Abstract: The present invention generally relates to a fodder-feeding disc wire driving device having a tension management unit, the driving device including: a drive motor; a drive sprocket having multiple protrusions on a circumference thereof; an idle wheel provided at a position adjacent to the drive sprocket such that the disc wire moved by the drive sprocket passes over the idle wheel; a tension adjustment unit connected to a central shaft of the idle wheel, the tension adjustment unit being movably provided on a line extending between a central axis of the drive sprocket and a central axis of the idle wheel; a casing having a disc wire inlet and a disc wire outlet; a tension measurement unit mechanically provided between the casing and the tension adjustment unit.

Abstract: An apparatus comprising a hopper and an auger conveyor for conveying solid items, wherein the auger conveyor comprises an auger and an outlet pipe enclosing the auger along at least a part of the length of the auger, the outlet pipe having an inlet end and an outlet end, wherein the outlet pipe is mounted at its inlet end to the hopper for receiving solid items from the hopper through an outlet opening near the bottom of the hopper, and the auger extends partly along at least a part of the bottom of the hopper, partly inside the outlet pipe along substantially the full length thereof, and wherein at least a part of the inner surface of the hopper above the outlet opening is inclined towards the direction of conveyance of the auger conveyor.

Abstract: The discharge accuracy of unit sortation is improved by making real time adjustments to the discharge timing of the carrier based on the determined actual position of each article on respective carriers. The adjustments are applied at the time the discharge command is given.

Abstract: A wear resistant pipe fitting includes an inlet end in fluid communication, in use, with a first linear pipe segment, and an outlet end in fluid communication, in use, with a second linear pipe segment. The pipe fitting includes a first eccentric reducer arranged to receive a slurry or pipeline fluid from the first linear pipe section and deliver the slurry or pipeline fluid to a second eccentric reducer; the second eccentric reducer arranged to receive the slurry or fluid from the first eccentric reducer and deliver the slurry or pipeline fluid to the second linear pipe section; and, a flow interrupter device is positioned within the first eccentric reducer for disrupting the flow of the slurry or pipeline fluid before the slurry or fluid enters the second eccentric reducer.

Abstract: A glass bottle array lifting and transferring apparatus is operable to vertically lift a two-dimensional arrayed layer of bottles, and in particular glass bottles, and transfer the lifted arrayed layer of bottles horizontally from a stack of bottles. More specifically, the present invention pertains to an apparatus having pluralities of pairs of rails that are operable to lift a top, two-dimensional arrayed layer of glass bottles from the top of a stack of bottles on a pallet, then transfer the lifted bottles horizontally to a position over an accumulator table and then lower the bottles onto the surface of the accumulator table.

Abstract: A robotic carton unloader for automatic unloading of cartons from a carton pile, such as a carton pile stacked within a trailer. In various embodiments, a robotic carton unloader may comprise a conveyor system, a robotic positioner, and a manipulator having a conformable face configured to conform to irregularities of the carton pile, and the manipulator may be movable attached to an end of the robotic positioner.

Abstract: A paper feed apparatus includes a paper feeding portion that sends-out a paper placed in a paper placing tray, and is used in an image forming apparatus such as a multifunction machine. The paper feed apparatus comprises a first regulating portion and a second regulating portion that are arranged in the vicinity of a downstream side of a paper feeding position by the paper feeding portion. The first regulating portion is arranged outside a second width paper passage area to regulate a movement of a first width paper such as A4 paper placed in the paper placing tray toward a feeding direction. On the other hand, the second regulating portion is arranged inside the second width paper passage area to regulate a movement of a second width paper such as a name card placed in the paper placing tray toward a feeding direction.

Abstract: A conveying device includes: a housing having a conveyance path; a first roller disposed on the conveyance path; a second roller which is opposed to the first roller; a guide member whose state is changeable between a first state in which the guide member partly defines the conveyance path and a second state in which the guide member exposes the conveyance path; a roller holder supporting the second roller; an urging force applier configured to apply, to the second roller, an urging force in a first direction directed from the second roller toward the first roller; and an urging force adjuster configured to adjust the urging force to a first value when the guide member is in the first state and adjust the urging force to a second value when the guide member is in the second state, the second value being less than the first value.

Abstract: An automatic document feeder includes a sheet feeding tray on which a document is stacked; a slit glass on which the document is scanned while moving; a discharge path in which the document is conveyed after the document is scanned; a document discharge unit to which the document is discharged through the discharge path; and a stamp device that makes a mark on a scanned surface of the document being in the discharge path. The stamp device includes a printing unit that faces the scanned surface of the document. The printing unit is movable between a first position at which the printing unit faces the document being in the discharge path and a second position at which the printing unit is retracted from the discharge path.

Abstract: A feeding device in manufacturing which is configured to feed a carrier tape includes a transmission mechanism and a buffering mechanism. The transmission mechanism is configured to receive the carrier tape and transfer the carrier tape to the buffering mechanism. The buffering mechanism includes a slide assembly, a feeder assembly, and an inductor. The slidable feeder assembly is mounted to the slide assembly, and is configured to receive the carrier tape transferred from the transmission mechanism. The slide assembly moves the feeder assembly. The inductor is mounted to one side of the slide assembly, and senses distances from the feeder assembly, to control a feeding speed of the transmission mechanism.

Abstract: The invention relates to a method for adhering an object (12) having an adhesive tape (16) preferably having a liner (26), wherein the object having the adhesive tape contacts and is applied to the object during transport of the object having the likewise transported adhesive tape and wherein the speed of the object and the speed of the adhesive tape are synchronized during the adhesion. In order to enable adhesion of the object without influencing the adhesive tape, whereby the adhesive effect could be negatively influenced, according to the invention the object is transported by means of a handling arrangement and both the velocity and acceleration curves of the object are transferred to the transport of the adhesive tape via an axis of the handling device.

Abstract: An improved manually operated taping device provides for control of the leading end or a tape being applied, which may be obtained by a brake action of adhesive grip or both and may also include controlled tape cutting action and a safety cutting knife retaining mechanism.

Abstract: A fiber bundle guide 1 includes a cylindrical guide roller 11, a support member 12 which rotatably supports the guide roller 11, and a movable mechanical section 13 arranged between the guide roller 11 and the support member 12, so that the guide roller 11 swings in response to widthwise changes in the traveling path of the fiber bundle Y. According to this fiber bundle guide, it is possible to prevent excessive shifting of the fiber bundle Y toward one of both sides of the circumferential edge of the guider roller 11, preventing shrinking or bending of the fiber bundle Y due to the contact of the fiber bundle Y to the flange 112 of the guide roller 11, which makes it possible to guide the fiber bundle Y without causing twisting of the bundle.

Abstract: A detacher for detaching from a roll a spool supporting the roll, and the detacher includes a detacher body; and a plurality of hooking parts disposed on a circumference of the detacher body to engage a plurality of projections of a flange disposed at an end of the spool. With the hooking parts engaging the projections of the flange, the roll and the detacher are relatively displaced so that the spool is detached from the roll.

Abstract: A sliding guide shoe for an elevator for conveying persons or goods includes a guide shoe housing and a two-part insert, which insert is inserted in the guide shoe housing for guiding an elevator car along a guide rail extending in a longitudinal direction. The insert includes a slide element connected with a support element and removable laterally from the sliding guide shoe in the longitudinal direction. The slide element is insertable into or removable from the support element only from one longitudinal side.

Abstract: System, including methods and apparatus, for mechanically moving components with lifting machinery. In some embodiments, the system may comprise a lug mounted to a component, and a clasp. The clasp may include a body configured to receive the lug. The clasp also may include a gate mechanism configured to support the body when the clasp is supported by lifting machinery, and to move with respect to the body between (a) an open position that allows removal of the lug from the body when the gate mechanism is not supporting the body and (b) a closed position that prevents removal of the lug from the body when the gate mechanism is supporting the body.

Abstract: A portable lifting device is provided that includes a pair of telescoping parallel beam assemblies attached on either end to a pair of stanchion assemblies. Each stanchion assembly includes a top and bottom member as well as at least one vertical member. The bottom member of each beam assembly rests on a deck support member, and the height of each vertical member may be adjustable. A sliding guide assembly is slidably mounted on the parallel beam assemblies and includes a cross-member between the parallel beams that acts as the connection point for a lifting medium. This allows for a higher support point for the lifting medium than would be provided by a conventional single-beam device.

Abstract: The present invention provides a lift system comprising a drum that rotates about an axis, a drive mechanism operable to rotate the drum about the axis, an elongate member (e.g., a cable) having a wound portion wound around the drum and a vertical portion extending downward to the article being lifted, and a low profile adjuster for adjusting a vertical length of the elongate member. The low profile adjuster comprises a first guide adapted to support the article to be lifted and including a first pathway, and a second guide movable relative to the first guide. The elongate member transitions from the vertical portion, through the first pathway to a non-vertical (e.g., horizontal) portion, and to the second guide. Adjustment of a distance between the first guide and the second guide results in adjustment of a vertical position of the first guide relative to the elongate member.

Abstract: The invention relates to a hydraulic apparatus comprising a hydraulic pump (30) which is connectable to a hydraulic fluid tank, an electric motor (2) as a drive means for the hydraulic pump (30), which electric motor comprises a motor shaft and a motor housing cover (4), and a control valve assembly (12) connected to the pump (30) to control at least one hydraulic consumer which is connectable to the pump (30) and is to be supplied by the pump (30) with hydraulic fluid from the hydraulic fluid tank, wherein the pump (30) is fixed on the motor housing cover (4) and the motor housing cover (4) comprises a holding adapter (10) on which the control valve assembly (12) is fixed.

Abstract: A multi-purpose wrecking tool in which a dual prying elements are coupled to a crossbar. Each of the dual prying elements having a pair of pry arms. Each of the pry arms extending at the same length from the crossbar. A handle coupled to a center portion of the crossbar. A slight curvature at the end of the handle connecting to the crossbar providing a predetermined angle between the handle and the crossbar. Each of the pry arms and the end of the handle including V shaped notches. The crossbar and pry arms provide controlled movement of the tool and improved leverage for removing of housing materials with reduced damage to the materials.

Abstract: A device for use in connection with a manhole covers having two generally opposing slots includes a first member including a first section and a second section including a first attachment member. The device further includes a second member including a second attachment member. The first member and the second member are rotatably connected so that a distance between the first attachment member and the second attachment member can be adjusted. The first section extends from the second section so that a proximal end thereof is at a height above the surface of the manhole cover of no greater than 3 feet when the first attachment member is in attachment with one of the two slots and the second attachment member is in attachment with the other of the two slots.

Abstract: A funnel system for transferring liquids from a dispenser to a receptacle including a mouth end and a smaller outlet end the funnel formed as a hollow conical portion with an angled wall having a rim around the mouth end, the outlet end is perpendicular to a central axis running vertically through the center of the funnel. A vent channel runs through the interior of the wall to a vent opening inside the hollow conical portion, where the vent channel includes an inlet port. A set of cams are located at preselected points and adapted to mate with a set of collars having threads sized to thread onto a selected receptacle having a threaded inlet and fixedly engage the receptacle inlet.

Abstract: A dispensing apparatus for cooled fluid, provided with a fluid holder, a cooling system near the fluid holder for cooling fluid in the fluid holder, a tap for dispensing fluid from the fluid holder, and means for active heating of fluid in said fluid holder in order to prevent the temperature of said fluid from dropping below a reference temperature.

Abstract: A container has an outflow arranged in the vicinity of the bottom and a vortex breaker mounted upstream from the outflow for preventing foaming. The vortex breaker has a vertical main wall and two vertical side wings oriented away from one another to define a T-shape. The main wall merges into a fixing arm. A method also is provided for producing the vortex breaker. The method includes a) cutting a flat plate to define a main wall, two side wings, and a fixing arm connected to the main wall; and b) folding out the side wings in opposing directions in each case into a final position arranged transverse to the main wall. The vortex breaker is applicable in chemistry, biotechnology, and filtration technology.

Abstract: A process for making mouthpieces for the bits of horses and draught animals includes the following steps: making the mouthpiece with titanium or titanium alloys through a turning and removal operation, sandblasting with zirconium microspheres, and passivation through oxidation of the surface titanium by means of acid solutions. The mouthpiece obtained with such a process is completely made of titanium or titanium alloys and has a passivated surface, that is, a surface that is better resistant to corrosion.

Abstract: A portable saddle stand apparatus that can be secured to an existing structure allows a saddle to be securely placed upon the saddle stand apparatus when the respective saddle is not fastened to an animals back by a girth. The saddle stand apparatus includes a saddle supporting structure, a front mount, a rear mount, a front strap fastener, and a rear strap fastener. The front mount attaches with a front mount receiving bracket of the saddle supporting structure, and the rear mount attaches with a rear mount receiving bracket of the saddle supporting structure. The front strap fastener secures the front mount to the saddle supporting structure while securing a front end of the saddle stand apparatus to the existing structure. Similarly, the rear strap fastener secures the rear mount to the saddle supporting structure while securing a rear end of the saddle stand apparatus to the existing structure.

Abstract: The instant invention provides reinforced microcapillary films and/or foams. The inventive reinforced film and/or foam have a first end and a second end, wherein the film and/or foam comprises: (a) a matrix comprising a first thermoplastic material, (b) at least one or more channels disposed in parallel in said matrix from the first end to the second end of the film or foam, wherein said one or more channels are at least 1 ?m apart from each other, and wherein each said one or more channels have a diameter in the range of at least 1 ?m; and (c) a second thermoplastic material disposed in said one or more channels, wherein said second thermoplastic material is different than the first thermoplastic material; wherein said film has a thickness in the range of from 2 ?m to 2000 ?m.

Abstract: A capacitance type sensor has a semiconductor substrate having a vertically opened penetration hole, a movable electrode film arranged above the penetration hole such that a periphery portion opposes to a top surface of the semiconductor substrate with a gap provided, and a fixed electrode film arranged above the movable electrode film with a gap with respect to the movable electrode film. A concave portion having at least a part thereof formed by an inclined surface is provided in the top surface of the semiconductor substrate in a region of the top surface of the semiconductor substrate which overlaps the periphery portion of the movable electrode film.

Abstract: According to an embodiment, a MEMS includes a substrate; a substrate; a membrane arranged above the substrate; a first conductor with a first plane, the first conductor being connected to the membrane; and a second conductor with a second plane facing the first plane, the second conductor being arranged with a gap between the first conductor and the second conductor, wherein relative positions of the first conductor and the second conductor change in a direction in which an area of the first plane facing the second plane changes.

Abstract: A MEMS device, such as an accelerometer or gyroscope, fabricated in interconnect metallization compatible with a CMOS microelectronic device. In embodiments, a proof mass has a first body region utilizing a thick metal layer that is separated from a thin metal layer. The thick metal layer has a film thickness that is significantly greater than that of the thin metal layer for increased mass. The proof mass further includes a first sensing structure comprising the thin metal layer, but lacking the thick metal layer for small feature sizes and increased capacitive coupling to a surrounding frame that includes a second sensing structure comprising the thin metal layer, but also lacking the thick metal layer. In further embodiments, the frame is released and includes regions with the thick metal layer to better match film stress-induced static deflection of the proof mass.

Abstract: A method of forming at least one Micro-Electro-Mechanical System (MEMS) includes patterning a wiring layer to form at least one fixed plate and forming a sacrificial material on the wiring layer. The method further includes forming an insulator layer of one or more films over the at least one fixed plate and exposed portions of an underlying substrate to prevent formation of a reaction product between the wiring layer and a sacrificial material. The method further includes forming at least one MEMS beam that is moveable over the at least one fixed plate. The method further includes venting or stripping of the sacrificial material to form at least a first cavity.

Abstract: A composite wafer level MEMS force dies including a spacer coupled to a sensor is described herein. The sensor includes at least one flexible sensing element, such as a beam or diaphragm, which have one or more sensor elements formed thereon. Bonding pads connected to the sensor elements are placed on the outer periphery of the sensor. The spacer, which protects the flexible sensing element and the wire bonding pads, is bonded to the sensor. For the beam version, the bond is implemented at the outer edges of the die. For the diaphragm version, the bond is implemented in the center of the die. An interior gap between the spacer and the sensor allows the flexible sensing element to deflect. The gap can also be used to limit the amount of deflection of the flexible sensing element in order to provide overload protection.

Abstract: A method of forming at least one Micro-Electro-Mechanical System (MEMS) includes forming a beam structure and an electrode on an insulator layer, remote from the beam structure. The method further includes forming at least one sacrificial layer over the beam structure, and remote from the electrode. The method further includes forming a lid structure over the at least one sacrificial layer and the electrode. The method further includes providing simultaneously a vent hole through the lid structure to expose the sacrificial layer and to form a partial via over the electrode. The method further includes venting the sacrificial layer to form a cavity. The method further includes sealing the vent hole with material. The method further includes forming a final via in the lid structure to the electrode, through the partial via.

Abstract: A MEMS sensor comprises a substrate and at least one proof mass having a first plurality of combs. The proof mass is coupled to the substrate via one or more suspension beams such that the proof mass and the first plurality of combs are movable. The MEMS sensor also comprises at least one anchor having a second plurality of combs. The anchor is coupled to the substrate such that the anchor and second plurality of combs are fixed in position relative to the substrate. The first plurality of combs are interleaved with the second plurality of combs. Each of the combs comprises a plurality of conductive layers electrically isolated from each other by one or more non-conductive layers. Each conductive layer is individually coupled to a respective electric potential such that capacitance between the combs varies approximately linearly with displacement of the movable combs in an out-of-plane direction.

Abstract: The present invention provides a method for fabricating slanted copper nanorods. The method includes manufacturing a workpiece configured to include an etch stop layer on a wafer, placing the workpiece in a slanted position, and etching the slanted workpiece, forming a copper (Cu) layer on the slanted workpiece by plating, removing an over-plated portion from the copper layer, and removing a polysilicon (poly Si) excluding copper from the surface of the workpiece. According to the invention, copper nanorod structures having a uniform array can be fabricated in a large area at a high process yield compared to conventional methods. In addition, the angle and diameter of copper nanorods can be controlled as desired so that the applicability thereof can be greatly increased. Moreover, the present invention can be applied to processes for fabricating various devices, including semiconductor devices, MEMSs (microelectromechanical systems), optical devices, gas sensors, display devices, etc.

Abstract: An integrated circuit (IC) structure is provided. The IC structure includes an IC substrate including active devices which are coupled together through a conductive interconnect structure arranged thereover. The conductive interconnect structure includes a series of horizontal conductive layers and dielectric regions arranged between neighboring horizontal conductive layers. The conductive interconnect structure includes an uppermost conductive horizontal region with a planar top surface region. A MEMS substrate is arranged over the IC substrate and includes a flexible or moveable structure that flexes or moves commensurate with a force applied to the flexible or moveable structure. The active devices of the IC substrate are arranged to establish analysis circuitry to facilitate electrical measurement of a capacitance between the uppermost conductive horizontal region and the flexible or moveable structure.

Abstract: A method of forming a semiconductor device includes depositing a light reflecting layer over a substrate. The method also includes forming a protection layer over the light reflecting layer. The method further includes forming an anti-reflective coating (ARC) layer over the protection layer. The method additionally includes forming an opening in the ARC layer, the protection layer and the light reflecting layer exposing the substrate. The method also includes removing the ARC layer in a wet solution comprising H2O2, the ARC layer being exposed to the H2O2 at a flow rate greater than about 10 standard cubic centimeters per minute (sccm).

Abstract: A barrier stack for encapsulating a moisture and/or oxygen sensitive electronic device is provided. The barrier stack comprises a multilayer film having at least one barrier layer having low moisture and/or oxygen permeability, and at least one sealing layer arranged to be in contact with a surface of the barrier layer, wherein the sealing material comprises reactive nanoparticles capable of interacting with moisture and/or oxygen, thereby retarding the permeation of moisture and/or oxygen through defects present in the barrier layer.

Abstract: A system for generating and purifying hydrogen. To generate hydrogen, the system includes inlets configured to receive a hydrogen carrier and an inert insulator, a mixing chamber configured to combine the hydrogen carrier and the inert insulator, a heat exchanger configured to apply heat to the mixture of hydrogen carrier and the inert insulator, wherein the applied heat results in the generation of hydrogen from the hydrogen carrier, and an outlet configured to release the generated hydrogen. To purify hydrogen, the system includes a primary inlet to receive a starting material and an ammonia filtration subassembly, which may include an absorption column configured to absorb the ammonia into water for providing purified hydrogen at a first purity level. The ammonia filtration subassembly may also include an adsorbent member configured to adsorb ammonia from the starting material into an adsorbent for providing purified hydrogen at a second purity level.

Abstract: Disclosed is a process for the production of hydrogen in a reactor system comprising a steam reforming reaction zone comprising a reforming catalyst and a membrane separation zone comprising a hydrogen-selective membrane. The process involves a reaction system of so-called open architecture, wherein the reforming zone and the membrane separation zone operate independently of each other. The invention provides the heat for the reforming reaction through heat exchange from liquid molten salts, preferably heated by solar energy.

Abstract: Methods for the non-hot-injection synthesis of semiconductor nanocrystals are described. For example, a multi-podal cadmium selenide nanocrystal may be produced by a method including heating a degassed mixture comprising cadmium oxide, selenium, trioctylphosphine, and a carboxylic acid in a non-coordinating solvent from about room temperature to about 210° C., where the multi-podal cadmium selenide nanocrystal may be a tetrapodal cadmium selenide nanocrystal.

Abstract: The present disclosure is directed to a method of producing nitric oxide comprising (i) providing a composition comprising a metal-organic framework, and (ii) exposing the composition to a nitric oxide-releasing compound. The disclosure also is directed to compositions, coatings, and medical devices comprising a metal-organic framework.

Abstract: A process for producing a pyrophosphate, particularly melamine pyrophosphate useful as a flame retardant, efficiently in high yield is provided. The process includes firing an orthophosphate, preferably melamine orthophosphate, in the presence of a silicone oil, preferably methylphenyl silicone oil preferably at 120° to 350° C. Examples of useful firing equipment include a hot air dryer, a kneader, a Henschel mixture, a fluidized bed dryer, a rotary kiln, a paddle dryer, an extruder, a vibrating dryer, a far-infrared conveyor furnace, and a microwave firing furnace.

Abstract: A method for manufacturing a carbon nanostructure according to the present invention includes a preparation step of preparing a base body, an oxidization step and a step of growing a carbon nanostructure. In the step of preparing a base body, a base body with at least a part of a contact portion or an integral portion of a catalyst member and a separation member having been oxidized is prepared. In the step of growing a carbon nanostructure, a carbon nanostructure is grown in a separation interface region between the catalyst member and the separation member. The step of growing a carbon nanostructure includes at least one of a step of locally supplying a source gas to a portion of the catalyst member facing the separation interface region where the carbon nanostructure is being grown, and a step of locally heating the separation interface region.

Abstract: The present invention provides methods of preparing functionalized graphene nanoribbons. Such methods include: (1) exposing a plurality of carbon nanotubes (CNTs) to an alkali metal source in the presence of an aprotic solvent to open them; and (2) exposing the opened CNTs to an electrophile to form functionalized graphene nanoribbons (GNRs). The methods may also include a step of exposing the opened CNTs to a protic solvent to quench any reactive species on them. Additional methods include preparing unfunctionalized GNRs by: (1) exposing a plurality of CNTs to an alkali metal source in the presence of an aprotic solvent to open them; and (2) exposing the opened CNTs to a protic solvent to form unfunctionalized GNRs.

Abstract: A filtration material is provided for incorporation in a gas filter that includes an Activated Carbon, Impregnated with Copper, Silver, Zinc, Molybdenum, and Triethlyenediamine (ASZM-TEDA) medium and a macrocyclic organic material. The material is impregnated into the medium in proportions of between 1% and 5% of the medium. The material consists of molecules, each with a binding pocket for binding a metal ion. Also, a method is provided for impregnating porphyrin into a medium of ASZM-TEDA for incorporation in a gas filter. The method includes mixing porphyrin and ASZM-TEDA in a first ratio-by-weight of 1:4 of porphyrin to ASZM-TEDA as a mixture in a container; adding dichloromethane to the mixture in a second ratio-by-weight of 1:133 of porphyrin to dichloromethane as a solution in the container; stirring and refluxing the solution under nitrogen, filtering said mixture from the solution as a carbon residue; and drying the residue.

Abstract: A crystalline silicon ingot and a method of fabricating the same are provided. The method utilizes a nucleation promotion layer to facilitate a plurality of silicon grains to nucleate on the nucleation promotion layer from a silicon melt and grow in a vertical direction into silicon grains until the silicon melt is completely solidified. The increment rate of defect density in the silicon ingot along the vertical direction has a range of 0.01%/mm˜10%/mm.

Abstract: A photovoltaic module and its manufacturing method. The module includes a sintered silicon support including several integrated photovoltaic cells.

Abstract: An apparatus for producing trichlorosilane, including: a reaction vessel in which a supply gas containing silicon tetrachloride and hydrogen is supplied to an internal reaction passageway to produce a reaction product gas containing trichlorosilane and hydrogen chloride; a heating mechanism that heats the interior of the reaction vessel; a gas supply section that supplies the supply gas in the reaction vessel; and a gas discharge section that discharges the reaction product gas from the reaction vessel to the outside, wherein the reaction passageway includes: a supply side passageway which is connected to the gas supply section at a central portion of the reaction vessel and flows the supply gas toward the outside while meandering in the reaction vessel; a return passageway which is connected to a downstream end of the supply side passageway and extends to the central portion of the reaction vessel; and a discharge side passageway that is disposed so as to be connected to a downstream end of the return passag

Abstract: A catalytic process for converting silicon tetrachloride (STC) into trichlorosilane (TCS) utilizes a metal catalyst such as metal silicide at a low temperature such as 500 C, where the STC is reacted with hydrogen gas in the presence of catalyst and under non-thermal equilibrium conditions, to provide for a product gas stream that includes TCS at levels exceeding those obtained at thermal equilibrium, as well as optionally including HCl and unreacted STC.