Abstract: An approach for enhancing resolution in a lithographic process (e.g., an immersion lithographic process) is provided. Specifically, a material having a high reflexive index (e.g., water) is provided on opposite sides of an objective lens. This allows a set of light rays (high intensity) to be directed/passed from a light source, through a condenser lens, over a mask, through the material positioned on one side of the objective lens, through the objective lens, through the material on the opposite side of the objective lens, and to a wafer that is then patterned. Positioning the material on both sides of the objective lens allows for improved resolution and lithographic patterning of the wafer for both on-axis illumination and off-axis illumination techniques.

Abstract: An exposure apparatus and method exposes a substrate via a projection optical system and a liquid supplied to an immersion area below the projection optical system. First and second movable members move below the projection optical system. The first movable member has a mount area that mounts a substrate located in a hole of an upper surface of the first movable member. The upper surface outside the hole can maintain at least a part of the immersion area outside the substrate mounted in the hole. A drive system drives the first and second movable members to move the first and second movable members below the projection optical system relative to the liquid immersion region to replace one member positioned below the projection optical system with the other member such that the liquid immersion area is maintained below the projection optical system.

Abstract: An exposure apparatus exposes a substrate with an energy beam via a projection system and liquid and an immersion member forms an immersion area under the projection system with the liquid. A controller controls a stage system having first and second substrate holding members that hold first and second substrates, (i) to execute a relative movement between the first and second substrate holding members such that, while one of the substrate holding members is arranged opposed to the projection system, the other of the substrate holding members comes close to the one substrate holding members, and (ii) to move the close substrate holding members relative to the immersion member below the projection system such that the other of the substrate holding members is arranged opposite to the projection system in place of the one substrate holding members while substantially maintaining the immersion area under the projection system.

Abstract: A method for producing a capping layer (18) composed of silicon oxide SiOx on a coating (16) of a mirror (13), the coating reflecting EUV radiation (6) e.g. for use in an EUV lithography apparatus or in an EUV mask metrology system. The method includes irradiating a capping layer (18) composed of silicon nitride SiNx or composed of silicon oxynitride SiNxOy for converting the silicon nitride SiNx or the silicon oxynitride SiNxOy of the capping layer (18) into silicon oxide SiOx. An associated mirror (13) includes a capping layer comprised of silicon oxide SiOx, and can be provided in an associated EUV lithography apparatus.

Abstract: A mirror (13) for use e.g. in an EUV lithography apparatus or an EUV mask metrology system, with: a substrate (15) and a coating (16) reflective to EUV radiation (6), the reflective coating having a capping layer (18) composed of an oxynitride, in particular composed of SiNxOY, wherein a nitrogen proportion x in the oxynitride NxOY is between 0.4 and 1.4. Also provided are an EUV lithography apparatus having at least one such EUV mirror (13) and a method for operating such an EUV lithography apparatus.

Abstract: A projection objective includes at least four curved mirrors, which include a first curved mirror that is a most optically forward mirror and a second curved mirror that is a second most optically forward mirror, as defined along a light path. In addition, an intermediate lens element is disposed physically between the first and second mirrors, the intermediate lens element being a single pass type lens. The objective forms an image with a numerical aperture of at least substantially 1.0 in immersion.

Abstract: In order to make possible both good laser resistance and good antireflection properties, an optical element, in particular for UV lithography, comprising a substrate and a coating on the substrate having at least four layers, is proposed, wherein a first layer comprising a low refractive index inorganic fluoride compound is arranged on the substrate, a layer comprising an inorganic oxide-containing compound is arranged as a layer the most distant from the substrate, and at least two further layers each comprising an inorganic fluoride compound or an inorganic oxide-containing compound are arranged alternately between the first and the most distant layers.

Abstract: A projection objective includes at least four curved mirrors, which include a first curved mirror that is a most optically forward mirror and a second curved mirror that is a second most optically forward mirror, as defined along a light path. In addition, an intermediate lens element is disposed physically between the first and second mirrors, the intermediate lens element being a single pass type lens. The objective forms an image with a numerical aperture of at least substantially 1.0 in immersion.

Abstract: A projection objective includes at least four curved mirrors, which include a first curved mirror that is a most optically forward mirror and a second curved mirror that is a second most optically forward mirror, as defined along a light path. In addition, an intermediate lens element is disposed physically between the first and second mirrors, the intermediate lens element being a single pass type lens. The objective forms an image with a numerical aperture of at least substantially 1.0 in immersion.

Abstract: According to a first aspect of the present invention, there is provided a radiation source comprising: a nozzle configured to direct a stream of fuel droplets (70) along a trajectory towards a plasma formation location; a laser configured to direct laser radiation at a fuel droplet at the plasma formation location to generate, in use, a radiation generating plasma; wherein the laser comprises: a seed laser (50) for providing a seed laser beam (52); a beam splitter (54) for receiving the seed laser beam from the seed laser; an optical amplifier (58) for receiving the seed laser beam from the beam splitter and performing optical amplification; a first reflector (60) located downstream of the optical amplifier, configured to direct the seed laser beam back through the optical amplifier and on to the beam splitter; and a second reflector (70) located further downstream of the beam splitter, configured to receive the seed laser beam from the beam splitter and to direct at least a portion of the seed laser beam bac

Abstract: For angular resolved spectrometry a radiation beam is used having an illumination profile having four quadrants is used. The first and third quadrants are illuminated whereas the second and fourth quadrants aren't illuminated. The resulting pupil plane is thus also divided into four quadrants with only the zeroth order diffraction pattern appearing in the first and third quadrants and only the first order diffraction pattern appearing in the second and third quadrants.

Abstract: A way of predicting distribution of light in an illumination pupil, comprising: (a) identifying one or more component(s) of an illumination system having an illumination pupil, where the component(s) affect the distribution of light in the illumination pupil; (b) generating a point spread function that depends on the identified component(s) and has a functional relationship with the configurable settings of the illumination system; and (c) predicting the distribution of light in the illumination pupil using the point spread function.

Abstract: An optical module includes a chamber capable of being evacuated and a mirror in the chamber. The mirror includes a plurality of individual mirrors. Each individual mirror includes: a mirror body including a reflection face; a support structure; and a thermally conductive portion that mechanically connects the support structure to the mirror body. For at least one individual mirror, the thermally conductive portion includes a plurality of thermally conductive strips arranged radially, adjacent thermally conductive strips being separated from each other, and each of the plurality of thermally conductive strips connecting the mirror body to the support structure. For at least one individual mirror, an actuator is associated with the mirror body, the actuator being configured to displace the mirror body relative to the support structure in at least one degree of freedom.

Abstract: A projection exposure apparatus for microlithography comprises illumination optics for illuminating object field points of an object field in an object plane is disclosed. The illumination optics have, for each object field point of the object field, an exit pupil associated with the object point, where sin(?) is a greatest marginal angle value of the exit pupil. The illumination optics include a multi-mirror array that includes a plurality of mirrors to adjust an intensity distribution in exit pupils associated to the object field points. The illumination optics further contain at least one optical system to temporally stabilize the illumination of the multi-mirror array so that, for each object field point, the intensity distribution in the associated exit pupil deviates from a second adjusted intensity distribution in the associated exit pupil by less than 0.1 in at least one of an inner ? or an outer ?.

Abstract: A radiation modulator for a lithography apparatus, a lithography apparatus, a method of modulating radiation for use in lithography, and a device manufacturing method is disclosed. The radiation modulator for a lithography apparatus may have a plurality of waveguides supporting propagation therethough of radiation having a wavelength less than 450 nm; and a modulating section configured to individually modulate radiation propagating in each of the waveguides in order to provide a modulated plurality of output beams.

Abstract: An electrical connector comprises a high voltage pad and a high voltage plate. When connected to another electrical connector, the two plates, which are at the same voltage as the pads, form a region of high voltage in which the field is low. The pads are positioned in that region. An electrostatic clamp of an EUV lithographic apparatus may have such a pad and plate, for connecting to the electrical connector. By placing the interconnection in a low field region, triple points (points of contact between a conductor, a solid insulator and a gas) may be present in that region.

Abstract: A distance measuring method for a point on an object is performed by emitting measurement radiation. When an optical measurement axis of the measurement radiation is aligned with the point to be measured, an optical measurement point region is defined by the beam cross section of the radiation on the object. The beam cross section may be, for example, a maximum of eight times the standard deviation of a Gaussian steel profile of the measurement radiation. The distance to the point on the object is determined by receiving measurement radiation reflected from the object. The method includes altering, at least once, a measurement direction as emission direction of the measurement radiation with respective emission and reception of the measurement radiation. Altering the measurement direction is carried out such that respective area centroids defined by the beam cross section on the object lie within the measurement point region.

Abstract: An electronic driver circuit for LEDs and LASERs is provided for use in time-of-flight applications featuring a high efficiency of energy-conversion and a high precision of distance-measurements based on a dual conversion circuit. A voltage to voltage DC-DC conversion is hereby merged with a DC-voltage to pulsed-current booster, this booster operating at a time-of-flight modulation frequency. At the start of a new measurement cycle, the PWM signal for driving the DC-DC conversion is updated in response to currents observed during previous illumination periods.

Abstract: A fast spatial light modulator based on a linear MEMS ribbon array enables a depth capture system to operate in structured light and time-of-flight modes. Time-of-flight depth information may be used to phase unwrap structured light depth information. Combined structured light and time-of-flight systems offer precise depth resolution over a wide range of distances.

Abstract: A lidar-based apparatus and method are used for multi-signal detection, weak signal detection and signal disambiguation through waveform approximation utilizing a multi-channel time-to-digital converter (TDC) electronic circuit, with each TDC having an individually adjustable voltage threshold. This advanced TDC-based pulse width time-of-flight (ToF) approach achieves the low cost associated with the TDC-based pulse width ToF approach while solving the signal quality issues associated with the standard single-threshold TDC-based approach.

Abstract: A strain gauge or other device may include a deformable medium and discrete plasmon supporting structures arranged to create one or more plasmon resonances that change with deformation of the medium and provide the device with an optical characteristic that indicates the deformation of the medium.

Abstract: According to an example, an apparatus for performing spectroscopy includes a substrate on which a plurality of surface-enhanced spectroscopy (SES) elements are positioned substantially along a first plane. The apparatus also includes a first electrode positioned adjacent to the plurality of SES elements substantially along the first plane and a second electrode positioned adjacent to the plurality of SES elements substantially along the first plane and on a side of the plurality of SES elements that is opposite the first electrode. The first electrode and the second electrode are to generate an electric field around the plurality of SES elements when voltages are applied through the first electrode and the second electrode.

Abstract: Disclosed is an infrared optical sensor for the continuous analysis of a liquid flowing in a pipe. The sensor includes, in a housing, a central section of duct through which the liquid to be analyzed flows, and a spectral analysis device using a light beam, including an infrared source which emits a signal which is received by a receiving device having passed through the liquid, an optical component which allows the light beam to pass through the liquid, and a support plate which carries the infrared source and the receiving device. The liquid to be analyzed circulates through a loop formed by walls in the form of an arch of the optical component and by a projection of the housing in the optical component. A sealing gasket is compressed between the optical component and the housing, in order to prevent any diffusion of liquid on the interior of the housing.

Abstract: A method of characterizing and correcting effective radius variations in a surface nanoscale axial photonic (SNAP) device that comprises a plurality of separate optical microdevices includes the steps of characterizing an as-fabricated SNAP device to determine local effective radius values of the plurality of separate optical microdevices, calibrating the as-fabricated SNAP device to determine a correction factor defined as a change in effective radius associated with a predetermined corrective treatment and then correcting individual microdevices by the application of a number of refractive index-changing treatments, the number of treatments applied to individual microdevices determined by the amount of correction required and the correction factor determined in the calibrating step. A number of iterations of the characterizing and correcting operations can be performed, achieving less than an Angstrom variation in effective radius variation. An apparatus for performing the method is also disclosed.

Abstract: According to an example, apparatuses for performing multiple concurrent spectral analyses on a sample under test include an optical system to concurrently direct a plurality of light beams onto analytes at multiple locations on the sample under test, in which the plurality of light beams cause light in either or both of a Raman spectra and a non-Raman spectra to be emitted from the analytes at the multiple locations of the sample under test. The apparatuses also include a detector to concurrently acquire a plurality of spectral measurements of the light emitted from the analytes at the multiple locations of the sample under test. Example methods of performing spectral analysis include use of the apparatuses.

Abstract: A fiber end-surface inspection device and method illuminates the fiber end-surface from at least 2 different illumination angles, taking observations at the different angles, for detection of fiber end-surface imperfections, scratches or the like.

Abstract: A fault detector for fiber optic cabling is provided in a hand held device for detecting fiber faults, presence/absence of signal and wavelength of light present on an optical fiber. Audible and visual indicators of the fault/status and wavelength are provided.

Abstract: A monitoring system for monitoring a plurality of fibre Bragg gratings in an optical fibre, each fibre Bragg grating being sensitive to a different wavelength of light. The system comprises a broadband source for illuminating the optical fibre; at least one optical interferometer; light feeding means for feeding to an input of the interferometer light reflected from the fibre Bragg gratings, and a processor for processing the output from the interferometer to determine the wavelength of the reflected light. The light feeding means comprise a wavelength division multiplexer operable to separate light received from the optical fibre into a plurality of wavelengths, each associated with one of the fibre Bragg gratings and/or a time division mulitplexer operable to separate light received from the optical fibre into in a time separated series.

Abstract: A device for testing a camera module with an actuator is provided. The testing device includes a light emitter, a testing lens member, a light receiver, and a processor. The light receiver emits test light to the camera module. The testing lens member serves as a lens unit of the camera module in a testing process. The testing lens member includes a first lens, and a second lens detachably connected to the first lens. The first lens and the second lens respectively insert into the camera module from two opposite sides of the camera module, and abut two opposite sides of the actuator. The light receiver receives test light emitted from the light emitter and passed through the camera module. The processor determines a quality of the camera module according to the test light received by the light receiver.

Abstract: The present invention provides compositions for making and methods of using a hand-held nucleic acid amplification device, comprising a disposable biochip with a series of sample wells, each sample well having a novel optical arrangement that includes a light-emitting diode (LED) and a single light capturing element (e.g. a photodiode) for quickly measuring light emissions from biological samples such as nucleic acid amplification reactions. Such a device can utilize isothermal amplification for obtaining detectable yields of amplified nucleic acid product in short time periods, for example, within seconds.

Abstract: A cytometer cartridge insert includes a micro-molded component and a plastic laminate component. The micro-molded component is embedded in the plastic laminate component.

Abstract: According to an example, an apparatus for collecting a material to be spectrally analyzed includes a body having a first end and a second end, in which the body is elongated along a first axis from the first end to the second end. The body also includes a hole having an opening formed in an external surface of the body at a location between the first end and the second end and extending at least partially through the body at an angle with respect to the first axis. The body further includes a plurality of surface-enhanced spectroscopy (SES) elements positioned inside the body.

Abstract: A method and device for remotely detecting structural integrity using reflections or scattering from windows or other portions of a structure. The long geometrical lever arm of a reflection on a building window, when viewed with suitable instruments, produces detectable modulation in the reflected light from minute vibrational changes upon the glass surface, revealing fundamental resonances and structural changes and failure in the building housing the window. By sensing very small changes in intensity and polarization, information may be obtained on fundamental resonances and structural changes, including failure or imminent failure of the structure.

Abstract: A method for detecting component concentrations in human gas emissions such as breath and gas emitted from skin. A gas sample containing a specified component is collected into a gas cell using a pump and a series of valves to draw the gas sample into the cell and control the gas pressure within the cell. A tunable optical radiation beam is passed through the gas cell and the amount of energy absorbed by the specified component may be measured indirectly by taking the difference between the incident and emerging beam energy or directly by optoacoustic methods. Concentrations of the specified component as small as 0.1 ppB may be determined. Additionally, the tunable optical radiation beam may be multiplexed for use with a plurality of systems utilizing the beam for medical purposes.

Abstract: A gas analysis apparatus includes: a first reflector that reflects measurement light from a light emitting unit disposed outside a gas flue wall and transmitted through a sample gas. A light receiving unit outside the gas flue wall receives measurement light reflected by the first reflector. A second reflector outside the gas flue wall reflects measurement light toward the light receiving unit. A computing unit analyzes sample gas by allowing the measurement light to be reflected by the first reflector and performs correction or calibration of the gas analysis apparatus using known substances within an associated containing unit along the light path between the light emitting unit and the second reflector by allowing measurement light to be reflected by the second reflector. A switching unit outside the gas flue wall selectively removes or inserts the second reflector from the light path during component concentration analysis and correction or calibration, respectively.

Abstract: A system comprising a fiber optic gyroscope and a mixed signal application specific integrated circuit (ASIC) connected to the gyroscope is provided. The mixed signal ASIC comprises a digital logic unit, a relative intensity noise (RIN) analog-to-digital converter (ADC) coupled to the digital logic unit and configurable to receive a signal from a RIN detector, and a rate ADC coupled to the digital logic unit and configurable to receive a signal from a rate detector. The mixed signal ASIC also includes a light source digital-to-analog converter (DAC) coupled to the digital logic unit, and a thermo-electric cooler DAC coupled to the digital logic unit, both of which are configurable to send control signals to a light source of the gyroscope. The mixed signal ASIC further includes an integrated optical chip DAC, an eigen-frequency servo DAC, and a heater servo DAC, all of which are coupled to the digital logic unit.

Abstract: In one embodiment a system including a resonator fiber-optic gyroscope configured to measure rotation rate is provided. The resonator fiber-optic gyroscope includes a sensing resonator have a first resonance frequency for a first laser beam propagation direction and a second resonance frequency for a second laser beam propagation direction, an optical mixer coupled to an output of the sensing resonator and configured to mix an output of the sensing resonator with a reference laser, wherein the optical mixer outputs a beat signal, and a resonance tracking electronics coupled to the optical mixer. The resonance tracking electronics are configured to demodulate the beat signal at a frequency offset to produce first in-phase and quadrature demodulated information, generate R-squared information from a sum of squares of the first in-phase and quadrature demodulated information, and demodulate the R-squared information at a resonance tracking modulation frequency.

Abstract: An inner surface shape measuring apparatus that measures an inner surface shape of a tested object by using a light-section method includes: a projection section which includes an outer peripheral section having a tubular shape and having a slit that light is capable of penetrating and that is provided in a circumferential direction, and a light source unit having a light-emitting element and arranged in the outer peripheral section, the projection section projecting a luminous flux that has a predetermined thickness from the slit onto the tested object; and an imaging section which images the inner surface of the tested object with the luminous flux projected thereon.

Abstract: The invention relates to a method for predicting kinking, breaking or fracturing of flexible medical instruments 100 such as guidewires. Fiber optic methods for determining curvature are known. However, according to this invention such optic methods can be utilized for determining bending of flexible medical instrument, for example by determining when the curvature of the flexible medical instruments becomes smaller than a given curvature threshold. The flexible medical instruments may kink, break or fracture due to material fatigue. To predict failure of the instrument due to fatigue, the bending actions on the instrument may be monitored during the entire lifetime or during several uses of the instrument for determining a warning of a possible risk of instrument failure.

Abstract: A measuring apparatus includes a light projecting and receiving device configured to project and receive light, and measures an object based on the projected and received light. The measuring apparatus comprises a chamber configured to enclose a first space for accommodating the object; a partition configured to separate the first space from a second space which accommodates the light projecting and receiving device, and configured to transmit the light; a first regulator configured to regulate temperature of the first space to a first temperature by flowing a gas through the first space; and a second regulator configured to regulate temperature of the second space to a second temperature different from the first temperature by flowing a gas through the second space. The partition includes a plurality of partition walls disposed with a gap.

Abstract: Optical apparatus includes a beam source, which is configured to generate an optical beam having a pattern imposed thereon. A projection lens is configured to receive and project the optical beam so as to cast the pattern onto a first area in space having a first angular extent. A field multiplier is interposed between the projection lens and the first area and is configured to expand the projected optical beam so as to cast the pattern onto a second area in space having a second angular extent that is at least 50% greater than the first angular extent.

Abstract: A projector includes a projection portion including a laser beam generation portion and a scanning portion scanning a laser beam, projecting an image, a light detection sensor provided separately from the projection portion, including a light receiving portion receiving the laser beam reflected by a detection object, and a control portion acquiring the position of the detection object on the image on the basis of a detection result of the laser beam.

Abstract: A method for printing at least one carrier element, in particular at least one pack, in at least one printing operation includes sensing a position of the at least one carrier element, orienting at least one piece of information on the basis of the sensed position of the at least one carrier element, storing the at least one piece of information in at least one file, and printing the at least one piece of information onto the carrier element.

Abstract: When a license for setting a continuous copying speed of an image forming apparatus is installed in the image forming apparatus, a continuous copying speed identified from the license is set as the continuous copying speed of the image forming apparatus.

Abstract: A license management server issues a license required for setting a continuous copying speed of an image forming apparatus to a continuous copying speed specified by a license issuance request.

Abstract: An image forming system includes a first image forming apparatus configured to form an image according to first setting information that is set to a first user; a second image forming apparatus configured to form an image according to second setting information that is set to a second user; and an administration apparatus that holds the first setting information and the second setting information and administers the first image forming apparatus and the second image forming apparatus according to the first setting information and the second setting information thus held. The administration apparatus includes a determining unit configured to determine whether a substitute apparatus for the first image forming apparatus is necessary; and an information setting unit configured to obtain the first setting information according to a determination result of the determining unit, and add the first setting information to the second setting information.

Abstract: A page-wide-array printer has a print unit including an array of print-heads, wherein a printing direction is defined by a relative movement between the print unit and a print medium during a printing process. The page-wide-array printer receives a continuous tone image and divides the continuous tone image into a series of slices along a printing direction. Halftone image data is generated from each of the slices using error diffusion halftoning. The error diffusion halftoning comprises processing, with regard to error diffusion, each slice pixel-by-pixel following a processing pattern mainly oriented along a main processing direction which is parallel to the printing direction. The page-wide-array printer prints the halftone image data along the printing direction.

Abstract: An image forming apparatus including a multi-processor and an image forming method thereof. The apparatus includes a data processing unit to divide input print data into a plurality of divided print data according to a predetermined criterion and to simultaneously process the plurality of divided print data using a multi-processor, and an image forming unit to form an image corresponding to the processed print data.

Abstract: An image processing apparatus converts first color values in a first color space to second color values in a second color space for an objective color. If the objective color is not within a color reproduction space of an outputting device, the searching unit searches for a set of color values as base color values in the color reproduction space so that the set of color values minimizes a value of the color difference formula for the first color values. As the second color values, the searching unit determines a set of color values in a predetermine neighbor space of the base color values so that the determined set of color values minimizes a difference between property values on a color property of which the allowed color difference is smallest among the allowed color differences at the first color values.

Abstract: Systems and methods for printing a 3D object on a three-dimensional (3D) printer are described. The methods semi-automatically or automatically delineate an item in an image, receive a 3D model of the item, matches said item to said 3D model, and send the matched 3D model to a 3D printer.