Abstract: An image forming apparatus includes a conveying path, a reverse path, a first guide member and a second guide member. The conveying path conveys a sheet to a discharge part. The reverse path conveys the sheet again to the image forming part. The first guide member is provided movably between a first closed position for forming the conveying path and a first opening position for opening the conveying path. The second guide member is provided movably between a second closed position for forming the reverse path and a second opening position for opening the reverse path. The first guide member contacts with the second guide member in a process of moving from the first closed position to the first opening position and moves the second guide member from the second closed position to the second opening position.

Abstract: To provide a sheet conveying apparatus and an image forming apparatus that can accurately detect a position of a rear end of a sheet regardless of rigidity of the sheet. A rotation axis is positioned to one of a plurality of stop positions by a positioning mechanism, an applied force of a torsion coil spring provided between the rotation axis and a first sensor flag, and an applied force of a torsion coil spring provided between the rotation axis and a second sensor flag are made smaller than an applied force of a pressing spring provided in the positioning mechanism.

Abstract: A sheet feeding apparatus includes a sheet conveying unit configured to convey a sheet along a conveyance path, a detecting unit configured to detect the sheet passing along the conveyance path, a control unit configured to determine an amount of delay of a sheet conveyed along the conveyance path based on the detection and determine information to be output based on the amount of the delay, and an output unit configured to output the information.

Abstract: A paper sheet transport apparatus (10) includes transport member that is slidable along the widthwise direction of a transport path (11) (e.g., a drive roller (36) and a driven roller (38)), and a paper sheet detection unit (inlet-side paper sheet detection sensor (70)) that is arranged on an upstream side of the transport member in the paper sheet transport direction along the transport path (11) and detects the position of the paper sheet in the widthwise direction of the transport path (11). A control unit (80) calculates an amount of movement of the transport member based on the position of the paper sheet in the widthwise direction of the transport path (11) detected by the paper sheet detection unit and a previously set predetermined position of the paper sheet in the widthwise direction of the transport path (11).

Abstract: A sheet metal strip is directed from a supply coil into a unitized system including a frame supporting a feed roll driven by a variable speed motor. The strip is directed upwardly from the feed roll between vertical guide rods to produce an inverted U-shaped vertical loop detected by sensors connected to control the feed roll motor. A servo driven index roll receives and advances the strip into tooling within a reciprocating press. Vibration insulators support the frame from a base stand mounted on air casters which provide for quickly removing the system from the press. The axial length of each roll is less than the width of the strip and engages only a center portion of the strip. A second index roll driven by a servo motor may be used on the press to provide push/pull advancement of the strip through the press.

Abstract: A system and method for automatic splicing of rolls of sleeve material used in various packaging markets is provided. The system will automatically splice the prepared end of a new roll onto the expiring end of the prior roll. The system performs an automatic cut and splice operation resulting in a butt splice of the two rolls with tape applied to both sides of the splice joint. The splice can be done in-registration to provide a consistent product repeat length between expiring and new rolls.

Abstract: An adhesive tape dispenser includes a tape roll housing holding a cutter blade, a protective member mounted in the tape roll housing and movable relative to the tape roll housing to a first position to expose the cutter blade, a front cover mounted in the tape roll housing in such a manner that the front cover is prohibited from being opened when the protective member is in the first position, or can be opened or received when the protective member is moved to a second position. Further, the cutter blade can be mounted in a cutter holder that is installed in the tape roll housing. With the slidable or biasable design of the protective member and the front cover, the user can selectively expose the cutter blade or enable the cutter blade to be blocked.

Abstract: A sheet processing apparatus is configured to press a fold line that is formed on a sheet. The sheet processing apparatus includes: a sheet supporting unit configured to support the sheet in a pressing direction for pressing the fold line; a pressing unit configured to press the fold line that is formed on the sheet that is supported by the sheet supporting unit; and a pressing-force generating unit configured to generate a pressing force for pressing the sheet supporting unit against the pressing unit at a central part in a direction along which the fold line is formed.

Abstract: An assembly for dispensing cable from a spool, including first and second end members separated by one or more cross-members; and an axle extending at least partially between the end members for rotatably coupling the spool to the assembly, wherein end sections of the cross-members are releasably coupled to respective keyed slots of the end members.

Abstract: During the process of making elastomeric laminates, elastic material is advanced and stretched in a machine direction and may be joined with one or more substrates advancing in the machine direction. During the assembly process, one-way snare apparatuses and methods may be configured to automatically isolate elastic materials that may break. The one-way snares may include a housing and a snare member movably connected with the housing, wherein the snare member is movable relative to the housing between a first position and a second position. The one-way snares are adapted to permit advancement of continuous elastic strands in a first direction through the housing when the snare members are in the first position, and to prevent an end portion a broken elastic strand from retracting in a second direction through the housing when the snare member is in the second position, wherein the second direction is opposite the first direction.

Abstract: A tape spindle comprising a first holding portion and a second holding portion individually supporting and fastening to tape rolls of different sizes, wherein the second holding portion is constructed by a column with at least two orthogonal diagonals, and an operating section of the tape roll is extended through an opening of the first holding portion to reach a tape dispenser; therefore, the tape spindle may accommodate the purpose of the user to hold tape rolls on the first holding portion and the second holding portion according to their sizes, and when extending the tape roll held on the second holding portion, the shaft of the tape spindle may not move with the rotation of the tape roll due to the friction force between an inner wall of the tape roll and the second holding portion.

Abstract: The present invention pertains to a single-piece flange adapted to be a part of a reel or spool, wherein the flange includes: (a) a hub portion defining one or more apertures, wherein the hub portion comprises an outer face and a wire face; (b) an outer rim; (c) a side wall disposed between the hub portion and the outer rim, wherein the side wall comprises an outer face and a wire face, and a plurality of crack propagation inhibitors extending through a thickness of at least the sidewall; and (d) a plurality of ribs connected to the side wall, and extending toward the hub portion.

Abstract: In order to keep hose for oxygen delivery off of the floor and thus make use of the oxygen delivery system safer, a storage system for storing the hose includes a support structure, a first pulley assembly, and a second pulley assembly below the first pulley assembly. At least a part of the first pulley assembly is translationally fixed relative to the support structure, and the second pulley assembly is translationally movable relative to the first pulley assembly, along the support structure. The hose is wrapped around pulleys of the first pulley assembly and pulleys of the second pulley assembly, and the amount of hose stored in the storage system is dependent on a position of the second pulley assembly relative to the first pulley assembly.

Abstract: In an elevator apparatus, an abnormal acceleration detecting mechanism includes a mass body that operates in connection with movement of the car, the abnormal acceleration detecting mechanism operating a safety device using a force of inertia that is generated by the mass body if an acceleration that exceeds a predetermined set value arises in a car. A breakage detecting means detects breakage of a suspending means that suspends the car. A resistance force applying apparatus applies a resistance force to a mechanism for activating the safety device such that the resistance force is applied when breakage of the suspending means is not detected by the breakage detecting means and the resistance force is reduced if breakage of the suspending means is detected by the breakage detecting means.

Abstract: An example elevator brake includes a first braking member that is biased by a first spring member into engagement with a braking surface. The first braking member includes a first armature arranged to be actuated by an electromagnetic actuator to disengage the first braking member from the braking surface against the biasing force of the first spring member. A second braking member is biased by a second spring member into engagement with a braking surface. The second braking member includes a second armature arranged to be actuated by an electromagnetic actuator to disengage the second braking member against the biasing force of the second spring member. A first electromagnetic actuator actuates the first armature and a second electromagnetic actuator actuates the second armature.

Abstract: A device for synchronously actuating and locking elevator doors, which are situated essentially one behind the other in the passage direction—such as a car door and a shaft door; the device includes entraining skids that are associated with a first driven door and whose spacing relative to one another can be changed in order to be able to couple the first door to the second door and move them together, characterized in that at least one of the entraining skids is supported in mobile fashion relative to the component, which holds it directly and is preferably embodied in the form of an entraining skid support, and toward the end of the closing movement, is secured so that it disengages from the second door, particularly by coming into contact with a stationary actuating element, which forcibly imparts a lifting movement to the at least one entraining skid.

Abstract: A drive system (10) that is operable to drive a conveyor band (12) includes a drive motor (26), inner and outer drive shafts (28, 30), a gearbox (32), and a band engagement member (34, 36). The inner drive shaft (28) includes first and second ends (38, 40), the first end (38) being connected to the drive motor (26). The gearbox (32) includes input and output portions, the input and output portions being in geared connection with one another, and the input portions being connected to the second end (40) of the inner drive shaft (28). The outer drive shaft (30) includes a cavity (46) that extends through at least a portion of the outer drive shaft (30). The outer drive shaft (30) is connected to the output portion of the gearbox (32). The band engagement member (34, 36) extends radially outward from an outer surface of the outer drive shaft (30). At least a portion of the inner drive shaft (28) is positioned within the cavity (46) of the outer drive shaft (30).

Abstract: A method of manufacturing a display panel which is operable to enable content to be displayed on a step of an escalator, the method comprising the steps (102) of printing desired advertising content on a surface of a generally rigid plastic sheet; manufacturing (104) a vacuum formed sheet by vacuum forming the printed plastic sheet to fit a desired part of an escalator step profile; trimming (106) the vacuum formed sheet on all four sides; and applying (110) an adhesive substance to an operatively back surface of the vacuum formed sheet.

Abstract: The present disclosure relates to a monitoring module and an escalator/autowalk including the monitoring module. A monitoring device comprises: a first component disposed on one of the driving device of the escalator or autowalk and a fixed device; and a recess portion disposed on the other of the driving device of the escalator or autowalk and the fixed device and configured to receive at least a part of the first component; wherein a relative movement between the recess portion and the first component triggers the first component so as to indicate a movement of the driving device. By applying the monitoring device of the present disclosure, it is possible to achieve monitoring the movement of the driving device of the escalator or autowalk in multiple directions.

Abstract: Devices and methods for handling uncured radius fillers are disclosed. The devices, i.e., radius filler transport tools, generally are configured to load a radius filler from above, to index the radius filler to a desired location (e.g., a cavity), and to downwardly unload (e.g., drop) the radius filler at the desired location. Radius filler transport tools comprise at least two trough portions, coupled together to form a trough to carry the radius filler, and a plurality of hanger assemblies configured to transversely span the trough. The radius filler transport tool may have a transport state, where the trough and the hanger assemblies are in closed states, a load state, where the trough is in the closed state and at least one hanger assembly is in an open state, and an unload state, where the trough is in an open state and the hanger assemblies are in closed states.

Abstract: The invention relates to a process for the calculation of relevant data for the operation of at least one crane, particularly of a mobile crane, whereby the system comprises at least one crane, a communication network, as well as a data processing center, whereby, first of all, one or more parameters of the crane are determined on the crane and these are transmitted to the data processing center through the communication network and, in the data processing center, one or more items of data that are relevant for the operation of the crane are computed and/or selected on the basis of the one or more parameters received from the crane and the relevant data computed and/or selected for the operation of the crane is transmitted back to the at least one crane, particularly to its crane control.

Abstract: A collapsible hoist apparatus includes a lower boom assembly, a middle boom assembly, and an upper boom assembly, the boom assemblies consisting of two parallel boom arms and a transversal crossbeam, and are connected to one another by a pivotal annular support. The annular support allows the complete boom assembly to be placed in a first extended position, such that the boom assemblies extend outwardly, aligned in a pleated configuration; a fully extended position, such that the boom assemblies extend outwardly, aligned in a planar configuration; or a closed storage position, such that the boom assemblies extend inwardly, aligned in a pleated configuration.

Abstract: Articulated operating arm (100) on which one or more implements are or can be mounted, comprising substantially three articulations (101,102,103) which are pivotally connected to each other, which substantially three articulations comprise a first articulation, a second articulation and a third articulation which is intended for connection to the one or more implements, which second articulation is pivotally connected at a first end to the first articulation an at a second end to the third articulation, wherein the substantially three articulations are rotatable adjacently of each other in order to form a shortened arm, this such that during the rotation a mechanical locking of the third articulation occurs between the second and the first articulations.

Abstract: A mobile telescopic crane has a telescopic jib with at least three part-jibs. Each of the part-jibs is constructed from at least two part-jib portions so as to be telescopic in a longitudinal direction. Part-jib portions arranged at a spacing from one another transverse to the longitudinal direction each form a jib portion with at least one flexurally rigid connecting element. Respective adjacent jib portions are mechanically lockable with respect to one another in the longitudinal direction. A construction of this type of the jib means that an increase in the bearing load is easily achieved by increasing the area moment of inertia of the jib.

Abstract: A drive of a sliding connecting member of a locking system of a telescopic system, having a telescopic cylinder (1) with an outer telescopic section (2, 3) and an inner telescopic section (6, 7), which are each provided with a locking hole (5) into which a locking bolt (11) can be entered and withdrawn in a releasable manner via the sliding connecting member (14), provided with a sliding path (12), and a grasper (10), wherein the locking bolt (11) is designed to be moveable by means of an engagement member (9) running in the sliding path (12) in such a way that the locking bolt (11) effects a linear movement and the jib sections (3, 6) can be connected to one another by insertion of the locking bolt (11) into the bolting hole (5) and the sliding connecting member (14) can be driven by an electric linear drive (4).

Abstract: An apparatus includes a drum to draw in or let out a line and a motor and transmission coupled to the drum to apply a torque thereto. The transmission includes at least one stage of gearing to reduce a gear ratio of the motor relative to the drum. A shaft couples the motor to the transmission and a locking mechanism selectively locks the shaft to prevent rotation of the drum. In certain embodiments, a braking mechanism may be provided in addition to the locking mechanism to slow the motor when the motor is not applying torque to the drum. This may slow the motor sufficiently to enable engagement of the locking mechanism.

Abstract: A system and method for raising a structure, or part thereof, the system comprising vertical jack members connected and disposed about a rail system attached about the periphery of the structure. The vertical jack members comprise an outer sleeve and a slidable inner portion that is driven vertically by a jack screw and drive block. Extensible diagonal cross-braces stabilize the jack members and structure being raised.

Abstract: A jack for lifting a small wheeled utility vehicle such as a lawn mower. The jack includes spaced bars having a lever actuated jacking mechanism therebetween. A base cross bar is carried by the jacking mechanism up and down the same and has spaced cradles for receiving the wheels of the utility vehicle therein. The spacings between the cradles and within the cradles are adjustable for adapting to the wheels of the vehicle. The jack also includes a base bar extending away from the bars for stabilizing the same and movable to a stored position.

Abstract: A conveyor frame for a conveyor system, having a lifting table, particularly a scissor-lift table, and a storage device for electrical energy for supplying an electrical lifting table drive for raising and/or lowering the lifting table, in which the maximum electrical power consumption of the lifting table is greater than the maximum electrical power consumption of all other electrical devices of the conveyor frame supplied by the storage device.

Abstract: A car lift for motor vehicles, having at least a first and a second lift element, each having at least one hydraulic cylinder/piston assembly (9, 9?, 10) for lifting motor vehicles, with each cylinder/piston assembly including an inlet (9a, 9a?, 10a) for feeding and an overflow for draining hydraulic fluid when the motor vehicle is raised. The first cylinder/piston assembly (9, 9?) is embodied as the master assembly, by its overflow being connected in a fluid-guiding fashion to the inlet (10a) of the second cylinder/piston assembly (10) embodied as a slave assembly. At least one of the cylinder/piston assemblies (9, 9?, 10) has an overflow channel (9c, 10c) arranged and embodied such that only in an area of the end position at maximally raised or maximally lowered vehicles the inlet (9a, 9a?, 10a) of the cylinder/piston assembly is connected in a fluid-conducting fashion to the overflow channel (9c, 10c).

Abstract: The present invention relates to a mold drum for molding products from a mass of food starting material. The mold drum comprises one or more cavities with a mold cavity wall having at least partially a porous structure, whereas each cavity is connected to a passage. The present invention further relates to a cleaning apparatus for the inventive mold drum with supporting means for supporting the axis of the drum. Additionally, the present invention relates to a process for cleaning the inventive drum.

Abstract: A device for handling reels includes a telescoping assembly with a first fork sleeve and a second fork sleeve attached to the telescoping assembly so that a position of the first fork sleeve may be adjusted with respect to a position of the second fork sleeve. A first reel lifter fitting and a second reel lifter fitting are attached to the telescoping assembly so that a position of the first reel lifter fitting may be adjusted with respect to a position of the second reel lifter fitting. A first reel lifter arm having a first hook portion and a second reel lifter arm having a second hook portion are slidingly received within the first and second reel lifter fittings.

Abstract: A hand-held container opener for providing a convenient way to open both containers with a twist-off cap and containers with a cork-stopper which includes a caliper clamp assembly mounted within a first open end of a housing and which is driven by a motor to initially clamp and subsequently twist off a cap on a container and which includes a second open end portion that includes a corkscrew driven by the motor or gas injection device for penetrating a cork for either twisting the cork from the container using the corkscrew or forcing the cork from the container using pressurized gas.

Abstract: A fluid capturing assembly includes a sign may be positioned on a support surface thereby facilitating the sign to be visible to an observer. The sign is positioned beneath a fluid leak. A funnel is hingedly coupled to the sign such that the funnel captures fluid from the fluid leak. A bag is removably coupled to the funnel such that the bag receives the fluid.

Abstract: A spike for dispensing fluids from a flexible bag, wherein the spike includes multiple fluid channels which transfer liquids from the bag to an enclosed dispensing chamber and air from the enclosed chamber to the bag to permit and control fluid flow within the system.

Abstract: Various exemplary devices and methods for heating fluid dispensers, hoses, and nozzles are provided. In general, the devices and methods for heating fluid dispensers, hoses, and nozzles can be configured to heat fluid dispensable by a user into a fuel tank or other type of container. In some embodiments, a fuel dispensing device can include a first passageway configured to pass fluid therethrough and can include a second passageway configured to pass heated air therethrough. The heated air passing through the second passageway can be configured to heat the fluid passing through the first passageway. In some embodiments, a fuel dispensing device can include a single hose configured to pass fluid and heated air through separate passageways therein, and the device can include a manifold configured to facilitate passage of the fluid and the heated air from separate sources into the single hose.

Abstract: Membrane transducer structures and thin-film encapsulation methods for manufacturing the same are provided. In one example, the thin film encapsulation methods may be implemented to co-integrate processes for thin-film encapsulation and formation of microelectronic devices and microelectromechanical systems (MEMS) that include the membrane transducers.

Abstract: A multi-wafer structure is formed by forming a cavity in a cap wafer and forming a first seal material around the cavity. A collapsible standoff structure is formed around the cavity. A movable mass is formed in a device wafer. A second seal material is formed around the movable mass. The first seal material and the second seal material are of materials that are able to form a eutectic bond at a eutectic temperature. The cap wafer and the device wafer are arranged so that the first and second seals are aligned but separated by the collapsible standoff structure. Gas is evacuated from the cavity at a temperature above the eutectic temperature using a low pressure. The temperature is lowered, the cap and device wafer are pressed together, and the temperature is raised above the eutectic temperature to form a eutectic bond with the first and second seal materials.

Abstract: A method of forming a Micro-Electro-Mechanical System (MEMS) includes forming a lower electrode on a first insulator layer within a cavity of the MEMS. The method further includes forming an upper electrode over another insulator material on top of the lower electrode which is at least partially in contact with the lower electrode. The forming of the lower electrode and the upper electrode includes adjusting a metal volume of the lower electrode and the upper electrode to modify beam bending.

Abstract: A MEMS capacitive transducer with increased robustness and resilience to acoustic shock. The transducer structure includes a flexible membrane supported between a first volume and a second volume, and at least one variable vent structure in communication with at least one of the first and second volumes. The variable vent structure includes at least one moveable portion which is moveable in response to a pressure differential across the moveable portion so as to vary the size of a flow path through the vent structure. The variable vent may be formed through the membrane and the moveable portion may be a part of the membrane, defined by one or more channels, that is deflectable away from the surface of the membrane. The variable vent is preferably closed in the normal range of pressure differentials but opens at high pressure differentials to provide more rapid equalization of the air volumes above and below the membrane.

Abstract: According to an exemplary embodiment, a method of forming a MEMS device is provided. The method includes the following operations: providing a substrate; forming a first layer formed of titanium nitride over the substrate; and forming a second layer formed of titanium over the first layer. According to an exemplary embodiment, a MEMS device is provided. The device includes: a substrate; a first layer formed of titanium nitride over the substrate; and a second layer formed of titanium over the first layer. According to an exemplary embodiment, a getter structure is provided. The structure includes: a first layer formed of titanium nitride over a substrate; and a second layer formed of titanium over the first layer.

Abstract: An integrated circuit packaging structure comprises at least one Micro Electrical Mechanical Systems (MEMS) gyroscope die mounted directly on a multi-layer flexible substrate having at least one metal layer and wire-bonded to the flexible substrate and a lid or die coating protecting the MEMS die and wire bonds.

Abstract: The present invention relates to a method for forming a micro-surface structure on a substrate, in particular for producing a micro-electromechanical component, a micro-surface structure of this type, a method for producing a micro-electromechanical component having a micro-surface structure of this type and such a micro-electromechanical component. The invention is particularly relevant for components of microsystem technology (MST, micro-electromechanical systems MEMS) and the construction and connection technology for hermetically housing micro components, preferably using getter materials.

Abstract: The present disclosure relates to a method of gettering that provides for a high efficiency gettering process by increasing an area in which a getter layer is deposited, and an associated apparatus. In some embodiments, the method is performed by providing a substrate into a processing chamber having one or more residual gases. A cavity is formed within a top surface of the substrate. The cavity has a bottom surface and sidewalls extending from the bottom surface to the top surface. A getter layer, which absorbs the one or more residual gases, is deposited over the substrate at a position extending from the bottom surface of the cavity to a location on the sidewalls. By depositing the getter layer to extend to a location on the sidewalls of the cavity, the area of the substrate that is able to absorb the one or more residual gases is increased.

Abstract: A method can be used for producing a microelectromechanical transducer. A plurality of microelectromechanical transducers are produced on a single wafer. Each transducer includes a diaphragm. The wafer is divided into at least a first and a second region. The mechanical tensions of a random sample of diaphragms of the first region are established and the values are compared with a predetermined desired value. The mechanical tensions of a random sample of diaphragms of the second region are established and the values are compared with the predetermined desired value. The tensions of the diaphragms in the first region are adjusted to the predetermined desired value, and the tensions of the diaphragms in the second region are adjusted to the predetermined desired value.

Abstract: Methods, compositions and arrays for non-random loading of single analyte molecules into array structures are provided. Arrays of confined regions are produced wherein each confined region comprises a single island within the confined region. The island can be selectively functionalized with a coupling agent to couple a single molecule of interest within the confined region.

Abstract: The present invention relates to a catalyst for steam pre-reforming of hydrocarbons, containing in its formulation nickel and rare earths supported on alumina or magnesium or calcium aluminates, so as to increase the resistance to coke deposition, and the process for preparing said catalyst. Additionally the present invention relates to a process for manufacturing hydrogen or syn gas through steam pre-reforming olefin-containing hydrocarbons in the presence of the catalyst obtained according to the present invention.

Abstract: A two-stage reaction process includes reacting gaseous carbon dioxide with a reducing agent to form carbon monoxide and water. At least a portion of the water is condensed to form a dry tail gas. The dry tail gas, with the possible addition of a reducing agent, reacts to convert at least a portion of the carbon monoxide to solid carbon and water. Other methods include reacting a feed gas mixture to form a reaction mixture, condensing water from the reaction mixture to form a dried reaction mixture, mixing the dried reaction mixture with a recirculating gas to form a catalytic converter feed gas mixture, flowing the catalytic converter feed gas mixture through a catalytic converter to form solid carbon and a tail gas mixture containing water, and flowing the tail gas mixture through a heat exchanger.

Abstract: Known methods for hydrothermal carbonization are very time intensive, as the carbonization reaction only proceeds gradually in the biomass used therefor. This is because of the different reaction conditions prevailing in different parts of the biomass. These also cause an inhomogeneous reaction product. To accelerate the method and to improve the result, the biomass is swirled inside the available reaction space with the aid of blower nozzles, which blow in the steam at a high speed so that the biomass is swirled. This ensures that the carbonization reaction can proceed uniformly and promptly after the biomass is introduced.

Abstract: The present invention relates to new fullerene derivatives of formulae 1a-d, 2 and 3: method of synthesizing said derivatives, and applications thereof in organic photovoltaics, e.g., organic solar cells. In particular, the fullerene derivatives of the present invention are soluble in non-halogenated solvents such that an environmental-friendly and low-cost fabrication method for industrialization of solar cell based on the new fullerene derivatives is provided. An ink formulation for forming a thin film on a substrate of organic photovoltaics comprising at least one of the fullerene derivatives of the present invention is also provided. Greater than 3% power conversion efficiency of the organic solar cells (area=0.16 cm2) formed based on the fullerene derivatives of the present invention with less pollution and lower cost in fabrication can be achieved in the present invention.