller, disposed remotely from the base unit, allows an operator to activate the source of UV radiation at a distance of at least several feet away from the source. The preferred embodiment allows an operator to control the UV radiation at a distance of 10 to 100 feet or more using a wired or wireless interconnection between the controller and the base unit. A detachable infrared lamp may be optionally disposed along side the UV source.

Abstract: A radiation sensor can include a first layer and a second layer. The first layer can include a first scintillation material to produce first light in response to receiving a first targeted radiation, and the second layer can include a second scintillation material to produce second light in response to receiving a second targeted radiation. The first scintillation material can be different from the second scintillation material, and the first targeted radiation can be different from the second targeted radiation. The first layer can be configured to receive and transmit the second light. In an embodiment, the radiation sensor can be part of a radiation detection system that includes a photosensor that can produce an electronic pulse in response to the first and second lights. A method of detecting radiation can include using the radiation detection system to distinguish different radiations by differences in pulse shape.

Abstract: A method of making at least a portion of an imager includes obtaining an imager component having a substrate layer, a photo-sensitive layer, and a first image element and a second image element disposed between the substrate layer and the photo-sensitive layer, and delivering ultraviolet light through the substrate layer and between the first image element and the second image element to reach the photo-sensitive layer, wherein the ultraviolet light interacts with a portion of the photo-sensitive layer to form a photo-resist structure.

Abstract: An ionizing radiation detection device including a detector of semi-conductor material intended to be biased thanks to electrodes, among which reading electrodes connected to a reading circuit process signals they provide to reject those causing a poor spectrometric response, that is those affected by an induction share and possibly those affected by a charge or electronic noise share.

Abstract: A radiation detector dosimeter system/method implementing a corrected energy response detector is disclosed. The system incorporates charged (typically tungsten impregnated) injection molded plastic that may be formed into arbitrary detector configurations to affect radiation detection and dose rate functionality at a drastically reduced cost compared to the prior art, while simultaneously permitting the radiation detectors to compensate for radiation intensity and provide accurate radiation dose rate measurements. Various preferred system embodiments include configurations in which the energy response of the detector is nominally isotropic, allowing the detector to be utilized within a wide range of application orientations. The method incorporates utilization of a radiation detector so configured to compensate for radiation counts and generate accurate radiation dosing rate measurements.

Abstract: A radiographic image capture system includes: a radiographic image capture section, an output section and a generation section. The radiographic image capture section has plural radiographic imaging devices are placed adjacent to each other in a predetermined direction. Each of the radiographic imaging devices independently performs an imaging action, a preparatory action that is performed before the imaging action, and a transition action in which the radiographic imaging device transitions, in response to a transition command, from a first state in which the radiographic imaging device performs the preparatory action to a second state in which the radiographic imaging device performs the imaging action. The output section outputs the transition command to the plurality of radiographic imaging devices when imaging condition data has been input.

Abstract: An x-ray detector includes a plurality of photosensitive pixels each including a first photodiode generating an electric signal corresponding to an x-ray, and a first switching device turned on by a gate signal and outputting the electric signal from the photodiode through a data line, and a plurality of dummy pixels each including a second photodiode generating an electric signal corresponding to an x-ray, and a second switching device maintaining a turned-off state regardless of a gate signal and blocking the electric signal from being output from the second photodiode to the data line.

Abstract: A portable radiographic imaging device including: a radiation detection panel including optoelectric conversion elements that convert irradiated radiation into an electrical signal; a signal processing substrate performing predetermined signal processing on the input electrical signal; a holding base provided between the radiation detection panel and the signal processing substrate and holding the signal processing substrate; a flexible substrate including a flexed portion, with one end of the flexible substrate being connected to the radiation detection panel and the other end of the flexible substrate being connected to the signal processing substrate; a casing in which the radiation detection panel, the signal processing substrate, the holding base and the flexible substrate are installed; and a contact avoidance portion formed at at least one of the signal processing substrate, the holding base or the casing such that contact of with the flexible substrate is avoided, is provided.

Abstract: A method for detecting the presence of a chemical element in an object by emission of neutrons onto the object, characterized in that the emission of neutrons onto the object is constituted, firstly, by a continuous emission of neutrons originating from an associated particle neutron generator (G1) and, secondly, by an emission of neutron pulses which are superimposed on the continuous emission of neutrons, where the neutron pulses originate from a pulsed neutron generator (G2) which generates neutron pulses of pulse duration T2, where two successive neutron pulses are separated by a duration T4, and where the continuous and pulsed emissions of neutrons on to the object produce a gamma capture radiation and an inelastic gamma radiation.

Abstract: A system and method for correcting, based on a monitored subject's height and thickness, the net count rate value of a whole-body surface contamination monitoring device. The device includes a height detection means for determining the height of a subject being monitored, and a thickness detection means for determining the thickness of at least a portion of the body of the subject being monitored. The net count rate is based on site calibration factor data and self-shielding factor data, wherein both types of factor data consider the determined height and thickness.

Abstract: A radiation image capturing system which includes a radiation image capturing apparatus including a detection part, a scan activation unit, switch units, a reading circuit, a control unit and a communication unit, a radiation generation apparatus and a console wherein the radiation image capturing apparatus switches an image capturing method between a cooperation method in which radiation image capturing is performed in cooperation with the radiation generation apparatus and a non-cooperation method in which radiation image capturing is performed without cooperation with the radiation generation apparatus, and the console switches standby time which is a time period after the radiation image capturing apparatus becomes able to perform radiation image capturing until the radiation source is allowed to emit radiation onto the radiation image capturing apparatus between the cooperation method and the non-cooperation method.

Abstract: The invention relates to a plane detector for a gamma ray burst imager, the detector comprising a multilayer ceramic interconnection circuit between external connectors and a processor circuit fastened on a rear face of the circuit and a detection module fastened on a front face of the circuit. The detection module includes a support having a rear face fastened to the circuit and a front face on which sensors are fastened, and a high voltage electrical connection device having a through portion passing through the support and extending between two adjacent sensors in order to connect a connection pad of the circuit to a conductive grid that extends at least in part between the sensors and that is electrically connected to a free face of each sensor.

Abstract: A drawing apparatus includes a first aperture array configured to split a diverging charged particle beam, a converging lens array configured to form a plurality of first crossovers of a plurality of charged particle beams from the first aperture array, a collimator lens having a principal plane where the plurality of first crossovers are to be formed, a correcting system configured to correct angles of a plurality of charged particle beams from the collimator lens and to form a plurality of second crossovers, and an element having a plurality of apertures respectively corresponding to the plurality of second crossovers. The first aperture array and the converging lens array have apertures such that an arrangement of the plurality of first crossovers is different from an arrangement of the plurality of apertures, and that the plurality of second crossovers are aligned with the plurality of apertures on the element.

Abstract: Provided is an electrostatic lens array, including multiple substrates arranged with intervals, each of the multiple substrates having an aperture for passing a charged particle beam, in which: in a travelling direction of the charged particle beam, a peripheral contour line formed by any one of surfaces of the multiple substrates other than an upper surface of a most upstream substrate and a lower surface of a most downstream substrate has a protruding portion protruding from a peripheral contour line of one of the upper surface of the most upstream substrate and the lower surface of the most downstream substrate; and a position of the protruding portion is defined by a position regulating member, whereby parallelism is adjustable so that a surface including the protruding portion is parallel to a surface to be irradiated with the charged particle beam after passing through the aperture.

Abstract: A charged particle beam drawing apparatus of an embodiment includes: a drawing unit to perform drawing on a workpiece on a stage by using a charged particle beam; multiple marks located on the stage and having different heights; an irradiation position detector to, when any of the marks is irradiated with the charged particle beam, detect an irradiation position of the charged particle beam on a mark surface of the mark; a drift-amount calculation unit to calculate a drift amount of the charged particle beam on the mark surface by using the irradiation position; a drift-amount processing unit to obtain a drift amount on a workpiece surface by using the drift amounts on at least two of the mark surfaces; and a drawing controller to correct an is irradiation position of the charged particle beam by using the drift amount on the workpiece surface.

Abstract: In accordance with an embodiment, a sample analyzing apparatus includes a charged beam generating unit, a detecting unit, and an analyzing unit. The charged beam generating unit is configured to generate a charged beam and apply the charged beam to a sample. The detecting unit is configured to detect charged particles and then output a signal, the charged particles being generated from the sample by the application of the charged beam in a manner depending on a three-dimensional structure and material characteristics of the sample. The analyzing unit is configured to process the signal to analyze the sample.

Abstract: Ion sources, systems and methods are disclosed.

Abstract: A method for identifying a presence of a nitro (NO)-bearing compound suspected of being included in a sample includes photodissociating a sample into one or more fragments that include a NO molecule, where the NO molecule has an electron in a first-vibrational excited state of an electronic ground state. Laser-induced fluorescence (LIF) is applied including directing UV light from a UV laser source at the sample to induce fluorescent light. An emission wavelength of 270 nm to 274 nm from fluorescent light received is used to identify a presence of the NO-bearing compound in the sample.

Abstract: A method of manufacturing a white light emitting device includes dividing a phosphor sheet into phosphor film units to be applied to individual light emitting diode (LED) devices, measuring light conversion characteristics of the respective phosphor film units, classifying the phosphor film units of the phosphor sheet into a plurality of groups according to measurement results of the light conversion characteristics and combining the phosphor film units classified into the plurality of groups and an LED device having predetermined light characteristics so as to obtain target color characteristics.

Abstract: A method of generating Raman laser for inducing fluorescence of fluoranthene and a system thereof is disclosed. The system comprising a pulsed laser, a frequency doubling crystal, a frequency quadrupling crystal, a light filter unit, a quarter-wave plate, a Raman cell filled with deuterium gas( ), a light dispersion device and an optical diaphragm. The method of the present invention comprises the steps of emitting a laser beam pulse through the crystals as mentioned above such that a mixture of lasers is generated. The light filter unit and the quarter-wave plate are used to obtain a circular or ellipsometric polarized pump laser from the mixture of lasers. Finally, the Raman laser is obtained by directing the pump laser into a Raman cell filled with deuterium gas, extracting different orders of stimulated Raman scattering lasers emitted from the Raman cell by the light dispersion device and selecting the desired order of stimulated Raman scattering laser by the optical diaphragm.

Abstract: A scintillator panel which is capable of obtaining a radiation image exhibiting enhanced luminance and sharpness and achieving improved storage stability is disclosed, comprising on a support a base layer and a phosphor layer provided sequentially in this order, wherein the phosphor layer comprises (columnar) phosphor crystals formed of a phosphor parent compound and an activator by a process of vapor phase deposition and the base layer comprises crystals formed of the phosphor parent compound and an activator, and a relative density of the base layer is lower than a relative density of the phosphor layer and a relative content of an activator of the base layer is lower than a relative content of an activator of the phosphor layer.

Abstract: An energy application device applies optical energy on an adhesion sheet by a light radiator and, subsequently, applies heat energy on the adhesion sheet by a heater. With this arrangement, even the adhesion sheet, which includes an adhesive layer having an energy barrier that cannot be overcome only with optical energy, is enabled to start a photoreaction by overcoming an energy barrier with the heat energy from the heater.

Abstract: An aging apparatus including a pulse laser, a beam expansion assembly, and a platform configured to carry an object is provided. The pulse laser transmits a first beam to the beam expansion assembly. The beam expansion assembly expands the first beam to a second beam and projects the second beam onto the object.

Abstract: The present invention relates to a particle therapy apparatus used for radiation therapy. More particularly, this invention relates to a compact isocentric gantry for delivering particle beams perpendicularly to a rotation axis of the gantry. The gantry comprises three dipole magnets. The angle of the last dipole magnet is smaller than 90° and a most preferred bending angle for this last dipole magnet is 60°.

Abstract: A chamber apparatus for operating with a laser apparatus includes a chamber, a target supply unit, a collection unit and a collection container. The chamber includes an inlet through which a laser beam from the laser apparatus enters the chamber. The target supply unit is configured to supply a target material to a predetermined region inside the chamber. The collection unit includes a debris entering surface so that debris generated when the target material is irradiated with the laser beam enters the debris entering surface. The debris entering surface is inclined with respect to a direction in which the debris enters the debris entering surface. The collection container collects the debris flowing out of the collection unit.