Patents Issued in June 21, 2016
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Patent number: 9372358Abstract: Disclosed is an LCD device with reduced thickness and bezel width. The LCD device includes a liquid crystal display panel configured to include an upper substrate and a lower substrate that are facing-coupled to each other, a backlight unit configured to include a light guide plate which irradiates light incident from a light source module on the liquid crystal display panel and an optical sheet disposed on the light guide plate, and a coupling member configured to couple the liquid crystal display panel to the light guide plate with the optical sheet therebetween such that a sealed space is provided between the liquid crystal display panel and the light guide plate.Type: GrantFiled: October 1, 2015Date of Patent: June 21, 2016Assignee: LG Display Co., Ltd.Inventors: Yong Seok Lee, Choun Sung Kang, Yong Ik Hwang, Hee Kyung Lee
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Patent number: 9372359Abstract: To provide a thin liquid crystal display device equipped with the capacitance-type touch panel, and specifically the thin liquid crystal display device with a lower cost and a higher reliability. The thin liquid crystal display device includes a CF substrate and a TFT substrate formed with a transparent electrode common line, the CF substrate having a plurality of transparent lines, the transparent electrode common line being isolated into a plurality of belt-like forms by an isolation slit, and an area where the transparent line and the transparent electrode common line constitutes an upper electrode and a lower electrode of the capacitance-type touch panel. Furthermore, there are provided a redundant slit and a disconnectable point of the metal common line.Type: GrantFiled: June 27, 2013Date of Patent: June 21, 2016Assignee: Japan Display Inc.Inventor: Takahiro Nagami
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Patent number: 9372360Abstract: A touch liquid crystal display device includes a first substrate and a second substrate opposite to each other, and a liquid crystal layer disposed between the first and second substrates. The first substrate includes a touch layer disposed on a surface of the first substrate facing the liquid crystal layer, an insulating layer disposed on a surface of the touch layer and covering the touch layer, and a pixel array structure disposed on a surface of the insulating layer facing away from the touch layer. The touch layer is disposed between the pixel array structure and the first substrate. Only a filming process and a photoetching process of the touch layer and a deposition process of the insulating layer are additionally required to transform a non-touch liquid crystal display device to a touch liquid crystal display device.Type: GrantFiled: January 8, 2014Date of Patent: June 21, 2016Assignee: Shanghai Tianma Micro-Electronics Co., Ltd.Inventors: Lihua Wang, Qijun Yao, Jun Ma, Conghua Ma, Lijun Zhao, Quanpeng Yu
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Patent number: 9372361Abstract: At least a portion of a polarizing layer in the display screen is omitted or removed to temporarily disable image generation but an equivalent polarizing layer is used as a replacement or as a substitute for enabling the display of images on the screen. For instance, the omitted or removed polarizing layer can be replaced in situ or a remote polarizing layer can be substituted through which the images on the display can be seen. The selective reassembly of the display can be used for purposes of security or promotion.Type: GrantFiled: May 10, 2011Date of Patent: June 21, 2016Assignee: Document Security Systems, Inc.Inventor: Kenneth M. Wicker
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Patent number: 9372362Abstract: A liquid crystal display includes a first substrate, a plurality of pixel electrodes disposed on the first substrate and including a first sub-pixel electrode and a second sub-pixel electrode, the first sub-pixel electrode and the second sub-pixel electrode respectively including a cruciform stem part, and a plurality of fine branch parts which extends from the cruciform stem part, and a liquid crystal layer interposed between the first substrate and a second substrate facing the first substrate, the second substrate including a common electrode in which an opening corresponding to the cruciform stem part of the pixel electrode is defined.Type: GrantFiled: January 7, 2014Date of Patent: June 21, 2016Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Jae-Soo Jang, Jang Wi Ryu, Cheol Shin, Hak Sun Chang, Ki Chul Shin
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Patent number: 9372363Abstract: The present invention relates to a method for manufacturing a photo-responsive cross-linked liquid-crystalline polymer film, containing: a process of preparing a photopolymerizable monomer solution by dissolving in a solvent a polyfunctional liquid-crystalline monomer, a monofunctional liquid-crystalline monomer, a polyfunctional photo-responsive monomer and a photopolymerization initiator; a process of forming a photopolymerizable coating by applying the photopolymerizable monomer solution to a surface of an alignment film by means of a wet coating method and performing removal of the solvent; and a process of forming a film by photopolymerizing the monomers through light irradiation of the photopolymerizable coating under a non-oxygen atmosphere.Type: GrantFiled: January 26, 2015Date of Patent: June 21, 2016Assignee: NITTO DENKO CORPORATIONInventors: Naoyuki Matsuo, Takeshi Sutou
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Patent number: 9372364Abstract: A display panel is provided. A first substrate includes a display area and a peripheral area. The peripheral area surrounds the display area. A second substrate is disposed on the first substrate. The second substrate faces the first substrate along a first direction. A liquid crystal layer is interposed between the first substrate and the second substrate. A multi-layered sealant is disposed on the peripheral area of the first substrate. The multi-layered sealant surrounds the liquid crystal layer. The multi-layered sealant includes a first sealant layer including an acrylate resin having a functional group having at least 3 carbon atoms, and a second sealant layer including an epoxy resin having a (meth)arcylate group.Type: GrantFiled: April 2, 2014Date of Patent: June 21, 2016Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Jang-Hyun Kim, Keun-Chan Oh, Won-Gap Yoon, Jin-Hyeong Lee, Chang-Hun Lee, Ji-Eun Jang
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Patent number: 9372365Abstract: A liquid crystal display device is provided in which color unevenness can be reduced and inhibited in the peripheral display area even when the display device has a narrow frame. In the liquid crystal display device, liquid crystal sandwiched between a TFT substrate and a CF substrate and sealed by a seal is disposed in a frame portion. The CF substrate has a BM, a color resist film, an OC, an alignment film, and a wall that inhibits the alignment film from expanding outward. In the area where the wall is disposed, the BM and color resist film on the CF substrate are removed.Type: GrantFiled: August 6, 2014Date of Patent: June 21, 2016Assignee: JAPAN DISPLAY INC.Inventor: Yuki Kuramoto
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Patent number: 9372366Abstract: A first substrate includes a first insulating substrate. A first organic insulating film is arranged on the first substrate in a circumference area outside an active area. The first organic insulating film includes a first surface and a first concave portion in the circumference area. A second substrate includes a second insulating substrate. A circumference color filter is laminated on a circumference shield layer and includes a second concave portion arranged facing the first concave portion. The second concave portion spreads toward the first substrate. A second organic insulating film covers the circumference color filter and includes a second surface and a third concave portion covering the second concave portion. A seal material is arranged between the first surface and the second surface, and between the first concave portion and the third concave portion to attach the first substrate and the second substrate.Type: GrantFiled: July 27, 2015Date of Patent: June 21, 2016Assignee: Japan Display Inc.Inventor: Ayumi Mori
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Patent number: 9372367Abstract: A system for displaying images including a display panel is provided. The display panel has a display area and a peripheral area. The display panel includes a metal layer disposed on a first substrate. A patterned planarization layer is disposed on the metal layer, having at least one opening corresponding to the peripheral area, wherein a portion of the metal layer is disposed in the opening. A second substrate is disposed opposite to the first substrate. A seal is disposed at the peripheral area and between the first and the second substrates, wherein the seal covers the metal layer through the opening of the patterned planarization layer. A passivation layer disposed on the portion of the metal layer and covering a sidewall of the patterned planarization layer to form a first passivation sidewall, wherein the seal is in contact with the first passivation sidewall.Type: GrantFiled: October 5, 2015Date of Patent: June 21, 2016Assignees: INNOCOM TECHNOLOGY(SHENZHEN) CO., LTD, INNOLUX CORPORATIONInventors: Chun-Ming Wang, Hsixg-Ju Sung, Te-Yu Lee
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Patent number: 9372368Abstract: A display panel, a display device using the same, and a method for manufacturing a display panel are provided. The display panel includes a first substrate (25) and a second substrate (26) disposed oppositely, and spacers located between the first substrate (25) and the second substrate (26). Each of the spacers includes a first part (21) and a second part (22) at locations corresponding to each other, the first part (21) is located on the first substrate (25), the second part (22) is located on the second substrate (26), both the first part (21) and the second part (22) are magnetic bodies, and top ends of the first part (21) and the second part (22) at the locations corresponding to each other contact with each other and have opposite magnetic poles.Type: GrantFiled: November 18, 2013Date of Patent: June 21, 2016Assignee: BOE TECHNOLOGY GROUP CO., LTD.Inventor: Xiaodong Zhou
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Patent number: 9372369Abstract: A manufacturing method for a liquid crystal panel, comprising: coating a photoresist layer on a substrate; utilizing a first exposure energy and a first mask for executing a first exposure process to form a spacing column having a first height, wherein, the first mask has a first light transparent area corresponding to a dark area; utilizing a second exposure energy and a second mask for executing a second exposure process to form a spacing column having a second height, wherein, the second mask has a second light transparent area corresponding to the dark area, and the second height is greater than the first height; and removing an unexposed portion of the photoresist layer. Through above way, the present invention can improve the pixel transmittance of the dark area in order to reduce or eliminate the dark area.Type: GrantFiled: September 25, 2014Date of Patent: June 21, 2016Assignee: Shenzhen China Star Optoelectronics Technology Co., LtdInventor: Hua Zheng
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Patent number: 9372370Abstract: A liquid crystal display includes: a substrate; a thin film transistor disposed on the substrate; a pixel electrode disposed on the thin film transistor; and a roof layer facing the pixel electrode, wherein a plurality of microcavities are formed between the pixel electrode and the roof layer, each microcavity includes liquid crystal materials, a partition wall is formed between the microcavities, and the roof layer includes a dry film.Type: GrantFiled: May 7, 2014Date of Patent: June 21, 2016Assignee: Samsung Display Co., Ltd.Inventors: Yang-ho Jung, Hoon Kang, Seung Bo Shim, Jin Ho Ju
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Patent number: 9372371Abstract: The present invention provides a liquid crystal display panel which is capable of providing a sufficiently high response speed and an excellent transmittance, and a liquid crystal display device. The liquid crystal display panel of the present invention includes a first substrate, a second substrate, and a liquid crystal layer disposed between the substrates. The first substrate and the second substrate have electrodes. The electrodes of the second substrate include a pair of comb-shaped electrodes and a slit-formed electrode.Type: GrantFiled: May 31, 2012Date of Patent: June 21, 2016Assignee: SHARP KABUSHIKI KAISHAInventors: Takatomo Yoshioka, Iori Aoyama, Takao Imaoku, Yuichi Iyama, Kazuhiko Tsuda
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Patent number: 9372372Abstract: A liquid crystal display device includes a first substrate and a second substrate. The first substrate includes a gate line and an auxiliary capacitance line extending in a first direction, a source line extending in a second direction orthogonally crossing the first direction, and a pixel electrode having a main pixel electrode arranged on the auxiliary capacitance line and extending in the first direction. The second substrate includes a common electrode having a main common electrode arranged above the gate line and extending in the first direction. A liquid crystal layer is held between the first substrate and the second substrate having liquid crystal molecules. The liquid crystal molecules are initially aligned in the first direction in a splay alignment state between the first substrate and the second substrate in a state where electric field is not formed between the pixel electrode and the common electrode.Type: GrantFiled: March 25, 2015Date of Patent: June 21, 2016Assignee: JAPAN DISPLAY INC.Inventor: Jin Hirosawa
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Patent number: 9372373Abstract: In a liquid crystal device according to the embodiment of the invention, a high potential and a low potential relative to the counter electrode potential are alternately applied to the pixel electrode through the switching element. Here, the counter electrode potential is set to be lower than a reference potential, when the reference potential is an electric potential which is obtained by shifting an average electric potential between the high potential and the low potential by an average value between an amount of change in an electric potential of the pixel electrode, caused by a parasitic capacitance of the switching element when the high potential is being applied to the pixel electrode, and an amount of change in the electric potential of the pixel electrode caused by the parasitic capacitance when the low potential is being applied to the pixel electrode.Type: GrantFiled: February 3, 2014Date of Patent: June 21, 2016Assignee: SEIKO EPSON CORPORATIONInventors: Masakazu Nishida, Shohei Yoshida
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Patent number: 9372374Abstract: A liquid crystal display includes a lower panel, an upper panel, and a liquid crystal layer disposed therebetween. The lower panel includes a pixel electrode including at least one unit pixel electrode. The upper panel includes a common electrode. The unit pixel electrode includes a rhombus-like plate portion, and a plurality of minute branch portions extending therefrom.Type: GrantFiled: August 5, 2014Date of Patent: June 21, 2016Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Bo Yeong Kim, Jae Won Kim, Hyung Jun Park, Dong-Hyun Yoo, Seong Young Lee
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Patent number: 9372375Abstract: A display device includes a TFT substrate with gate signal lines, drain signal lines, thin-film transistors connected thereto, a gate driver connected to the gate signal lines, a drain driver having output terminals connected to drain signal lines, and a film substrate having first wirings. The first wirings are disposed between the drain driver and the film substrate. The drain driver is mounted on the film substrate, and the output terminals are connected to the first wirings between the film substrate and the drain driver. The output terminal includes first group terminals formed in parallel with a longer edge of the drain driver, and second group terminals formed in parallel with the longer edge and disposed between the loner edge and the first group terminals.Type: GrantFiled: October 10, 2013Date of Patent: June 21, 2016Assignees: JAPAN DISPLAY INC., PANASONIC LIQUID CRYSTAL DISPLAY CO., LTD.Inventors: Mitsuru Goto, Hiroko Hayata
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Patent number: 9372376Abstract: A method of manufacturing a liquid crystal display device having a substrate with a display area, a control area adjacent to the display area, and terminals. The method includes forming an interlayer insulating film and an a-Si film below an image signal line in the display area and below a line in the same layer as the image signal line in the control area, forming a scribing line outside the terminals, forming a ground line in the same layer as the scan line outside the scribing line, forming the interlayer insulating film outside the terminal, without forming the a-Si film on the interlayer insulating film, forming a static electricity protection line coupled to the terminal on the interlayer insulating film, the static electricity protection line being coupled to other static electricity protection lines outside the ground line, and, after the steps above, separating the substrate along the scribing line.Type: GrantFiled: December 13, 2013Date of Patent: June 21, 2016Assignees: Japan Display Inc., Panasonic Liquid Crystal Display Co. LTDInventors: Terunori Saitou, Hidekazu Miyake, Takuo Kaitoh, Yoshiharu Owaku
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Patent number: 9372377Abstract: Gate lines are arranged in a first direction. Drain lines are arranged in a second direction. A first electrode has slits formed therein. Aperture regions surrounded by the drain lines and the gate lines include an aperture region including the slits having a first inclined angle and an aperture region including the slits having a second inclined angle, the second inclined angle being different from the first inclined angle. The aperture region including the slits having the first inclined angle and the aperture region including the slits having the second inclined angle are alternately formed in the first direction. Within the aperture regions arranged adjacent to each other in the first direction, a first region and a second region forming a pair by being arranged so as to be opposed to each other via one of the gate lines form one of pixels.Type: GrantFiled: August 21, 2014Date of Patent: June 21, 2016Assignees: JAPAN DISPLAY, INC., PANASONIC LIQUID CRYSTAL DISPLAY CO., LTD.Inventors: Takeshi Sato, Hirotaka Imayama
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Patent number: 9372378Abstract: An embodiment of the invention provides a thin film transistor liquid crystal display (TFT-LCD) array substrate comprising: a gate line and a data line that intersect with each other to define a pixel region; and a pixel electrode and a thin film transistor formed in the pixel region. The thin film transistor comprises: a gate electrode connected with the gate line; a semiconductor island positioned above the gate electrode; and a source electrode and a drain electrode that are formed on the semiconductor island. A surface of the semiconductor island contacting with the source electrode and the drain electrode comprises ohmic contact regions subject to a surface treatment and a region of the semiconductor layer between the source electrode and the drain electrode is covered with a barrier layer. Another embodiment of the invention provides a method of manufacturing a thin film transistor liquid crystal display (TFT-LCD) array substrate.Type: GrantFiled: June 11, 2012Date of Patent: June 21, 2016Assignee: BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.Inventor: Xiang Liu
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Patent number: 9372379Abstract: A thin film transistor substrate, a method for fabricating the same, and a display device including the same are provided. In one aspect of the present invention, there is provided a thin film transistor substrate comprising a substrate, a semiconductor layer formed on the substrate, a gate insulating film formed on the semiconductor layer, a gate electrode formed on the gate insulating film, an interlayer insulating film formed on the gate electrode and including a source contact hole and a drain contact hole for exposing portions of the semiconductor layer, and a source electrode and a drain electrode respectively inserted into the source contact hole and the drain contact hole. The interlayer insulating film includes a first convex portion formed at an inlet of the source contact hole and at an inlet of the drain contact hole.Type: GrantFiled: December 20, 2013Date of Patent: June 21, 2016Assignee: Samsung Display Co., Ltd.Inventors: Dan Bi Choi, Jung Hun Lee
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Patent number: 9372380Abstract: The present invention is directed to a display fluid comprising charged composite pigment particles dispersed in a solvent. The composite pigment particles have a density which matches to the density of the solvent in which they are dispersed. A display fluid comprising the composite pigment particles provides improved display performance.Type: GrantFiled: July 13, 2012Date of Patent: June 21, 2016Assignee: E INK CALIFORNIA, LLCInventors: Hui Du, Yu Li, Wei-Ho Ting, HongMei Zang, Ming Wang
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Patent number: 9372381Abstract: Disclosed herein are methods, structures, and devices that compensates for modulator loss and modulation inefficiencies introduced by mask misalignments in opposite oriented pn type junction modulators. More specifically, Mach-Zehnder type optical modulators are disclosed wherein both arms in the MZI modulator are arranged in a push-pull configuration and configured to experience pn type junctions of two orientations wherein both arms further configured to experience the same length of waveguide with a pn type junction of each orientation.Type: GrantFiled: October 18, 2013Date of Patent: June 21, 2016Assignee: Acacia Communications, Inc.Inventors: Diedrik Vermeulen, Long Chen, Christopher Doerr
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Patent number: 9372382Abstract: A rotary mechanism is provided, including a first housing, a second housing, a rotary module, an elastic element, and a speed-reduction module. The rotary module connects to the first housing and extends therefrom to connect with the second housing. The elastic element connects the second housing and the rotary module. The speed-reduction module connects to the rotary module. When an external force is exerted on the second housing, and the second housing rotates relative to the first housing along a first direction, the elastic element stores an elastic potential energy. When the external force is released, the second housing rotates relative to the first housing along a second direction by the elastic force. The second direction is opposite to the first direction, and the speed-reduction module reduces the rotary speed of the second housing relative to the first housing.Type: GrantFiled: November 14, 2014Date of Patent: June 21, 2016Assignee: HTC CORPORATIONInventors: Ernest Euan Tien, Chun-Ta Huang
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Patent number: 9372383Abstract: A plate provides clearance between a camera and a quick-release receiver securing the camera to a support.Type: GrantFiled: February 27, 2015Date of Patent: June 21, 2016Assignee: Really Right Stuff, LLCInventors: Joseph M. Johnson, Sr., Matthew L. Burk
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Patent number: 9372384Abstract: A quick attachment and release mounting mechanism for a camera. The mechanism includes a clamping base with clamping structure adapted to be secured around an object, such as a paddle, and an adapter. The clamping base includes a receptacle which is trapezoidal and narrower at the top, and also tapers from one end to the other. The receptacle is disclosed forwardly of the clamping structure. The adapter includes a fastener adapted to engage a camera, and a leading portion with a shape that is complementary to that of the receptacle. A latch mechanism is provided to latch the adapter and receptacle together. The latch mechanism is shielded from accidental disengagement by a frame.Type: GrantFiled: May 27, 2015Date of Patent: June 21, 2016Inventors: Andrew John Hudson, Caralin Riva Adair
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Patent number: 9372385Abstract: A panoramic device includes a base member and a clamp member rotatably interconnected within a single plane of rotation with the base that includes a first rotatable knob to selectively inhibit the rotation of the clamp member with respect to the base. The upper surface includes a central region that is at a different elevation than another portion of the upper surface. The clamp includes a pair of opposed surfaces suitable to detachably secure a camera thereto. The one of the opposed surfaces is maintained in a fixed relationship with respect to the clamp member. The other one of the opposed surfaces is in a movable relationship with respect to the clamp member using a second rotatable knob. The first knob and the second knob are rotatably connected with respect to one another.Type: GrantFiled: May 28, 2015Date of Patent: June 21, 2016Assignee: Really Right Stuff, LLCInventor: Joseph M. Johnson, Sr.
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Patent number: 9372386Abstract: A projection system includes a first projector and a second projector. The projection system superimposes images projected from the first and second projectors on a projection surface and displays a projected image. The projection system includes a support configured to support the first projector and the second projector. The support supports the first projector and the second projector in positions where projection distances from the first projector and the second projector to the projection surface are different.Type: GrantFiled: April 4, 2013Date of Patent: June 21, 2016Assignee: Seiko Epson CorporationInventors: Daigo Yamano, Hideki Takasuka
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Patent number: 9372387Abstract: A laser projector includes a laser light source to emit laser light modulated in accordance with image information, a scanner to drive the laser light along two axes in horizontal and vertical directions and make scanning two-dimensionally with the laser light, a scanning mirror drive part to produce a drive signal of the scanner, a light source data conversion part to change arrangement in a horizontal direction of data applied to the laser light source and a timing generation part to synchronize the scanning mirror drive part with the light source data conversion part, and a start direction of laser scanning in the horizontal direction is changed every frame of the image information.Type: GrantFiled: February 1, 2013Date of Patent: June 21, 2016Assignee: Hitachi Consumer Electronics Co., Ltd.Inventors: Yoshiho Seo, Tomoki Kobori, Satoshi Ouchi, Koji Hirata, Junichi Yokoyama, Hidehiro Ikeda, Masayuki Fukui, Masahiko Yatsu, Tatsuya Ishikawa
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Patent number: 9372388Abstract: There is provided a projection optical system (1) that projects from a first image plane on a reducing side to a second image plane on an enlargement side, including a first refractive optical system (11) that includes eight lenses (L1) to (L8) and forms a first intermediate image (31) on the enlargement side using light that is incident from the reducing side, a second refractive optical system (12) that includes six lenses (L9) to (L14) and forms the first intermediate image (31) on the reducing side into a second intermediate image (32) on the enlargement side, and a first reflective optical system (20) that includes a first reflective surface (21a) with positive refractive power that is positioned closer to the enlargement side than the second intermediate image (32).Type: GrantFiled: July 5, 2012Date of Patent: June 21, 2016Assignee: NITTOH KOGAKU K.K.Inventor: Takahiko Matsuo
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Patent number: 9372389Abstract: According to one embodiment, a projector includes a light source unit, a light scanning unit, and a focus controller. The light source unit emits laser light. The light scanning unit includes a holder and a reflective surface. The holder is capable of a first rotation operation around a first direction. The reflective surface is held by the holder and is capable of a second rotation operation around a second direction intersecting the first direction. The light scanning unit scans the laser light by the first and second rotation operations. The focus controller is provided between the light source unit and the light scanning unit in an optical path of the laser light to modify a convergence of the laser light. An angle between a plane including the first and second directions, and an image surface is not less than 80 degrees and not more than 100 degrees.Type: GrantFiled: February 4, 2014Date of Patent: June 21, 2016Assignee: KABUSHIKI KAISHA TOSHIBAInventors: Masatoshi Hirono, Masataka Shiratsuchi
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Patent number: 9372390Abstract: A thermal processor including a rotatable hollow drum including a drum core having an interior surface and an exterior surface, and a radiant heater positioned within an interior of the drum and configured to provide radiant energy to heat the drum, wherein at least one radiant energy absorption characteristic of the interior of the drum varies across its longitudinal width Wd so that selected areas of the interior of the drum absorb more radiant energy than other areas of the interior of the drum so as to compensate for non-uniform heat loss from the drum and to provide the exterior surface of the drum core at a desired temperature which is substantially uniform across the longitudinal width of the drum core.Type: GrantFiled: January 9, 2014Date of Patent: June 21, 2016Assignee: Carestream Health, Inc.Inventors: Robert R. Brearey, John T. Olson, Kent R. Struble
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Patent number: 9372391Abstract: A method and system for fracturing or mask data preparation or optical proximity correction or proximity effect correction or mask process correction is disclosed in which a set of shaped beam shots is determined that is capable of forming a pattern on a surface, where the set of shots provides different dosages to different parts of the pattern, and where the dose margin from the set of shots is calculated. A method for forming patterns on a surface is also disclosed.Type: GrantFiled: July 25, 2015Date of Patent: June 21, 2016Assignee: D2S, Inc.Inventors: Akira Fujimura, Harold Robert Zable
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Patent number: 9372392Abstract: In one example, a reticle disclosed herein includes a body having a center, an arrangement of a plurality of exposure patterns, wherein a center of the arrangement is offset from the center of the body, and at least one open feature defined on or through the body of the reticle. In another example, a method is disclosed that includes forming a layer of photoresist above a plurality of functional die and a plurality of incomplete die, exposing the photoresist material positioned above at least one of the functional die and/or at least one of the incomplete die, performing an incomplete die exposure processes via an open feature of the reticle to expose substantially all of the photoresist material positioned above the plurality of incomplete die, and developing the photoresist to remove the portions of the photoresist material positioned above the incomplete die.Type: GrantFiled: July 8, 2014Date of Patent: June 21, 2016Assignee: GLOBALFOUNDRIES Inc.Inventors: Martin Mazur, Dietmar Henke, Hans-Juergen Thees
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Patent number: 9372393Abstract: A mask blank for manufacturing a transfer mask adapted to be applied with ArF excimer laser exposure light that has a transparent substrate and a light-shielding film formed into a transfer pattern. The light-shielding film has at least two-layers, one a lower layer composed mainly of a first material containing a transition metal, silicon, and nitrogen, and the other an upper layer composed mainly of a second material containing a transition metal, silicon, and nitrogen. A ratio of a first etching rate of the lower layer to a second etching rate of the upper layer is 1.0 or more and 5.0 or less in etching carried out by supplying a fluorine-containing substance onto a target portion and irradiating charged particles to the target portion. Another ratio satisfies the following formula CN??0.00526CMo2?0.640CMo+26.624.Type: GrantFiled: July 10, 2014Date of Patent: June 21, 2016Assignee: HOYA CORPORATIONInventors: Atsushi Kominato, Osamu Nozawa, Hiroyuki Iwashita, Masahiro Hashimoto
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Patent number: 9372394Abstract: Aspects of the present invention relate to a test photomask and a method for evaluating critical dimension changes in the test photomask. Various embodiments include a test photomask. The test photomask includes a plurality of cells having a varied density pattern. The plurality of cells include a first group of cells arranged along a first line, the first group of cells having a first combined density ratio. The plurality of cells also include a second group of cells arranged along a second line, the second group of cells having a second combined density ratio. In the plurality of cells, the second combined density ratio for the second group of cells is equal to the first combined density ratio of the first group of cells. The varied density pattern is configured to substantially neutralize fogging effects.Type: GrantFiled: January 24, 2014Date of Patent: June 21, 2016Assignees: International Business Machines Corporation, Toppan Printing CO., LTD.Inventors: Brian N. Caldwell, Yuki Fujita, Raymond W. Jeffer, James P. Levin, Joseph L. Malenfant, Jr., Steven C. Nash
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Patent number: 9372395Abstract: A method of manufacturing a mask, the method including forming initial ribs such that forming the initial ribs includes forming at least two photoresist patterns such that the at least two photoresist patterns have different widths, are formed on at least one side of a mask substrate, and overlap each other, and performing an etching process at least two times; and forming final ribs such that the final ribs have curved sides having a different curvature radius than a curvature radius of initial curved sides of the initial ribs and have defined slit patterns, forming the final ribs including removing all but one of the at least two photoresist patterns, and performing an etching process.Type: GrantFiled: April 24, 2014Date of Patent: June 21, 2016Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Valeriy Prushinskiy, Minsoo Kim
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Patent number: 9372396Abstract: An imprint lithography apparatus and manufacturing method can lead to mechanical stress being formed in a substrate to which an imprint pattern is being applied. This may cause strain within the substrate leading to misalignment of a subsequent pattern with an earlier pattern in a part of the substrate, which is strained. An apparatus and method is disclosed which allows for stress relaxation in the substrate prior to further patterning to reduce, minimize or prevent such misalignment from residual strain. This is achieved by locally unclamping a portion of substrate (including optionally the entire substrate) from a corresponding portion of substrate holder so that mechanical stress leading to local strain may relax prior to further patterning. To overcome residual frictional force between the substrate and substrate holder, the substrate and substrate holder may be physically separated prior to further patterning.Type: GrantFiled: October 15, 2009Date of Patent: June 21, 2016Assignee: ASML NETHERLANDS B.V.Inventors: Yvonne Wendela Kruijt-Stegeman, Andre Bernardus Jeunink, Johannes Petrus Martinus Bernardus Vermeulen
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Patent number: 9372397Abstract: The disclosure relates to methods of printing indicia on a substrate using a tip array comprised of elastomeric, compressible polymers. The tip array can be prepared using conventional photolithographic methods and can be tailored to have any desired number and/or arrangement of tips. Numerous copies (e.g., greater than 15,000, or greater than 11 million) of a pattern can be made in a parallel fashion in as little as 40 minutes.Type: GrantFiled: April 25, 2009Date of Patent: June 21, 2016Assignee: NORTHWESTERN UNIVERSITYInventors: Chad A. Mirkin, Fengwei Huo, Zijian Zheng, Gengfeng Zheng
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Patent number: 9372398Abstract: Provided herein are block copolymer thin film structures and methods of fabrication. The methods involve directing the assembly of ABA triblock copolymers such that desired features are formed by domains of the assembled ABA triblock copolymer. In some embodiments, an ABA triblock copolymer is directed to assemble by a chemical pattern. Chemical patterns with periods much different than the natural period of the ABA triblock copolymer may be used to direct assembly of the ABA triblock copolymer.Type: GrantFiled: July 6, 2012Date of Patent: June 21, 2016Assignee: Wisconsin Alumni Research FoundationInventors: Paul Franklin Nealey, Shengxiang Ji
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Patent number: 9372399Abstract: An imprint lithography method is disclosed for reducing a difference between an intended topography and an actual topography arising from a part of a patterned layer of fixed imprintable medium. The method involves imprinting an imprint lithography template into a layer of flowable imprintable medium to form a patterned layer in the imprintable medium, and fixing the imprintable medium to form a patterned layer of fixed imprintable medium. Local excitation is applied to the part of the patterned layer to adjust a chemical reaction in the part of the patterned layer to reduce the difference between the intended topography and the actual topography arising from the part of the fixed patterned layer of imprintable medium when this is subsequently used as a resist for patterning the substrate. An imprint medium suitable for imprint lithography with the method is also disclosed.Type: GrantFiled: July 21, 2011Date of Patent: June 21, 2016Assignee: ASML NETHERLANDS B.V.Inventors: Martinus Bernardus Van Der Mark, Vadim Yevgenyevich Banine, Andre Bernardus Jeunink, Johan Frederik Dijksman, Sander Frederik Wuister, Emiel Andreas Godefridus Peeters, Johan Hendrik Klootwijk, Roelof Koole, Christianus Martinus Van Heesch, Ruediger Guenter Mauczok, Jacobus Bernardus Giesbers
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Patent number: 9372400Abstract: A grayscale mask plate and method of fabricating the same, a color film substrate and method of fabricating the same, and a display device are disclosed. The grayscale mask plate comprises a transparent substrate and a light blocking layer on the transparent substrate. The light blocking layer comprises an exposure region with an optical translucent film which has a light blocking ratio decreasing gradually or stepwise from a center of the optical translucent film to an edge of the optical translucent film. As a result, the intensity of light transmitted through the exposure region is uniform, such that a post spacer fabricated by the grayscale mask plate has a relatively flat top face. Thus, the post spacer exhibits a linear variation in its hardness under the action of an external force.Type: GrantFiled: September 29, 2014Date of Patent: June 21, 2016Assignees: Boe Technology Group Co., Ltd., Beijing Boe Display Technology Co., Ltd.Inventors: Hongjiang Wu, Jianfeng Yuan, Min Li
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Patent number: 9372401Abstract: A method of forming micropatterns separated over a misalignment margin includes forming a first mold pattern including a main pattern and a separation-assist pattern, forming a first spacer mask having a first width around the first mold pattern, forming a second mold pattern using the first spacer mask as an etch mask, forming a second spacer mask having a second width around the second mold pattern, and forming a target pattern using the second spacer mask as an etch mask.Type: GrantFiled: August 17, 2012Date of Patent: June 21, 2016Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Ki-jeong Kim, Jae-ho Min, Kyoung-sub Shin, Dong-hyun Kim
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Patent number: 9372402Abstract: Described herein are organometallic or inorganic complexes with high extreme ultraviolet (EUV) optical density (OD) and high mass density for use in thin films. These thin films are used as high resolution, low line edge roughness (LER) EUV photoresists. The complexes may also be included in nanoparticle form for use in photoresists.Type: GrantFiled: September 13, 2013Date of Patent: June 21, 2016Assignee: The Research Foundation for the State University of New YorkInventors: Daniel Freedman, Miles Marnell, Robert Brainard, Brian Cardineau
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Patent number: 9372403Abstract: A chemically amplified photosensitive resin composition including a compound represented by formula (1) and/or formula (4), a resin having an acid-dissociative dissolution-controlling group whose solubility in alkali increases under the action of an acid or an alkali-soluble resin, a photoacid generator, and an organic solvent, in which the solid concentration is 40% by mass to 65% by mass. R1, R2, and R3 independently represent a hydrogen atom or an alkyl group, R4 represents a group represented by formula (2) or (3), and R5 and R6 represent a monovalent hydrocarbon group which may have a substituent.Type: GrantFiled: August 4, 2014Date of Patent: June 21, 2016Assignee: TOKYO OHKA KOGYO CO., LTD.Inventors: Makiko Irie, Shota Katayama
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Patent number: 9372404Abstract: The invention provides an organic film composition comprises (A) a heat-decomposable polymer, (B) an organic solvent, and (C) an aromatic ring containing resin, with the weight reduction rate of (A) the heat-decomposable polymer from 30° C. to 250° C. being 40% or more by mass. There can be provided an organic film composition having not only a high dry etching resistance but also an excellent filling-up or flattening characteristics.Type: GrantFiled: April 30, 2013Date of Patent: June 21, 2016Assignee: SHIN-ETSU CHEMICAL CO., LTD.Inventors: Takeru Watanabe, Seiichiro Tachibana, Toshihiko Fujii, Kazumi Noda, Toshiharu Yano, Takeshi Kinsho
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Patent number: 9372405Abstract: The pressure sensor detects a pressure in the operation chamber when the first opening/closing valve is opened at a time of starting a replenishment of the chemical liquid into the chemical liquid pump. The flow rate sensor detects an exhaust flow rate exhausted from the operation chamber.Type: GrantFiled: January 17, 2012Date of Patent: June 21, 2016Assignee: TOKYO ELECTRON LIMITEDInventors: Toshinobu Furusho, Takahiro Ookubo, Takashi Sasa, Tsuyoshi Nogami
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Patent number: 9372406Abstract: A film layer on a substrate of the wafer is patterned to form a first plurality of areas of the film layer and a second plurality of areas of the film layer. The first plurality of areas of the film layer is removed. The second plurality of areas of the film layer is kept on the substrate. A first portion of the film layer is kept on the substrate. A first edge of the first portion of the film layer is substantially near an edge of the wafer. The first portion of the film layer defines a boundary for the wafer.Type: GrantFiled: February 11, 2013Date of Patent: June 21, 2016Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chun-Wei Chang, Wang-Pen Mo, Hung-Chang Hsieh
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Patent number: 9372407Abstract: The invention pertains to an exposure apparatus, a method for exposing a photosensitive element to radiation using the exposure apparatus, and a method for preparing a printing form from the photosensitive element. The exposure apparatus includes a base assembly having an exposure bed that supports the photosensitive element, and a lamp housing assembly having two or more lamps. The lamp housing assembly includes an air distribution assembly having an air chamber that is disposed adjacent to the lamps and pressurized to provide uniform distribution of air exiting the air chamber to impinge a backside of each of the lamps. The air exiting the chamber and impinging the lamps is controlled by monitoring the temperature of the lamps and/or the irradiance emitting from the lamps.Type: GrantFiled: April 3, 2014Date of Patent: June 21, 2016Assignee: E I DU PONT DE NEMOURS AND COMPANYInventors: Volker Struewe, Helmut Luetke, Rolf Schwan