Abstract: Disclosed are a rinse solution for lithography comprising water and a nonionic surfactant represented by the formula (I) (R1 and R2 may be the same as or different from each other and represent a hydrogen atom or a methyl group, R3 and R4 may be the same as or different from each other and represent a hydrogen atom, a methyl group or an ethyl group, R5 represents a hydrocarbon group having 2 to 5 carbon atoms, in which one or more of a double bond or triple bond are contained, or a phenylene group, and R6 and R7 may be the same as or different from each other and represent a hydrogen atom or a methyl group) and a method for forming a resist pattern by rinsing the resist pattern obtained by exposing and developing a photosensitive resist with the rinse solution for lithography described above.

Abstract: Projection objectives, such as projection objectives of lithography projection exposure apparatuses, as well as related systems, components and methods, such as methods of revising and/or repairing such objectives, are disclosed.

Abstract: An exposure apparatus including a projection system configured to project a plurality of radiation beams onto a target; a movable frame that is at least rotatable around an axis; and an actuator system configured to displace the movable frame to an axis away from an axis corresponding to the geometric center of the movable frame and to cause the frame to rotate around an axis through the center of mass of the frame.

Abstract: An exposure apparatus exposes a substrate by exposure light via liquid between an emitting surface of an optical member and the substrate. The exposure apparatus includes: a liquid immersion member configured to form an immersion liquid space on an object and including a first and second member, the first being disposed at at least a portion of surrounding of the optical member, the second being disposed at at least a portion of surrounding of an optical path of the exposure light below the first member, being movable with respect to the first member and including a second upper and lower surface, the second upper surface being opposite a first lower surface of the first member via a gap, the second lower surface being capable of being opposite to the object, which is movable below the optical member; and a vibration isolator configured to suppress a vibration of the first member.

Abstract: A liquid immersion exposure apparatus includes a projection system, a liquid supply inlet, a liquid collection outlet, a separator fluidically connected to the liquid collection outlet, the separator separating one of liquid and gas, which have been collected via the liquid collection outlet from the other, and a flow-meter configured to measure an amount of the liquid collected via the liquid collection outlet.

Abstract: The present invention relates to an inspection apparatus and method which include projecting a measurement radiation beam onto a target on a substrate in order to measure the radiation reflected from the target and obtain information related to properties of the substrate. In the present embodiments, the measurement spot, which is the focused beam on the substrate, is larger than the target. Information regarding the radiation reflected from the target is kept and information regarding the radiation reflected from the surface around the target is eliminated. This is done either by having no reflecting (or no specularly reflecting) surfaces around the target or by having known structures around the target, the information from which may be recognized and removed from the total reflected beam.

Abstract: An asymmetry compensation method used in a lithography overlay process and including steps of: providing a first substrate, wherein a circuit layout is disposed on the first substrate, a first mask layer and a second mask layer together having an x-axis allowable deviation range and an y-axis allowable deviation range relative to the circuit layout are stacked sequentially on the circuit layout, wherein the x-axis allowable deviation range is unequal to the y-axis allowable deviation range; and calculating an x-axis final compensation parameter and an y-axis final compensation parameter base on the unequal x-axis allowable deviation range and the y-axis allowable deviation range.

Abstract: A system to, and a method to, select a metrology target for use on a substrate including performing a lithographic simulation for a plurality of points on a process window region for each proposed target, identifying a catastrophic error for any of the plurality of points for each proposed target, eliminating each target having a catastrophic error at any of the plurality of points, performing a metrology simulation to determine a parameter over the process window for each target not having a catastrophic error at any of the plurality of points, and using the one or more resulting determined simulated parameters to evaluate target quality.

Abstract: A chuck, chuck control system, lithographic apparatus and method of using a chuck are disclosed.

Abstract: An exposure apparatus exposes an upper surface of a substrate with exposure light through liquid, and includes an optical member that has an emitting surface from which the exposure light is emitted; and a substrate holding apparatus having a holding portion that releasably holds a lower surface of the substrate, and an upper surface provided around the holding portion. The upper surface of the substrate holding apparatus is configured such that the upper surface of the substrate holding apparatus and the upper surface of the substrate held by the holding portion are substantially in a plane. The upper surface of the substrate holding apparatus has a jagged edge portion. The substrate is held by the holding portion such that an edge portion of the substrate held by the holding portion is located along the jagged edge portion of the upper surface of the substrate holding apparatus.

Abstract: A substrate processing apparatus includes an indexer block, a first processing block, a second processing block, and an interface block. The indexer block includes a pair of carrier platforms and a transport section. A carrier storing a plurality of substrates in multiple stages is placed in each of the carrier platforms. The transport section includes transport mechanisms. The transport mechanisms concurrently transport the substrates.

Abstract: An EUV optical apparatus includes a number of adjustable mirrors (22x) on mirror bodies (120). Each mirror body is supported on an actuator (100x) comprising a moving part (132, 134, 136) and a fixed casing part (128, 130). The actuator provides a resilient support (140, 142) for the mirror body so that it is tiltable with two degrees relative to the casing. An electromagnetic motor (166, 170-178) applies first part, under the influence of an applied motive force, the resilient mounting being arranged to provide a biasing force that resists said motive force. A magnetic coupling (102, 104a, 104b) is arranged between the moving and fixed parts so as to provide a counter-biasing force. The counter-biasing force partly opposes said biasing force and thereby reduces the motive force required to effect a given displacement. The actuator can thus be made with reduced size, weight and heat dissipation.

Abstract: Disclosed is a contamination trap arrangement (300) configured to trap debris particles that are generated with the formation of a plasma within a radiation source configured to generate extreme ultraviolet radiation. The contamination trap comprises a vane structure (310) for trapping the debris particles; a heating arrangement (330) for heating the vane structure, the heating arrangement being in thermal communication with the vane structure; a cooling arrangement (350) for transporting heat generated as a result of the plasma formation, away from the vane structure, and a gap (370) between the heating arrangement and the cooling arrangement. The cooling arrangement is in thermal communication with the vane structure via the heating arrangement and the gap and the contamination trap also comprises a heat transfer adjustment arrangement operable to adjust the heat transfer characteristics of a fluid inside of the gap by providing for controllable relative movement between the surfaces defining the gap.

Abstract: The present invention relates to an electrophotographic photosensitive member including an undercoat layer containing metal oxide particles, a binder resin, and an organic acid metal salt having at least one metal element selected from the group consisting of bismuth, zinc, cobalt, iron, nickel, and copper.

Abstract: A triarylamine derivative is represented by general formula (1) shown below. In general formula (1), each R1 independently represents a halogen atom, an optionally substituted alkyl group having a carbon number of 1-6, an optionally substituted alkoxy group having a carbon number of 1-6, or an optionally substituted aryl group having a carbon number of 6-12. Each k independently represents an integer of 0-4, and each m independently represents an integer of 1-3. Each R2 independently represents a halogen atom, an optionally substituted alkyl group having a carbon number of 1-6, an optionally substituted alkoxy group having a carbon number of 1-6, or an optionally substituted aryl group having a carbon number of 6-12. Each p independently represents an integer of 0-4.

Abstract: The invention has a process of preparing a dispersion liquid by dispersing particles containing a charge transporting substance and a binder resin in liquid medium containing a specific liquid to prepare a dispersion liquid and a process of forming a coat of the dispersion liquid, and heating and drying the coat to dissolve the particles containing the charge transporting substance and the binder resin with liquid medium to form a charge transporting layer.

Abstract: An electrophotographic photoreceptor that satisfies excellent transparency, abrasion resistance, and electrophotographic properties (including sensitivity and residual potential after light irradiation) all together is provided. Specifically, an electrophotographic photoreceptor and a resin composition that include therein (1) a polycarbonate resin (A) having a structural unit represented by the following formula (I) and (2) at least one selected from a polycarbonate resin (B) synthesized from a source material that includes therein a bisphenol represented by the following formula (II) and a polyester resin (B?) synthesized from a source material that includes therein a bisphenol represented by the following formula (II). In formulas (I) and (II), each of Ra, Rb, Rc, Rd, Re, and Rf represents, independently from one another, a substituted or non-substituted alkyl group, a substituted or non-substituted cycloalkyl group, or a substituted or non-substituted phenyl group.

Abstract: Provided is a polymer coating composition for a surface layer, comprising a product of a grafting reaction between a fluoroelastomer and at least one of an aminosilane component and an aminofunctionalized fluorosilicone component.

Abstract: A method for producing a developing agent including preparing a dispersion liquid containing first fine particles containing a binder resin and second fine particles containing a color developable compound, a color coupler, and a color eraser, and aggregating the first and second fine particles in the dispersion liquid to form aggregated particles.

Abstract: To provide a toner, which contains: a colorant; a resin; and a releasing agent, wherein a spin-spin relaxation time (T2s) originated from a soft component is 0.10 msec to 0.50 msec, where the soft component is obtained with a hard component from an echo signal of the toner by a solid-echo technique of pulsed NMR, and a proportion of a proton intensity of the soft component is 50.0% or lower.

Abstract: A toner having good environmental stability, low-temperature fixability, development durability, and storage stability is provided. A toner includes toner particles each including a surface layer that contains an organic silicon polymer. The organic silicon polymer is obtained by polymerizing a compound having a specific structure. The surface layers have a particular average thickness Dav. In mapping by focused-ion-beam time-of-flight secondary ion mass spectroscopy, a ratio of silicon ions to carbon ions released from the toner particles upon irradiation of toner particle surfaces with primary ions is a particular value.

Abstract: An electrophotographic imaging device includes a charging device, a cleaning device, and a fuser member that each include hydrophobic carbon nanotubes. The use of hydrophobic carbon nanotubes can increases the charging device's, the cleaning device's, and the fuser member's durability, conductivity, and contaminants deposition.

Abstract: An image forming apparatus includes an irradiation unit for irradiating an image carrier having a formed detection image with light, the irradiation unit being capable of switching a size of a light-emitting region; a light-receiving unit for receiving reflected light of the light irradiated by the irradiation unit and outputting a detection signal corresponding to a light-receiving amount of the reflected light including a specular-reflected light component; a detection unit for detecting one of position information and density information of the detection image based on the detection signal; and a control unit for controlling to switch the size of the light-emitting region to detect one of the position information and the density information of the detection image.

Abstract: A developing cartridge includes: a flexible developer bag, provided with an opening and provided in a frame, for accommodating a developer; and an acting member contactable to the developer bag. The developer bag is fixed to the frame at its upper portion. The developer bag is swingable by contact with the acting member.

Abstract: A developing device mountable in a main body of an image forming device includes: a frame, a developer cartridge attachable to the frame, and a maintaining member. The developer cartridge includes: a casing having an opening; and a shutter movable between an open position and a closed position to open and close the opening. The developer cartridge is movable between a first position to be attached to the frame and mountable in the main body and a second position to be partially detached from the frame and incapable of being mounted in the main body. The shutter moves from the closed position to the open position while the developer cartridge moves from the second position to the first position. The maintaining member maintains the shutter at the closed position when the developer cartridge moves from the second position to the first position.

Abstract: A developing apparatus includes a developer vessel that is provided with a first transporting path, a second transporting path and a third transporting path. The first transporting path and the second transporting path are communicated with each other, and a developer is circulated in the first transporting path and the second transporting path. The third transporting path has a developer discharge port and is provided in an upstream side in a transporting direction of the developer in the second transporting path. Furthermore, an annular plate-like first regulation portion is arranged in an end portion of the second transporting path in a third transporting path side and an annular plate-like second regulation portion opposite to the first regulation portion with a predetermined interval is arranged in an end portion of the third transporting path in a second transporting path side.

Abstract: A developing cartridge is provided. The developing cartridge includes a first frame and a second frame and a layer thickness regulating member. The first frame and the second frame include a first welding surface formed at a periphery of the developer accommodating part correspondingly to a developer accommodating part; and a second welding surface extending continuously from the first welding surface correspondingly to a roller support part. The first welding surface extends in a direction orthogonal to an overlapping direction of the first frame and the second frame. The second welding surface extends to be inclined toward a side of the first frame in the overlapping direction as extending toward the developing roller. The layer thickness regulating member is provided to cover the second welding surface from a side of the second frame in the overlapping direction.

Abstract: Wheels configured to be supported by a metallic roller on an outside of end portions of a contact area and inside of end portions of the transfer belt in terms of a width direction are provided, and the wheels are formed of a non-conductive resin.

Abstract: An image forming apparatus includes: a driving source including only a first driving motor and a second driving motor; a first transfer system that transfers a first driving force generated by the first driving motor; and a second transfer system that transfers a second driving force generated by the second driving motor. The first transfer system transfers the first driving force only to each image carrier and each developing roller. The second transfer system transfers the second driving force to at least a belt driving roller of an intermediate transfer unit, a fixing roller, and a sheet conveyance roller.

Abstract: A fixing device includes a fixing rotary body rotatable in a given direction of rotation and a heater disposed opposite the fixing rotary body to heat the fixing rotary body. A pressing rotary body contacts the fixing rotary body to form a fixing nip therebetween through which a recording medium is conveyed. A separator is disposed downstream from the fixing nip in a recording medium conveyance direction to separate the recording medium from one of the fixing rotary body and the pressing rotary body. The separator includes a separation plate including an upstream portion disposed opposite the fixing nip and at least one slot disposed downstream from the upstream portion in the recording medium conveyance direction.

Abstract: A fixing device includes a heating roller, a fixing roller, an endless fixing belt, a pressure roller, a temperature gauge, and a cooling device. The fixing belt is stretched between the heating roller and the fixing roller. The pressure roller includes a core rod and an elastic layer formed on an outer circumferential surface of the core rod, and is pressed against the fixing roller via the fixing belt to form a nip portion to thermally fix an image on a recording medium passed through the nip portion. The temperature gauge measures the surface temperature of the pressure roller. The cooling device includes plural cooling units arranged parallel to a rotation axis of the pressure roller, and cools the pressure roller while adjusting the amount of cooling for each of the cooling units in accordance with the surface temperature of the pressure roller measured by the temperature gauge.

Abstract: An image formation method includes a step of preparing an electrostatic latent image developer, a transferring step, and a fixation step. The step of preparing an electrostatic latent image developer includes a step of preparing an electrostatic latent image developer containing toner particles having prescribed viscoelasticity characteristics. The fixation step includes steps of heating a recording medium and fixing the toner particles to the recording medium at a pressure not lower than 200 kPa and not higher than 800 kPa.

Abstract: A heater used for a fixing device includes a substrate, first and second conductor patterns formed at either end of the substrate in the short direction of the substrate, a third conductor pattern formed between the first and second conductor patterns and separated from the two conductor patterns, a first heating member disposed between the first and third conductor patterns and electrically connected to the two conductor patterns, and a second heating member disposed between the second and third conductor patterns and electrically connected to the conductor patterns. The heater has both end regions in which the widths of the third conductor pattern in the short direction is smaller than that of a middle portion of the third conductor pattern. The widths of the first and second heating members in the end regions are smaller than the widths of the first and second heating members in the other region, respectively.

Abstract: A device includes a fixing belt, a holder that holds the fixing belt, a pressing member that comes in contact with the fixing belt, a nip-forming-member arranged inside the fixing belt, that forms a nip by coming in contact with the pressing member, a supporting member that supports the nip-forming-member, a side plate to which the nip-forming-member and the supporting member are fixed, and a pressing mechanism that presses a pressing roller to the nip-forming-member via the fixing belt. The supporting member includes at least two plates. The two plates are separated from each other near a contact portion where the plates come in contact with the nip-forming-member. At least a part of each of the plates is a flat surface parallel to a direction of a load applied by the pressing mechanism. Portions of the two plates on a side distant from the contact portion are joined together.

Abstract: A fixing device includes a nip formation pad pressing against a pressure rotator via a fixing rotator to form a fixing nip between the fixing rotator and the pressure rotator. The nip formation pad includes a base and a first thermal conductor sandwiched between the base and the fixing rotator at the fixing nip and having a first thermal conductivity greater than a basic thermal conductivity of the base. A first heater and a second heater are disposed opposite an inner circumferential surface of the fixing rotator to heat the fixing rotator. A rotatable light shield moves to a shield position where the light shield is interposed between the second heater and the fixing rotator to shield the fixing rotator from the second heater. The second heater is disposed at a location where the light shield screens the second heater more readily than the first heater.

Abstract: A fixing belt for a fixing device of an image forming apparatus includes a base layer including a heat-resistant resin and a mesh member embedded in the heat-resistant resin and including a metal member, in which the mesh member includes an opening. The heat-resistant resin fills in the opening. A thickness of the thinnest portion of the mesh member is 40% or more of the thickness of the base layer. A fixing device includes a heating member; a pressure member; and the fixing belt as described above. Further, an image forming apparatus includes an image forming section and the fixing device including the above described fixing belt.

Abstract: An image forming apparatus includes: an image forming device configured to form a toner image on a sheet; a fixing device configured to fix the toner image formed on the sheet by the image forming device at a nip; an executing portion configured to execute an operation in a cleaning mode for cleaning the fixing device by forming a predetermined toner image on a sheet using the image forming device and then by introducing the sheet into the nip; and a notifying device for notifying an operator that a maximum-width sheet usable in the image forming device is to be used in the operation in the cleaning mode.

Abstract: A separation device separates a recording medium ejected from a fixing nip formed between a first rotator and a second rotator from the first rotator. The separation device includes a separator including a front end disposed opposite the fixing nip and the recording medium and a plurality of recesses disposed on the front end of the separator at least in a conveyance span on the separator where the recording medium is conveyed. The plurality of recesses includes a first recess extending in a first extension line that is oblique relative to a recording medium conveyance direction and a second recess adjacent to the first recess and extending in a second extension line that is oblique relative to the recording medium conveyance direction. The second extension line overlaps the first extension line in a direction perpendicular to the recording medium conveyance direction to define an overlap span.

Abstract: A bearing member includes a concave section receiving a spherical body therein, and swing grooves into which end sections of a rotating force transmission pin are inserted. The swing groove at least includes a parallel part an axis and a curved part, an undercut section is not provided in the concave section when the concave section is viewed from an opened side of the concave section in a direction of the axis of the bearing member, and a clearance between the two swing grooves in a direction which is orthogonal to the direction of the axis on the opened side of the concave section is shorter than a distance between both ends of the rotating force transmission pin in the direction which is orthogonal to the axis of the bearing member even when the shaft member is mounted on the bearing member in a posture inclined at the most.

Abstract: A driving force transmission device that transmits a driving force to a rotation body includes a flange member provided in the rotation body, a through shaft that is connected to the flange member to transmit the driving force to the rotation body via the flange member, and an intermediate transmission member that is provided in the through shaft to transmit the driving force to the flange member from the through shaft.

Abstract: A waste toner storing container includes a container main body, a first conveyance portion, and a second conveyance portion. The container main body stores waste toner discharged from a plurality of image-carrying members provided in an image forming apparatus. The first conveyance portion is rotatably provided in the container main body and configured to, by being rotated, convey the waste toner toward one side in a direction along a rotation axis line. The second conveyance portion is rotatably provided below and parallel to the first conveyance portion in the container main body and configured to, by being rotated, convey the waste toner toward another side that is opposite to the one side.

Abstract: An image forming apparatus includes a cartridge-supporting body, a belt, a belt cleaning unit, a waste toner cartridge, and a collective conveying unit. The cartridge-supporting unit supports a plurality of process cartridges. Each process cartridge includes a photosensitive drum and a drum-cleaning unit for collecting waste toner on the photosensitive drum. The belt confronts the plurality of process cartridges when the cartridge-supporting body is in an internal position. The belt cleaning unit collects waste toner on the belt. The waste toner cartridge accommodates both waste toner collected from the plurality of photosensitive drums by the plurality of drum-cleaning units and waste toner collected from the belt by the belt cleaning unit. The collective conveying unit aggregates waste toner collected from the plurality of photosensitive drums by the plurality of drum-cleaning units and conveys collectively the aggregated waste toner to the waste toner cartridge.

Abstract: Printing devices have, among other components, a cartridge positioned within the interior of a device body to receive print media from a sheet feeder. A photoreceptor and marking material are maintained within the cartridge. The photoreceptor transfers marking material from within the cartridge in a pattern to the print media. The printing apparatus also includes a receptacle, that is potentially on the exterior of the device body, which is connected to a supply conduit. A storage container can be positioned in the receptacle. The storage container generally holds only marking material, and the storage container easily and conveniently resupplies the marking material to the cartridge through the supply conduit when the storage container is positioned in the receptacle (e.g., after the cartridge has consumed the original supply of marking material) so as to extend a useful life of the cartridge.

Abstract: An image forming apparatus includes an apparatus main body and a board holding member. The apparatus main body includes an image forming part. The board holding member is attached to the apparatus main body and configured to have a surface to which a board is fixed. The apparatus main body includes an engaging part and a supporting part. The engaging part is configured to engage with a side edge part of the board holding member. The supporting part is configured to support a part closer to an inside than the side edge part of the board holding member. The board holding member is rotated around the side edge part as a fulcrum so as to be opened and closed with respect to the apparatus main body.

Abstract: A cabinet structure includes multiple cover members configured to spatially partition an inside from an outside of a cabinet, and a clearance communicating between the inside and the outside of the cabinet is left between two cover members, the two cover members being adjacent to each other, of the cover members, and a passage defined by the clearance and leading from the inside to the outside of the cabinet through the clearance has a shape with multiple bends.

Abstract: An image forming apparatus is provided. The image forming apparatus includes a chassis having a first opening on a first side, photosensitive members, an intermediate transfer belt arranged to have a surface thereof facing the photosensitive members, primary-transfer members, a secondary-transfer roller, a first feed roller, a cleaner device, a waste toner container, which is removably installed in the chassis through the first opening and settled in a position opposite from the photosensitive members across the intermediate transfer belt, a connector, a first feeding path extending in a range between the first feed roller and the secondary-transfer roller, and a second feeding path being formed in clearance between the intermediate transfer belt and the waste toner container to convey a recording sheet being inserted through a sheet inlet and merging into the first feeding path in the vicinity of the first feed roller.

Abstract: A developing cartridge includes: a housing having first and second sidewalls through which respective end portions of a developing roller shaft are rotatably inserted; a developing gear, which is arranged outside of the first sidewall, and which is fixed to the end portion of the developing roller shaft; a transmission gear, which is arranged outside of the first sidewall, and which transmits driving force to the developing gear; a first cover member, which is attached to the first sidewall, and which covers the transmission gear; and a second cover member, which is attached to the first sidewall, and which covers the developing gear from an outer side in the axis line direction. The second cover member is formed separately from the first cover member and is arranged side by side with the first cover member outside of the first sidewall.

Abstract: In a developing cartridge, a first supporting member is attached to a housing and has a first developing supporting portion and a driving-force-receiving-member supporting portion. The first developing supporting portion is configured to rotatably support a first part of a rotational shaft and the driving-force-receiving-member supporting portion is configured to rotatably support a driving-force-receiving member. The second supporting member is attached to the housing and has a second developing supporting portion and a detection-rotational-body supporting portion. The second developing supporting portion is configured to rotatably support a second part of the rotational shaft and the detection-rotational-body supporting portion is configured to rotatably support a detection rotational body.

Abstract: An image forming apparatus includes a main assembly and a supporting member that detachably supports a cartridge between a first position at an image formable position and a second position retracted from the first position. A first engaging portion in the main assembly supports the cartridge by engaging with a first engaged portion on the cartridge when the supporting member is in the first position, and a second engaging portion in the main assembly suppresses rotation of the cartridge about the first engaging portion by engaging with a second engaged portion provided on the cartridge when the supporting member is in the first position. When the supporting member moves from the first position to the second position, the second engaged portion moves to a side downstream of the second engaging portion with respect to a movement direction of the supporting member to disengage from the second engaging portion.

Abstract: A process cartridge is detachably mountable to a main assembly of an electrophotographic image forming apparatus. The cartridge includes an electrophotographic photosensitive drum, a developing roller, a drum unit containing the drum, a developing unit containing the roller and being movable so the roller contacts and is spaced from the drum, and a first force receiver receiving a force from a main-assembly first force applier by movement of a door from open to closed positions when mounting the cartridge and a second force receiver movable from a stand-by position by movement of the first force receiver by a force received from the first force applier. The second force receiver takes a projected position receiving a force from the second force applier to move the developing unit so the roller moves out of contact with the drum, the projected position being higher than the stand-by position.